C u r v e Tr a c e r s 370B • 371B Features & Benefits High-resolution DC Parametric Measurements With the 370B (Resolution Down to 1 pA or 2 µV) High Voltage and Current Sourcing With the 371B (Up to 3,000 V or 400 A) Built-in Cursor Measurements – Dot, Window and Function Line Kelvin Sense Measurements Sweep Measurement Mode Waveform Comparison and Averaging Fully Programmable 1.44 MB Floppy Drive Stores Setup and Bitmap of Curves Direct Hardcopy with Third-party Printer Applications 370B and 371B Programmable Curve Tracers Parametric Characterization of Semiconductors Failure Analysis Tektronix curve tracers offer power and versatility to test the DC characteristics of semiconductor devices. The 370B and 371B curve tracers combine a simple-to-use front panel, digital acquisition and display, and programmability to serve a variety of application needs. 1 Curve Tracers • www.tektronix.com/other_tm In the R&D lab, Tektronix curve tracers are used for characterization of new designs, extraction of SPICE parameters, failure analysis and data sheet generation. In manufacturing test, Tektronix curve tracers are used to verify device quality and process monitoring. They are also used for incoming inspection to verify device performance, perform failure analysis and match components. Data Sheet Generation Manufacturing Test Process Monitoring and Quality Control Incoming Inspection Component Matching Curve Tracers 370B • 371B the data, up to 24 characters of text may be used to label or annotate the curve data. Operating parameters can be adjusted, stored and recalled using several storage methods including the 370B and 371B system memory, the built-in 1.44 MB floppy drive, or sent externally via the GPIB controller. Automated Cursor 370B. The World Standard for High-resolution Curve Tracers The 370B, the world standard for highresolution curve tracers, provides up to 20 A/2,000 V sourcing capability combined with 1 pA and 50 µV measurement resolution. The 370B performs DC parametric characterization of integrated circuits, transistors, thyristors, diodes, SCRs, MOSFETs, electro-optic components, solar cells, solidstate relays and other semiconductor devices. It has push button source and measurement configuration so it’s easy to change from one test to the next. The Industry Leader in High-power Curve Tracers The 371B, the industry leader in high-power curve tracers, performs DC parametric characterization on a wide variety of power semiconductors including thyristors, SCRs, IGBTs and power MOSFETs. The highvoltage collector mode permits testing the Off-characteristics of a device up to 3,000 volts. The pulsed high-current collector mode provides output current pulses greater than 400 amps peak to test On- 2 Curve Tracers • www.tektronix.com/other_tm 371B. characteristics and permits high-power testing up to 3,000 watts. In the sweep measurement mode, the 371B automatically constructs a family of curves while stimulating the device with low-duty-cycle pulses. With this capability, power curves can be displayed without excessive heating of the device. Interactive Programmable Control Interactive control of all 370B and 371B measurements is accomplished from the full-featured front panel or over the GPIB. Every operating parameter can be controlled using the GPIB controller. 370B and 371B Series LabView drivers are available at the Tektronix.com web site. These drivers have many of the building blocks to create a custom measurement solution. Store and Recall Setups and Digitized Curves Up to 80 digitized characteristic curves can be stored on a diskette or in internal non-volatile memory and recalled at the touch of a button. A live curve can then be compared with a previously stored curve to assess temperature drift or other changes in operating parameters. To help identify The 370B and 371B provide three cursor measurement modes. The dot cursor provides direct screen readout of voltage, current, gm or DC beta at any point. The window cursor can be positioned between two curves to measure small signal beta or gm and can also be used for visual go/no-go tests. The function line cursor provides screen readout of a slope or intercept value. Sweep Measurement Mode In the sweep measurement mode, the curve tracer automatically constructs a family of curves. The 371B achieves this with low duty-cycle pulses. With this capability, power curves can be displayed without excessive heating of the device. Direct Hardcopy Printouts Curve output data can be sent directly from the 370B and 371B to a Citizen iDP-3240 thermal printer. Printing can continue while the 370B and 371B perform the next tasks. Curve Tracers 370B • 371B Characteristics 370B Curve Tracer Characteristics Collector Supply Peak Voltage (Range) Polarity Modes Available Current Peak Current Peak Current (PULSE mode) Available Resistance Minimum Series Resistance Maximum Series Resistance Available Peak Power 16, 80 and 400 V Range – 0.08, 0.4, 2, 10, 50, 220 W. 2,000 V Range – 0.08, 0.4, 2, 10, 50 W. Variable Collector Supply Settings As a % of Maximum Peak Voltage – 0 to 100% in 0.1% increments. Looping Compensation (typical) Range – at least 100 pF. Step Generator Accuracy Incremental – 1.5%. Absolute – Less than 1.5% of total output + 3% x STEP AMPLITUDE setting + 1 mV or 1 nA. Offset Control Range – Variable from –10 to +10 times STEP AMPLITUDE. Resolution – STEP AMPLITUDE setting x 1%. Current Mode Amplitude Range – 50 nA to 200 mA in a 1-2-5 sequence of 21 steps. Maximum Current – 20x STEP AMPLITUDE setting, 10x STEP AMPLITUDE setting when control is set to 200 mA. Maximum Voltage – At least 10 V. Maximum Opposing Offset Current – 10x STEP AMPLITUDE. Maximum Opposing Volts – Less than 15 V. Ripple Plus Noise – Less than 0.5% x STEP AMPLITUDE + 10 nA. 16 V 80 V 400 V AC, ± DC, ± Leakage, ± Rectified Sine 2,000 V 10 A 20 A 2A 4A 0.4 A 0.8 A 0.05 A 0.1 A 0.26 Ω 800 Ω 6.4 Ω 20 kΩ 160 Ω 500 kΩ 20 kΩ 12.5 MΩ Voltage Mode Amplitude Switch Range – 50 mV to 2 V, in a 1-2-5 sequence of six steps. Maximum Voltage – 20x STEP AMPLITUDE. Maximum Current – At least 500 mA at 10 V or less, at least 200 mA at 15 V, at least 10 mA at 40 V. Short Circuit Current Limiting – 500 mA, +50%, –20%. Maximum Opposing Offset Current – 10x STEP AMPLITUDE. Maximum Opposing Current – Less than 20 mA. Ripple Plus Noise – Less than 0.5% x STEP AMPLITUDE + 10 mV. Step Rates – 2x line frequency (1x line frequency in AC collector supply mode). Steps occur at 0 collector voltage. Pulsed Steps – 80 µs or 300 µs wide, ±10%. Steps and Offset Polarity – Corresponds to Collector Supply Polarity when STEP GENERATOR POLARITY INVERT is disabled. Opposite to Collector Supply Polarity when STEP GENERATOR POLARITY INVERT is selected or CONFIGURATION switch is set to BASE COMMON. BASE COMMON configuration disables STEP GENERATOR POLARITY INVERT. Number of Steps – Ranges from 0 to 10. AUX Supply Range – From –40 to +40 volts, with 20 mV step resolution. Accuracy (typical) – Within 50 mV + 1.5% of total output. Output Current – At least 100 nA at ±20 V. At least 10 mA at ±40 V. Ripple Plus Noise – Less than 50 mVp-p. Curve Tracers • www.tektronix.com/other_tm 3 Curve Tracers 370B • 371B Max. Volts Range 16 V 80 V 400 V 2000 V Noise or Ripple 1 nAp-p 1 nAp-p 2 nAp-p 5 nAp-p Non-store Vertical Deflection System Collector/Base Current Range – 1 µA/div to 2 A/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 100 nA/div (1 nA resolution). Accuracy (typical) – Within 2% of WINDOW cursor readout + 0.1 x VERT/DIV setting. Emitter Current Range – 1 nA/div to 2 mA/div in a 1-2-5 sequence X10 MAG extends maximum sensitivity to 100 pA/div. Accuracy (typical) – Within 2% of WINDOW cursor readout + 0.1 x VERT/DIV settings + 1 nA. Maximum Displayed Noise or Ripple – Depending on setting of MAX PEAK VOLTS. Step Generator Display Range – 1 step/division. 1 step/10 divisions with X10 MAG. 10 steps/division with STEP MULTI .1x. Accuracy – Within 0.3 division. 4 Curve Tracers • www.tektronix.com/other_tm Display Offset (typical) Range – ±10 divisions with 0.1 div resolution. Accuracy – Within 1.5% of offset + 0.1 x VERT/DIV setting. Display X10 MAG (typical) Accuracy – Within 1.5% of window cursor readout + 0.3 x VERT/DIV setting. Display Invert (typical) Accuracy – Within 0.1 x VERT/DIV setting. Digital Storage Vertical Acquisition A/D Converter Resolution – 10-Bits for 10.24 divisions, 100 counts per division. Max. Data Points – 1024. Max. Sampling Rate – Line frequency x 1024. Min. Sampling Rate – Line frequency x 2. Collector/Base Current Range – 1 µA/div to 2 A/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 100 nA/div (1 nA resolution). Accuracy – Within 1.5% of DOT cursor readout +0.05 x VERT/DIV setting. Emitter Current Range – 1 nA/div to 2 mA/div in a 1-2-5 sequence. X10 MAG extends max sensitivity to 100 pA/div (1 pA resolution). Accuracy – Within 1.5% of DOT cursor readout +0.05 x VERT/DIV setting + 1 nA. Step Generator Display Range – 1 step/division, 1 step/10 divisions with X10 MAG, 10 steps/division with STEP MULTI .1x. Accuracy – Within 0.3 division. Display Offset (typical) Range – ±10 divisions with 0.1 div resolution. Accuracy – Within 1.5% of offset + 0.06 x VERT/DIV setting. Display X10 MAG (typical) Accuracy – Within 1.5% of window cursor readout + 0.3 x VERT/DIV setting. Display Invert (typical) Accuracy – Within 0.04 x VERT/DIV setting. Curve Tracers 370B • 371B Non-store Horizontal Deflection System Collector Volts Range – 50 nV/div to 500 V/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 5 mV/div (50 µV resolution). Accuracy (typical) – Within 2% of WINDOW cursor readout + 0.1 x HORIZ/DIV setting. Base/Emitter Volts Range – 50 mV to 5 V/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 5 mV/div (50 µV resolution). Accuracy (typical) – Within 2% of WINDOW cursor readout + 0.1 x HORIZ/DIV setting. Step Generator Display Range – 1 step/division, 1 step/division with X10 MAG, 10 steps/division with STEP MULTI .1x. Accuracy – Within 0.3 division. Display X10 MAG Accuracy – Within 1.5% of window cursor readout + 0.3 x HORIZ/DIV setting. Display Invert Accuracy – Within 0.1 x HORIZ/DIV setting. Digital Storage Horizontal Acquisition A/D Converter Resolution – 10 bits for 10.24 divisions, 100 counts per division. Max. Data Points – 1024. Max. Sampling Rate – Line frequency x 1024.. Min. Sampling Rate – Line frequency x 2. Collector Volts Acquisition Modes Normal, Envelope, and Average. Envelope is Vertical or Horizontal. Average is moving average with weight of 1/16. Safety Standards Met – UL3111-1, CAN/CSA C22.2 NO. 1010.1, EN 61010-1 with second amendment. Collector Supply Modes (positive and negative polarities for both modes) – High current: 250 µs pulses with maximum peak of 30 V. High voltage: Full rectified sine wave with maximum peak of 3,000 V. Polarity Modes – NPN +. PNP –. Range – 50 mV/div to 500 V/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 5 mV/div (50 µV resolution). Accuracy – Within 1.5% of DOT cursor readout + 0.05 x HORZ/DIV setting. Display Offset Range – ±10 divisions in 0.1 division steps. Accuracy – Within 1.5% of offset + 0.1 x HORIZ/DIV setting. Curve Tracers • www.tektronix.com/other_tm 5 Curve Tracers 370B • 371B 3 7 1 B C u r v e Tr a c e r C h a r a c t e r i s t i c s High Voltage Mode Peak Power Watts (range) High Current (pulsed) Mode High Current (pulsed) Mode 30 mW 300 mW 3W 30 W 300 W 3 kW Collector Peak Current 0.4 mA ±20% 4 mA ±20% 4 mA ±20% 40 mA ±20% 40 A 400 A Maximum Peak Voltage 300 V + 15% – 0% 300 V + 15% – 0% 3 kV + 10% – 0% 3 kV + 10% – 0% 30 V + 10% – 5% 30 V + 10% – 5% Variable Collector Supply Range – Continuously variable from 0% to 100% in 0.1% increments. Looping Compensation (high voltage mode) – Stray capacitance between collector terminal and ground is compensated for up to a maximum of 100 pF. Pulsed Collector Supply Repetition Rate – 3 kW: 1/4 (0.25 x) line frequency. 300 W: 1/2 (0.5 x) line frequency. Pulse Width (half amplitude) – 250 µs ±10% (more than 30% of collector supply). Circuit Breakers – Both the high-voltage and the high-current supplies have breakers which operate independently. The high-current output breaker opens automatically in an over-current condition. Both breakers can be operated manually. Current Mode Amplitude Range Normal Step – 1 µA to 2 mA in 1-2-5 sequence. COLLECTOR SUPPLY HIGH VOLTAGE MODE (30 W/3 W and 300 mW/30 mW). Pulsed Step – 1 mA to 2 A in 1-2-5 sequence. COLLECTOR SUPPLY HIGH CURRENT MODE (3 kW/300 W). Maximum Current – 20 x step amplitude, except 10 times STEP/OFFSET AMPLITUDE when control is set to 2 A per step. Maximum Voltage – 12 V ±30%. Accuracy: At least 5 V. Ripple Plus Noise – Within 1% of STEP AMPLITUDE + 10 nA. Step Generator Offset Control Range – Variable 0 to 10 times STEP/OFFSET AMPLITUDE setting. However, 0 to 5 times when STEP/OFFSET AMPLITUDE is 5 V or 2 A. Number of Steps – 0 to 10. However, 0 to 5 when STEP/OFFSET. Step Polarity – Positive, Negative. Step Rate – Pulse: 3 kW: 1/4 (0.25x) the line frequency, 300 W: 1/2 (.5X) the line frequency. Stairstep: 300 W, 3 W, 300 mW, 30 mW: 2x the line frequency. 6 Curve Tracers • www.tektronix.com/other_tm Voltage Mode Step Amplitude Range – 200 mV to 5 V in 1-2-5 sequence. Short Circuit Current Limiting – 100 mA +50%, –20%. Maximum Voltage – 10 x STEP AMPLITUDE, with 5 V setting. 20 x STEP AMPLITUDE, except 5 V setting. Ripple Plus Noise – Within 1% of STEP AMPLITUDE + 10 mV. Vertical Deflection System Collector Current (lc) Range 3 kW Peak Power – 1 A/DIV to 50 A/DIV. 300 W Peak Power – 500 mA/DIV to 5 A/DIV. 30 W Peak Power – 100 µA/DIV to 5 mA/DIV. 3 W Peak Power – 10 µA/DIV to 500 µA/DIV. 0.3 W Peak Power – 10 µA/DIV to 500 µA/DIV. 0.03 W Peak Power – 1 µA/DIV to 50 µA/DIV. Collector Current (lc) Accuracy – Within 0.1 DIV to the Vertical graticule lines. Collector Current (lc) Cursor Accuracy – Within 1.5% of readout +0.1 DIV of the CURRENT/DIV setting. Horizontal Deflection System Collector Supply Volts (Vce) Range 3 kW, 300 W Peak Power – 100 mV/DIV to 5 V/DIV in a 1-2-5 sequence. 30 W, 3 W Peak Power – 50 V/DIV to 500 V/DIV in a 1-2-5 sequence. 300 mW, 30 mW Peak Power – 5 V/DIV to 50 V/DIV in a 1-2-5 sequence. Step Generator Volts (Vbe) Range – 100 mV/DIV to 5 V/DIV in a 1-2-5 sequence. Step Generator Volts (Vbe) Accuracy – Within 0.1 DIV of Horizontal graticules. Digital Storage Acquisition A/D Converter Resolution – 10 bits for 1024 division, 100 points per one division. Tolerance – Within ±2 counts. Max. Data Point – 1024. Max. Sample Rate – 1024 x line frequency. Min. Sample Rate – 1/8 x line frequency. Safety Standards Met – UL3111-1, CAN/CSA C22.2 NO. 1010.1, EN 61010-1 with second amendment. Curve Tracers 370B • 371B Ordering Information 370B 371B Power Plug Options High-Resolution Programmable Curve Tracer. High-Power Programmable Curve Tracer. 370B Standard Accessories 371B Standard Accessories A1001– Blank adapter for mounting custom sockets. A1002– In-line transistor adapter. A1005– Axial diode lead adapter. User Manual– Order 070-A838-00 (English). Protective Cover– Order 337-3344-02. Power Cord– Order 161-0066-00. Fuses– Order 159-0260-00 (125 V, 4 A). Order 159-0259-00 ( 250 V, 2 A). Utility Software– Order 063-3341-02. A1002– In-line transistor adapter. User Manual– Order 070-A840-00 (English). Power Cord– Order 161-0066-00. Wire Set– Order 012-1371-00. Fuses– Order 159-0291-00 (250 V, 1 A). Order 159-0238-00 (250 V, 4 A). Utility Software– Order 063-3341-02. Opt. A1– Euro Plug, 220V, 50 Hz. Opt. A2– UK Plug, 240V, 50 Hz. Opt. A3– Australian Plug, 240V, 50 Hz. Opt. A5– Swiss Plug, 220V, 50 Hz. Opt. AC– China Plug, 50 Hz. Opt. A9– No power cord, set to 220/240 V. 370B Recommended Accessories Service Manual– Order 071-A842-00. K4000– Instrument cart. Rackmount kit– Order 016-0930-00 (Opt. 1R). 371B Recommended Accessories A1001– Blank adapter for mounting custom sockets. A1005– Axial lead adapter. Service Manual– Order 070-A843-00. K4000– Instrument cart. Rackmount Kit– Order 016-0930-00 (Opt. 1R). Service Opt. C3– Calibration Service 3 Years. Opt. C5– Calibration Service 5 Years. Opt. D1– Calibration Data Report. Opt. D3– Calibration Data Report 3 Years (with Option C3). Opt. D5– Calibration Data Report 5 Years (with Option C5). Opt. R3– Repair Service 3 Years. Opt. R5– Repair Service 5 Years. Curve Tracers • www.tektronix.com/other_tm 7 Curve Tracers Contact Tektronix: ASEAN / Australasia (65) 6356 3900 370B • 371B Austria +41 52 675 3777 Balkan, Israel, South Africa and other ISE Countries +41 52 675 3777 Belgium 07 81 60166 Brazil & South America 55 (11) 3741-8360 Canada 1 (800) 661-5625 Central East Europe, Ukraine and the Baltics +41 52 675 3777 Central Europe & Greece +41 52 675 3777 Denmark +45 80 88 1401 Finland +41 52 675 3777 France +33 (0) 1 69 86 81 81 Germany +49 (221) 94 77 400 Hong Kong (852) 2585-6688 India (91) 80-22275577 Italy +39 (02) 25086 1 Japan 81 (3) 6714-3010 Luxembourg +44 (0) 1344 392400 Mexico, Central America & Caribbean 52 (55) 5424700 Middle East, Asia and North Africa +41 52 675 3777 The Netherlands 090 02 021797 Norway 800 16098 People’s Republic of China 86 (10) 6235 1230 Poland +41 52 675 3777 Portugal 80 08 12370 Republic of Korea 82 (2) 528-5299 Russia & CIS +7 (495) 7484900 South Africa +27 11 254 8360 Spain (+34) 901 988 054 Sweden 020 08 80371 Switzerland +41 52 675 3777 Taiwan 886 (2) 2722-9622 United Kingdom & Eire +44 (0) 1344 392400 USA 1 (800) 426-2200 For other areas contact Tektronix, Inc. at: 1 (503) 627-7111 Updated 12 May 2006 Our most up-to-date product information is available at: www.tektronix.com Copyright © 2006, Tektronix. All rights reserved. Tektronix products are covered by U.S. and foreign patents, issued and pending. Information in this publication supersedes that in all previously published material. Specification and price change privileges reserved. TEKTRONIX and TEK are registered trademarks of Tektronix, Inc. All other trade names referenced are the service marks, trademarks or registered trademarks of their respective companies. 05/06 8 Curve Tracers • www.tektronix.com/other_tm DV/WOW 76W-10757-3