SiC POWER MODULES
Innovative Power Devices
for a Sustainable Future
Traction, industrial equipment, building facilities, electric vehicles, renewable energies, home appliances...
Power devices are a key component in power electronics products for contributing to the realization of a low-carbon
society. Attracting attention as the most energy-efficient power device is one made using new material,
silicon-carbide (SiC). The material characteristics of SiC have led to a dramatic reduction in power loss and
significant energy savings for power electronics devices. Mitsubishi Electric began the development of elemental
SiC technologies in the early 1990s and has since introduced them to achieve practical energy-saving effects for
products manufactured using SiC. Innovative SiC power modules are contributing to the realization of a low-carbon
society and more affluent lifestyles.
SiC: Silicon Carbide-Compound that fuses silicon and carbon at a ratio of one-to-one.
Traction
• Size and weight of traction inverters reduced
• Regenerative performance enhanced
• Noise reduced
Home appliances
• Energy savings increased
• Cooling system more compact
• Equipment more compact/thinner
Industrial equipment
• High torque, high speed, size reduced
• Cooling system more compact
• Manufacturing productivity enhanced
Merits of Incorporating
SiC Power Modules
Electric/hybrid vehicles
• Power loss reduced
• Cooling system more compact
• Regenerative power used efficiently
Renewable energies
• Energy conversion efficiency improved
• Passive components downsized
• Quieter high-speed operation
Building facilities
• Power loss reduced
• Greater layout freedom as the result of smaller equipment
1
SiC with superior characteristics
Si
SiC
Gate
Gate
Source
Source
n+
p
n+
n-
Power loss reduced
Source
p
p
Source
n+
n+
n-
p
SiC substrate
Drain electrode
SiC MOSFET structure
1
10
Current flow
Si substrate
SiC has approximately 10 times the critical breakdown
strength of silicon. Furthermore, the drift layer that is a
main cause of electrical resistance is one-tenth of the
thickness. This allows a large reduction in electrical
resistance and, in turn, reduces power loss. This SiC
characteristic enables dramatic reductions in conductivity
loss and switching loss in power devices.
Large reduction in
electrical resistance
Drain electrode
Si MOSFET structure
High-temperature operation
SiC
Conduction band
High temperature
Band gap Band gap is approx.
3 times that of Si
When the temperature increases, electrons are exited to
the conduction band and the leakage current increases.
At times, this results in abnormal operation.
However, SiC has three times the band gap width of
silicon, preventing the flow of leakage current and enabling
operation at high temperatures.
Valence band
High-speed switching operation
Hybrid SiC power modules
Si
SiC
Turn-on switching waveform
High-speed
switching operations realized
Ic:500A/div
With SiC, owing to the high dielectric breakdown, power
loss is reduced and high-voltage is easier to achieve, it is
possible to use Schottky Barrier Diodes (SBDs), which
cannot be used with Si. SBDs can realize high-speed
switching motion because they don't have accumulation
carriers. As a result, high-speed switching can be realized.
Vce:250V/div
t:1µs/div
Heat dissipation
Si
SiC
SiC has three times the heat conductivity of silicon,
which improves heat dissipation.
Thermal
conductivity
rate is approx.
3 times
that of Si
SiC power modules appropriated by application
Application
Product name
Hybrid SiC-IPM
Full SiC-IPM
Full SiC Power Modules
Industrial
equipment
Traction
Home
appliances
Hybrid SiC Power Modules for
High-frequency Switching
Applications
Large Hybrid SiC DIPIPMTM for PV Application
Hybrid SiC Power Modules
Hybrid SiC DIPPFCTM
Full SiC DIPPFCTM
Model
PMH200CS1D060
PMH75-120-Sxxx＊
PMF75-120-Sxxx＊
FMF400BX-24A
FMF800DX-24A
CMH100DY-24NFH
CMH150DY-24NFH
CMH200DU-24NFH
CMH300DU-24NFH
CMH400DU-24NFH
CMH600DU-24NFH
PSH50YA2A6
CMH1200DC-34S
PSH20L91A6-A
PSF20L91A6-A
Rating
Voltages[V] Current[A]
Connection
States
Insert
pages
600
200
6-in-1
1200
75
6-in-1
1200
1200
4-in-1
2-in-1
2-in-1
Sample available
600
1700
400
800
100
150
200
300
400
600
50
1200
Commercially available
Sample available
Sample available
Sample available
Sample available
600
20Arms
1200
Commercially
Commercially
Commercially
Interleaved
Commercially
4-in-1
2-in-1
available
available
available
available
P3
P4
P5
P6
P7
＊Tentative No.
2
600V/200A Hybrid SiC-IPM for Industrial Equipment
PMH200CS1D060 New
SiC-SBD incorporated in an IPM with a built-in drive circuit and protection functions
Power loss reduction of approx. 20% contributes to
enhancing the performance of industrial machinery
Features
• Hybrid combination of SiC-SBD and IGBT with current and temperature sensors
implemented for IPM supplies high functionality and low loss enabling high torque
and motor speed
• Recovery loss (Err) reduced by 95% compared to the conventional product*
• Package compatible with the conventional product* making replacement possible
* Conventional product: Mitsubishi Electric S1 Series PM200SC1D060
Internal circuit diagram
: SiC-SBD
FWD_SW
FWD_DC
Power loss comparison
IGBT_SW
IGBT_DC
P
Approx.
V
Power loss [W]
U
20%
W
reduction
Si-IPM
Hybrid SiC-IPM
Condition:Vcc=300V, Io=85Arms, fc=15kHz, VD=15V,P.F=1, Modulation=1,
three-phase modulation, Tj=125˚C
N
1200V/75A Hybrid/Full SiC-IPM for Industrial Equipment
PMH75-120-Sxxx＊/PMF75-120-Sxxx＊ Sample available
＊Tentative No.
Built-in drive circuit and protection functions realize high functionality
Features
Main specifications
• Incorporates SiC-MOSFET with current sensor and
built-in drive circuit and protection functions to
deliver high functionality
• Significant reduction in power loss compared to the
conventional product*
• Package compatible with the conventional product*
Rating
Mounted
Functions
1200V/75A 6in1
• Built-in drive circuit
• Under-voltage protection
• Short-circuit protection
• Over temperature protection
(Monitoring IGBT chip surface)
* Conventional product: Mitsubishi Electric IPM L1 Series PM75CL1A120
Internal circuit diagram
Full SiC-IPM
V
W
Gate
Sense
N
3
Source
FWD_SW
FWD_DC
Power loss comparison
SiC-MOSFET
with current sense terminal
Drain
U
:SiC-SBD
Power loss [W]
P
:SiC-MOSFET
Approx.
Approx.
reduction
reduction
25%
Si-IPM
Hybrid SiC-IPM
Tr_SW
Tr_DC
70%
Full SiC-IPM
Condition:Vcc=600V, Io=31Arms (assuming a 15kW inverter), fc=15kHz, P.F=0.9,
Modulation=1 ,three-phase modulation, Tj=125˚C
1200V/400A・1200V/800A Full SiC Power Modules
for Industrial Equipment
FMF400BX-24A/FMF800DX-24A Sample available
Contributes to reducing size/weight of industrial-use inverters
with the mounting area reduced by approx. 60%
Features
• Power loss reduced approx. 70% compared to the conventional product*
• Low-inductance package adopted to deliver full SiC performance
• Contributes to realizing smaller/lighter inverter equipment by significantly reducing
the package size and realizing a mounting area approx. 60% smaller compared to
the conventional product*
＊Conventional product:Mitsubishi Electric CM400DY-24NF(1200V/400A 2in1) 2pcs
Product lineup
Applications
Industrial
equipment
Rated
voltage
Comparison with conventional product package
Reted
current
Circuit
configration
400A
4-in-1
800A
2-in-1
1200V
Package size
(D ×W)
Si Power module
1200V/400A(2-in-1) 2pcs
92.3 × 121.7mm
Full SiC Power module
1200V/400A(4-in-1) 1pcs
or
1200V/800A(2-in-1) 1pcs
Approx.
60%
Footprint
reduction
Internal circuit diagram
1200V/400A
Full SiC Power module
:SiC-MOSFET
:SiC-SBD
FWD_SW
FWD_DC
Tr_SW
Tr_DC
1200V/800A
Full SiC Power module
:SiC-MOSFET
:SiC-SBD
FWD_SW
FWD_DC
Tr_SW
Tr_DC
Power loss comparison
Approx.
70%
reduction
IGBT module(Si)
Full SiC module
Condition:Vcc=600V, Io=110Arms (assuming a 55kW inverter), fc=15kHz, P.F=0.8,
Modulation=1 ,three-phase modulation, Tj=125˚C
1200V/800A
Full SiC Power module
Power loss [W]
Power loss [W]
1200V/400A
Full SiC Power module
Approx.
70%
reduction
IGBT module(Si)
Full SiC module
Condition:Vcc=600V, Io=222Arms (assuming a 110kW inverter), fc=15kHz, P.F=0.8,
Modulation=1 ,three-phase modulation, Tj=125˚C
4
Hybrid SiC Power Modules for High-frequency
Switching Applications Sample available
For optimal operation of power electronics devices that conduct high-frequency switching
Contributes to realizing highly efficient machinery that is smaller and lighter by reducing
power loss and enabling higher frequencies
Features
• Power loss reduction of approx. 40% contributes to higher efficiency, smaller size
and weight reduction of total system
• Suppresses surge voltage by reducing internal inductance
• Package compatible with the conventional product*
* Conventional product: Mitsubishi Electric NFH Series IGBT Modules
Internal circuit diagram
FWD_SW
FWD_DC
Power loss comparison
E2
C1
E1
C2E1
Tr_SW
Tr_DC
Approx.
40%
Power loss [W]
E2
G2
:SiC-SBD
reduction
G1
CM600DU-24NFH
(Si-IGBT)
CMH600DU-24NFH
(Hybrid SiC)
Condition:Vcc=600V, Io=600Ap, fc=15kHz, P.F=0.8, Modulation=1,
three-phase modulation, Tj=125˚C
Recovery waveform (FWD)
Product lineup
Applications
CM600DU-24NFH
(Si-IGBT)
IE:100A/div
CMH600DU-24NFH
(Hybrid SiC)
Industrial
equipment
Model
Rated
voltage
Rated
Circuit
External size
current configuration
(DxW)
CMH100DY-24NFH
100A
48 × 94mm
CMH150DY-24NFH
150A
48 × 94mm
CMH200DU-24NFH
62 × 108mm
200A
1200V
2-in-1
CMH300DU-24NFH
300A
62 × 108mm
CMH400DU-24NFH
400A
80 × 110mm
CMH600DU-24NFH
600A
80 × 110mm
200ns/div
5
600V/50A Large Hybrid SiC DIPIPMTM for PV Application
PSH50YA2A6 New
More efficient power modules for PV power conditioner applications
Features
・Hybrid structure achieved with SiC Schottky barrier diode
and 7th-generation. IGBT chips
・Power loss reduction of approx. 25% compared to the conventional product*
・Helps downsize PV inverter system thanks to modified short-circuit protection scheme
*Conventional product:Mitsubishi Electric Large DIPIPMTM PS61A99
Internal circuit diagram
:SiC-SBD
Power loss comparison
FWD_SW
FWD_DC
IGBT_SW
IGBT_DC
P
VWP1
LVIC
WP
LVIC
VP
VWPC
VVPC
V
W
VN1
VN
Approx.
Power Loss [W]
VVP1
25%
reduction
LVIC
WN
FO
VNC
CFO
CIN
N
W
N
V
VSC
Si DIPIPMTM
Hybrid SiC DIPIPMTM
Condition：Vcc=300V, Io=25Arms, PF=0.8, fc=10kHz, Tj=125℃
1700V/1200A Hybrid SiC Power Modules for Traction Inverters
CMH1200DC-34S New
High-power/low-loss/highly reliable modules appropriate for use in traction inverters
Features
Main specifications
• Power loss reduced approximately 30%
compared to the conventional product*
• Highly reliable design appropriate for
use in traction
• Package compatible with the
conventional product*
Module
Si-IGBT
@150˚C
SiC-SBD
@150˚C
150˚C
Max.operating temperature
4000Vrms
Isolation voltage
2.3V
Collector-emitter saturation voltage
turn-on
140mJ
Switching loss
850V/1200V
turn-off
390mJ
2.3V
Emitter-collector voltage
9.0µC
Capacitive charge
* Conventional product: Mitsubishi Electric Power Module
CM1200DC-34N
Internal circuit diagram
:SiC-SBD
4
Power loss comparison
FWD_SW
FWD_DC
IGBT_SW
IGBT_DC
2
(C2)
C2
E1
G1
G2
Si-IGBT
Si-IGBT
C1
Approx.
Power loss [W]
(E1)
30%
reduction
E2
3
(C1)
1
(E2)
CM1200DC-34N
CMH1200DC-34S
Condition:Vcc=850V, Io=600Arms, fc=1kHz, P.F=1, Modulation=1,
three-phase modulation, Tj=125˚C
6
Hybrid SiC DIPPFCTM/Full SiC DIPPFCTM for Home Appliances
PSH20L91A6-A New / PSF20L91A6-A New
Utilizing SiC enables high-frequency switching and contributes to
reducing the size of peripheral components
Features
• Incorporating SiC chip in the Super mini package widely used in home appliances
• The SiC chip allows high-frequency switching (up to 40kHz) and contributes to
downsizing the reactor, heat sink and other peripheral components
• Adopts the same package as the Super mini DIPIPMTM to eliminate the need for a
spacer between the inverter and heat sink and to facilitate its implementation
Power loss comparison
Internal block diagram (Full SiC DIPPFCTM)
:SiC-MOSFET
L1
L2
LVIC
CFo
GND
N2
Cin1
Cin2
N1
45%
reduction
Si DIPPFC™
Full SiC DIPPFC™
Condition:Vin=240Vrms, Vout=370V, Ic=20Arms, fc=40kHz, Tj=125˚C
Interleaved PFC circuit configuration (for Hybrid SiC DIPPFCTM)
:SiC-SBD
Hybrid SiC DIPPFC™
P2
L1
Vin1
MCU
High-frequency drive enables
reactor sized to be reduced
P1
VD
Vin2
L2
LV
IC
Fo
CFo
Si-IGBT
N2
AC input
N1
GND
+
To inverter part
PFC circuit and drive IC integrated making
it possible to reduce size including
smaller mounting area and simplified layout pattern
Merits of combined use of SiC DIPIPMTM and DIPPFCTM
Interleave PFC circuit in the case of discrete element configuration
In the case of using
SiC DIPIPMTM and DIPPFCTM configuration
High adjustment
spacer
Di
Tr
PFC control and protection circuit parts
Di
Tr
No need to use spacer for adjusting
Merit 1 height when attaching heat sink
7
Tr_DC
Approx.
Power loss [W]
Vin1
Fo
Tr_SWoff
Tr_SWon
P1
P2
VD
Vin2
FWD_SW
FWD_DC
:SiC-SBD
DIPIPMTM
SiC DIPPFCTM
DIPIPMTM
Integration of PFC circuit and drive IC made it possible to
Merit 2 reduce the mounting area and make component more
compact such as simplifying the wiring pattern
SiC Power Module Lineup
Unit : mm
1200V/75A Hybrid/Full SiC-IPM
for Industrial Use
PMH75-120-Sxxx＊
PMF75-120-Sxxx＊
32.75
23
23
7
(3)
23
12 (SCREWING DEPTH)
7
94
17
21.14
18.49
23
Hybrid SiC Power Modules for
High-frequency Switching Applications
CMH 200DU-24NFH
CMH 300DU-24NFH
7.5
17
12
6.72
22
39
3.5
6
6-M6 NUTS
110
93±0.25
(8.5)
7.5
14
23.72
Hybrid SiC Power Modules for
High-frequency Switching Applications
CMH 400DU-24NFH
CMH 600DU-24NFH
Tc measured point
108
93±0.25
14
14
22
39
(8.5)
4 56
30
31
32
4
12.7
40
34
2
33
3
1
Type name
18
SCREWING
DEPTH
MIN. 7.7
11.85±0.2
55.2±0.3
6-φ7 MOUNTING
HOLES
14x2.54(-35.56)
0.45
0.45
SCREWING
DEPTH
MIN. 16.5
5±0.2
16
0.45
0.2
0.45
0.25
8
8.6
62±0.25
80
8-0.6
+1
2
18±0.2
44±0.2
57±0.2
4-C1.2
25
14±0.5
2.7
16±0.2
40±0.2
53±0.2
17.5 6 15 6
Lot No.
3MIN
38 -0
0.8
1
2.54±0.2
6-M4 NUTS
(9)
18.25
0.28
70 ±0.3
79 ±0.5
1
18
10±0.3 10±0.3 10±0.3 10±0.3 10±0.3 10±0.3
1.8
38±0.5
20x1.778(-35.56)
35±0.3
14-0.5
0.28
1.778±0.2
(1)
4-M8 NUTS
57±0.25
2-ø4.5±0.2
TAB#110. t=0.5
18
LABEL
29
Type name , Lot No.
31±0.5
130±0.5
7
Hybrid/Full SiC DIPPFCTM
for Home Appliances
PSH20L91A6-A / PSF20L91A6-A
20±0.1
23
18 19
12 13
14 15 1617
20
7 8 9 1011
41
42
18
21.2 8.5
4
B
57±0.25
1
21.5
(2.2)
A
2.54±0.3
2.8
7
1.
6
A
(2.54×10)
A
18
2R
A
B
LABEL
124±0.25
140±0.5
A
A
A
2.8
14
25
TAB#110,
t=0.5
1700V/1200A
Hybrid SiC Power Modules
for Tranction Inverters
CMH1200DC-34S
A = 2.54±0.3
B = 5.08±0.3
B
B
7 18
14
25
+1.0
+1
Large Hybrid SiC DIPIPMTM
for PV Application
PSH50YA2A6
B
7 18
7.5
18
14
3-M6 NUTS
8.5
TAB#110,
t=0.5
16
LABEL
B
4-φ6.5 MOUTING
HOLES
22
7
29 –0.5
16
2.5
4
21.2 7.5
29 –0.5
+1.0
7
21.5
29 –0.5
2-φ6.5MOUNTING HOLES
16
25
24±0.5
25
3-M6 NUTS
4-φ6.5 MOUNTING HOLES
HEAT SINK SIDE
5.5±0.5
3-M5 NUTS
12
12
12
80±0.25
30±0.2
12
9.25 (10)
(22.2)
17.5 6 15 6
48±0.25
62
7
4
25.7
18
8.85 8.25
18
13
48
4
23
3.81
3.81
3.81
19- 0.5
(9)
17
3.81
3.81
12
＊Tentative No.
Hybrid SiC Power Modules for
High-frequency Switching Applications
CMH100DY-24NFH
CMH150DY-24NFH
41.35
44
13.64
6.5
LABEL
42.7
31.2
30
28
3
10.75
7.75
13.64
6-M5
NUTS
SCREWING
DEPTH 7.5
15- 0.64
4-φ5.5
MOUNTING
HOLES
(21.14)
19
19
6.5
19
13
19.05
121.7
110±0.5
94.5
39
22
57.5
50±0.5
19
9
57.15
92.3
62
19
5-M4 NUT
5
18.8
3.75
10
15
2
11.6 1.1
2.5
7
1
32
2-R7
13.5
9
4.06
55
2-φ 5.5
MOUNTING
HOLES
15
2-φ 5.5
MOUNTING
HOLES
16 15.25
3-2 6-2
13
10
25
5.57
106
16
3-2
12
8.5
1.65
50
39
7
67.4
17.5
5-2.54
10.16
14.5 17.5
4
10.16
3.25
19.75
16
19.75
3-2
16.5
2-2.54
1
10.16
2-2.54
2-2.54
23.79
120
7
(20.5)
13
11
106 ±0.3
11.75
120
7
1200V/400A，1200V/800A
Full SiC Power Modules
for Industrial Use
FMF400BX-24A
FMF800DX-24A
31
600V/200A Hybrid SiC-IPM
for Industrial Use
PMH200CS1D060
Terminology
SiC
Silicon Carbide
FWD-SW
Diode switching loss
DIPIPM
Dual-In-Line Package Intelligent Power Module
Tr-SW
Transistor switching loss
IPM
DIPPFC
SBD
MOSFET
IGBT
Tr
Intelligent Power Module
Dual-In-Line Package Power Factor Correction
Schottky Barrier Diode
Metal Oxide Semiconductor Field Effect Transistor
Insulated Gate Bipolar Transistor
Transistor
FWD-DC
Tr-DC
IGBT-SW
IGBT-DC
PV
CSTBT
Diode DC loss
Transistor DC loss
IGBT switching loss
IGBT DC loss
Photovoltaics
Mitsubishi Electric’s unique IGBT that makes
use of the carrier cumulative effect
8
Development of Mitsubishi Electric SiC Power Devices
and Power Electronics Equipment Incorporating Them
Mitsubishi Electric began developing SiC as a new material in the early 1990s. Pursuing special characteristics,
we succeeded in developing various elemental technologies.
In 2010, we commercialized the first air conditioner in the world equipped with a SiC power device.
Furthermore, substantial energy-saving effects have been achieved for traction and FA machinery.
We will continue to provide competitive SiC power modules with advanced development and achievements from now on.
2010
January 2010
Developed large-capacity
power module equipped
with SiC diode
Early
1990s
2011
January 2011
Verified highest power
conversion efficiency＊1 for solar
power generation system
power conditioner
(domestic industry)
October 2011
Commercialized SiC inverter
for use in railcars
Developed new material,
silicon-carbide (SiC) power
semiconductor, maintaining
a lead over other companies
2000s
October 2010
Launched "Kirigamine"
inverter air conditioner
Various elemental technologies
developed
2006
January 2006
Successfully developed
SiC inverter for driving motor
rated at 3.7kW
2009
February 2009
Verified 11kW SiC inverter,
world's highest value＊1 with
approx. 70% reduction
in power loss
November 2009
Verified 20kW SiC inverter,
world's highest value＊1 with
approx. 90% reduction
in power loss
9
Development of these modules and applications has been partially supported by Japan's Ministry of Economy, Trade and Industry (METI)
and New Energy and Industrial Technology Development Organization (NEDO).
2012
March 2012
Developed motor system
with built-in SiC inverter＊2
September 2012
Verified built-in main circuit
system for railcars
2014
February 2014
Developed EV motor
drive system with
built-in SiC inverter＊2
May 2014
Began shipping samples
of hybrid SiC power modules
for high-frequency
switching applications
Contributing to the realization
of a low-carbon society and
more affluent lifestyles
November 2014
Launch Large Hybrid SiC DIPIPMTM
for PV Application
2015
January 2015
Launched power conditioner
for PV equipped
with full SiC-IPM
2013
February 2013
Developed SiC for
application in elevator
control systems＊2
July 2012
Began shipping samples
of hybrid SiC
power modules
March 2013
Delivered auxiliary power
supply systems for railcars
February 2013
Developed technologies
to increase capacities of
SiC power modules＊2
May 2013
Launched SiC power
modules
December 2013
Launched railcar traction inverter
with full SiC power module
December 2012
Launched CNC drive unit
equipped with SiC power module
＊1 Researched on press releases by Mitsubishi Electric. ＊2 Currently under development, as of May 2015.
* The year and month listed are based on press releases or information released during the product launch month in Japan.
10
SiC POWER MODULES
Please visit our website for further details.
www.MitsubishiElectric.com
Revised publication, effective May 2015.
Superseding publication of HG-802B Sep. 2014.
Specifications subject to change without notice.
HG-802B
2015