MODEL 4200-SCS
Semiconductor Characterization System
The simple choice for complex characterization tasks
a g r e at e r m e a s u r e o f c o n f i d e n c e
materials and device research • device and process development
The Model
4200-SCS
the most comprehensive
solution for semiconductor
device characterization
nMaterials
and device research
nDevice
and process development
nDevice
modeling
nReliability
nFailure
and lifetime testing
analysis
For CMOS semiconductor technology and more
nHigh
power MOSFET, BJT, and III-V device characterization
nNanotechnology
nAdvanced
nOrganic
nSolar
and MEMs research
NVM testing
electronics characterization
cell/photovoltaic device
characterization
device modeling • reliability and lifetime testing • failure analysis
DC I-V, C-V, pulse, and ultra-fast I-V testing in the same
flexible environment
Everything you need to fully characterize
a device, material, or process
Familiar Windows­­­­­­­ Interface
®
Start testing right out of the box—
no training needed
Fast, single-click test sequencing
No complex programming required
Configurable, scalable solution
Plug in new capabilities as your test needs change
Low noise, wide measurement range, high resolution
See more, faster
Cost-effective hardware and software upgrades available
Modular design protects your instrumentation investment
Visit www.keithley.com to download your free Model 4200-SCS Technical Data Booklet.
3
a complete,
integrated
solution
Industry-standard Windows-based GUI
minimizes set-up and integration time.
all from one vendor
Integrated industrial controller
and additional RAM ensure high
test throughput, plus system
robustness, stability, and security.
Store test setups and results
right on the system with the
high capacity fixed disk drive.
The integrated
CD-RW drive
allows high
capacity backup
and data transfer.
Communicate
quickly with a
wide range of
PC accessories
with the built-in
USB interface.
A Characterization Environment that Grows with Your Test Needs
n
Flexible test environment and modular architecture allows characterizing the full range of materials, devices, and processes with a single set of instrumentation.
n Even infrequent users can begin testing productively right away, without programming assistance, for a lower cost of test and faster ROI.
n The flexible user interface makes it easy to change parameters on the fly and test devices interactively with just a mouse click.
n C-V tests are as easy to set up and run as DC I-V tests. An extensive set of sample programs, test libraries, and built-in parameter extraction examples are included, as well as support for high voltage C-V, very low frequency C-V, differential DC bias, and quasistatic C-V measurements.
n Make ultra-fast I-V measurements over a wide dynamic range to reduce the effects of device self-heating and trapped charge, study transient properties in non-volatile memory (NVM) devices, or avoid relaxation in device reliability tests like negative bias temperature instability (NBTI).
n Source high speed pulses to stress test a device using an AC signal during reliability cycling or in a multi-level waveform mode to program/erase memory devices.
n Export test settings, data, and plots to .xls, delimited text, .bmp, .jpg, or .tif file formats.
n More than 450 sample tests and projects for a variety of applications are included to simplify startup.
To learn more about C-V measurements, download a free copy of our application note,
“Making I-V and C-V Measurements on Solar/Photovoltaic Cells Using the
Model 4200-SCS Semiconductor Characterization System” from www.keithley.com.
4
The Model 4210-CVU is an integrated instrument designed to
plug directly into the chassis, so it can be controlled through
the system's point-and-click interface, just like an SMU.
RS-232 port
Additional USB ports
Low noise ground unit with remote sense
Configurable with from
2 to 9 SMUs and optional
sub-femtoamp Remote
PreAmps. Adding
high power SMUs won’t
restrict SMU capacity.
Standard 10/100 BASE-T network interface
allows easy access to network files and printers.
n-MOSFET
Drain Current vs. Drain Voltage
(1E–6 pulse width)
Use the GPIB interface to control external instruments
or to allow external control of the 4200-SCS.
40.0E–3
Drain Current (I)
30.0E–3
20.0E–3
10.0E–3
0.0E+0
0.0E+0
1.0E+0
2.0E+0
3.0E+0
4.0E+0
5.0E+0
Drain Voltage (V)
Add up to 6 dual-channel pulse generators to configure
the system for a growing range of pulse applications, from
I-V pulse testing to stress/measure reliability testing using
parallel AC stress on multiple channels.
The optional Model 4225-RPM Remote Amplifier/Switch expands
the ultra-fast I-V testing capabilities of the Model 4225-PMU, adding
current sensitivity down to tens of picoamps. It also reduces cable
capacitance effects and supports switching automatically between
the Model 4225-PMU, the Model 4210-CVU, and other SMU modules
installed in the chassis, allowing you to choose the most appropriate
instrument for a particular measurement task without re-cabling.
Our patented high performance Multi-Measurement Performance
Cable kits make it easy to connect the Model 4200-SCS to a prober,
simplifying switching between DC I-V, C-V, and ultra-fast I-V testing
configurations and eliminating the need for recabling.
The economical two-channel Model 4220-PGU Pulse
Generator Unit offers a voltage-sourcing-only alternative to
the Model 4225-PMU, providing identical pulse outputs.
5
and c-v MEASUREMENTS
AS EASY AS DC
ULTRA-FAST I-V
With two channels of integrated sourcing and measurement, the Model 4225-PMU Ultra-Fast I-V module can be
applied to a wide range of measurements, including device
self-heating, NVM pulse sourcing and transient analysis,
ultra-fast reliability testing such as NBTI, and more.
Each channel combines high speed voltage sourcing
with simultaneous current and voltage measurements
on pulse widths from 60nsec to DC at a sample rate of
up to 200 megasamples/second. When multiple modules are
installed, they are internally synchronized to less than 3ns. If
your application demands measuring extremely low current
pulses, extend the Model 4225-PMU’s measurement range
with the optional Model 4225-RPM Remote Amplifier/Switch, which
effectively adds three lower current ranges to any channel. This option also allows you to
switch automatically between the precision DC SMUs, the Model 4210-CVU, or the UltraFast I-V modules installed in the system’s chassis.
Samples
V2
Voltage
Voltage
Sequence A
1
2
3
4
V3
5
V1
Measure Window
V4
Time
Time
Sequence A Definition
Segment Start V Stop V Duration
1
V1
V2
T1
2
V2
V2
T2
3
V2
V3
T3
4
V3
V3
T4
5
V3
V4
T5
Pulsed I-V
Transient I-V
Pulsed Sourcing
Pulse/Measure with DC-like results
Train, Sweep, Step modes
General device characterization
Time-based I and V measurements
Waveform capture
Dynamic device testing
Multi-level pulsing
Arbitrary waveform generator
AC stress testing with measure
Don’t need pulse measurements? Choose the Model 4220-PGU
Dual-Channel Pulse Generator for dual-channel pulsing at up to
40V and pulse widths as short as 20ns. Linear, arbitrary waveform
®
(ARB), and Segment ARB (patent pending) sweeps are built in to
the 4220-PGU and 4225-PMU.
Two dual-channel digital oscilloscope options are available:
n Model 4200-SCP2 (8-bit resolution, up to 2.5Gsamples/sec)
n Model 4200-SCP2HR (16-bit resolution, up to 400Msamples/sec).
Use them for automated measurement and data acquisition or for
traditional oscilloscope tasks with the stand-alone GUI application
provided. Both support measurements in both the time (frequency, rise/
fall time) and voltage domains (amplitude, peak-peak, etc.).
Download our applications guide: Ultra-Fast I-V Applications.
6
full range of c-v measurement capability
The Model 4200-SCS can be configured to support quasistatic, high
voltage, and very low frequency C-V measurements. An extensive
set of sample programs, test libraries, and built-in parameter
extraction examples are included to make C-V measurements as
easy to perform as I-V measurements.
For characterizing LDMOS structures, low κ interlayer dielectrics,
MEMS devices, organic TFT displays, and photodiodes, an optional
C-V Power Package allows making C-V measurements with a DC
voltage bias of up to ±200V or 400V differential and a current
output of up to 300mA. The software included supports making
The optional Model 4210-CVU C-V Meter plugs directly into the either high voltage C-V sweeps or capacitance measurements at a
chassis for measuring capacitances from femtofarads (fF) to constant DC voltage.
microfarads (µF) at frequencies from 1kHz to 10MHz. Quickly
configure linear or custom C-V, C-f, and C-t sweeps with up to
4096 data points. A built-in diagnostic tool ensures the integrity of
open and short corrections and connections to the DUT, displaying
readings in real time.
The very low frequency C-V (VLF C-V) technique takes advantage of the very low current
measurement capability of the system’s DC SMUs and low current remote pre-amplifier. It can
measure AC impedances from 10mHz to 10Hz with no additional hardware. It’s well suited for both
MOS device applications and emerging technologies like organic electronics, including organic LEDs
(OLEDs), organic FETs (OFETs), and organic photovoltaic cells (OPVCs), thin film transistors (TFTs),
and microelectromechanical systems (MEMS).
7
intuitive
interface
simplifies device and
material characterization
and analysis
1
Define a test starting from any of more than 450
supplied sample libraries, using the system’s
intuitive point-and-click interface.
2
Click the on-screen Run button to start
the test and view a real-time plot.
3
Export data in Excel workbook or ASCII formats and
plots in .bmp, .jpg, or .tif formats for either online or
offline analysis. Built-in Formulator, graphing, and calc
sheet functions simplify complex analyses.
8
automated test sequences
without writing code
The Project Navigator organizes tests and controls test sequencing. Switching between
different test setups and accessing test results is fast and simple. Sequence tests on a
single device by clicking on the device in the Navigator, then clicking the Run button.
Keithley Interactive Test Environment (KITE) is designed to let while the sequence is still running. Multiple plots can be viewed
users understand device behavior quickly. When running a test at the same time to get a complete picture of device performance.
sequence, users can view results and plots for completed tests
Extend the Model 4200-SCS with C language test libraries
The User Test Module (UTM) feature in KITE lets the Model 4200-SCS
take on advanced test algorithm requirements with user-written C++
code. These modules give lab users a “fill in the blank” interface to C
language subroutines. Everything needed to collect, analyze, and report
results is integrated in one application. UTMs support viewing and
graphing data in real time to monitor test progress. The KULT User
library Tool (KULT), in combination with the optional Model
4200-COMPILER, allows integrating these subroutines easily into a test
sequence. Selected UTMs also have GUI interfaces to simplify test setups.
9
EXTEND YOUR
SYSTEM’S
CAPABILITIES
QUICKLY AND COST-EFFECTIVELY
n
Best high speed, low current measurement sensitivity
available in an integrated solution
n Supports building complex test sequences, including full
prober integration
n Can handle the large data sets required in device
reliability modeling and process monitoring applications
Explore nanotechnology applications
The sample project and sample tests included in the Model
4200-SCS bring together the capabilities you need to create
powerful nanotech R&D software applications. They can
help you to focus on your research on carbon nanotubes,
nanowires, and more by slashing the time needed to develop
new applications or to refine them as new test requirements
emerge. The Model 4200-SCS conforms to and supports IEEE
Standard P1650™-2005: IEEE Standard Test Methods for
Measurement of Electrical Properties of Carbon Nanotubes.
Define stress timing and stress conditions easily using familiar parameters
like timing log, linear, custom list; measurements per decade; AC or DC
stress; optional recovery test sequence; and test sample rate (speed).
Characterize device lifetimes accurately and economically
The stress-measure capabilities included in the Keithley
Interactive Test Environment (KITE) make the Model 4200-SCS
ideal for both packaged level and wafer level reliability testing
applications. The system’s sequencer controls the order of stressmeasure steps, and several JEDEC-compliant sample projects are
provided with the system, including projects for standard WLR
tests like Hot Carrier Injection or Channel Hot Carrier, Negative
Bias Temperature Instability, Charge to Breakdown, and
Electromigration. All of these projects are easily customizable to
adapt to specific WLR testing requirements.
For reliability test applications that demand more advanced
capabilities, the optional Model 4200-BTI-A Ultra-Fast BTI
Package combines all the hardware and software needed for a
broad range of ultra-fast NBTI/PBTI test applications.
Vgate
Vdrain
Vdrain
1µs
Vstress
V
I
Measurement Types
Spot
Smooth Sweep
Triangle
Step Sweep
The Ultra-Fast BTI test software module supports spot, step sweep,
smooth sweep, and sample measurement types. Each type’s timing
is defined by the test sample rate and the individual measurement
settings. The software module also provides control over the voltage
conditions between each element in the test sequence, for maximum
flexibility and ease of use, even when defining complex test sequences.
To learn more, download our datasheet:
Model 4200-BTI-A Ultra-Fast NBTI/PBTI Package for the Model 4200-SCS.
10
Idrain
Non-Volatile Memory (NVM) Test Libraries
New NVM test libraries expand the Model 4200-SCS’s capabilities
for testing all types of non-volatile memory devices and materials:
n Flash
n Phase change memory (PRAM and PC-RAM)
n Ferro-electric memory (FeRAM)
n Resistive memory (RRAM or ReRAM)
n Magneto-resistive memory (MRAM)
n Other NVM types
The NVM test libraries take advantage of the high speed capabilities of
the Model 4225-PMU Ultra-Fast I-V Module and the Model 4225-RPM
Remote Amplifier/Switch Module. They support precise sourcing of
ultra-fast pulses, as well as accurate measurements of the transient
signals produced during testing. Together, they let you perform all
the typical characterization routines NVM testing requires with no
need for external sense resistors, capacitors, or extra test hardware.
When a high speed pulse is sourced through an NVM device during
characterization, high speed transient measurements are essential.
These challenging measurements provide valuable information
about the state of materials during and after the SET and RESET
stages of testing. When equipped with both the Model 4225PMU and Model 4225-RPM modules, the Model 4200-SCS is the
only parameter analyzer on the market capable of sourcing high
speed, user-defined pulses while measuring voltage and current
simultaneously over a wide dynamic range and minimizing the
negative effects of stray system capacitance.
Sample projects are included for several memory types to provide the
flexibility you need to set up and execute tests quickly, as well as to
analyze the data. You can easily modify the examples provided for use
with most emerging memory technologies.
The Model 4225-RPM module helps to simplify ultra-fast I-V testing
configuration and dramatically reduces the time necessary to complete NVM measurement sequences. The module also extends the
dynamic range of the system’s ultra-fast I-V measurements, and
allows fast switching between pulse source-measure and precision
DC I-V measure. This combination of measurements is critical to
several NVM test sequences.
Results from a resistance-current (RI) curve test on a phase-change
memory device.
11
MODULAR
ARCHITECTURE
SIMPLIFIES
SYSTEM INTEGRATION AND
UPGRADES
Integrated switching control
A choice of standard switch configurations simplifies finding the best
match for the application. Based on Keithley's six-slot Model 707B or
single-slot Model 708B switch matrix mainframes, they include all the
components, cabling, and instructions needed to assemble the switch
matrix and incorporate it into the Model 4200-SCS test environment.
Once the switch is installed, users can connect instrument terminals
to output pins quickly with a simple "fill-in-the-blank" interface in the
Keithley Configuration Utility (KCON). No need to remember and
program row and column closures—system applications and standard
user libraries manage routing test signals from instruments to DUT pins.
The GUI simplifies configuring switch connections.
n
Low current (<1pA) switch matrix configuration: This configuration, which uses the Model 7072 switch card, is
suitable for basic device characterization with or without optional Remote PreAmps.
n
Ultra-low current (<100fA) switch matrix configuration: This configuration, which uses the Model 7174A switch card,
is intended for high performance device characterization tasks
when the system is equipped with optional Remote PreAmps.
Control external hardware via GPIB with our built-in drivers
Need to incorporate an external source or instrument, switch matrix, or
prober into your parameter analyzer? Just set the GPIB address, install
the GPIB cable, and the Model 4200-SCS is ready to start testing. The
User Test Modules we supply load external instrument data directly
into the system’s analysis and graphing tools.
12
Advanced automation and system integration using
Automated Characterization Suite (ACS) software
ACS is a software option that can be applied to the Model 4200-SCS for
more advanced automation with fully automatic probe stations, as well as
for advanced reliability testing such as ultra-fast BTl. Use ACS interactively
or in automation mode for testing at the device, wafer, or cassette level.
®
ACS supports the full range of Keithley SourceMeter instruments,
switching systems, and the Model 4200-SCS, as well as a variety of GPIB
instruments. ACS can also be applied to Keithley's S530 Parametric Test
Systems and highly configurable S500 Integrated Test Systems.
ACS uses an open architecture that gives you greater programming
flexibility without compromising ease of use. It supports integrating
the Model 4200-SCS with a wide range of popular semi-automatic and
fully automatic wafer probers. It simplifies a variety of complex system
functions, including wafer description, test setup, interactive prober
control, automation, and test summary report generation. It offers
maximum operating flexibility by making it easy to switch between semiautomatic operation and fully automatic operation using the same test
plan and environment.
13
4200-scs
condensed specifications
Note: See the 4200 Technical Data Sheet for complete specifications.
4200-SCS Chassis core capabilities
4210-CVU Multi-Frequency CapacitanceVoltage Unit
Integrate Intel Core2Duo processor, 2Gb Ram, 500Gb HDD,
1024X768 LCD, 9 slots, USB, Ethernet, GPIB, external monitor,
more than 200W of measurement power.
Maximum Units per Chassis: 1.
4200-SMU MEDIUM Power Source Measure
Unit (2.1 watts max.)
Maximum Units per Chassis: 9.
Measurement Parameters:Cp-G, Cp-D, Cs-Rs, Cs-D, R-jX, Z theta.
Frequency Range:
1kHz to 10MHz variable.
Minimum Resolution: 10kHz, 1MHz depending on frequency range.
Source Frequency Accuracy: ±0.1%
Voltage Range: ±210V, 4 ranges from 200mV to 210V full scale.
Measurement Ranges: 100fF to 100µF typical full scale.
Typical Resolution: 1aF, 1nanoSiemens, 0.001 degree.
Basic Voltage Accuracy: 0.01% measure, 0.02% source.
Voltage Resolution: 0.1µV to 100µV.
Current Range: ±100mA, 7 ranges from 100nA to 100mA full scale.
AC Signal: 10mV to 100mV programmable.
Resolution: 1mVrms.
Accuracy: ±(10.0% + 1mVrms)
unloaded (at rear panel).
Basic Current Accuracy: 0.03% measure, 0.04% source.
Current Resolution: 0.1pA to 100pA.
With Optional 4200-PA:
Adds 5 low current ranges with resolution down to 0.1fA.
DC Bias: ±30V on either High or Low outputs (±60V differential), 10mA max current.
DC Voltage Bias Range: ±30V
Resolution: 1.0mV.
Sweep Characteristics: 4210-SMU High Power Source Measure Unit (21 watts max.)
Available Sweep Parameters: DC
bias voltage, frequency. AC Voltage
Optional Utilizes SMUs for ±200V 4200-CVU-PWR-PKG:
(400V differential) up to 300mA.
Maximum Units per Chassis: 9.
14
Voltage Range: ±210V, 4 ranges from 200mV to 210V full scale.
Ramp Rate QUAsistatic C-V
Basic Voltage Accuracy: 0.01% measure, 0.02% source.
Required Instruments:
Voltage Resolution: 0.1µV to 100µV.
Measurement Parameters:
Cp, DCV, timestamp.
Current Range: ±1A, 8 ranges from 100nA to 1A full scale.
Range of Capacitance: 1pF to 400pF.
Basic Current Accuracy: 0.03% measure, 0.04% source.
Ramp Rates: 0.1V/s to 1V/s.
Current Resolution: 0.1pA to 100pA.
DCV: ±200V.
With Optional 4200-PA: Adds 5 low current ranges with resolution down to 0.1fA.
Typical Accuracy: 5% at 1V/s ramp rate.
Two SMUs.
C-V POWER PACKAGE TYPICAL PERFORMANCE
4225-PMU Ultra-Fast I-V Unit
Measurement Parameters:
Cp-Gp, DCV, timestamp.
Maximum Units per Chassis:
6 (12 channels).
Range of Capacitance:
1pF to 1nF.
Channels per Unit:
2 independent or synchronized.
Test Signal:
100kHz to 10MHz, 10mV to 100mV.
DC Voltage Source: ±200V with 5mV resolution.
Voltage Range:
±40V maximum (into high impedance), 2 ranges of 10V and 40V.
DC Current:
100mA or 300mA maximum.
Voltage Resolution:
250µV, 750µV.
Typical Cp Acc. @ 1MHz:
1.0%.
DC Current Sensitivity: 10nA/V.
SMU Bias Terminals
Supported: 4.
VERY LOW FREQUENCY C-V (VLF C-V)
Maximum Units per Chassis: Requires two SMUs (either Model
4200-SMU or 4210-SMU) and two Model 4200-PA Remote Preamplifiers. Any two SMUs/PAs can be used for a VLF C-V measurement.
Measurement Parameters:
CP-GP, Cp-D, Cs-Rs, Cs-D, R-jX, Z-Theta, DCV, timestamp
Frequency Range: 10mHz to 10Hz.
Measurement Range: 1pF to 10nF.
Typical Resolution:
3.5 digits, minimum typical 10fF.
AC Signal: 10mv to 3V RMS.
DC Bias: ±20V on the high terminal, minus the AC signal, 1µA maximum.
Basic Voltage Measure Accuracy: 0.25%.
Current Range:
±800mA, 4 ranges from 100µA to 800mA.
Basic Current Measure Accuracy: 0.25%.
Pulse Waveform Timing: Pulse width from 60ns to 999ms in 10ns steps.
Other timing parameters are adjustable from 20ns to 999ms in 10ns steps.
Core A/D Converter:
Two per channel (measure I and
V simultaneously), 4 per unit, 200 MSa/s sample rate, 14 bits, 1 MSa buffer per A/D.
With Optional 4225-RPMAdds 4 low current ranges
Remote Amplifier/Switch:
100nA, 1µA, 10µA, 1mA.
It also switches sourcing/
measurement between the Model 4225-PMU, Model 4210-CVU, Model 4200-SMU, and Model 4210-SMU.
*Model 4220-PGU Pulse Generator Unit offers a voltage-sourcing-only
alternative to the Model 4225-PMU.
KEY DIGITAL OSCILLOSCOPE SPECIFICATIONS
Bandwidth (50Ω): DC to 750mHz (4200-SCP2).
DC to 250mHz (4200-SCP2HR).
Channels: 2 (BNC).
Maximum Sample Rate: 1.25 GSa/s per channel (4200-SCP2).
DC to 250mHz (4200-SCP2HR).
2.5 GSa/s one channel interleaved (4200-SCP2).
200 MSa/s (4200-SCP2HR).
400 MSa/s interleaved (4200-SCP2HR).
On-board Memory Buffers: Up to 1 MSa per channel.
15
We back Keithley quality with Keithley support
To request applications assistance for the Model 4200-SCS within the Visit www.keithley.com to download free copies of our latest
United States, call our Applications Engineering Department on our literature on the Model 4200-SCS:
toll-free hotline at 1-888- KEITHLEY (534-8453) from 8:00 am to 5:00 n Model 4200-SCS Technical Data Sheet
pm ET. For assistance beyond those hours, send them a facsimile n Ultra-Fast I-V Applications for the (440-248-6168) or an e-mail message (applications@keithley.com).
Model 4225-PMU Ultra-Fast I-V Module
For our customers outside the United States, our worldwide facilities n The Evolution of Ultra-Fast I-V Measurement Techniques
and affiliates offer native language support services. See the list below n Wafer Level Reliability Test Systems
or consult the listings at www.keithley.com/company/servicecenters
n Ultra-Fast NBTI/PBTI Package for the Model 4200-SCS
for up-to-date contact information for these offices.
n Electrical Characterization of Carbon Nanotube Customer assistance is also available through our free online appliTransistors (CNT FETs) with the Model 4200-SCS
cations forum at http://forum.keithley.com, a central location for
Semiconductor Characterization System
finding product support and exchanging applications insights via the
n Electrical Characterization of Photovoltaic Materials web. Keithley instrumentation and applications experts moderate the
and Solar Cells with the Model 4200-SCS Semiconductor
forum and can answer questions and direct visitors to sources of
Characterization System
additional information.
n The Challenge of Integrating Three Critical Semiconductor
Ongoing system enhancements ensure ongoing ROI
Measurement Types into a Single Instrument Chassis
Keithley has continually enhanced the Model 4200-SCS’s hardware n Labs' Demands for Greater Measurement Flexibility
and software capabilities ever since its introduction in 2000. This
Require Cabling Systems Capable of Accommodating
ongoing commitment assures you of a cost-effective system upgrade
Multiple Measurement Types
path to address new characterization requirements as they evolve, so
n Using the Model 4200-CVU-PWR C-V Power Package
you’ll never have to buy a new parametric analyzer because your old
one is obsolete. The Model 4200-SCS can keep up with your changing n C-V Measurement Tips, Tricks, and Traps
test needs—making your capital investment stretch further and
improving your ROI.
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.
All other trademarks and trade names are the property of their respective companies.
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
KEITHLEY INSTRUMENTS, INC. ■ 28775 AURORA RD. ■ CLEVELAND, OH 44139-1891 ■ 440-248-0400 ■ Fax: 440-248-6168 ■ 1-888-KEITHLEY ■ www.keithley.com
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info@keithley.co.uk
www.keithley.co.uk
© Copyright 2011 Keithley Instruments, Inc.
Printed in the U.S.A.
No. 2227
11.8.11 9K.OP
30%