50 GHz Broadband SMT Package for Microwave Applications Katsuyuki YOSHIDA, Takayuki SHIRASAKI, Seigo MATSUZONO, Chihiro MAKIHARA Kyocera Corporation Semiconductor Components Group, R & D Address: 1-1, Yamashita-cho, Kokubu, Kagoshima, 899-4396, Japan Tel: (81) 995 46 1100, Fax: (81) 995 47 1290 E-mail: k.yoshida@scpd.kyocera.co.jp , c.makihara@scpd.kyocera.co.jp Abstract Due to the rapid growth in the use of Internet and mobile communications, the high speed transmission capacity requirements have been increasing at a high rate. As a result of this, the semiconductor and packaging technologies have seen significant advances. Especially, wireless communication systems in the microwave/millimeter wave bands, such as LMDS (Local Multipoint Distribution System), Point to Point radio, and satellite communications are expected to see significant growth in a consumer market. High Frequency Integrated circuits to be used in broadband transmission would be implemented in materials such as GaAs, SiGe, and InP. Some effort is seen to develop passivation films for these devices so that they can be used without additional packaging, but so far these attempts have not met with much success. The requirements for ceramic packaging have remained very strong and stable. As the microwave/millimeter wave applications are gradually transferring to the consumer market, the packaging must meet the demands for high reliability, miniaturization, lower cost, and low electrical loss. Although several surface mount package types for high frequency have been proposed to meet those requirements, the return loss starts dropping drastically around 30GHz level. Then, there are no clear reports on the work done to reduce these losses. This paper shows and explains the key points of the simulation and design technologies for high frequency SMT package. Then, we introduce practical examples of packages designed for high frequency by using simulation technology in order to improve the transmission properties of the package. We have manufactured prototype samples of such packages and confirmed the results of simulation by actual measurements. The measurement results show S11<-15dB and S21<-1dB per port up to 50 GHz (including the board interface). Therefore we introduce a surface mount BGA package suitable for up to 50 GHz. As for package material, we used low loss LTCC(Low Temperature Cofired Ceramic [GL560]), (Er=6.0, tangent delta= 0.0023 at 10 GHz) in order to lower the capacitance at the ball portion. 1. Introduction The requirements for high frequency packages in the LMDS and Point-to-Point radio programs are as diverse as they are in number. Listed below are some of the requirements: 1. Low transmission loss 2. Transmission from DC to broadbands 3. Hermeticity 4. Surface mount configuration type 0-7803-7038-4/01/$10.00 (C)2001 IEEE Several SMT (surface mount type) packages have been introduced into the market to lower the cost of package, as well as that of board assembly. For example, in cellular handsets, chip components such as SAW filter, crystal oscillators, and PA module packages are mounted on the PWB (Printed Wiring Board) using a single solder reflow cycle. Likewise, this cost effectiveness is expected in packages used at microwave frequencies by also adopting surface mount configuration type packages, and there have been several reports of such packages. However, at frequencies over 30GHz, the return loss (S11) in an SMT package is degraded, and, therefore, a package that achieves DC signal I/O transmission of 50Ghz with a low loss is still a goal that has, until now, not been reached. This paper describes a solution for an SMT package for high frequency applications. In the course of developing this solution, we have considered hermetic package sealing, as well as first and second level package reliability. This solution has been achieved by using novel approaches in investigating the causes of performance degradation in package transmission lines. In optimizing the package design, we have extensively used computer simulations to thoroughly investigate the mechanisms of reflection at all transmission lines that compose the package. 2. Background Figure 1 shows a photograph of an SMT package developed for microwave bandwidths in the past. The construction of this package is 11mm square OD, composed of multilayer alumina ceramic. Interconnect board used for package mounting is also alumina ceramic, and solder material is used for package mounting. The mounting pad diameter is 0.3 mm. The bonding finger area of package and pattern of interconnect board are executed as a coplanar structure with ground pattern to enable measuring of the electrical performance of the package by using a wafer probe. Fig.1 The example of conventional SMT package The measurement method of the package and interconnect board is illustrated in Figure 2, and the actual measurement results are shown in Figure 3. Wafer probe ACP40-GSG200 2001 Electronic Components and Technology Conference has been used for measurement, and LRM method is adopted for calibration. Fig.2 Measurement Method signal-ground pads of 0.10mm, and impedance matching controlled at 50 Ohm. (b) In the VIA area, two port measurement has been designed to have location of probe contacts in the same plane (or X axis) – see Figure 5. (c) Similarly, in the Interconnection area, two port measurement has been designed to have location of probe contacts in the same plane (or X axis). As shown in Figure 6, each probe interconnects the pads of the substrate, and measurement of the horizontal transitions through the microstrip line area between the two ports is made. Fig.5 Fig.3 Test samples for VIA Measurement results of conventional package At frequencies over 20 GHz, the return loss is over -10dB and package performance is significantly degraded. The cause of the degradation is hypothesized as follows. To develop an SMT package with low transmission loss for microwave and millimeter wave applications, it is important to accurately understand the qualitative and quantitative behavior of transmission loss that occurs in each of the areas composing the package. These areas are depicted in Figure 4: GCPW (Grounded Coplanar Waveguide), VIA, and Interconnection area (including the area of solder ball attach). Therefore, all of these areas have been carefully considered when optimizing the package design. To evaluate the characteristics of each of these areas, a test vehicle, composed of multilayer alumina ceramic, has been prepared for measuring electrical performance of the package at high frequencies: Fig.4 RF Surface mount package (a) GCPW area has been designed to have substrate thickness of 0.4 mm, line width of 0.15mm, pitch of ground- 0-7803-7038-4/01/$10.00 (C)2001 IEEE Fig.6 Test samples for Ball The results of these measurements are shown in Figure 7: (a) GCPW area and (b) VIA area show return loss to be lower than –20dB at 40GHz. These results are acceptable for most high frequency applications. To improve transmission line performance, optimization in the GCPW and VIA areas has been performed. Not only has the impedance matching been considered, but the location of the ground conductors has also been optimized to avoid leakage of electromagnetic energy. However, the return loss in the interconnection area is worse than –10dB at 20GHz range. This is confirmed to be the cause of transmission line performance degradation for the SMT package / interconnect board assembly. Therefore, in order to develop an SMT package with a low transmission loss for microwave and millimeter wave applications, it is necessary to optimize the solder ball attach area of the package. 2001 Electronic Components and Technology Conference Fig.8 (a) GCPW Simulation & measurement results of ball Next, we have analyzed the E-magnitude distribution at 30 GHz – see Figure 9. It is confirmed that E-magnitude is concentrated mainly at the mounting pad. Moreover, the transmission mode is not orderly. Fig.9 (b) VIA E-magnitude distribution Typically, to achieve a hermetic seal, a metal lid is used in SMT packages for high frequency applications. Therefore, metallization is required on the top side of the substrate for sealing. This creates a capacitor between the solder ball mounting pad and seal metallization. This capacitor greatly influences the package, and accelerates the degradation of package characteristics at high frequencies. To reduce the capacitance value at the ball pad area, we have prepared a test vehicle with a smaller mounting pad size (with a diameter of 0.15 mm vs. 0.3 mm originally). Once again, we have conducted 3D simulations and actual measurements – see Figure10. (c) Interconnection area Fig.7 Measurement ď˝’esults of package elements 3. Improved package design This section describes our effort in optimizing the interconnection area. We have conducted 3D simulations using HFSS. The simulation results are shown in Figure 8. These results are similar to these obtained in actual measurements. The return loss is drastically degraded starting at 20GHz. Fig.10 0-7803-7038-4/01/$10.00 (C)2001 IEEE Measurement results of improved ball 2001 Electronic Components and Technology Conference The results of both, simulations and actual measurements show that return loss is better than -10dB in the interconnection area. The E-magnitude distribution is illustrated in Figure 11. However, by reducing pad diameter to 0.15mm, it may be caused to have difficulties at assembly. Futhermore, Reliability at solder joint level will be weaken when a package would be mounted onto the board which has a large mismatching of T.C.E. 4. Further investigation Fig.11 E-magnitude distribution From these results, we have concluded that reducing the size of the mounting pad from 0.3 mm to 0.15 mm in diameter will alleviate the concentrated E-vector distribution in the solder ball attach area. Next, using BEM(Boundary Element Method), we have conducted simulations of impedance values by reviewing the 2D cross section at the solder ball attach area. The impedance is ~38 Ohm when the diameter is 0.3mm, and ~46 Ohm when diameter is 0.15mm. These results clearly show that, by reducing the capacitance value (smaller diameter of mounting pad), high frequency transmission characteristics in the interconnection area are improved. Using the gained knowledge, a test package has been prepared to measure the package characteristics after second level mounting. The test vehicle is 11mm square OD with 0.15 mm diameter RF mounting pad and pad pitch of 0.8 mm, mounted on alumina ceramic interconnect board. The test results are presented in Figure 12. Fig.12 Measurement results of improved package The return loss (S11) between DC and 40Ghz is better than –10dB, and this proves that return loss is improved at second level mounting. These results are acceptable for an SMT package for high frequency applications. We have established that the interconnection of an SMT package has wide influence on the electrical performance of the package. Package characteristics are drastically improved by reducing the capacitance value in this area. 0-7803-7038-4/01/$10.00 (C)2001 IEEE (a) RF characteristics One of the methods to reduce the capacitance value in the solder ball attach area is to use a package material with low dielectric value. Measurements of S parameters have been performed on a test vehicle made from Low Temperature Cofired Ceramic (Er=6.0, tangent delta=0.0023 at 10GHz [GL560]). Figure 13 shows the measurement method, including the interconnect board. The actual measurement results are shown in Figure 14. Fig.13 Measurement method of SMT package Fig.14 Measurement results of SMT package The construction of this package is 7mm square OD with 0.3 mm diameter RF mounting pad and pad pitch of 0.8 mm, mounted on RO4003 (Duroid) interconnect board, and solder material is used for mounting. The bonding finger area of package and pattern of interconnect board are executed as a coplanar structure with ground pattern to enable measuring of the electrical performance of the package by using a wafer probe. The measurement results, including the second level mounting, are: S11<-15dB, S21<-1dB per port (up to 50 GHz). The simulation results are very similar. (b) 2nd level reliability test As we have demonstrated, by reducing the mounting pad diameter the electrical performance of the package is significantly improved. However, this reduces the solder joint 2001 Electronic Components and Technology Conference reliability. We have, therefore, evaluated the second level reliability of the package. The construction of this package is Low Temperature Cofired Ceramic 7mm square OD with 0.3 mm diameter RF mounting pad and pad pitch of 0.8 mm, mounted on RO4003 (Duroid) interconnect board. A temperature cycle test with test conditions of -40 to 85 degrees has been used for this purpose. No failures have been detected for 1,000 cycles. The results (see Figure 15) show that the developed package has adequate reliability. Fig.15 Results of 2nd level reliability test (c) Package level reliability Furthermore, we confirmed the package reliabilities (Fig.16). Results show that requirements for TCT (Temperature Cycle Test),PCT (Pressure Cooker Test) and HTS (High Temperature Strage) and they were satisfied. We have also tested the integrity of package sealing. The requirements for 5 x 10-8(Pamm3/s) and below are satisfied. Fig.16 Results of package reliability test 5. Conclusion (1) The interconnection area of SMT package for microwave and millimeter wave applications is found to be the main cause of increase in return loss at frequencies over 30GHz. (2) The capacitance value in the solder ball attach area is the cause of degradation in the transmission line characteristics of the package. Reducing the diameter of mounting pad improves those characteristics. (3) The newly developed SMT package composed of Low Temperature Cofired Ceramics (Er 6.0; tangent delta 0.0023 at 10GHz[GL560]) mounted on RO4003 (Duroid) interconnect board has been measured. Both, measurement and simulation results after second level assembly show that this 0-7803-7038-4/01/$10.00 (C)2001 IEEE configuration achieves S11<-15dB, and S21<-1dB per port (up to 50GHz). (4) Solder joint reliability testing shows that the developed package has adequate reliability (no failures at 1,000 cycles with test conditions of -40 to 85 degrees). (5) The testing of package level reliabilities (TCT,PCT,HTS and hermeticity) were confirmed to be satisfied. We have found that, in order to achieve satisfactory electrical performance of SMT package for high frequency applications, it is necessary to optimize not only the characteristics of each area that composes the package structure, such as GCPW and VIA areas, but also the characteristics package interface to the interconnect board. Computer simulations have been used to investigate the mechanism of performance degradation in the solder ball attach area. As a result of these studies, we have developed a package with no resonances from DC to 50GHz and low transmission loss. Low Temperature Cofired Ceramic has been proven to satisfy the requirements for high frequency characteristics, package level reliability, and solder joint reliability. Further work is planned to establish technology for measurement and simulation that is capable of the quantitative analysis of S parameters in each of the package areas. To respond to the needs for an even higher frequency packaging, we are planning to develop a surface mount package for 60GHz taking into consideration the second level mounting reliability. 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