Wet Process
Systems
for 300 mm
Semiconductor Applications
02
Wet Process Systems
for Semiconductor Applications (WAFER, MEMS, MRAM)
Innovative Technologies
SINGULUS TECHNOLOGIES develops innovative
technologies for efficient production processes,
which only make use of resources conservatively.
New production technology combined with sustainable
processes and the use of novel materials can decouple
the use of resources from economic growth in the
long-term. SINGULUS TECHNOLOGIES‘ innovative
power and competitiveness are strengthened by
these new technologic developments.
With its Optical Disc segment SINGULUS
TECHNOLOGIES is the market leader for CD, DVD
and Blu-ray Disc production equipment. In the
Solar division SINGULUS TECHNOLOGIES is a
recognized supplier for new machine concepts and
production processes for crystalline and thin-film
solar cells, which increase the efficiency of solar
cells and reduce their production costs.
Wet Process Systems
for Semiconductor
Applications
In the Semiconductor segment SINGULUS
TECHNOLOGIES focuses its activities on the vacuum
coating of wafers with ultrathin layers for the
production of MRAM memory, thin-film write/read
heads and other semiconductor applications.
Wet Process Systems for 300 mm
Semiconductor Applications
High end products in different fields at semiconductor
branch (WAFER, MEMS, MRAM, Communication).
Product range started with manual wet stations
for R&D, semi-automated systems and up to fully
automated tools for the chemical surface treatment
like cleaning, etching and drying.
→→ Manual Wet Process Stations
→→ Semi- and Fully Automated Wet Process Stations
→→ Quartz-Tube- and Part-Cleaning Stations
→→ Total Metal-Free Working Stations
→→ Special Customer Specified Units
→→ Chemical Supply Systems
(Pump or Pressure Systems)
1
03
Semi Automated Wet Process
2
Manual Wet Process Stations
→→ Wet Systems executed for max. 2x6”
→→ Applications:
→→ Full lap configuration with wet stations
(in total 49 wet systems) for Cleaning, Etching,
Developing, Resist Spinning, Polymer Processes
and Solvent Processes
→→ e.g. Si-TMAH-Etch, KOH Etch, NMP Strip/Lift,
quartz-tube cleaner
→→ Integration of 3rd party equipment like spinrinse dryers, hotplates, ovens, spin-coaters
Wet Systems for Sensor Applications
→→ Wet Systems executed for max. 2x6” for
sensor applications
→→ Package existing of Fully Automated Wet Stations,
Manual Wet Stations and Chemical Supply Systems
→→ Applications:
→→ RCA (with Megasonic), Au & TiW Etching,
Cr Etching, Nitride Etch, KOH Etching,
Membrane Etch (TMAH – fully automatic
system), Mask Cleaning and Post Metal
Ash Residue Removal
→→ Chemical Supply System including piping
and POU boxes for NH4OH, H2O2, HCl, H3PO4,
KOH, H2SO4, TMAH, HF, HNO3 and BHF
→→ Semi Automated Wet Process Systems executed
for max. 2x6” for e.g. bipolar IC’s, Metal Gate
CMOS, MOSAIC
→→ Applications:
→→ Semi automated systems with rotary robot
arm system dedicated to one process bath and
rinse for loading and unloading and agitation
inside the process bath
→→ In total package 6 semi automated systems for
different cleaning and etching applications
→→ Execution of the system according FM 4910
Chemical Supply Systems
→→ Chemical Supply Systems in different executions
→→ Chemical systems cover all areas of blending,
dispensing, distributing and monitoring high
purity bulk chemicals
→→ It is designed around an application-specific
platform that can be configured with various
delivery engines, and is the
→→ Perfect solution for bulk chemical delivery of
acids, bases and solvents
→→ Chemical systems executed as one drum
system (60-1000 liter) or double systems
(2x200 or 2x1000 liter) for guaranteed
uninterrupted supply of chemicals
→→ Systems executed as pump or pressure
systems
→→ As a full package, chemical piping systems
(double housing) and POU boxes offered
as an option
Fully Automated Wet Process
→→ Fully Automated Systems executed for max. 2x6”
(Dry-In/Dry-Out) for Mask Cleaning Application
→→ NMP Cleaning System with cascaded NMP
process bathes and rinser
→→ Applications:
→→ Cleaning of mask application with NMP
solution
→→ Fully automated system with buffering
→→ Optimized footprint of the systems (vs. linear)
3
4
1 Fully Automated Wet Process
2 Manual Wet Process Stations
3 Wet Systems for Sensor
Applications
4 Semi Automated Wet Process
5 Chemical Supply Systems
5
Subsidiaries
Offices
←
←
Headquarters
China
SINGULUS TECHNOLOGIES
SHANGHAI
Tel. +86 13918298537
greens.pan@singulus.com.cn
Latin America
SINGULUS TECHNOLOGIES
LATIN AMERICA LTDA.
Tel. +55 1121 6524-10
rodolfo.mignone@singulus.com.br
France
SINGULUS TECHNOLOGIES
FRANCE S.A.R.L.
Tel. +33 3 893111-29
singulus@club-internet.fr
Singapore
SINGULUS TECHNOLOGIES
ASIA PACIFIC PTE LTD.
Tel. +65 674 119-12
sales@singulus.com.sg
Germany
SINGULUS TECHNOLOGIES AG
Niederlassung Fürstenfeldbruck
Tel. +49 8141 3600-0
sales@singulus.de
Taiwan
SINGULUS TECHNOLOGIES
TAIWAN LTD.
Tel. +886 2 2748-3366
sales@singulus.com.tw
United States and Canada
SINGULUS TECHNOLOGIES INC.
Tel. +1 860 68380-00
sales@singulus.com
Thin Film
Deposition
Surface
Engineering
Thermal
Processing
Wet
Chemical
SINGULUS TECHNOLOGIES – Innovations for New Technologies
SINGULUS TECHNOLOGIES develops innovative technologies for economic and
resource-efficient production processes. SINGULUS TECHNOLOGIES’ strategy
targets the use and expansion of its existing core competencies. This includes
process technology and scientific solutions combined with mechanical and
plant engineering. The core competence of SINGULUS TECHNOLOGIES rests
on vacuum thin-film and plasma technology, wet-chemical processing as well
as thermal process technology.
SINGULUS TECHNOLOGIES is expanding this expertise in its core segments
and is transferring the know-how to new application areas: consumer goods,
entertainment, energy, mobility and semiconductors.
3_003 - 12/2015 MetaCom - Printed in Germany - Technical alterations reserved
SINGULUS TECHNOLOGIES AG
Hanauer Landstrasse 103
D - 63796 Kahl, Germany
Tel. +49 6188 440-0
Fax +49 6188 440-110
sales@singulus.de
www.singulus.de