Lecture 8: Mechanical Vibration Discrete systems Energy method Lumped-parameter analysis » 1 d.o.f. » Multi-d.o.f. (Eigenvalue analysis) Continuous systems Direct solving of partial differential equations Rayleigh’s method (the energy approach) Example: a laterally-driven folded-flexure comb-drive resonator Reference: Singiresu S. Rao, Mechanical Vibrations, 2nd Ed., Addison-Wesley Publishing Company, Inc., 1990 ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 1 Energy Method Conservation of energy; the maximum kinetic energy is equal to the maximum potential energy: Tmax = Vmax Also known as Rayleigh’s energy method Example: Effect of spring mass ms on the resonant frequency ωn Kinetic energy of spring length dy: dTs = y dy l Total kinetic energy: k T= m x(t) ENE 5400 ༾ᐒႝسी, Spring 2004 2 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 1 Cont’d The total potential energy: U= 1 2 kx 2 By assuming a harmonic motion x(t) = X⋅⋅ cosω ωnt, m 1 (m + s ) X 2ωn2 2 3 1 U max = kX 2 2 By equating Tmax = Vmax, Tmax = ωn = ENE 5400 ༾ᐒႝسी, Spring 2004 k m + ms / 3 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 3 Lumped-Parameter Model L-shape spring =? x k k m k k Simplified description of 3D physical model using minimum required number of variables (coordinates) Do we have “mass-less” spring? A valid assumption? Can consist of a set of ordinary differential equations depending on the number of variables In “Linear Control Systems”, we call them the state-space equations ENE 5400 ༾ᐒႝسी, Spring 2004 4 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 2 Degree of Freedom x1 k1 k3 k2 m1 m2 m1 2 degree of freedom system 1 degree of freedom system x2 x1 k1 k2 The minimum number of independent coordinates required to determine completely the positions of all parts of a system at any instant of time defines the degree of freedom of the system ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 5 Equations of Motion for a 2 D.O.F. System F1(t) x1(t) k1 F2(t) k3 m2 m1 b1 x2(t) k2 b2 b3 m1&x&1 = m2 &x&2 = ENE 5400 ༾ᐒႝسी, Spring 2004 6 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 3 Equations of Motion for a 2 D.O.F. System r r r r [ m ]x&& + [ b ]x& + [ k ]x = F 0 b1 + b2 m1 [m ] = , [ b ] = m2 0 − b2 F1 F= F2 − b2 k 1 + k 2 , [ k ] = b2 + b3 − k2 − k2 k 2 + k 3 In addition to the free-body diagram, equation of motion can also be derived through the Lagrange’s equation from the energy perspective ENE 5400 ༾ᐒႝسी, Spring 2004 7 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس Solving of Dynamic Equation Gives complete transient response under Free vibration: without external applied force » How can a structure move without a force? » Natural frequency and damped natural frequency can be obtained Forced vibration: with external applied force Motion Types: » Underdamped » Critical damped » Overdamped Remember how to solve a set of linear ordinary differential equations for multiple d.o.f. systems? ENE 5400 ༾ᐒႝسी, Spring 2004 8 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 4 Determine Resonant Frequency Design of micromechanical devices needs to know natural frequency and damping To many performance indexes of the transient response, such as rise time, overshoot, and settling time Resonant frequencies of a lumped-parameter mechanical system can be obtained by Solving the eigenvalue problem (exact solution) Rayleigh’s Method (approximate solution) etc ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 9 Eigenvalue Problem Under free vibration and no damping, natural frequencies of a multi-d.o.f system are solutions of the eigenvalue problem r Let x = x sin(ωt ), then r [[ K ] − ω2 [ M ]] x = 0 ⇒ ∆ = [[ K ] − ω [ M ]] = 0 mω × [ K ] ⇒ [[ I ] − ω [ K ] [ M ]] = 0 , [[ I ] − [ D ]] = 0 k x ≠ 0, 2 −1 2 { 2 −1 α The roots αi = mω ωi2/k, so ωi can be solved The eigenvector corresponding to the individual eigenvalue is the mode shape of the system ENE 5400 ༾ᐒႝسी, Spring 2004 10 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 5 Example From the free-body diagram: k1 m1 x1 k2 m2 x2 k3 m3 x3 ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 11 Cont’d Let m1 = m2 = m3 = m, k1 = k2 = k3 = k, and ω = √(k/m): m1 0 0 0 &x&2 + − k 2 m3 &x&3 0 − − k2 0 k2 + k3 − k3 x1 − k 3 x2 = [ 0 ] k3 x3 0 0 &x&1 − 1 0 x1 2 & & 1 0 x2 + k − 1 2 − 1 x2 = [ 0 ] 0 0 1 &x&3 − 1 1 x3 −1 0 1 0 0 2 2 − 1 − ω m 0 1 0 = 0 2 ⇒ k −1 0 ENE 5400 k1 + k 2 0 1 ⇒m 0 0 ⇒ I &x&1 0 m2 0 −1 0 1 −1 0 1 {14444244443 mω k α 2 2 −1 0 −1 2 −1 ༾ᐒႝسी, Spring 2004 0 − 1 1 1 0 0 D 12 0 0 1 0 = 0 0 1 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 6 Cont’d αι = mωωi2/k, solve: mω12 k α1 = = 0.19806, ω1 = 0.44504 k m α2 = mω 22 k = 1.55530, ω 2 = 1.2471 k m mω 32 k α3 = = 3.24900, ω 3 = 1.8025 k m ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 13 Cont’d: Mode Shapes For each solved ωi, recall that: r r [[ K ] − ωi2 [ M ]] x = 0 2 k −1 0 2 = k − 1 0 −1 2 −1 0 − 1 − ( 1 −1 2 −1 αi k m 0 1 ) ⋅ m 0 0 1 − 1 − α i 0 0 1 0 0 x1i 1 0 x2i 0 1 x3i 0 0 x1i 1 0 x2i = 0 0 1 x3i We can solve the eigenvector xji with respect to each αi ENE 5400 ༾ᐒႝسी, Spring 2004 14 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 7 Cont’d: Mode Shapes 1st mode, α1 = 0.19806 1. 0 x = x 1 1.8019 2.2470 r1 r 1 2nd mode, α2 = 1.5553 3rd mode, α3 = 3.2490 r2 1 .0 1.0 x = x 1 − 1.2468 0.5544 r3 ENE 5400 x = x 1 0.4450 − 0.8020 r2 ༾ᐒႝسी, Spring 2004 r3 15 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس Vibration of Continuous Systems A system of infinite degrees of freedom The equation of motion may be described by a partial differential equation which can be solved by the method of separation of variables Many methods can be used to find approximate resonant frequencies and mode shapes (e.g. the Rayleigh’s method) ENE 5400 ༾ᐒႝسी, Spring 2004 16 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 8 Example: Lateral Vibration of Beams y f(x,t) f(x,t): force per unit length y(x,t) x M(x,t) Free-body diagram M(x,t) + dM(x,t) x O L O’ V(x,t) y(x,t) V(x,t) + dV(x,t) dx What is the dynamic equation? The inertia force (i.e. f = ma): ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 17 Example: the Lateral Vibration of Beams The sum of moments around the point O is ZERO M(x,t) + dM(x,t) M(x,t) O Substitute V = ∂M/∂ ∂x into the last equation: y(x,t) V(x,t) O’ dx V(x,t) + dV(x,t) ∂ 2 M ( x ,t ) ∂ 2 y( x , t ) + f ( x , t ) = ρA( x ) 2 ∂x ∂t 2 ∂2 ∂ 2 y( x , t ) ] + f ( x ,t ) = ρA( x ) − 2[ ∂x ∂t 2 4 2 ∂ y( x , t ) ∂ y( x , t ) EI + ρA = f ( x ,t ) 4 ∂x ∂t 2 − For a uniform beam: ENE 5400 ༾ᐒႝسी, Spring 2004 18 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 9 Example: Lateral Vibration of Beams For free vibration, f(x,t) = 0, we require 4 2 Two initial conditions, for example: EI ∂ y ( x4 , t ) + ρA ∂ y ( x2 , t ) = 0 ∂x ∂t » y(x, t = 0) = yo(x) = 0 » ∂y/∂ ∂t|(x, t = 0) = 0 Four boundary conditions, for example: » Free end ∂x2) = 0 – Bending moment = EI(∂ ∂2y/∂ 3 3 ∂x = 0 – Shear force = EI∂ ∂ y/∂ We will use these two » Simply supported (pinned) end b.c.’s to solve for the – Deflection y = 0 Fixed-pinned beam ∂x2) = 0 – Bending moment = EI(∂ ∂2y/∂ » Clamped end – Deflection y = 0 – Slope ∂y/∂ ∂x = 0 ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 19 Solve Lateral Vibration of Beams Use the method of separation of variables y(x,t) = Y(x)⋅⋅ T(t) d 4Y ( x ) d 2T (t ) AY x + =0 ( ) ρ dx 4 dt 2 EI / ρA ∂ 4Y ( x ) 1 d 2T (t ) = − = a = ω2 Y ( x ) ∂x 4 T (t ) dt 2 EIT (t ) (3) (2) ENE 5400 ༾ᐒႝسी, Spring 2004 20 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 10 Solve the Lateral Vibration of Beams Y(x) can be solved as: Y ( x ) = C1e βx + C2e − βx + C3e iβx + C4e − iβx Or, Y ( x ) = C1 cos β x + C2 sin β x + C3 cosh β x + C4 sinh β x The natural frequencies of the beam are (from (1)): ω = β2 EI EI = ( β l )2 ρA ρAl 4 The βl product depends on the boundary conditions ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 21 Solve Lateral Vibration of a Fixed-Pinned Beam Four B.C.’s for a fixed-pinned beam are substituted into Y(x): ⇒ C = −C β( C + C ) = 0 ⇒ C = −C Y (0) = 0 C1 + C3 = 0 dY (0) = 0 dx Y (l ) = 0 EI 2 0 1 4 C1(cos β l − cosh βl ) + C2 (sin β l − sinh βl ) = 0 (5) − C1(cos βl + cosh β l ) − C2 (sin βl + sinh β l ) = 0 (6 ) cos βl − cosh β l So, − (cos βl + cosh βl ) ENE 5400 2 ∴Y ( x ) = C1 (cos βx − cosh βx ) + C2 (sin β x − sinh β x ) (4 ) d 2Y (l ) = 0 dx 2 14243 4 3 ༾ᐒႝسी, Spring 2004 22 sin βl − sinh β l = 0 (7 ) − (sin β l + sinh βl ) ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 11 Cont’d From the last matrix, we get the determinant: tan βl = tanh β l The many roots of this equation, β nl, will define the natural frequencies: ωn = ( β n l )2 EI ρAl 4 Mode shape: Yn(x), Y(x), yn(x,y), and y(x,t): C2 n = −C1n ( cos β n l − cosh β n l ), sin β nl − sinh β nl from (5) Yn ( x ) = C1n [(cos β n x − cosh β n x ) − ( cos β n l − cosh β n l )(sin β n x − sinh β n x )], from (4 ) sin β n l − sinh β n l yn ( x , t ) = Yn ( x )( An cos ωn t + Bn sin ωn t ) y( x ,t ) = ∑ y ( x ,t ), ∞ ENE 5400 n The final mod e shape ༾ᐒႝسी, Spring 2004 n =1 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 23 Results of β nl for Various Beam Constraints β1l = 1.875104 β2l = 4.694091 β3l = 7.854757 β4l = 10.99541 (1) Cantilever beam (2) Doubly-clamped beam β1l = 4.730041 β2l = 7.853205 β3l = 10.995608 β4l = 14.137165 (3) fixed-pinned beam β1l = 3.926602 β2l = 7.068583 β3l = 10.210176 β4l = 13.351768 ENE 5400 ༾ᐒႝسी, Spring 2004 24 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 12 Rayleigh’s Method An approximate analysis using the energy perspective to find the fundamental natural frequency of continuous systems The kinetic energy of a beam: T= Assume a harmonic variation y(x,t) = Y(x)⋅⋅ cos(ω ωt), the maximum kinetic energy: Tmax = ENE 5400 ω2 2 ༾ᐒႝسी, Spring 2004 l ∫0 Y 2 ( x )ρA( x )dx 25 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس Cont’d The potential energy V of a beam: (neglecting the work done by the shear forces) The maximum value of y(x,t) is Y(x), so the maximum potential energy: Vmax ENE 5400 1 l d 2Y ( x ) 2 = ∫ EI ( ) dx 2 0 dx 2 ༾ᐒႝسी, Spring 2004 26 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 13 Rayleigh’s Method By equating Tmax to Vmax, we obtain: d 2Y ( x ) 2 ) dx ∫0 dx 2 ω2 = l 2 ∫ ρAY ( x )dx l EI ( 0 For example, a stepped beam with various cross sections: l2 d 2Y ( x ) 2 d 2Y ( x ) 2 E I ( ) dx + E I ( ) dx + ∫0 1 1 dx 2 ∫l1 2 2 dx 2 ω2 = l1 l2 2 2 ∫ ρA1Y ( x )dx + ∫ ρA2Y ( x )dx + l1 0 l1 L L Where is Y(x) from? You have to choose Y(x), and make sure: (1) it is a reasonable beam deflection curve; (2) Y(x) must satisfy the beam boundary conditions ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 27 Example: Find the Resonant Frequency Use the deflection curve Y(x) = (1 – x/l)2 The cross section A(x) = hx/l The moment of inertia I(x) = 1⋅⋅(hx/l)3/12 By equating Tmax to Vmax y anchored ω = 2 1 h x l The exact frequency is (for comparison): ω = 1.5343( ENE 5400 ༾ᐒႝسी, Spring 2004 28 Eh 2 1 / 2 ) ρl 4 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 14 Lateral Folded-flexure Comb-Drive Resonator What is the resonant frequency of the resonator? A lumped-parameter model would be used for analysis Source: William Tang, Ph.D. Dissertation, UC Berkeley, 1990 ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 29 Spring Constant kx When the resonant plate moves Xo under a given force Fo, the point B and D moves Xo/2, respectively The force acting on each beam is Fo/4 The slope at both ends of the beams are identically zero truss beam anchor plate ENE 5400 ༾ᐒႝسी, Spring 2004 30 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 15 Cont’d The deflection curve of beam AB is: ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 31 Lateral Resonant Frequency By Rayleigh’s energy method: K .E .max = P.E .max K .E .max = K .E .plate + K .E .truss + K .E .beam = 1 1 1 M p v 2p + M t vt2 + ∫ vb2 dM b 2 2 2 = For the beam segment AB, remember that: x AB (y ) = (Fx / 4 ) ( 2 3Ly − 2y 3 ) 12EI z x AB (L ) = X o / 2 = ⇒ ENE 5400 x AB (y ) = − for 0 ≤ y ≤ L Fx L3 48EI z 2 3 Xo y y 3 − 2 2 L L ༾ᐒႝسी, Spring 2004 32 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 16 Cont’d So the velocity profile for segment AB (multiply ω) is: v AB ( y ) = X oω y y 3 − 2 2 L L 2 3 The K.E. for beam AB is: 1 L ( X o ω) y y 3 − 2 2 ∫0 4 L L 2 2 K .E . AB = 3 2 14444244443 dM AB v 2AB ENE 5400 = X o2 ω2 M AB 8L = 13 2 2 X o ω M AB 280 y ∫0 3 L L ༾ᐒႝسी, Spring 2004 2 y L − 2 3 2 dy dM AB = M AB ⋅ dy L ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 33 Cont’d Similarly for beam CD, the deflection curve is: xCD ( y ) = X o + (− x AB ( y )) = X o 1 − truss 2 3 y y + 2L L 3 beam y The velocity profile and K.E. for segment CD are: vCD ( y ) = X o ⋅ ω1 − K .E . CD = = ENE 5400 2 3 y y + 2 L L X o2 ω2 M CD 2L L ∫0 1 − 3 anchor 2 3 y y + 2 L L 3 2 dy plate 83 2 2 X o ω M CD 280 ༾ᐒႝسी, Spring 2004 34 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 17 Cont’d: Total Beam Potential Energy Since, 1 Mb 8 K .E .b = 4 ⋅ K .E .AB + 4 ⋅ K .E .CD 13 2 2 83 2 2 = X oω Mb + X oω Mb 560 560 6 2 2 = X o ω Mb 35 M AB = MCD = ⇒ ENE 5400 ༾ᐒႝسी, Spring 2004 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 35 Cont’d The total maximum K.E. is K .E .max = K .E .plate + K .E .truss + K .E .beam 1 6 1 = X o2ω 2 M p + Mt + Mb 2 8 35 The total maximum P.E. is: P .E .max = ∫ Xo 0 Fx ⋅ dx = ∫ Xo 0 k x x ⋅ dx = 1 k x X o2 2 Equating both equations, we obtain the resonant frequency: ω= ENE 5400 ༾ᐒႝسी, Spring 2004 kx Mp + 1 12 Mt + M 4 35 b 36 ᐽӛԋǴ ᐽӛԋǴమεᏢႝᐒس 18