Silicon-On-Insulator (SOI) technology has been intensively investigated due to its advantages such as higher mobility, transconductance and integration density. When the temperature is reduced, some of these characteristics are even improved, e.g. the mobility and the subthreshold slope . However, series resistance (Rseries) is an intrinsic problem in SOI devices due to the small silicon film thickness, and this problem becomes more critical when the temperature is reduced . The influence of the back gate voltage on the series resistance becomes appreciable mainly at low temperatures and with thin buried oxides. Some extraction methods have used the back interface conditions (depletion and/or accumulation) to extract electrical parameters. The influence of the back gate voltage on the series resistance is normally negligible. The goal of this work is to verify the influences of the back gate voltage and buried oxide thickness on the series resistance extraction at low temperatures. The LDD (Lightly Doped Drain) fully depleted SOI nMOSFET's were simulated by MEDICI  with drawn channel width (Wm) of 20 µm and different drawn channel lengths (Lm) of 0.6, 0.8, 1.0, 1.2, 1.6, and 2.0 µm. A gate oxide thickness (toxf) of 15 nm, buried oxide thickness (toxb) of 80 and 400 nm, silicon film thickness (tsi) of 80 nm and a substrate doping Na = 1x1017 cm-3 were used in the simulations. The front channel characteristics (Ids x Vgs) were simulated for different back gate voltages (Vgb) and different temperatures. The series resistance Rseries was obtained from Ids x Vgs curves using the technique proposed by G. J. Hu  for different overdrive voltage (Vgs - Vth) to reduce the influence of the device geometry. Figure 1 shows the results of the series resistance change ∆R, defined in Eq. (1), as a function of the back gate bias Vgb for toxb equal to 80 and 400 nm, for (Vgs - Vth) = 2.45 V, at 77 K. ( ) ( ( ) ) R V ≠ 0 − R series V gb = 0 series gb ∆R = x100 R V = 0 series gb (1) As can be observed, ∆R is significantly influenced by the back gate voltage mainly with toxb = 80 nm. Figure 1 also shows that for Vgb < - 15 V, ∆R becomes almost constant for toxb = 80 nm. When the back gate bias becomes more negative, the depletion region of the back interface inside the 140 LDD SOI nMOSFET - T = 77 K 120 100 ∆R [%] Aparecido S. Nicolett [email protected] Ph.D. Research (Adivisor: Prof. Dr. João A. Martino) LDD region increases and the series resistance also increases due to the reduction of the film neutral volume available for conduction . For Vgb = - 15 V, the back interface below the LDD region is inverted and the depletion region reaches its maximum value. This can explain why the series resistance changes hardly for Vgb < - 15V. toxb = 400 nm toxb = 80 nm 80 60 40 20 0 -20 -35 -30 -25 -20 -15 -10 -5 0 5 Vgb [V] Figure 1: Variation of the series resistance as a function of the back gate bias at 77 K. Figure 2 shows the influence of the temperature on ∆R. It can be seen that the influence of the back gate voltage is higher when the temperature is reduced, once the maximum depletion is larger in this case due to the reduction of the effective LDD concentration. 120 LDD SOI nMOSFET Vgb = Vgb = Vgb = Vgb = Vgb = Vgb = Vgb = 100 80 ∆R [%] Back Gate Voltage and Buried-oxide Thickness Influences on the Series Resistance of Fully Depleted SOI MOSFETs at 77 K 60 - 0V 5V 10 V 15 V 20 V 25 V 30 V 40 20 0 150 200 250 300 T [K] Figure 2: Influence of the temperature on ∆R for different back gate voltages with toxb = 80 nm. Conclusion: When the back gate bias is decreased the series resistance increases until the back interface below the LDD region reaches inversion. In this condition, the depletion region depth is maximum and the series resistance becomes practically constant. This effect becomes more pronounced when thin buried oxides and low temperature are used. References:  F. J. Garcia Sanches, A. Ortiz-Conde, M. Garcia Nunes, R. L. Anderson, Solid State Electronics, vol. 37, No. 12, pp. 1943, 1994.  F. Balestra, Proceedings of the First European Workshop on Low Temperature Electronics, p. C6-13, July 1994.  TMA MEDICI, version 4.0, 1997.  G. J. Hu, C. Chang and Chia, IEEE Trans. on Electron Devices, ED-34, p. 2469, 1987.  G. Reichert, T. Ouisse, J. L. Pelloie, S. Cristoveanu, Solid-State Electronics, Vol. 39, No. 9, p. 1347, 1996.