An Equivalent Electrical Model for Numerical Analyses of ODEP Manipulation Wenfeng Liang1,2, Shue Wang1,2, Yanli Qu1, Zaili Dong1, Gwo-Bin Lee1,3, Wen J. Li1,4,* 1 State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, China 2 Graduate University of the Chinese Academy of Sciences, 100049, China 3 Center for Micro/Nano Technology Research, National Cheng Kung University, Taiwan 4 Centre for Micro and Nano Systems, The Chinese University of Hong Kong,Hong Kong Abstract-Opticaldielectrophoresis(ODEP)has been explored experimentally with success in manipulating microscale objects in the last 5 years. However, not much theoretical analyses have been performed to understand its operating principles in depth and also determine its limitations as a tool to manipulate micro- and nano-scale objects. In this paper, we present our work on establishing an equivalent electrical model to analyze the important physical interactions when optically induced dielectrophoretic force is used to manipulate micron-sized polystyrene beads. Simulation results show that the ODEP manipulation of microbeads is frequency-dependent and that the electrothermal effect is negligible. Furthermore, the relationship between the frequency of the applied voltage and the maximum manipulation velocity of the microbeads obtained from simulation is consistent with our experimental measurements. In addition, simulation results also show that the minimum radius of a bead that can be manipulated exponentially decreases with respect to the size of the illuminated spot. For instance, when the illuminated spot size is 1μm, ODEP can theoretically manipulate 100nm beads – indicating that ODEP can be extended to manipulate nano-scale objects if the illuminated spot size can be significantly reduced. Keywords-ODEP; OET;DEP;simulation; polystyrene beads; I. beads. But electrothermal (ET) force affects on the trapped beads during the manipulation process were not mentioned. In this paper, we will theoretically analyze and compare the following forces exerted on suspended particles in liquid medium: DEP force, ET force, and Brownian motion, and present a more accurate explanation to the phenomenon of manipulating micro-particles using ODEP technique. II. MODELING AND SIMULATION 2.1 Equivalent electrical model of the OET device As shown in Fig. 1, the OET device used on our simulation and experiments is composed of a sandwich structure, including a top layer of transparent and conductive Indium Tin Oxide (ITO) glass, a 35um liquid layer containing micro-scale particles, and a bottom layer with two thin films deposited on another ITO glass. The two thin films include a 1μm photoconductive material layer of hydrogenated amorphous silicon (a:Si-H), and a 20nm insulating film of nitride silicon(SiN). INTRODUCTION Micro/nano-scale manipulators are important tools in many fields, such as in biological research and in assembling micro/nano-scale sensors and devices. There are several forces that can be used to move and trap particles. Although mechanical structures can be used to grip microparticles[1], however it is difficult and costly to scale mechanical devices for the parallel manipulation of single particles. Conversely, fluid drag can transport many cells[2], but it is extremely difficult to achieve single-cell manipulation using fluidic manipulation. Optical tweezers[3] can manipulate a single particle, but it suffers from a high optical power requirement. Dielectrophoresis (DEP)[4]can be also used to trap particles, but it requires a static pattern of metal electrodes, which cannot be dynamically reconfigurable. A novel manipulation tool called optoelectronic tweezer (OET) was reported by P. Y. Chiou et al., in 2005 [5], which enabled massively parallel manipulation of micrometer-scale objects. This new technique holds excellent potential in terms of realizing parallel fabrication of nano-devices, which is our team’s current research interest. P. Y. Chiou has theoretically analyzed the order of magnitude of the DEP force [6], which is based on the assumption that the OET is modeled as the resistance of the photosensitive layer in series with the resistance of the liquid layer. A. T. Ohta et al., have calculated the electrical field distribution and DEP force [7] using light to trap polystyrene *Contacting Author: Wen J. Li, is a professor in the Dept. of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Hong Kong, and an affiliated professor at the State Key Laboratory of Robotics, Shenyang Institute of Automation, CAS, China (e-mail: wen@mae.cuhk.edu.hk). Fig. 1 Schematic illustration of the operating principle of the OET chip.The particles can be concentrated by the positive DEP force. As shown in Fig. 2(a), between the interface of the liquid and solid layer, there is an electric double layer (EDL) which behaves as a capacitor. When the external AC bias is applied between the top and bottom electrodes, these multiple layers can be modeled as serially connected lum circuit elements (Fig. 2(b)). In ideal optically-induced DEP force generation process, the applied voltage drops across the amorphous silicon layer if the layer is not illuminated; but, if the layer is under illumination, all the voltage drops across the liquid layer. Realistically, however, some of the voltage may drop across the EDL layer or the insulating layer, which will decrease the amplitude of the voltage and the DEP force induced in the liquid layer. Fig. 2(c) shows the impedance as a function of frequency of the equivalent circuit model of the OET device. The voltage will drop across the insulating layer when the applied frequency is below 10kHz and will drop across the liquid layer when the applied frequency is above 140kHz with no incident light (for the values of the parameters as indicated in the caption of Fig. 2). That is, given the set of physical parameters as shown in Fig. 2, when no light is illuminated on the photoconductive layer and the applied electric field frequency across the OET device is lower than 140kHz, the impedance of the a:Si-H layer is higher than all other layers (including the liquid layer). So, the voltage will drop across the a:Si-H layer. However, when the frequency is lower than 10kHz, the voltage will drop across the SiN layer or EDL layer, regardless if there is an incident light or not, which is not expected. Therefore, ODEP manipulation of microbeads can be implemented in the frequency range from 10kHz to 140kHz, i.e., with an incident light, the impedance of the a:Si-H will be sharply decreased in this frequency range, and the voltage will be shifted to the liquid layer. K (ω ) = ε *p − ε m* (2) ε *p + 2ε m* Where ε* = ε–jσ/ω, ε and σ are the permittivity and conductivity, respectively, and ω = 2πf, where f is the applied voltage frequency across the liquid medium. The subscript, p and m, denotes the particle and the liquid solution, respectively. The DEP force acting on a particle can be positive or negative, depending on the sign of the real part of CM factor. If the particle is attracted to higher electric field, it is called positive DEP, while if the particle is pushed towards lower electric field, it is called negative DEP. For polystyrene beads (with radius R), the conductivity can be expressed as[8]: σ p = σ bulk + 2 K s / R (3) Where σp is the conductivity for polystyrene beads, σbulk the bulk conductivity and Ks the surface conductivity (for polystyrene beads σbulk=1×10-16S/m, Ks =2×10-9S/m).Eq. (3) shows that the conductivity of the particle is thus dominated by the surface conductivity and is inversely proportional to the particle’s size. Combing the Eq. (2) and Eq. (3) and neglecting the bulk conductivity (i.e., the magnitude of the bulk conductivity is much lower than the surface conductivity, and hence can be neglected)of the polystyrene beads, the real part of the CM factor can be rewritten as: 2 K s − σ m R jωτ 0 + 1 Re[ K (ω)] = Re 2 K s + 2σ m R jωτ ω + 1 Where τ ω = ε p + 2ε m 2 K s + 2σ m R R and τ 0 = ε p − εm 2K s − σ m R (4) R Then, the high- and low-frequency limits for Re(K(ω)) can be given lim Re[ K (ω)] = 2K s − σ m R 2 K s + 2σ m R lim Re[ K (ω)] = 2ε s − σ m R 2 K s + 2σ m R ωτ 0 →0 ωτ ω →0 Fig. 2 (a) Schematic and (b)equivalent electrical model for a typical OET.(c) Impedance of an equivalent circuit model of the OET system (assume thethickness of the EDL is 25nm, and the area of the OET device is 100cm2). 2.2 Clausius-Mossotti (CM) factor for polystyrene beads The time averaged DEP force on a spherical object is given in [8]: FDEP = πR 3ε m Re[ K (ω )]∇E 2 (1) Where R is the particle radius, εm the permittivity of the liquid medium, E the electric field, and 𝐾(𝜔)the Clausius-Mossotti (CM) factor, expressed as: (5) As shown in Eq. 5, the value of the Re(K(ω)) for the polystyrene bead is dominated by the magnitude of the εpand εm when the applied frequency is very high and is dominated by the Ks, σm, and R when the applied frequency is extremely low. Fig. 3(a) shows the crossover frequency (DEP force equal to zero) for different sizes of the polystyrene beads vs. the liquid conductivity. The left bottom of each curve indicates the positive DEP force zone, and the right top of that indicates the negative DEP force. For example, a bead with diameter of 10µm will experience a negative DEP force when the liquid conductivity is 1×10-3S/m. Fig. 3(b)shows the real component of the CM factor as a function of frequency for different microbead radii. At the same applied frequency, the bigger the bead, the smaller the real part of CM factor. As shown, the 10μm beads will always only experience negative DEP, regardless of applied voltage frequency. On the other hand, the 1μmbeads will experience negative DEP force in the frequency range of higher than 1.1MHz, and will experience positive DEP force when the frequency is lower than 1.1MHz. This suggests that using the different directions of DEP force to separate different diameters of the beads is possible. Fig. 3(a) The crossover frequency for different sizes of polystyrene beadsvs. the liquid conductivity. (b) Re[K] at different applied frequencies fordifferent sizes of polystyrene beads. 2.3 Simplified electro-hydrodynamics of polystyrene beads 2.3.1 DEP force In order to theoretically analyze the principle of manipulation of a 10um polystyrene bead,we assume a light ring as the incident light pattern with the inner radius equal to 20μm and with ring with of 25μm (the three dimensional geometry model is shown in Fig. 4(a)). Because this model is axially symmetric, we can use the two dimension model (Fig. 4(b)) to calculate the distribution of the electric field, based on the parameters that the conductivity of the deionized water is 8×10-3S/m, the light conductivity of the amorphous silicon is 10-5S/m, and the dark conductivity is 10-11S/m (these data were measured using the Keithley 2410 Source Meter).The simulation boundaries conditions are also presented in Fig. 4(b). The condition at the interface between the deionized water and photoconductor layers is that both the potential and the normal component of the current are continuous. The numerical results can then be obtained by finite element method if the electric field E can be obtained by E = −∇∅ in the subdomain of the liquid chamber. Fig. 4(c) shows the simulation results for the right-half of Fig. 4(b)’s geometric model because the two-dimension model is axis-symmetric. The simulation result is for the application of 20Vp-p (peak to peak value) at 100kHz across the liquid layer. We have neglected the electric field in the amorphous silicon layer because this layer’s electric field cannot influence the particles suspended in the liquid. We have also neglected the SiN insulation layer in the simulation because in the actual OET device it is only ~20nm thick, and hence can not significant affect the E-field distribution. Fig. 4(a) The simplified three dimension geometry for a ring pattern used for ODEP manipulation. (b)The two dimensional geometry model for the calculation with theboundary conditions for the electrical field and the parameters of each layer.The ‘Center’ indicates the center of the light ring, the ‘R1’ indicates the positon of the inner radius and the ‘R2’ the position of the externalradius.(c) Distribution of the magnitude and direction of the electric field. The arrow represents the direction of the negative DEP force and thesurface plot indicates distribution of the electric field. The simulation result shows that the electric field is nonuniform in the liquid chamber, and the magnitude of the electric field is higher in the areas where there is an incident light compared to the areas where there is no incident light. The arrow in Fig. 4(c) represents the direction of the negative DEP force. As shown, the negative DEP force will repel the trapped particles from the light-patterned area of the ring to the center of the ring. Hence, the DEP force generated in the OET device with a photoconducting layer is called optically-induced DEP force because the nonuniform field is induced by the light-dark optical patterns on the photoconductor layer. The selectively illuminated photoconductor layer can thus be described as a dynamic “virtual electrode”. 2.3.2 Stokes drag force Because the electric field is nonuniform in the liquid chamber of the OET, so the spherical bead will be influenced a DEP force expressed by Eq. (1). Under the action of the DEP force, the particle will be accelerated and moved. Once it moves, the opposing Stokes’ drag force will be produced, as discussed in[9]: Fd (6) fr where υ is the particle velocity, u the liquid velocity, Fd the drag force and fr the friction factor of the particle in the fluid. For a spherical particle fr = 6πηR, where η is the dynamic viscosity of the medium. Assuming that the liquid velocity can be neglected because the initial condition of the liquid solution is nearly static, so the drag force, expressed as: Fd = 6πηR𝜈. We note here that, in this kind of ODEP-based device, electro-osmosis should be taken into account only when a low-bias frequency (<1kHz) is applied to the OET as discussed in [10]. Then, at equilibrium, in the direction of the particle linear motion (assumed as x-direction), the forces acting on the bead should satisfy the following equation: FDEPx = Fd, i.e., the particle will reach a stable horizontal maximum velocity. Moreover, when the negative DEP force (Re[𝐾(𝜔)]<0) is exerted on the bead, the bead will be repelled away from the light-illuminated area of the ring. That is, if a single bead is surrounded by a light ring pattern projected on the a-Si layer though a projector, the negative DEP force will always push horizontally the bead to the center of the light ring. So when we move the light ring by an animation software at a certain velocity, the trapped bead will follow the motion of the projected optical pattern. In this way, the bead can be moved to any a desired location in the fluidic medium close to the a-Si substrate. υ=u+ To estimate the magnitude of the horizontal DEP force in the liquid vs. the radial distance from the center of the light ring, the vector 𝛻𝐸 2 in the Eq. (1) should be calculated. As shown in the Fig. 5(a), the cross-sectional distribution of the x-component of the vector ∇𝐸 2 (denoted as ∇𝐸𝑥2 ) can be simulated based on the boundaries settings in the Fig. 4(b). We also know that the DEP force sharply decreases along the vertical direction and is of axial symmetry with regard to the center of the light ring, which has the largest value around the inner edge of the light ring for bead trapped in a ring. The trapped particle will be left behind the light ring when the moving velocity of the light ring exceeds a certain velocity because a trapped particle experiences a maximum DEP force according to the formula: FDEPx = πε m R 3 Re[K (ω )]∇ E x 2 max (7) Hence, when the velocity of the light ring is increased, the equilibrium position of the trapped particle will change from the light ring center to the inner edge of the light ring within the ring trapping. So the horizontal DEP force would increase. When the particle moves to the inner edge of the light ring, the magnitude of the horizontal DEP force will reach the maximum value because the ∇𝐸𝑥2 has the maximum at this position. We know that the Stokes’ drag resistance force is proportional to the particle velocity through the Eq. 6. So when the moving velocity reaches a threshold value, i.e., the maximum horizontal DEP force will not overcome the Stokes’ drag resistance force, and the trapped particle will be left behind the moving optical ring and becomes lose trapped. This threshold velocity value can then be estimated by the following formula (i.e., by equating Fd in Eq. 6 to FDEPx in Eq. 7 and solve for v): υ max = R 2ε m Re[ K (ω )]∇ E x2 6η max (8) Fig. 5(a) The magnitude distribution of the cross-sectional of the x-component of the vector ∇E 2.(b) The absolute value of the horizontal component of the velocity induced by the DEP force, which results in a maximum velocity of about 35μm/s. Because of the diameter of the polystyrene bead being 10μm, so the maximum DEP force exerted on the bead can be reckoned at the position of a height of 6µm above the bottom of the a-Si layer, then the trapped particle will be right on the interface between the insulating layer and the liquid layer, and the abs of the maximum value of the horizontal velocity is ~35μm/s. 2.3.3Electrothermal flow The phenomena that the energy of the incident photos absorbed in a:Si-H film is dissipated through either electron-hole pairs or photo generation has been analyzed by [11], which concluded that the temperature of the liquid solution increased by the incident light is so low that it can be neglected. However, joule heating in the liquid cause by an external electric field applied across the liquid may be significant. Here we analyze this ‘electrothermal’ effect. Joule heating in a liquid caused by an applied electric field is given as [9]: W = σ mE2 (9) Where W is the power generated per-unit volume and 𝜎𝑚 is the conductivity of the liquid solution. Localized joule heating gives rise to gradients in the solution’s permittivity and conductivity, which interact with the surrounding electric field to cause the fluid motion. This phenomenon is generally known as the electrothermal (ET) effect. So particles in the fluid may also be influenced by the motion of the fluid caused by this phenomenon. The ET effects on moving and trapping a particle can be analyzed by coupling the electrical, temperature and flow fields in the fluid medium. As shown in Fig. 6(a).the temperature increase due to ET effect is ~3K, which is insignificant. Also as shown in Fig. 6(a), ET induced flow can recirculate in the internal and external edge right above the light ring. So, the suspended particles will be pushed away from the location where there is an incident light. However, compared with the particle maximum velocity (Fig. 5(b)) under the influence of the DEP force and Stokes’ drag force, the particle’s velocity induced by the ET flow (Fig. 6(b)) is so small that the ET effect can be neglected. In addition, we theoretically analyzed and calculated the minimum radius of beads that can be manipulated by ODEP force. Theoretically, suspended particles can be trapped or focused by DEP force when the maximum DEP force generated by an incident light pattern overcomes the thermal perturbation force caused by Brownian motion. Because DEP force scales with R3, it sharply decreases as the diameter of the manipulated object is scaled down, especially in the nanoscale domain. On the other hand, the thermal perturbation force scales with R-1,so it is critical to analyze the magnitude of these two competing forces as objects scale down in size. Assuming that an incident light pattern is a light spot with its diameter being 1μm, 5μm, 10μm, 15μm, 20μm, 30μm and 40μm, respectively, we can calculate the maximum DEP force generated by this light spot respective to its diameter size in the light chamber. By balancing the maximum DEP force and the thermal perturbation force, the minimum radius value of the beads can be obtained. The results for the minimum radius of a bead manipulable by ODEP force vs. light spot size is plotted in Fig. 7. Simulation results show that the minimum radius of a bead that can be manipulated exponentially decreases with respect to the size of the light spot. The curve-fit equation that relates the minimum radius (r) and light spot size (x)can be expressed as: r=101exp(0.04x) (10) As shown, when the light spot radius is 1μm, ODEP force can theoretically manipulate 100nm radius beads. This means the ODEP force can be used to manipulate nanometer-scale particles using smaller projected light image. Note that the simulated results shown in Fig. 7 is obtained by balancing the maximum DEP force with the force caused by Brownian motion, which is give by [12] as: FBrownian = K BT /(1.39 R) the ring (velocity of ~10µm/s),as shown in Fig. 8(b).As long as the ring velocity is below the velocity at which Stokes’ drag force is equal to the induced DEP force, the bead remains trapped in the ring (i.e., as shown in Fig. 8(c), where the ring velocity is ~20µm/s). For the experimental configuration shown in Fig. 8, when the velocity of the light ring exceeds 25μm/s, the bead will be left behind the light ring, i.e., it becomes “untrapped” (Fig. 8(d); repeated experiments indicate the ~25μm/s is the ring velocity at which the bead becomes “untrapped”). Note that the maximum velocity of manipulation of a single 10µm polystyrene bead is 25μm/s in DI water as stated above, which is in the same order of magnitude of our simulation result of 35μm/s (Fig. 5(b)). Fig. 6(a) The simulation results of the ET effect. The isolines indicate the logarithmic distribution of the temperature gradient; difference in log10(∇T) between the any adjacent isolines is 0.15, the surface color indicates the temperature distribution in the liquid layer, and the arrow represents the direction of the ET flow.(b) The absolute value of the maximum velocity of a particle induced by ET effect. (11) Where KB is the Boltzmann constant and T is the temperature. III. EXPERIMENTAL RESULTS We have performed several experiments using the ring-shape light as the virtual electrode,and successfully generated ODEP force to manipulate10μm beads as shown in Fig. 8(a)-(d). At first, the light ring pattern is projected onto the photoconductive layer through a objective lens attached to a projector, and no voltage potential is applied across the liquid medium (Fig. 8(a)). When an external AC voltage potential with peak-to-peak value of 20V is switched on and the light ring is moved, the bead can be trapped and move along with Fig. 7 Minimum radius of beads vs. light spot size. force acting on the particle by the ‘line’ electrode. In Fig. 9 (b), 1µm polystyrene beads were mixed in DI water and were observed to undergo Brownian motion initially. When the optical circular spot was illuminated onto the ODEP chip and the external AC bias was applied across the chip, the polystyrene beads were shown to be attracted towards the center of the optical spot (as shown in the right-hand-side Fig.)due to the induced positive DEP force. IV. Fig. 8 Example of DEP manipulation of a single bead(diameter of 10µm) using optically projected pattern on an ODEP chip.(a) No bias voltage is applied across the liquid medium.(b) Bias voltage applied and the light ring is moved, keeping the bead trapped as it moves.(c) The velocity of the moving light ring is increased. (d) The bead will be left behind when the velocity of the light ring exceeds 25μm/s. CONCLUSION In this paper, we present our work on analyzing the characteristics of ODEP manipulation of micron-sized polystyrene beads by establishing an equivalent electrical model. Simulation results show that the ODEP manipulation of microbeads is frequency-dependent and that the electrothermal effect is negligible. Furthermore, the relationship between the frequency of the applied voltage and the velocity of the microbeads is consistent with our experimental measurements. In addition, simulation results show the minimum radius of a bead that can be manipulated exponentially decreases with respect to the size of the light spot. For instance, when the projected light spot size is 1μm, ODEP can theoretically manipulate 100nm beads--indicating that ODEP can be extended to manipulate nano-scale objects if projected spot size can be significantly reduced. V. ACKNOWLEDGEMENTS The present work is supported by a self-sponsored project of the State Key Laboratory of Robotics(No. 2009Z02). The authors would like to thank all the members in the Micro/Nano Automation Group of the State Key Laboratory of Robotics, SIA, CAS, for their valuable discussions and support. REFERENCES N. Chronis and L. P. Lee, “Electrothermally activated SU-8 micro-gripperfor single cell manipulation in solution,” J. Microelectromech. Systems, vol. 14, pp. 857–863, 2005. [2] G. M. Whitesides, “The origins and the future of microfluidics,” Nature, vol. 442, pp. 368–373, 2006. [3] A. Ashkin, J. M. Dziedzic, J. E. Bjorkholm, and S. Chu, “Observation of a single-beam gradient force optical trap for dielectric particles,” Opt. Lett., vol. 11, pp. 288-290, 1986. [4] H.A. Pohl, Dielectrophoresis, Cambridge University Press, 1978. [5] P. Y. Chiou, A. T. Ohta, and M. C. 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P Brody, S Nakano, Y Kishi, Y Kuwano,“Manipulating nanoparticles in solution with electrically contacted nano-tubes using dielectrophoresis”,Langmuir, 2004, vol, pp. 8612-8619. [1] Fig. 9(a) Experimental results of a 10μm polystyrene bead under a negative DEP force. (b) Experimental results of 1μm polystyrene beads focused into a circular zone under a positive DEP force. In addition, we have done experiments on manipulating 10μm beads using a “line” and 1μm beads using a ”circle” as the light pattern (with AC bias of 20Vp-p at 100kHz) as shown in Fig. 9(a) and Fig. 9(b), respectively. The results validate the calculated results in Fig. 3, and also show that the direction of the DEP force for the polystyrene beads is dependent on the radius of the beads. In Fig. 9 (a), the particle was stabilized in the liquid medium initially, and the optical line was then illuminated onto the ODEP chip. When the external AC bias is applied across the chip, the particle is repelled away (as shown in the right-hand-side of the Fig.) from the optical line (which remains stationary at all times), indicating a negative DEP