New Power Device Analyzer / Curve
C
Tracer Solves
S
High Power Device Testing Challenges
Page 1
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Agenda for Today
• Challenges Facing Power Device Measurement
• Overview of the B1505A and EasyEXPERT Software
• Curve Tracer Mode: Features & Benefits
• Packaged Part Test & Wafer Probing Solutions
• Solar Cell Test with the B1505A
• Summary & Conclusions
Page 2
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Challenges
g Facing
g Power Device
Measurement
Page 3
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Key Power Device Measurement Challenges – 1
Insufficient Measurement Capability
No single measurement solution available that can
perform both high
high-current
current and high
high-voltage
voltage IV and CV
measurements.
Novel Device (SiC,
(SiC GaN,
GaN etc.)
etc ) Characterization
The high breakdown voltages and fast switching speeds
of these devices require wide measurement dynamic
ranges for proper characterization.
characterization
Curve Tracer Obsolescence and Support
Support and repair of obsolete curve tracers is
becoming increasingly difficult. Also, getting curve
tracer data into PC compatible formats is inconvenient.
Page 4
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Key Power Device Measurement Challenges – 2
Safe & Efficient Packaged Device Testing
The lack of a standardized test fixture for power devices
has forced many users to jury rig their own solution
solution,
which often compromises both safety and performance.
Power Device Development Costs
The ability to probe power devices on-wafer saves both
time and money by eliminating the need to package the
devices beforehand
beforehand. However
However, until now on-wafer
on wafer test
of power devices has not been easy to do.
Page 5
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The New Agilent B1505A Meets
these Measurement Challenges
• Voltage force/measure capability up to 3000 V
• Accurate sub
sub-picoamp
picoamp level current measurement at high
voltage bias
• Current force/measure capability up to 40 A
• 50 μs current pulse width at high current
• Switch between high current and high voltage measurement
without needing to recable
• Capacitance
p
measurement at up
p to 3000 V of DC bias
• True curve tracer functionality with knob sweep capability
• MS Windows based EasyEXPERT software facilitates data
management and simplifies data analysis
• Standard test fixture with interlock for safe packaged power
device testing
• Supported and secure on-wafer high power testing
Page 6
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Overview of the B1505A &
EasyEXPERT Software
Page 7
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The EasyEXPERT Parametric Test Environment
True
Tr
e knob ssweep
eep ccurve
r e
tracer functionality
IV & CV all in one box
Easy data analysis &
parameter extraction
High power wafer
prober
b control
t l
Offline test
development
p
and
data analysis
Page 8
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Agilent EasyEXPERT 4.0 Software
Microsoft Windows-based
Windows based
EasyEXPERT software
Over 50 high power Innovative task-based
approach to parametric test
application tests
Measure, append and
repeat functions
Built-in semi-auto
wafer prober drivers
Supported Functions:
1. Sweep
2. Multi-channel sweep
3. List sweep
4. Time sampling
5 1 kHz to 5 MHz CV
5.
6. Quasi-static CV
7. Direct control
Standby mode for
circuit debug
“My Favorite Setup”
feature allows users to
customize application
tests
“Tracer
Tracer Mode
Mode” supports
knob-sweep curve tracer
functionality
Intuitive GUI-based
application test
setup windows
“Quick Test” utility
supports test sequencing
without programming
Page 9
Data and setup information can be
automatically saved or selectively
saved after each measurement
Can automatically export
measurement data to
external drives
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
EasyEXPERT and Desktop EasyEXPERT Software
form a Complete Measurement Environment
Desktop EasyEXPERT
Online Mode
Desktop EasyEXPERT
Offline Mode
Desktop
EasyEXPERT
y
is free!
M
Measurement
t data
d t & test
t t setups
t
• Data analysis
• Full functionality & control
from a separate PC
• Test development
EasyEXPERT
on the B1505A
Page 10
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The B1505A Supports a Variety of Source/Monitor
Units (SMUs) for High Power Test
High Voltage SMU
(HVSMU)
High current SMU
(HCSMU)
Multi-frequency
capacitance measurement
unit (MFCMU)
High power SMU
(HPSMU)
T slot
Ten
l t modular
d l mainframe
i f
Page 11
4.2 Amp ground
unit (GNDU)
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The High-Current SMU (HCSMU) Can Output a 20 A
Current Pulse with a 50 Microsecond Width
20 A
The HCSMU’s pulsing
p
g
capability minimizes
device heating effects
to insure proper device
characterization
characterization.
50 μs
200 nV voltage measurement resolution!
Page 12
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
You Can Combine Two HCSMUs in Parallel to
Supply up to 40 A
A 40 A current pulse applied to
a 100 mΩ resistor using two
HCSMU modules in parallel
V drop at 100 mΩ Resistor
= (20 + 20) x 0.1
= 4.0 (V)
Power at 100 mΩ Resistor
= 40 x 4.0
= 160 (W)
Page 13
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Bipolar Transistor Emitter Resistance Measurement
Using the HCSMU
The B1505A can also
automatically draw a
regression line and calculate
the emitter resistance.
resistance
The HCSMU can function as a
precision voltmeter to measure
the emitter resistance of a
bipolar transistor.
Page 14
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The High Voltage SMU (HVSMU) Can Sweep from
Microvolts to 3000 Volts in Milliseconds
A breakdown voltage of more than
1800 V accuratelyy characterized
on a Schottky diode fabricated on
a diamond substrate
3000 V
~7
7.8
8 ms
10 fA current measurement
resolution!
Page 15
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
High DC Bias Capacitance Measurements
Output capacitance (Coss)
measured at 1500 V
Page 16
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Curve Tracer Mode: Features & Benefits
Page 17
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Using the B1505A Curve Tracer Function
1. Click or press
1
the repeat button.
2. Select the
parameter to be
controlled with the
knob sweep.
3. Move the knob
and observe the
curve as it changes.
Note: The default colors have been changed for easier viewing on these slides.
Page 18
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The Curve Tracer Mode in Action
Functionality exactly the
same as a traditional
analog curve tracer!
Page 19
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Pre-Defined Curve Tracer Setups are Included
Clicking on the
“utility” icon in the
setup window opens
up a menu of predefined curve tracer
setups for the most
common tests
tests.
Page 20
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Curve Tracer Issue #1 –
Difficult to Manage Trace Data
¾ It is VERY difficult to export curve tracer data into PC
compatible formats.
¾ Many curve tracers have no or limited trace overlay
capabilities.
Page 21
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Trace Management Feature - 1
Clicking on the
camera icon
saves trace data
into memory.
Page 22
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Trace Management Feature - 2
Clicking on the
adjacent
j
icon
opens up the
trace manager
window.
window
Page 23
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Using the Trace Management Feature
Pulsed
Measurement
Non-Pulsed
Measurement
Using the trace
management feature,
it is easy to show the
effects of device selfheating by comparing
the results of pulsed
and non-pulsed
measurements.
measurements
Page 24
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Trace Manager Feature Detail
Show/Hide
Selected Trace
Invert Selected
Trace
Delete Selected
Trace
Open (Import)
a Trace
Save Selected
Trace Data
Simply Click on a
Trace to Select It
Page 25
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
You Can Easily Save Data into XML (Spreadsheet)
or CSV Formats
Page 26
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Curve Tracer Issue #2 –
Difficult to Define “No
No Go
Go” Regions
¾ Many times it is useful to set up “stop” limits to prevent
your power device from being damaged.
¾ Conventional curve tracers do not have this type of
capability.
Page 27
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Forbidden Region (Stoplight) Feature - 1
Clicking on the stoplight icon
allows you to set up a “forbidden”
forbidden
region using the mouse. Note
that this region can be both
voltage and current sensitive.
Page 28
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Forbidden Region (Stoplight) Feature - 2
As soon as the curve enters
the forbidden region, the
measurement stops.
Page 29
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Curve Tracer Issue #3 –
Easy to Destroy Devices & Lose Data
¾ Especially with power devices, it is easy to inadvertently
apply too much voltage/current and destroy the DUT.
¾ When using conventional curve tracers, once the device
is destroyed there is no means to recover the data.
Page 30
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Auto Record Feature Detail
Toggle Auto Record
Feature On/Off
Open a Trace
Record
Save a Trace
Record
Replay Controls
Record Settings
Page 31
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Auto Record Feature Example - 1
Notice that the
instrument is “off”
(i.e. not making an
active measurement)
Page 32
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Auto Record Feature Example - 2
Page 33
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Auto Record Feature Example - 3
The data “snapshot”
can be saved anywhere
as you move the
th slider
lid
bar along.
Page 34
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The B1505A is More Than Just a Digital Curve Tracer
+
=
The B1505A improves upon curve tracer functionality by:
• Supporting
pp
g the easy
y export
p of numerical and g
graphical
p
data into PCbased formats
• Making it easy to overlay and compare trace data
• Providing a graphical means to limit current/voltage and prevent device
damage
• Automatically recording trace data so that information is not lost even if
the DUT is damaged or destroyed
Page 35
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Packaged
g Part Test and
Wafer Probing Solutions
Page 36
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The N1259A Test Fixture Supports Convenient and
Safe Testing of Packaged Devices
Universal Socket
Module
3-Pin In-line
Socket Module
Blank Teflon
Board
Page 37
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
You Can Create Your Own Customer Socket
Modules with the Universal Socket Module
For more information please
refer to the product note
B1505A-1, “Creating Custom
Socket Modules for Packaged
Power Devices.”
Page 38
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The Module Selector Unit Facilitates Device Test
Module Selector
Unit
D
G
Page 39
HVSM
MU
HCSM
MU
HPSM
MU
GND
DU
HP
PSMU
S
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The High Voltage Bias-T Supports CV
Measurements with up to 3000 V of DC Bias
Page 40
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The N1259A Test Fixture Shown with the Module
Selector and High Voltage Bias-T
Bias T Options
N1259A-020
p
HV bias-T option
Page 41
N1259A-300
Module selector option
p
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The B1505A Supports All Popular High-Power
Analytical Wafer Probers
Quick Test
Quick Test allows you to perform
Q
f
test sequencing
without any programming. You can also use Quick Test
with the built-in semiautomatic wafer prober drivers to
automate testing across an entire wafer. The test data
can be
b saved
d to any available
il bl storage d
device.
i
Page 42
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Setting Up to Auto Probe Across a Wafer
Page 43
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
High Voltage Wafer Probing Connection Example -1
Page 44
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
High Current Wafer Probing Connection Example - 2
Page 45
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Module Selector Wafer Probing Example
Page 46
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The N1260A High Voltage Bias-T
(Wafer Prober Version)
3 SHV Outputs
164 mm
53 mm
AC Guard
Low
High
125 mm
High-voltage
triaxial connector 4 BNC C-meter
connections
ti
Page 47
Note:
N
t Th
The adapter
d t fface h
has screw h
holes
l
so that it can be mounted on a plate.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Cgd Measurement Example (Lateral Device)
Page 48
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Gate-to-Drain Capacitance (Cgd) Measured at 500 V
Page 49
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Solar Cell Test with the B1505A
Page 50
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Basic Solar Cell Parameters
IV measurement
Symbol
Capacitance measurement
Parameter Name
Unit
Symbol
Parameter Name
Unit
A
Cp
Parallel capacitance
A/cm2
Nc
Carrier density
cm-33
Ndl
Drive-level density
cm-3
Isc
Short circuit current
Jsc
Short circuit current density
Voc
Open circuit voltage
V
Pmax
Maximum power point
W
Imax
Current at maximum power point
A
Vmax
Voltage at maximum power point
V
Fill factor
---
Symbol
Conversion efficiencyy
%
τ
Minorityy carrier lifetime
Rsh
Shunt resistance
Ω
S
Surface recombination velocity
cm/s
Rs
series resistance
Ω
Ld
Minority carrier diffusion length
m
FF
η
Page 51
F
Time domain measurement
Parameter Name
Unit
s
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Solar Cell DC and AC Equivalent Circuits
Solar Cell
Solar Cell
Rs
rs
+
Rsh
Load
-
DC Equivalent Circuit
Page 52
+
Cp
rp
Load
-
AC Equivalent Circuit
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
EasyEXPERT Solar Cell Application Tests
A suite
i off E
EasyEXPERT
EXPERT
solar cell application
tests is available from
the B1505A web page.
Page 53
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Sample Application Test List
Application Test Name
Type of Measurement
Parameters & Plots
Solar Cell IV
IV measurement
Solar Cell Fwd
IV measurement
Isc, Jsc, Voc, Pmax, Imax, Vmax,
FF, η, Rsh, Rs
Solar Cell Rev
IV measurement
Rsh
Solar Cell Cp-V
C-Vdc measurement
Mott-Schottky Plot, Nc
Solar Cell Nc
Nc-W
W
C Vdc measurement
C-V
Nc
Solar Cell Cp-Freq Log
C-f measurement
y
Plot
Solar Cell Nyquist
C-f measurement
Nyquist
y
Plot
Solar Cell Cp-ACLevel
C-Vac measurement
Ndl
Solar Cell DLCP
C-Vac measurement
Ndl
Page 54
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Typical Solar Cell IV Forward Characteristics
Isc
ΔVsc
ΔIsc
Imax
ΔVoc
Rs = −
ΔIoc
C ent
Curre
Pmax
ΔVoc
ΔIoc
Voltage
Page 55
ΔVsc
Rsh = −
ΔIsc
Vmax
Voc
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Solar Cell Test Example (IV Fwd)
Note that EasyEXPERT
automatically extracts
all important device
parameters.
Page 56
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
C-AC Voltage Plot and DLCP Measurement
C-AC Voltage Plot
Drive-level Capacitance
Profile (DLCP)
Page 57
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Cp-f and Nyquist Plots
Cp-Frequency Plot
Nyquist Plot
Cole-Cole Plot
Complex Impedance Plot
Page 58
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Summary
y & Reference Information
Page 59
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
The Agilent B1505A Power Device Analyzer / Curve
Tracer is the only Single Box Solution That Can…
• Measure and source current and voltage
at up to 3000 V and 40 A
• Measure capacitance at up to 3000 V of
DC bias
• Provide true curve tracer functionality
with easy data export into PC based work
environments
• Safely support both packaged part and
wafer prober testing environments
Page 60
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
How Do I Get More Information?
For more information please go to:
www agilent com/find/b1505a
www.agilent.com/find/b1505a
On this web page you can find:
• Data Sheet
• Manuals
• Drivers & Software
• Application Notes
• Trade-In Information
Page 61
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
How Can I Get a Live Demonstration?
Our staff at the North American technical contact
center (TCC) can give you a live demonstration of
the B1505A at your desk using Webex
Webex. Please
call one of the following numbers to arrange for a
B1505A demo.
United States:
800-829-4444
Canada:
877-894-4414
Latin America:
305-269-7500
If a live demonstration at your site is necessary,
th the
then
th TCC engineers
i
can putt you in
i ttouch
h with
ith
an application engineer local to your area.
Page 62
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Trade In Program
Trade-in Model
Trade-in Credit
Towards B1505A1,2
Tek 370A, 370B,
371A or 371B
$5,000
Tek 575, 576 or 577
$1,000
Agilent 4142B
$3,900
Program to be
extended into
2010!
1. These credits are valid for US only. Due to currency fluctuations the discount amount will vary for
other regions.
2. Trade-ins can only be made on a 1:1 basis (i.e. only one trade-in per B1505A purchased).
Page 63
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009
Questions?
Page 64
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
October 22, 2009