2016 General Europractice MPW runs Schedule and Prices Accessible for universities, research institutes and companies Version 160826– v16 www.europractice-ic.com Dear customer, Please note that indicated dates are gds-in deadlines. If you want to participate onto one of below listed shuttles, please make sure to notify us about 4 weeks before this date to ensure a seat is reserved for you. You can send your notification mail to : For For For For For tsmc technologies : eptsmc@imec.be umc technologies : epumc@imec.be xfab technologies : epxfab@imec.be ON Semiconductor technologies : greta.milczanowska@imec.be ams technologies : If your service center is imec : ams_support@imec.be If your service center is fraunhofer : virtual-asic@iis.fraunhofer.de ON Semiconductor (formerly AMIS) ON Semi 0.7µ C07M-D 2M/1P & ON Semi 0.7µ C07M-A 2M/1P/PdiffC/HR ON Semi 0.5µ CMOS EEPROM C5F & C5N ON Semi 0.35µ C035U 4M (3M & 5M optional) only thick top metal ON Semi 0.7µ C07M-I2T100 100 V - 2M & 3M options ON Semi 0.35µ C035 - I3T80U 80 V 4M - 3M optional (5M on special request) ON Semi 0.35µ C035 - I3T50U 50 V 4M - 3M optional (5M on special request) ON Semi 0.35µ C035 - I3T50U (E) 50 V 4M - 3M optional (5M on special request) ON Semi 0.35µ C035 - I3T25U 3.3/25 V 4M (3M & 5M optional) only thick top metal ONC18MS (0.18 µm - 1.8/3.3 V - 15V DMOS - 5LM - MiMC - ESD - HiR - EPI) ONC18MS-LL (=ONC18MS + High Vt) ONC18HPA (= ONC18MS + DNW + Zener + Stacked MiMC + Native Dev + Schottky) ONC18-I4T 45/70V HV CMOS ams J IHP SGB25V 0.25µ SiGe:C Ft=75GHz@BVCEO 2.4V IHP SGB25VGD 0.25µ SiGe:C Ft=75GHz@BVCEO 2.4V + RF HV-LDMOS GD-Module 22V IHP SG25H1 0.25µ SiGe:C Ft/Fmax=190GHz/220GHz 5M/MIM IHP SG25H3P 0.25µ Complementary SiGe:C Ft/Fmax (npn)110/180GHz / (pnp)90/120GHz 5M/MIM IHP SG25H3 0.25µ SiGe:C Ft/Fmax= 110/180GHz 5M/MIM IHP SG25H4 0.25µ SiGe:C Ft/Fmax= 200/220GHz 5M/MIM SG25H_EPIC (based on SG25H4) IHP SG13S SiGe:C Bipolar/Analog/CMOS Ft/Fmax= 250/300GHz 7M/MIM IHP SG13C SiGe:C CMOS 7M/MIM M 18 J A O 13 N D 2 29 4 11 S 16 13 29 14 12 14 16 2 12 10 7 6 5 5 7 6 5 5 8 F J 13 25 11 J M 29 8 J A 29 18 ams 0.35µ CMOS C35B4C3 4M/2P/HR/5V IO 25 ams 0.35µ CMOS C35OPTO 4M/2P/5V IO ams 0.35µ HV CMOS H35B4D3 120V 4M ams 0.35µ SiGe-BiCMOS S35 4M/4P ams 0.18µ CMOS C18 6M/1P/MIM/1.8V/5V ams 0.18µ HV CMOS H18 50V/20V/5V/1.8V/ 6M/MIM Bottom Anti Reflective Coating (BARC) Diode for ams 0.35µ CMOS C35OPTO 4M/2P/5V IO Wafer Level Chip Scale Package for ams 0.35µ CMOS C35B4C3 4M/2P/HR/5V IO Note: Customers making use of WLSCP have to send in their IHP F 18 25 M A 4 M 18 18 J J 13 2 12 14 16 3 1 16 3 1 16 3 1 16 3 1 A S 1 1 15 26 O N 15 29 22 23 22 28 22 23 22 28 18 1 21 18 1 21 6 D 21 21 31 12 12 design gds file two weeks before the indicated deadline F M A M J J A 25 1 25 1 25 2 S O N D 31 1 31 25 2 25 2 31 1 31 31 29 29 5 29 29 5 IHP SG13G2 SiGe:C Bipolar/Analog Ft/Fmax= 29 300/500GHz 7M/MIM IHP SG25 PIC (Photonics, Ge Photo-diode, BEOL) IHP BEOL SG25 (M1 and Metal Layers Above) + RF-MEMS + LBE IHP BEOL SG13 (M1 and Metal Layers Above) + LBE + Cu Bumping available for all IHP technologies with extra charge, limited to 200 bumps X-FAB J F M 29 5 30 30 27 A M J J A S O N D XH018 0.18µ HV NVM CMOS E-FLASH * 2 22 25 13 29 24 XT018 0.18µ HV SOI CMOS ** 1 16 12 XS018 0.18µ OPTO*** 14 * Process modules included : LPMOS, ISOMOS, NVM, HVMOS, DMOS, MIM, MRPOLY, SCHOTTKY, OPT3, LVT, FLASH, MET3, METMID, MET4, MET5, PHOTODIO. Other process modules are optional. ** Process modules included : MIM, LP5MOS, 1XN, 1XP, MET3, MET4, MET5, METMID, HVN, HVP, DTI, NBUR, HWC, HRPOLY, PSUB, DNC, DPC. Other process modules are optional. *** Process modules included : ISOMOS, MIM, MRPOLY, MET3, MET4, MET5, METMID, MOS3LP, BCH, 4TPIX, MOSLP, SFLATPV, PPDB, LVTN3D. Other process modules are optional. TSMC J F M A M J J A S O N D TSMC 0.18 CMOS Logic or Mixed-Signal/RF, General 6 3,24 9,30 13,27 11,28 8,29 6,27 3,24 7,28 5,26 2,30 7 9 30 TSMC 0.18 CMOS High Voltage Mixed-Signal (CV018LD 1.8/3.3/32V) TSMC 0.18 CMOS High Voltage BCD Gen 2 (1.8V/5V...70V) TSMC 0.13 CMOS Logic or Mixed-Signal/RF, General or Low Power (8-inch) TSMC 0.13 CMOS Logic or Mixed-Signal/RF, General or Low Power (12-inch) TSMC 90nm CMOS Logic or Mixed-Signal/RF, General or Low Power TSMC 65nm CMOS Logic or Mixed-Signal/RF, General or Low Power TSMC 40nm CMOS Logic or Mixed-Signal/RF, General or Low Power (no triple gate oxide) TSMC 28nm CMOS Logic, HPL (HKMG) 4 24 9 4 16 11 11 TSMC 28nm CMOS Logic, LP (SION) (reserve 4 months in advance) TSMC 28nm CMOS Logic, HPM (HKMG) (reserve 4 months in advance) 6 7 27 7 13 20 6 7 1,29 27 7,28 26 23 15 13 6 (reserve 4 months in advance) 3 2 4 9 7 28 2 9 2,30 27 3,17 23 20 18 22 20 24 20 19 30 6 3 2 6 4 1 6 3 14 5 2 7 6 3 2 6 4 1 6 3 14 5 2 7 6 3 2 6 4 1 6 3 14 5 2 7 M J J A S O N D Data in RED are preliminary scheduled UMC UMC UMC UMC UMC UMC UMC UMC UMC UMC UMC UMC UMC J L180 Logic GII L180 Mixed-Mode/RF L180 Logic Low Leakage L180 EFLASH Logic GII CIS180 Image Sensor 1P4M – CONV diode CIS180 Image Sensor 2P4M – ULTRA diode CIS11 – image sensor L130 Logic L130 Mixed-Mode/RF L110AE Logic/Mixed-Mode/RF L65N Logic/Mixed-Mode/RF - SP L65N Logic/Mixed-Mode/RF - LL F M A 7 7 7 30 30 30 4 12 12 12 11 4 4 11 5 5 5 22 14 17 17 30 4 22 22 22 8** 8 21* 21* 2 2** 2 4 4 11 20* 20* options regular runs UMC L180 Logic GII Core 1.8V IO 3.3V MIM 1fF UMC L180 Mixed-Mode/RF 1.8V 3.3V 1fF UMC L180 Logic Low Leakage 1.8V 3.3V / topmetal 8kA - Max. 1P6M 8kA/20kA Max. 1P6M 8kA - Max. 1P6M UMC L180 EFLASH logic GII 1.8V 3.3V / 8kA - Max. 2P6M UMC CIS18 – CONV 1.8V 3.3V 1fF 5kA – Max.1P4M UMC CIS18 – ULTRA 1.8V 3.3V 1fF 5kA – Max.2P4M UMC CIS11 - Image Sensor - 2P4M 1.5V 3.3V 1Ff UMC L130 Logic 1.2V 3.3V 1fF/1.5fF/2fF UMC L130 Mixed-Mode/RF 1.2V 3.3V 1fF/1.5fF/2fF UMC L110AE Logic/Mixed-Mode/RF 1.2V 1.8V/2.5V/3.3V/5V 1fF/1.5fF/2fF UMC L65N Logic/Mixed-Mode/RF - SP 1.0V, 1.1V 1.8V/2.5V/ 2.5V_OD3.3V/3.3V 2fF 5kA Max. 2P4M 8kA Max. 1P8M2T 8kA/20kA Max. 1P8M2T 8kA/12kA/20kA/40kA Max. 1P8M 8kA/32.5kA Max. 1P10M 1** 1 12 19* 19* 21 7 7 7 31** 31 5 5 special remarks Redistribution and bumping on request Redistribution and bumping on request. Cannot be combined with Logic GII Please get in touch with imec for the EEFLASH macro information. Colorfilters and microlenses included Colorfilters and microlenses included. Ultra diode is pinned. PIP capacitor possible. Colorfilters and microlenses included. PIP capacitor possible. Two types (out of 3) of devices can be combined: HS,LL, SP. Redistr. to Al. Two types (out of 3) of devices can be combined: HS,LL, SP. Redistr. to Al. Metalization is Aluminium. 5V device possible! HS,LL,SP can be combined. Metallization recommendation on request. Redistribution to Aluminium. * = 32kA topmetal, LVT, MIM in development. 2.5V_OD3.3V not available. ** = 3.3V not available. Please check with us before tapeout. UMC L65N Logic/Mixed-Mode/RF - LL 1.2V 1.8V/2.5V/ 2.5V_OD3.3V/3.3V GLOBALFOUNDRIES GLOBALFOUNDRIES 55 nm GLOBALFOUNDRIES 40 nm mmWave GLOBALFOUNDRIES 28 nm GLOBALFOUNDRIES 22 nm Data in RED are preliminary J LPe/LPx-NVM/LPx-RF LP/LP-RF/RF- M 14 J A S 8 9 18 2 25 O N 4 14 19 D 5 7 1 J ePIXfab-imec J F M A M J J A S O N D 2 22 21 23 F ePIXfab-imec SiPhotonics Passives ePIXfab-imec SiPhotonics ISIPP25G+ ePIXfab-imec SiPhotonics ISIPP50G ISIPP25G = advanced passives + Modulator + Detector ISIPP25G+ = ISIPP25G + LPAS + M2 + edge coupler J 20 24 10 M A M J J 22 20 A S O N D N D N D N D 15 31 31 F M A M J J A S 15 J 15 23 30 5 ePIXfab-LETI SiPhotonics Passives + Heater F M Micralyne MicraGEM-Si Teledyne Dalsa J 6 22 5 Micralyne M 4 11 METALMUMPS PolyMUMPS SOIMUMPS PIEZOMUMPS ePIXfab-LETI A 1 SLP/SLP-RF/HPP FDX scheduled MEMSCAP 2fF F Metallization recommendation on request. Redistribution to Aluminium. * = 32kA topmetal in development. Please check with us before tapeout. 8kA/32.5kA Max. 1P10M O 18 A M J J A S O M J J A S O 13 J Teledyne Dalsa MIDIS F M A 18 16 2016 General Europractice MPW runs – Pricelist Prices are valid for MPW runs starting after 1 January 2016 Accessible for universities, research institutes and companies Prices and conditions may change at any time without prior notice STANDARD price : normal price DISCOUNTED price : only applies to EUROPRACTICE registered (who paid their annual full membership fee) Academic and Research Members from all 28 EU countries and Albania, Armenia, Azerbaijan, Belarus, Bosnia-Herzegovina, Georgia, Iceland, Israel, Liechtenstein, Former Yugoslav Republic of Macedonia, Moldova, Montenegro, Norway, Russia, Switzerland, Turkey, Serbia and Ukraine who submit designs for educational or publicly funded research use only Prices are given for the delivery of unpackaged, untested prototypes. Encapsulation and testing will be charged separately. Number of prototypes OnSemi, XFAB : 30 samples ams , IHP : 40 samples UMC : 0.18um, 0.13um, 0.11um : 50 samples UMC : 65nm : 90 samples TSMC : 8-inch : 40 samples, 12-inch : 100 samples Imec SiPhotonics passives :25 samples, ISIPP25G+ : 20 samples miniphotonics : 10 samples MEMSCAP : 15 samples GLOBALFOUNDRIES : 50 samples If you need more prototype samples, please ask for a quotation Plots You can order plots/PDF of your designs first plot/PDF costs 50 euro next plots cost 20 euro each Packaging : see separate prices and available packages PRICES IN EURO ams ams 0.35µ CMOS C35B4C3 4M/2P/HR/5V IO ams 0.35µ CMOS C35OPTO 4M/2P/5V IO ams 0.35µ HV CMOS H35B4D3 120V 4M ams 0.35µ SiGe-BiCMOS S35 4M/4P ams 0.18µ CMOS C18 6M/1P/MIM/1.8V/5V ams 0.18µ HV CMOS H18 6M/50V/20V/5V/1.8V/MIM BARC Diode for ams 0.35µ CMOS C35OPTO 4M/2P/5V IO Wafer Level Chip Scale Package for ams 0.35µ CMOS C35B4C3 STANDARD Price/mm2 DISCOUNTED Price/mm2 640 4 800 4 880 4 880 4 1100 4 1200 4 One-off fee of 13800 One-off fee of 6150 580 4 700 4 800 4 800 4 1050 4 1100 4 One-off fee of 13800 One-off fee of 6150 ON Semiconductor (formerly AMIS) ON Semi 0.7µ C07M-D 2M/1P ON Semi 0.7µ C07M-A 2M/1P/PdiffC/HR ON Semi 0.5µ CMOS EEPROM C5F & C5N – 200 mm ON Semi 0.35µ C035U 4M (default) including analog options ON Semi 0.35µ C035U 3M (optional) including analog options ON Semi 0.35µ C035U 5M (optional) including analog options ON Semi 0.7µ C07M-I2T100 100 V - 2M ON Semi 0.7µ C07M-I2T100 100 V - 3M ON Semi 0.35µ C035 - I3T80U 80 V 3M ON Semi 0.35µ C035 - I3T80U 80 V 4M ON Semi 0.35µ C035 - I3T80U 80 V 5M ON Semi 0.35µ C035 - I3T50U (or E) 50 V 3M ON Semi 0.35µ C035 - I3T50U (or E) 50 V 4M ON Semi 0.35µ C035 - I3T50U (or E) 50 V 5M ON Semi 0.35µ C035 – I3T25U 3.3/25 V 3M (optional) ON Semi 0.35µ C035 – I3T25U 3.3/25 V 4M (default) ON Semi 0.35µ C035 – I3T25U 3.3/25 V 5M (optional) ONC18MS 0.18 µm - 1.8/3.3 V - 15V DMOS - 5LM - MiMC - ESD - HiR - EPI ONC18MS-LL (=ONC18MS + High Vt) ONC18HPA (= ONC18MS + DNW + Zener + Stacked MiMC + Native Dev + Schottky) ON 0.18 µm I4T 40/75 V - 5LM – DTI (=ONC18MS + 30V + 45V + 70V DMOS) DISCOUNTED Price/mm2 300 2 350 2 1150 2 720 1 700 1 800 1 525 1 560 1 850 1 925 1 1050 1 850 1 925 1 1050 1 750 1 770 1 800 1 1,100 1 1,225 1 270 2 315 2 1100 2 670 1 650 1 750 1 485 1 525 1 800 1 875 1 995 1 800 1 875 1 995 1 700 1 720 1 750 1 1,050 1 1,195 1 1,350 1 1,290 1 1,540 1 1,480 1 STANDARD Price/mm2 IHP IHP SGB25V 0.25µ SiGe:C Ft=75GHz@BVCEO 2.4V IHP SGB25VGD 0.25µ SiGe:C Ft=75GHz@BVCEO 2.4V + RF HV-LDMOS GDModule 22V IHP SG25H1 0.25µ SiGe:C Ft/Fmax=190GHz/220GHz 5M/MIM IHP SG25H3P 0.25µ Complementary SiGe:C Ft/Fmax (npn)110/180GHz / (pnp)90/120GHz 5M/MIM IHP SG25H3 0.25µ SiGe:C Ft/Fmax= 110/180GHz 5M/MIM IHP SG25H4 0.25µ SiGe:C Ft/Fmax= 200/220GHz 5M/MIM SG25H_EPIC (based on SG25H4) IHP SG13G2 SiGe:C Bipolar/Analog Ft/Fmax= 300/500GHz 7M/MIM IHP SG13S SiGe:C Bipolar/Analog/CMOS Ft/Fmax= 250/300GHz 7M/MIM IHP SG13C SiGe:C CMOS 7M/MIM BEOL SG25 (M1 and Metal Layers Above, for passive structures) BEOL SG13 (M1 and Metal Layers Above, for passive structures) IHP SG25 PIC (Photonics devices, Ge Photo-diode, BEOL) bumping for all IHP technologies localized back side etching for all IHP technologies (per design) RF-MEMS switch for SG13 (IP) TSV to ground (SG25H4) X-FAB X-FAB XH018 0.18µ HV NVM CMOS E-FLASH (MET3, METMID) X-FAB XH018 0.18µ HV NVM CMOS E-FLASH (MET3, MET4, METMID) X-FAB XH018 0.18µ HV NVM CMOS E-FLASH (MET3, MET4, MET5, METMID) X-FAB XT018 0.18µ HV SOI CMOS (MET3, METMID) X-FAB XT018 0.18µ HV SOI CMOS (MET3, MET4, METMID) X-FAB XT018 0.18µ HV SOI CMOS (MET3, MET4, MET5, METMID) XS018 0.18µ OPTO (MET3, METMID) XS018 0.18µ OPTO (MET3, MET4, METMID) XS018 0.18µ OPTO (MET3, MET4, MET5, METMID) TSMC All TSMC technologies UMC UMC UMC UMC UMC UMC UMC UMC STANDARD Price/mm2 L180 Logic GII, Mixed-Mode/RF, Logic Low Leakage L180 CIS 1P4M CONV or 2P4M ULTRA L180 EFLASH Logic GII L130 Logic, Mixed-Mode/RF L110AE Logic/Mixed-Mode/RF L110 CIS 65nm Logic, MM/technologies DISCOUNTED Price/mm2 2500 8 1940 8 3150 8 2445 8 6500 8 4875 8 5800 8 4350 8 8 3800 5000 8 7000 8 7500 8 6800 8 4500 8 800 8 1000 8 2000 8 One-off fee of 6500 9 One-off fee of 5000 One-off fee of 10000 One-off fee of 5000 2950 8 3750 8 4550 8 5625 8 5100 8 3375 8 640 8 800 8 1300 8 One-off fee of 4700 9 One-off fee of 2500 One-off fee of 2500 One-off fee of 2500 STANDARD Price/mm2 DISCOUNTED Price/mm2 1430 1505 1580 1435 1525 1610 1200 1280 1355 1, 11 1360 1430 1505 1365 1450 1535 1145 1215 1290 1, 11 1, 11 1, 11 1, 11 1, 11 1, 11 1, 11 1, 11 STANDARD Price/mm2 Upon request STANDARD Price/block 16600 27000 19700 28000 30600 31200 44700 5 5 5 5 5 5 6 1, 11 1, 11 1, 11 1, 11 1, 11 1, 11 1, 11 1, 11 1, 11 DISCOUNTED Price/mm2 7 Upon request 7 DISCOUNTED Price/block 15600 25800 18500 26400 29000 29500 42200 5 5 5 5 5 5 6 GLOBALFOUNDRIES GLOBALFOUNDRIES GLOBALFOUNDRIES GLOBALFOUNDRIES GLOBALFOUNDRIES GLOBALFOUNDRIES GLOBALFOUNDRIES 55 55 40 28 28 22 nm nm nm nm nm nm STANDARD Price/mm2 DISCOUNTED Price/mm2 3850 12 3850 12 4750 12 9800 12 9800 12 17000 12 3550 12 3550 12 4450 12 9000 12 9000 12 16000 12 STANDARD Price/block DISCOUNTED Price/block 4200 3990 LPx-NVM/LPx-RF LPe LP/LP-RF/RF-mmWave SLP-RF/HPP SLP FDX MEMSCAP METALMUMPS, PolyMUMPS, SOIMUMPS, PIEZOMUMPS – 10x10mm 10 Optional Postprocessing : see pricelist on www.europractice-ic.com Larger size dies or undiced wafer (die = design + cleared perimeter) Minimal size dies (die size design size) ePIXfab-imec SiPhotonics Passives 1 block 2 blocks - vertical 2 blocks - horizontal 4 blocks 6 x 3 mm 6 x 6.2 mm 12.2 x 3 mm 12.2 x 6.2 mm 25 additional compact dies 25 additional large dies 1 additional un-diced 200mm wafer Cladding High dose WG STANDARD Price DISCOUNTED Price STANDARD Price DISCOUNTED Price STANDARD Price DISCOUNTED Price 5000 9500 9500 4750 9000 9000 17000 16200 7400 11900 11900 19400 7150 11400 11400 18600 7400 11900 11900 19400 7150 11400 11400 18600 +1000 +1000 +1000 +1000 +1000 +1000 NA NA +2000 +2000 +2000 +2000 NA NA +2000 +2000 +2000 +2000 Included +1000 Included +1000 Included +1000 Included +1000 Included +1000 Included +1000 ePIXfab-imec SiPhotonics ISSIP50G 2.5 mm x 2.5 mm 5.15 mm x 2.5 mm 5.15 mm x 5.15 mm 10.45 mm x 5.15 mm 10.45 mm x 10.45 mm 20 additional dies miniPhotonics (10 samples) Regular (20 samples) STANDARD Price DISCOUNTED Price 10000 20000 40000 80000 150000 +1000 9500 19000 38000 76000 142500 +1000 Minimum area : 2 full blocks ePIXfab-LETI SiPhotonics Passives (if not enough designs LETI can cancel the run) Regular Un-diced 200mm wafer Full : 6.0 x 4.0 mm Half : 6.0 x 2.0 mm Larger sizes Variable dose, metrology, dicing, fabrication report, final resist cladding Deep rib 65nm Minimum area : 5 full blocks STANDARD Price DISCOUNTED Price STANDARD Price DISCOUNTED Price 4870 2435 Contact us 4630 2315 Contact us 3230 1615 Contact us 3070 1535 Contact us Included Included Included Included +1765 Minimum area : 2 full blocks ePIXfab-LETI SiPhotonics Passives + heater + metallization for wire bonding compatibility (if not enough designs LETI can cancel the run) 4.0 x 2.0 mm miniPhotonics (15 samples) 4.0 x 4.0 mm Half : 6.0 x 2.0 mm Regular (25 samples) Full : 6.0 x 4.0 mm Larger sizes Variable dose, metrology, dicing, fabrication report, final resist cladding Deep rib 65nm Passivation opening Minimum area : 5 full blocks STANDARD Price DISCOUNTED Price STANDARD Price DISCOUNTED Price 9550 19100 14325 28650 Contact us 9075 18145 13610 27220 Contact us NA NA 10750 21500 Contact us NA NA 10215 20425 Contact us Included Included Included Included +1765 +1765 STANDARD Price DISCOUNTED Price 4800 Canadian dollar 7200 Canadian dollar 12000 Canadian dollar NA NA NA STANDARD Price DISCOUNTED Price 8000 Canadian dollar 15400 Canadian dollar 29800 Canadian dollar NA NA NA Micralyne (prices only for academia) MicraGEM-SI 4.0 mm x 4.0 mm 4.0 mm x 8.0 mm 8.0 mm x 8.0 mm Teledyne Dalsa (prices only for academia) MiDIS 4.0 mm x 4.0 mm 4.0 mm x 8.0 mm 8.0 mm x 8.0 mm Notes 1) Price = area (mm2) * price/mm2 with min. fabrication cost equivalent to 10 mm2 2) Price = area (mm2) * price/mm2 with min. fabrication cost equivalent to 5 mm2 3) Price = area (mm2) * price/mm2 with min. fabrication cost equivalent to 8 mm2 4) Price = area (mm2) * price/mm2 with min. fabrication cost equivalent to 7 mm2 5) Price = per block of 5x5mm needed to fit the design in 6) Price = per block of 4x4mm needed to fit the design in 7) Price can be calculated through http://www.europractice-ic.com/TSMC_request_prices.php 8) Price = area (mm2) * price/mm2 with min. fabrication cost equivalent to 0.8 mm2 9) Price = per submitted design (no size limit, bumping limited to 200 bumps) 10) 11) 12) Cost for extra services like structures release, subdicing, … please refer to http://www.europractice-ic.com/MEMS_pricing.php Area will be rounded upwards to the next mm2 (eg. 12.24 mm2 will be charged as 13 mm2) Price = area (mm2) * price/mm2 with min. fabrication cost equivalent to 9 mm2 Any edge length between 1.5 mm to 12.5 mm is possible. The mentioned die size is referred to the Pre-Shrink die size Contacts imec, Belgium (P. Malisse, tel: +32 16 281273, e-mail: mpc@imec.be) Fraunhofer IIS, Germany (W. McKinley, tel : +49 9131 776 4413, e-mail: europrac@iis.fraunhofer.de)