COMMERCIAL LASERS
High-Power Q-Switched Diode-Pumped Laser
Q Series
Key Features
• Intracavity harmonic generation
• Sealed laser head with Direct-Coupled Pump (DCP®) design
• Highest commercially available pulse energy and peak power
• Superior pulse-to-pulse amplitude and energy stability
• Relatively low fluence in harmonic crystals and no cavity
optic coatings exposed to UV for high reliability
• 355 or 532 nm outputs available
Applications
• Micro via drilling
• Wafer scribing
• Low-k dielectric grooving
• Full-cut thin wafer dicing
• Solar cell processing
• Micromachining of silicon and metals
The JDSU Q Series lasers are sophisticated high-power Q-switched diodepumped laser systems. The Q Series family incorporates a rugged, efficient
Nd:YAG-based direct-coupled pump (DCP) platform with a proprietary design
for intracavity harmonic generation. As a result, it provides the highest power 355
and 532 nm laser systems with uncompromising stability and mode quality, from
single-shot operation to pulse repetition rates of up to 200 kHz. Whether for high
pulse-energy processing of refractory materials such as silicon, or high repetitionrate processing of packaging materials such as Kapton, the Q Series delivers
unsurpassed performance combined with the longest system lifetimes in the
industry.
The Q Series lasers achieve their outstanding power with no loss of stability
through a unique integration of the DCP® architecture and extremely efficient
harmonic generation. The DCP® platform uses a Nd:YAG gain medium,
dramatically reducing thermal lensing issues and energy storage limitations. As a
result, the Q Series systems are able to operate at low repetition rates with high
pulse energies. As there is only limited thermal lensing, the same laser systems
may be optimized at repetition rates of up to 200 kHz to provide the highest
average UV powers commercially available.
The Q Series lasers enable the tightest possible process tolerances for
micromachining and other materials processing applications. Due to the selfstabilizing characteristics of intracavity harmonic generation, all Q Series lasers
exhibit inherently high pulse-to-pulse energy and long-term output power
stability. In addition, the excellent thermal stability of the DCP® architecture
maintains a spatially stable output beam, which is extremely important for
processes requiring accurate feature placement.
NORTH AMERICA : 800 498-JDSU (5378)
WORLDWIDE : +800 5378-JDSU
WEBSITE : www.jdsu.com
HIGH-POWER Q-SWITCHED DIODE-PUMPED LASER
2
Q Series 355 and 532 nm Laser Head
(Specifications in inches [mm] unless otherwise noted. Dimensions include mounting pads.)
LOCATION POINT, 3X
.25
[6.4]
8.75 [222.3]
10.00 [254.0]
9.84 [250.0]
5.00
[127.0]
4.92
[125.0]
4.92
[125.0]
5.00
[127.0]
3X, .266 WIDE X .346 LONG SLOT
[3X, 6.8 WIDE X 8.8 LONG SLOT]
.90
[22.9]
COOLING WATER CONNECTION, 2X
5.50 [139.7]
2.75 [69.8]
3.39 [86.1]
A
.040
[1.0]
2.19 [55.6]
1.987 [50.47]
1.06
[26.9]
3X MOUNTING PADS
4.82
[122.4]
32.00 [812.8]
Laser Center
1.050 [26.65]
.94
[23.9]
UMBILICAL CABLE PORT
.100 [2.54]
Detail A
Scale 1:2
.669
[17.00]
Power Supply and Chiller
(Specifications in inches [mm] unless otherwise noted. )
17.3
[440]
WATER FILL PORT
16.80
[426.7]
VOLTAGE SELECTION
ACCESS
14.34
[364.2]
21.0
[533]
WATER HOSE FITTINGS
10.4
[264]
13.00
[329]
ELECTRICAL
INTERFACE PANEL
4X, .218 X .375
3.48 [88.4]
3.00 [76.2]
.24 [6.1]
.35 [8.9]
18.30 [464.8]
HIGH-POWER Q-SWITCHED DIODE-PUMPED LASER
5
Q Series Laser Head Specifications
Continued
Parameter
Q201-HD
Q202-HD
Wavelength
Spatial mode
M-squared1
Waist location1 (internal, from beam exit)
Waist diameter1, 1/e2
Beam divergence1, full angle
Beam pointing drift
Beam position accuracy, unit to unit
Beam pointing accuracy, unit to unit
Repetition rate
Internally triggered
Externally triggered
Constant pulse energy range
Average output power
At 5 kHz
At 40 kHz
Pulse width
At 5 kHz
At 40 kHz
Pulse energy fluctuations
At 5 kHz
At 40 kHz
Power drift over 8 hours
Beam roundness
Polarization
Warm-up time
From cold start
From standby
Operating ambient temperature
Relative humidity, non-condensing
Weight
532 nm
TEM00
<1.3
50 cm
0.35 mm
2.2 mrad
<25 µrad/°C
<1.0 mm from nominal
<1.0° from nominal
532 nm
TEM00
<1.3
50 cm
0.35 mm
2.2 mrad
<25 µrad/°C
<1.0 mm from nominal
<1.0° from nominal
5 to 250 kHz
0 to 250 kHz
<5 kHz
5 to 250 kHz
0 to 250 kHz
<15 kHz
12.0 W
-
>15 W
18 ns
-
110 ns
<2.0% rms
<±2%
>85% circular
>100:1, vertical
<2.5% rms
<±2%
>85% circular
>100:1, vertical
<20 minutes
<10 minutes
15 to 35 °C
10 to 80%
14.5 kg
<20 minutes
<10 minutes
15 to 35 °C
10 to 80%
14.5 kg
1. Specification holds over different repetition rate ranges, depending on the laser model, as follows:
Q201 from 5 to 15 kHz, for Q202 from 15 to 60 kHz
Q20X 532nm Models Typical performance
200
Q201
Q202
15
150
10
100
5
50
0
0
10 20 30 40 50 60
Pulse Repetition Rate (kHz)
0
70
Pulse Widths (ns)
532-nm Average Power (W)
20
HIGH-POWER Q-SWITCHED DIODE-PUMPED LASER
6
QB-PS Power Supply
Parameter
Specification
Front panel/display
Power on/off key (Status LED)
Shutter open/closed switch (Status LED)
Standby/mode/status/control button
Parameter adjust dial
External trigger in/out BNC (TTL)
18.5 lbs (8.4 kg)
10 ft (3.0 m) - standard
16.4 ft (5.0 m) - optional
3.9 lbs (1.8 kg) - standard
6.2 lbs (2.9 kg) - optional
90 to 250 V AC, 47 to 63 Hz
<550 W (400 W typical)
Weight
Umbilical cable length
Umbilical cable weight
Frequency
Power
Input and Ambient
Voltage, frequency
Power
Operating ambient temperature
Relative humidity, non-condensing
Storage temperature
90 to 250 V AC, 47 to 63 Hz
<550 W (400 W typical)
15 to 35 °C
10 to 80%
-20 to 55 °C
QA-CH Chiller
Parameter
Specification
Cooling capacity
Refrigerant
Coolant
Reservoir volume
Coolant flow rate
Weight, reservoir empty
Hose length
>300 W
R134a
Distilled or tap water
<1 gal (3.8 l)
<0.4 gpm at 6 psi (1.5 lpm at 0.4 atm)
121 lbs (55 kg)
9.5 ft (2.9 m) - standard
16 ft (4.9 m) - optional
10 ft (3.0 m)
Control cable length
Input and Ambient
Voltage, frequency1
Power
Operating ambient temperature
Relative humidity, non-condensing
Storage temperature
Orientation
1. For 200/230 VAC version, the model number is QA-CH-E.
90 to 110 and 180 to 220 V AC, 50 Hz
105 to 125 and 210 to 250 V AC, 60 Hz
<1000 W (700 W typical)
15 to 35 °C
10 to 80%
-20 to 55 °C
Upright position only
HIGH-POWER Q-SWITCHED DIODE-PUMPED LASER
7
Ordering Information
For more information on this or other products and their availability, please contact your local JDSU account manager or
JDSU directly at 1-800-498-JDSU (5378) in North America and +800-5378-JDSU worldwide or via e-mail at
customer.service@jdsu.com.
Sample: Q201-HD (532 nm, 5 to 15 kHz laser head), QB-PS (power supply), QB-PS-A01 (3 m umbilical cable for power
supply), QA-CH (standard voltage configuration chiller), and QB-CH-A11 (3 m hose, straight/straight couplings)
Laser Head
Product Code
Q201-HD
Q202-HD
Q331-HD
Q332-HD
Q333-HD
Q301-HD
Q302-HD
Q303-HD
Description
532 nm, 12 W class, 5 to15 kHz
532 nm, 15 W class, 15 to 60 kHz
355 nm, 5 W class, 10 to 30 kHz
355 nm, 5 W class, 30 to 70 kHz
355 nm, 5 W class, 70 to 130 kHz
355 nm, 10 W class, 10 to 30 kHz
355 nm, 10 W class, 30 to 70 kHz
355 nm, 10 W class, 70 to 130 kHz
Power Supply
Product Code
QB-PS
Description
Standard power supply
Umbilical Cable
Product Code
QB-PS-A01
QB-PS-A02
Description
3 m umbilical cable
5 m umbilical cable
Chiller
Product Code
QA-CH
QA-CH-E
Description
Chiller with standard voltage configuration
Chiller with European voltage configuration
Hose Kit
Product Code
QA-CH-A11
QA-CH-A12
QA-CH-A21
QA-CH-A22
QA-CH-A31
QA-CH-A32
Description
Pair of 3 m hoses, straight/straight couplings
Pair of 5 m hoses, straight/straight couplings
Pair of 3 m hoses, right-angle/straight couplings
Pair of 5 m hoses, right-angle/straight couplings
Pair of 3 m hoses, right-angle/right-angle couplings
Pair of 5 m hoses, right-angle/right-angle couplings
HIGH-POWER Q-SWITCHED DIODE-PUMPED LASER
Compliance with Regulatory Requirements
These laser sources are generic (non-OEM) versions of JDSU diode-pumped, Q-switched laser systems. The lasers are Class IV lasers as
defined by the Federal Register 21 CFR 1040.10 Laser Safety Standard. The Standard requires that certain performance features and
laser safety labels be provided on the product.
The American National Standards Institute publishes a laser safety standard for users entitled American National Standard for the Safe
Use of Lasers (ANSI Z136.1). JDSU recommends that laser users obtain and follow the procedures described in this ANSI Standard.
Warranty
JDSU diode-pumped Q Series laser systems are warranted to be free of defects in materials and workmanship for thirteen
months from the date of shipment or for 5,000 operating hours, whichever occurs first.
Patent Information
The products described in this data sheet are based on JDSU Intellectual Property which includes more than 1,800 United
States and foreign registered patents. These patents are relevant to an extensive set of products and/or technology applications
including JDSU’s laser products and associated technologies. For further information contact the JDSU Legal Department.
NORTH AMERICA : 800 498-JDSU (5378)
WORLDWIDE : +800 5378-JDSU
WEBSITE : www.jdsu.com
Product specifications and descriptions in this document subject to change without notice. © 2007 JDS Uniphase Corporation 10143146 Rev. 005 11/07 QSERIES.DS.CL.AE
November 2007