Gallium Arsenide (GaAs) EDWARD D. PALIK Naval Research Laboratory Washington, D.C. The optical constants of pure (semi-insulating) GaAs are derived from a number of papers including the far-infrared reststrahlen work of Johnson et al. [1], Kachare et al. [2], and Holm et at. [3]; the mid-IR work of Cochran et at. [4]; the near-IR work of Pikhtin and Yas'kov [5]; the calorimetry work of Christensen et al. [6]; the fundamental band gap work of Casey et al. [7]; the visible-UV ellipsometry work of Theeten et al. [8]; the UV reflection work of Philipp and Ehrenreich [9]; and the synchrotron transmission work of Cardona et al. [10]. A smooth plot of the nand k data, given in Fig. 2, is obtained from the data of Table II. The measurements of Johnson et al. [1] to determine nand k were 300-K transmission measurements of thin samples of resistivity 3.5 x 108 n cm. Slab thickness was known to ± 1%. The transmittance was measured to ± 5% with a Beckmann IR-ll spectrometer system. Surface preparation was described as optical polish. If this were a mechanical grit polish, then the surfaces were damaged, as discussed by Holm and Palik [11]. The effect of a damage layer thousands of angstroms thick can probably be neglected except at the reststrahlen peak itself. The n data listed were obtained from a graph of a calculated oscillator fit to the experimental points, the scatter of the points being ± 0.02 from the fit. The k data listed were read directly off a smooth-curve graph (no fit in this case). Similar less-detailed measurements for k have been made by Stolen [12], and his 294-K data (as read from a graph) are also listed for comparison. In the reststrahlen region reflectivity data have been fitted by an oscillator model of the form '2 (n - Ik) = Coo [ 1+ wl-wiJ 2 . W + Irw 2 WT - (1) used by Kachare et al. [2] and Holm et at. [3]. We averaged these parameters to obtain W L = 292.1 cm - \ W T = 268.7 cm - \ r = 2.4 cm -1, and Coo = 11.0. Surfaces were chemically polished to remove saw-cut and grinding damage. The reference was an aluminum mirror whose reflectivity is given by Bennett 429 HANDBOOK OF OPTICAL CONSTANTS OF SOLIDS ISBN 0-12·544420-6 430 Edward D. Palik et at. [13]. A comparison can be made in the longer-wavelength overlap region with the data of Johnson et al. [1] showing agreement to ~ 0.03 and better in n. The calculated values of k are almost a factor of 2 smaller than those measured by Johnson et al. [1] probably because on the low-frequency side of W T difference bands occur in the 80-200-pm region that would make the experimental values of k larger than the single-oscillator model, as is observed. However, k measurements ofIwasa et al. [14] on thin mechanically polished and epitaxial films are only ~ 10% smaller than those calculated in the 240-320-cm - 1 region (after a decimal point correction in Fig. 2. of I wasa et at. [14], so we chose the oscillator-model fit through this region. The oscillator model can be modified to include a frequency-dependent damping constant to account for some of the structure away from W T [15]. The static dielectric constant is found to be 13.00. The oscillator fit for n is extended up to 480 cm -1. However, several multiphonon bands occur above w L that have been measured directly by Cochran et at. [4] in the 347-807-cm -1 region. They measured transmission and reflection of thin slabs. Surface preparation was not described. Room temperature varies among the samples and is usually 297 or 300 K, except for these samples for which it was 292 K (a cold English laboratory or ice water in the dewar?). Dopant impurities such as Si, Li, and B give rise to local vibration modes that often fall in this spectral region [16]. Calorimetry measurements at CO 2 laser wavelengths [6] produced the small k values listed in the 1000-cm - 1 region for Czochrolski-grown, undoped, high-resistivity GaAs. No surface preparation was given, although surely a chemical polish was used. These numbers varied from sample to sample by a factor of 2 and with other measurements also [17]. Temperaturedependence studies suggest that this absorption is primarily intrinsic due to multiphonon absorption, although the variation from sample to sample suggests that residual impurities and surface effects may still be present. Pikhtin and Yas'kov [5] have measured the index of refraction in the near IR by using prism (minimum deviation) and interference-fringe techniques. The authors fitted theirs and Marple's data [18] to an oscillator formula of the form 2 A Ei - (hwf n = 1 + -; In E6 _ (hW)2 + Ei G1 _ (hW)2 G2 (hW)2 + E~ _ + E~ G3 _ (hW)2' (2) with the parameters Eo = 1.428 eY, E1 = 3.0 eY, E2 = 5.1 eY, E3 = 0.0333 eY, G1 = 39.194 ey2, G2 = 136.08 ey2, G3 = 0.00218 ey2, and A = 0.7/$0 = 0.5858. No damping was assumed. These results for n are listed from 0.1 to 1.4 eY and fit the experimental values to a few units in the third decimal place. This fit of Eq. (2) agrees with the reststrahlen oscillator fit of Eq. (1) to within 0.02 at 0.06 eY, but n is smaller primarily due to the fact that in Eq. (1) Soo = 11.0, while in Eq. (2) the first four terms give 10.9 to three figures from 5000 to 0 cm -1 when G3 = O. Usually, Soo is the high-frequency back- Gallium Arsenide (GaAs) 431 ground dielectric constant conveniently defined, where n2 in Eq. (2) is equal to its low-frequency value when G3 = O. The second term in Eq. (1) could replace (without GcxJ the last term in Eq. (2) for better description of n over the entire IR region along with k in the reststrahlen region. At the fundamental band gap, Casey et al. [7] have measured k for "pure" and doped thin films by transmission and Kramers-Kronig (KK) analysis of reflectivity. A I-m Jarrell Ash monochromator was used. The BursteinMoss effect, the change in interband absorption due to free carriers blocking interband transitions, does change k significantly, but this effect is not discussed here. Transmission samples were bulk samples thinned down to appropriate thicknesses. Surface preparation was not described. For nearnormal-incidence reflection, epitaxial films of GaAs on Al x Ga 1 - x As were used. The surfaces in this case would be undamaged. Uncertainty in absorption coefficient IX = 4nk/), was quoted to ± 5% for the transmission data for 3 IX ~ 10 cm - 1, primarily due to uncertainty in thickness measurements. Theeten et al. [8] have performed continuous wavelength ellipsometry measurements on chemically polished samples and their results are presented in the 1.5-6.0-eV region. We have overlapped the Casey et al. [7] and the Theeten et al. [8] data to demonstrate how these data can differ; at 1.5 eV the respective k's are 0.079 and 0.041, while are 1.6 eV they are 0.095 and 0.066. The transmission measurements are preferred if the film thickness is well determined and the surface quality is good. However, in the Casey [7]/ Theeten [3] overlap region the KK analysis was done by Casey et al. [7], so we prefer the more direct ellipsometric data. The ellipsometric data [8] are considered better than the KK analyzed reflection data of Philipp and Ehrenreich [9], since it is a more direct determination with few approximations and assumptions. At 6 eV n is 1.264 compared to 1.395, a difference of 0.1, while k is 2.472 compared to 2.048, a difference of 0.4. Above 6 eV we list the results of Philipp and Ehrenreich [9] as tabulated by Seraphin and Bennett [19]. These were near-normalincidence reflection measurements taken over the range 1-25 eV in a vacuum spectrometer system. Surfaces were chemically prepared. Transmission of synchrotron radiation was measured by Cardona et al. [10] in the 15-155-eV region to determine k only. Normal incidence and grazing incidence vacuum spectrometers were used. Films were flash evaporated on carbon foils or on microscope slides coated with KCl. The films could be floated on water and picked up on a copper screen. To obtain polycrystalline rather than amorphous samples, the substrate temperature was ~ 250°C. The k data listed were obtained from a graph readable to three figures. At 15 eV the KK-analyzed reflection data [9] give k = 0.41 while the transmission data give k = 0.28. Throughout the visible-UV region we are plagued with values of k from various laboratories that differ by as much as a factor of 2, although the usual differences are < 50%. Differences in n are usually less than 10%. Often, 432 Edward D. Palik absolute reflectivity is quoted to ± 3%, which could account for much of the differences between KK analysis, between two laboratories, or between KK analysis and eIIipsometric measurements. Except for the spectral regions in which the minimum deviation and interference-fringe techniques are used, we are hard-pressed to quote n to better than two significant figures. Things are even worse for k that is generally not determined better than ± 30%. Physicists, who did most of the measurements cited, were more interested in positions of peaks to identify vibrational frequencies and interband transitions, so relative values of k were typically good but absolute values varied as has been discussed. The temperature dependence of n in the near IR between 5 and 20 /lm has been found by Cardona [20] to be (l/n)(dn/dT) = (4.5 ± 0.2) x 10- 5 (C- 1 ). (3) Near strong absorption features like band edges and lattice vibrations, the effects are no doubt even stronger. Data are usually quoted at 297 or 300 K, which would mean a variation of a few units in the fourth decimal place. Therefore, we cannot use this decimal place with confidence, although it is sometimes quoted in Table II. lt is clear that all samples probably have a native oxide in the form of Ga 2 0 3 and AS 2 0 3 of '" 20-A thickness. This layer presents little or no problems in the IR region but must be considered in the region above the band gap of this mixed oxide ('" 5 eV). Theeten et at. [8] and Philipp and Ehrenreich [9] prepared surfaces by chemical etching and polishing, but the samples may have been exposed to air before being put into the inert gas system or the vacuum system. Native oxides typically grow to their final thickness in a few hours in air but grow rapidly at first exposure. Therefore, we must assume that an oxide was growing on the samples. This may cause uncertainties in the determination of k in the UV. Only work with cleaved or evaporated surfaces in UHV would be free of oxides for a few hours. REFERENCES 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. C. J. Johnson, G. H. Sherman, and R. Weil, Appl. Opt. 8, 1667 (1969). A. H. Kachare, W. G. Spitzer, F. K. Euler, and A. Kahan, J App/. Phys. 45, 2938 (1974). R. T. Holm, J. W. Gibson, and E. D. Palik, J. Appl. Phys. 48, 212 (1977). W. Cochran, S. J. Fray, F. A. Johnson, J. E. Quarrington, and N. Williams, J. Appl. Phys. Suppl. 32, 2102 (1961). A. N. Pikhtin and A. D. Yas'koy, Sov. Phys. Semicond. 12,622 (1978); A. N. Pikhtin and A. D. Yas'koy, Fiz. Tekh. Poluprovodn. 12, 1047 (1978). C. P. Christensen, R. Joiner, S. K. T. Nieh, and W. H. Steier, J. Appl. Phys. 45, 4957 (1974). H. C. Casey, D. D. Sell, and K. W. Wecht, J. App/. Phys. 46,250 (1975). J. B. Theeten, D. E. Aspnes, and R. P. H. Chang, J. Appl. Phys. 49, 6097 (1978); J. B. Theeten, D. E Aspnes, and R. P. H. Chang, priYate communication (1982). H. R. Philipp and H. Ehrenreich, Phys. Rev. 129, 1550 (1963). M. Cardona, W. Gudat, B. Sonntag, and P. Y. Yu, in Proc. Int. Con! Phys. Semicond., 10th Cambridge, 1970, p. 208. u.S. Atomic Energy Commission, Oak Ridge, Tennessee, 1970. 433 Gallium Arsenide (GaAs) 11. R. T. Holm and E. D. Palik, J. Vac. Sci. Techno/. 13,889 (19"16). 12. R. H. Stolen, Phys. Rev. B 11, 767 (1975); R. H. Stolen, Appl. Phys. Lett. 15, 74 (1969). 13. H. E. Bennett, M. Silver, and E. J. Ashley, J. Opt. Soc. Am. 53, 1089 (1963). 14. S. Iwasa, 1. Balslev, and E. Burstein, in lnt. Can! Phys. Semicond., Paris, 1964, p. 1077. Dunod, Paris, and Academic Press, New York, 1964. 15. A. S. Barker, Jr., Phys. Rev. 165,917 (1968). 16. W. G. Spitzer, in "Semiconductors and Semimetals" (R. K. Willardson and A. C. Beer, eds.), Vol. 3, p. 17. Academic Press, New York, 1967. 17. L. H. Skolnik, H. G. Lipson, and B. Bendow, Appl. Phys. Lett. 25, 442 (1974). 18. D. T. F. Marple, J. App/. Phys.35, 1241 (1964). 19. B. O. Seraphin and H. E. Bennett, in "Semiconductors and Semimetals" (R. K. Willardson and A. C. Beer, eds.), Vol. 3, p. 499. Academic Press, New York, 1967. 20. M. Cardona, Proc. Int. Conf. Semicond. Phys., Prague, 1960, p.388. Czech. Acad. Sci., Prague, and Academic Press, New York, 1961. ! iijiil 1111111 lol 100~ 10- 1 , ~ - / 2 IU -"" c- 10-3 ,, : I I I ,I I ,I II I~\I IG5UL~~~~~-L~~wL~~-U~~:-L-LUU~~~LL~~~ IU2 lUi 10° WAVELENGTH 10 1 102 103 l)J.m) Fig. 2. Log-log plot of n (--) and k (----) versus wavelength in micrometers for gallium arsenide. Data from various references sometimes do not join together in overlap regions. 434 Edward D. Palik TABLE II Values of nand k for Gallium Arsenide Obtained from Various References· eV 155 150 145 144 143 142 141 140 135 130 125 120 115 113 111 110 109 108 107 106 105 104 103 102 100 95 90 85 80 75 70 65 60 55 50 48 cm- 1 !lm 0.007999 0.008266 0.008551 0.008610 0.008670 0.008731 0.008793 0.008856 0.009184 0.009537 0.009919 0.01033 0.01078 0.01097 0.01117 0.01127 0.01137 0.01148 0.01159 0.01170 0.01181 0.01192 0.01204 0.01215 0.01240 0.01305 0.01378 0.01459 0.01550 0.01653 0.01771 0.01907 0.02066 0.02254 0.02480 0.02583 n k 0.0181 [10] 0.0193 0.0203 0.0204 0.0206 0.0204 0.0205 0.0206 0.0213 0.0224 0.0234 0.0245 0.0256 0.0263 0.0274 0.0278 0.0281 0.0283 0.0276 0.0288 0.0293 0.0284 0.0294 0.0289 0.0294 0.0308 0.0323 0.0338 0.0353 0.0368 0.0376 0.0387 0.0389 0.0407 0.0430 0.0448 • The data of Philipp and 'Ehrenreich [9] given in Seraphin and Bennett [19] are specified by the wavelength (in micrometers). However, the original data were given in electron volts, and it is obvious that most of the n, k values were determined for energies in whole numbers or tenths of a whole number. They were rounded off to three significant figures and then given the wavelength listed in Seraphin and Bennett [19]. Sometimes we list these wavelengths and then recalculate energy (in electron volts), thus producing roundoff error in election volts. The reference is given at the beginning of a tabulation of nand k, for example, and is understood to refer to all n's and k's below it until a new reference appears in brackets. The value of k is frequently given as an exponent of 10. This value of exponent is understood to refer to all k's below it in the table until a new exponent appears or the number changes from 10- 2 to 10- 1 when a decimal only is used. 435 Gal li um Arsen ide (GaAs) TABLE II (Continued ) Gallium Arsenide eV cm - ! n J.lm 46 44 43 42 41 40 38 35 30 29 28 27 26 25 24 23.5 23 0.02695 0.02818 0.02883 0.02952 0.03024 0.03 100 0.03263 0.03542 0.04133 0.04275 0.04428 0.04592 0.04769 0.04959 0.05 166 0.05276 0.0539 1 1.037 [9, 19] 22.5 22 0.05510 0.05636 1.043 21.5 21 0.05767 0.05904 1.058 20.5 20 0.06048 0.06199 1.025 19.5 19 0.06358 0.06526 0.981 18 0.06888 0.936 17 0.07293 0.889 16 0.07749 0.850 15 0.08266 0.836 14 13 12.0 10.8 10.0 9.0 8.0 7.0 0.08856 0.09537 0.1033 0.11 48 0.1240 0.1378 0.1550 0.1771 0.840 0.864 0.895 0.923 0.913 0.901 0.899 1.063 k 0.0476 0.0518 0.0546 0.0470 0.0426 0.0426 0.0452 0.0513 0.0648 0.0683 0.0740 0.0785 0.0872 0.0986 0.115 0.126 0.141 0.228 [9, 19] 0.1 46 [ 10] 0. 148 0.243 [ 9, 19] 0.147 [ 10] 0.162 0.245 [9, 19] 0.164 [10] 0.144 0.212 [9, 19] 0.147 [ 10] 0. 152 0.234 [9, 19] 0.178 [10] 0.267 [9, 19] 0.223 [1 0] 0.324 [9, 19] 0.261 [10] 0.411 [9, 19] 0.282 [ 10] 0.503 [9, 19] 0.602 0.709 0.791 0.881 0.974 1.1 36 1.435 1.838 (continued) 436 Edward D. Palik TABLE II (Continued) Gallium Arsenide eV cm- 1 lim 6.6 6.3 6.2 6.0 48,390 0.1879 0.1968 0.2000 0.2066 5.94 5.90 5.84 5.80 5.74 5.70 5.64 5.60 5.54 5.50 5.44 5.40 5.34 5.30 5.24 5.20 5.14 5.10 5.04 5.00 4.94 4.90 4.84 4.80 4.74 4.70 4.64 4.60 4.54 4.50 4.44 4.40 4.34 4.30 4.24 4.20 4.14 4.10 4.04 4.00 3.94 3.90 47,910 47,590 47,100 46,780 46,300 45,970 45,490 45,170 44,680 44,360 43,880 43,550 43,070 42,750 42,260 41,940 41,460 41,130 40,650 40,330 39,840 39,520 39,040 38,710 38,230 37,910 37,420 37,100 36,620 36,290 35,810 35,490 35,000 34,680 34,200 33,880 33,390 33,070 32,580 32,260 31,780 31,460 0.2087 0.2101 0.2123 0.2138 0.2160 0.2175 0.2198 0.2214 0.2238 0.2254 0.2279 0.2296 0.2322 0.2339 0.2366 0.2384 0.2412 0.2431 0.2460 0.2480 0.2510 0.2530 0.2562 0.2583 0.2616 0.2638 0.2672 0.2695 0.2731 0.2755 0.2792 0.2818 0.2857 0.2883 0.2924 0.2952 0.2995 0.3024 0.3069 0.3100 0.3147 0.3179 n 1.247 1.441 1.424 1.264 [8] 1.395 [9, 19] 1.287 [8] 1.288 1.304 1.311 1.321 1.325 1.339 1.349 1.367 1.383 1.410 1.430 1.468 1.499 1.552 1.599 1.699 1.802 2.044 2.273 2.654 2.890 3.187 3.342 3.511 3.598 3.708 3.769 3.850 3.913 4.004 4.015 3.981 3.939 3.864 3.810 3.736 3.692 3.634 3.601 3,559 3.538 k 2.047 1.988 1.976 2.472 [8] 2.048 [9, 19] 2.523 [8] 2.556 2.592 2.625 2.673 2.710 2.772 2.815 2.885 2.936 3.019 3.079 3.181 3.255 3.384 3.484 3.660 3.795 3.992 4.084 4.106 4.047 3.898 3.770 3.574 3.452 3.280 3.169 3.018 2.919 2.715 2.563 2.368 2.260 2.132 2.069 2.001 1.969 1.935 1.920 1.907 1.904 437 Gallium Arsenide (GaAs) TABLE II (Continued) Gallium Arsenide eV cm- 1 3.84 3.80 3.74 3.70 3.64 3.60 3.54 3.50 3.48 3.46 3.44 3.42 3.40 3.38 3.36 3.34 3.32 3.30 3.28 3.26 3.24 3.22 3.20 3.18 3.16 3.14 3.12 3.10 3.08 3.06 3.04 3.02 3.00 2.98 2.96 2.94 2.92 2.90 2.88 2.86 2.84 2.82 2.80 2.78 2.76 2.74 30,970 30,650 30,160 29,840 29,360 29,040 28,550 28,230 28,070 27,910 27,750 27,580 27,420 27,260 27,100 26,940 26,780 26,620 26,450 26,290 26,130 25,970 25,810 25,650 25,490 25,330 25,160 25,000 24,840 24,680 24,520 24,360 24,200 24,040 23,870 23,710 23,550 23,390 23,230 23,070 22,910 22,740 22,580 22,420 22,260 22,100 11m 0.3229 0.3263 0.3315 0.3351 0.3406 0.3444 0.3502 0.3542 0.3563 0.3583 0.3604 0.3625 0.3647 0.3668 0.3690 0.3712 0.3734 0.3757 0.3780 0.3803 0.3827 0.3850 0.3875 0.3899 0.3924 0.3949 0.3974 0.4000 0.4025 0.4052 0.4078 0.4105 0.4133 0.4161 0.4189 0.4217 0.4246 0.4275 0.4305 0.4335 0.4366 0.4397 0.4428 0.4460 0.4492 0.4525 n 3.512 3.501 3.488 3.485 3.489 3.495 3.513 3.531 3.541 3.553 3.566 3.580 3.596 3.614 3.635 3.657 3.681 3.709 3.740 3.776 3.818 3.871 3.938 4.023 4.126 4.229 4.313 4.373 4.413 4.439 4.462 4.483 4.509 4.550 4.626 4.755 4.917 5.052 5.107 5.102 5.065 5.015 4.959 4.902 4.845 4.793 k 1.905 1.909 1.920 1.931 1.950 1.965 1.992 2.013 2.024 2.036 2.049 2.062 2.076 2.091 2.107 2.123 2.142 2.162 2.183 2.207 2.232 2.260 2.288 2.307 2.304 2.270 2.212 2.146 2.082 2.029 1.988 1.961 1.948 1.952 1.967 1.960 1.885 1.721 1.529 1.353 1.206 1.088 0.991 0.912 0.846 0.789 (continued) 438 Edward D. Palik TABLE II (Continued) Gallium Arsenide eV cm- 1 2.72 2.70 2.68 2.66 2.64 2.62 2.60 2.58 2.56 2.54 2.52 2.50 2.48 2.46 2.44 2.42 2.40 2.38 2.36 2.34 2.32 2.30 2.28 2.26 2.24 2.22 2.20 2.18 2.16 2.14 2.12 2.10 2.08 2.06 2.04 2.02 2.00 1.98 1.96 1.94 1.92 1.90 1.88 1.86 1.84 1.82 1.80 21,940 21,780 21,660 21,450 21,290 21,130 20,970 20,810 20,650 20,490 20,330 20,160 20,000 19,840 19,680 19,520 19,360 19,200 19,030 18,870 18,710 18,550 18,390 18,230 18,070 17,910 17,740 17,580 17,420 17,260 17,100 16,940 16,780 16,610 16,450 16,290 16,130 15,970 15,810 15,650 15,490 15,320 15,160 15,000 14,840 14,680 14,520 pID 0.4558 0.4592 0.4626 0.4661 0.4696 0.4732 0.4769 0.4806 0.4843 0.4881 0.4920 0.4959 0.4999 0.5040 0.5081 0.5123 0.5166 0.5209 0.5254 0.5299 0.5344 0.5391 0.5438 0.5486 0.5535 0.5585 0.5636 0.5687 0.5740 0.5794 0.5848 0.5904 0.5961 0.6019 0.6078 0.6138 0.6199 0.6262 0.6326 0.6391 0.6458 0.6526 0.6595 0.6666 0.6738 0.6812 6.8888 n 4.741 4.694 4.649 4.605 4.567 4.525 4.492 4.456 4.423 4.392 4.362 4.333 4.305 4.279 4.254 4.229 4.205 4.183 4.162 4.141 4.120 4.100 4.082 4.063 4.045 4.029 4.013 3.998 3.983 3.968 3.954 3.940 3.927 3.914 3.902 3.890 3.878 3.867 3.856 3.846 3.836 3.826 3.817 3.809 3.799 3.792 3.785 k 0.739 0.696 0.659 0.626 0.595 0.569 0.539 0.517 0.497 0.476 0.458 0.441 0.426 0.411 0.398 0.385 0.371 0.359 0.347 0.337 0.327 0.320 0.308 0.301 0.294 0.285 0.276 0.266 0.257 0.251 0.245 0.240 0.232 0.228 0.223 0.213 0.211 0.203 0.196 0.187 0.183 0.179 0.173 0.173 0.168 0.158 0.151 439 Gallium Arsenide (GaAs) TABLE II (Continued) Gallium Arsenide eV 1.78 1.76 1.74 1.72 1.70 1.68 1.66 1.64 1.62 1.60 1.58 1.56 1.54 1.52 1.50 1.49 1.48 1.47 1.46 1.45 1.44 1.435 1.43 1.425 1.42 1.41 1.40 1.39 1.38 1.37 1.35 1.30 1.25 1.20 1.15 1.10 1.05 1.00 0.95 0.90 0.85 0.80 0.75 0.70 0.65 CID- 1 14,360 14,200 14,030 13,870 13,710 13,550 13,390 13,230 13,070 12,900 12,740 12,580 12,420 12,260 12,100 12,020 11,940 11,860 11,780 11,690 11,610 11,570 11,530 11,490 11,450 11,370 11,290 11,210 11,130 11,050 10,890 10,490 10,080 9,679 9,275 8,872 8,469 8,065 7,662 7,259 6,856 6,452 6,049 5,646 5,243 /lID 0.6965 0.7045 0.7126 0.7208 0.7293 0.7380 0.7469 0.7560 0.7653 0.7749 0.7847 0.7948 0.8051 0.8157 0.8266 0.8321 0.8377 0.8434 0.8492 0.8551 0.8610 0.8640 0.8670 0.8700 0.8731 0.8793 0.8856 0.8920 0.8984 0.9050 0.9184 0.9537 0.9919 1.033 1.078 1.127 1.181 1.240 1.305 1.378 1.459 1.550 1.653 1.771 1.907 k n 3.779 3.772 3.762 3.752 3.742 3.734 3.725 3.716 3.707 3.700 3.693 3.685 3.679 3.672 3.666 3.6140 [5] 0.152 0.134 0.127 0.118 0.112 0.105 0.101 0.097 0.093 0.091 0.089 0.087 0.085 0.083 0.080 7.89 x 7.28 6.86 6.64 6.28 6.12 5.68 5.57 5.72 5.54 2.71 x 5.95 x 1.69 x 5.68 x 2.50 1.33 x 10- 2 [7] 10- 2 10- 3 10- 3 10- 4 10- 4 3.5690 3.5388 3.5138 3.4920 3.4724 3.4546 3.4383 3.4232 3.4094 3.3965 3.3847 3.3737 3.3636 3.3543 3.3457 (continued) 440 Edward D. Palik TABLE II (Continued) Gallium Arsenide eV cm- 1 Jim 0.60 0.55 0.50 0.45 0.40 0.35 0.30 0.29 0.28 0.27 0.26 0.25 0.24 0.23 0.22 0.21 0.20 0.19 0.18 0.17 0.16 0.15 0.14 0.1347 0.13 0.1239 0.12 0.1169 0.11 0.100 0.098 0.096 0.095 0.094 0.092 0.090 0.088 0.086 0.084 0.082 0.080 0.Q78 0.076 0.074 0.073 0.072 0.071 4,839 4,436 4,033 3,629 3,226 2,823 2,420 2,339 2,258 2,178 2,097 2,016 1,936 1,855 1,774 1,694 1,613 1,532 1,452 1,371 1,290 1,210 1,129 1,087 1,048 1,042 967.9 943.4 887.2 806.5 790.4 774.3 766.2 758.2 742.0 725.9 709.8 693.6 677.5 661.4 645.2 629.1 613.0 596.8 588.8 580.7 572.6 2.066 2.254 2.480 2.755 3.100 3.542 4.133 4.275 4.428 4.592 4.768 4.959 5.166 5.391 5.636 5.904 6.199 6.526 6.888 7.293 7.749 8.266 8.856 9.2 9.537 9.6 10.33 10.6 11.27 12.40 12.65 12.91 13.05 13.19 13.48 13.78 14.09 14.42 14.76 15.12 15.50 15.90 16.31 16.75 16.98 17.22 17.46 k n 3.3378 3.3306 3.3240 3.3180 3.3125 3.3075 3.3027 3.3017 3.3008 3.2998 3.2988 3.2978 3.2968 3.2954 3.2946 3.2934 3.2921 3.2907 3.2891 3.2874 3.2854 3.2831 3.2803 4.4 x 10- 7 [6] 3.2769 6.1 3.2727 7.6 x 10- 7 3.2671 3.2597 3.2493 3.2336 4.93 1.61 3.49 3.63 2.72 1.61 1.64 2.24 2.40 2.11 2.16 2.83 4.55 7.66 9.46 1.00 1.50 2.05 x 10- 6 [4] x 10- 5 x 10- 5 x 10- 4 441 Gallium Arsenide (GaAs) TABLE II (Continued) Gallium Arsenide eV 0.Q70 0.069 0.068 0.067 0.066 0.0655 0.065 0.0645 0.064 0.0635 0.063 0.0625 0.062 0.0615 0.061 0.060 0.0595 0.059 0.058 0.057 0.0565 0.056 0.0555 0.055 0.054 0.053 0.0525 0.052 0.051 0.050 0.0495 0.049 0.0485 0.048 0.047 0.046 0.045 0.04463 0.044 0.04339 0.043 0.04215 0.04092 0.03968 0.03906 em-I 564.6 556.5 548.5 540.4 532.3 528.3 524.3 520.2 516.2 512.2 508.1 504.1 500.1 496.0 492.0 483.9 480.0 475.9 467.8 459.7 455.7 451.7 447.6 443.6 435.5 427.5 423.4 419.4 411.3 403.3 399.2 395.2 391.2 387.1 379.1 371.0 362.9 360 354.9 350 346.8 340 330 320 315 !lID n 17.71 17.97 18.23 18.51 18.79 18.93 19.07 19.22 19.37 19.53 19.68 19.84 20.00 20.16 20.33 20.66 20.84 21.01 21.38 21.75 21.94 22.14 22.34 22.54 22.96 23.39 23.62 23.84 24.31 24.80 25.05 25.30 25.56 25.83 26.38 26.95 27.55 27.78 28.18 28.57 28.83 29.41 30.30 31.25 31.75 3.2081 3.1886 3.205 [2, 3] 3.1609 [5] 3.176 [2, 3] 3.157 3.126 3.100 3.058 2.997 2.913 2.851 2.770 2.659 2.495 2.380 k 2.32 6.00 x 10- 4 1.17 x 10- 3 2.59 4.18 6.10 8.27 6.27 4.85 4.83 4.85 4.23 4.17 4.18 4.09 3.45 3.18 3.19 3.57 4.50 4.78 4.84 4.97 5.32 4.56 3.68 3.38 3.43 3.71 2.74 2.07 2.07 2.17 2.10 2.33 2.91 3.94 6.50 [2, 3] 5.15 [4] 8.40 [2, 3] 8.95 x 10- 3 [4] 1.13 x 10- 2 [2, 3] 1.59 2.43 3.14 (continued) 442 Edward D. Palik TABLE II (Continued) Gallium Arsenide eV 0.03844 0.03782 0.03720 0.03707 0.03695 0.03682 0.03670 0.03658 0.03645 0.03633 0.03620 0.03608 0.03596 0.03583 0.03571 0.03558 0.03546 0.03534 0.03521 0.03509 0.03496 0.03484 0.03472 0.03459 0.03447 0.03434 0.03422 0.03409 0.03397 0.03385 0.03372 0.03360 0.03348 0.03341 0.03335 0.03329 0.03323 0.03317 0.03310 0.03304 0.03298 0.03286 0.03273 0.03261 0.03248 0.03236 0.03224 cm- 1 310 305 300 299 298 297 296 295 294 293 292 291 290 289 288 287 286 285 284 283 282 281 280 279 278 277 276 275 274 273 272 271 270 269.5 269 268.5 268 267.5 267 266.5 266 265 264 263 262 261 260 )lm 32.26 32.79 33.33 33.44 33.56 33.67 33.78 33.90 34.01 34.13 34.25 34.36 34.48 34.60 34.72 34.84 34.96 35.09 35.21 35.33 35.46 35.59 35.71 35.84 35.97 36.10 36.23 36.36 36.50 36.63 36.76 36.90 37.04 37.10 37.17 37.24 37.31 37.38 37.45 37.52 37.59 37.74 37.88 38.02 38.17 38.31 38.46 n 2.229 2.020 1.707 1.623 1.529 1.422 1.298 1.151 0.975 0.761 0.536 0.391 0.323 0.291 0.275 0.267 0.266 0.270 0.278 0.290 0.307 0.329 0.358 0.395 0.443 0.506 0.592 0.713 0.890 1.17 1.64 2.56 4.66 6.63 9.30 11.6 12.4 12.0 11.3 10.6 9.90 8.87 8.12 7.55 7.11 6.76 6.47 k 4.21 6.02 9.59 x 10- 2 0.107 0.122 0.141 0.166 0.201 0.257 0.357 0.552 0.826 1.09 1.34 1.57 1.79 2.01 2.23 2.46 2.69 2.94 3.20 3.48 3.79 4.14 4.52 4.97 5.49 6.12 6.91 7.94 9.32 11.0 11.6 11.3 9.37 6.74 4.66 3.30 2.43 1.87 1.20 0.844 0.629 0.489 0.393 0.323 443 Gall ium Arsenide (GaAs) TABLE II (Continued) Gallium Arsenide eV cm - 1 0.03 162 0.03 100 0.02976 0.02852 0.02728 0.02604 0.02480 255 250 240 230 220 21 0 200 39.22 40.00 41.67 43.48 45.45 47.62 SO.OO 0.02356 0.02232 0.02108 0.02066 190 180 170 166.7 52.63 55.56 58.82 60 0.01984 0.01860 0.0 177 1 160 150 142.9 62.S0 66.67 70 0.01736 0.01612 0.01550 140 130 125 71.43 76.92 80 0.0 1488 0.0 1378 120 111.1 83.33 90 0.01364 0.01240 110 100 0.0111 6 0.009919 0.008679 0.008266 0.007439 0.006 199 90 80 70 66.67 60 50.00 0.004959 0.00413 3 40 33.33 0.003720 0.003 100 0.002480 0.001 860 0.001240 30 25 20 15 10 n /lm 90.91 100 11 1.1 125.0 142.9 150 166.7 200 250.0 300 333.3 400 500 667 1000 5.57 5.08 4.57 4.30 4.13 4.02 3.93 3.87 [1 ] 3.77 [2, 3] 3.74 [ 1] 3.7 1 [ 2, 3J 3.68 [IJ 3.681 [ 2, 3J 3.65 [1 J 3.662 [ 2, 3] 3.635 [1 J 3.650 [2, 3J 3.625 [ IJ 3.623 [ 2, 3J 3.62 [I J 3.615 [ 2, 3J 3.61 [ IJ k 0.t53 9.02 x 10- 2 4.26 2.49 1.63 U S x 10 - 2 8.49 x 10 - 3 1.09 x 10 - 2 1.22 1.25 x 10 - 2 3.89 x 10- 3 6.92 x 10- 3 US x 10- 2 6.4 x 10- 3 3.79 [ 1J 5.0 [12J 4.4 1.84 [ 2, 3J 3.18 [IJ 3.9 [ 12J 2.86 [1 J 3.6 [12J 3.6 2.78 [ IJ 3.8 [1 2J 4.2 3.5 2.14[ IJ 2.1 [ 12J 1.8 [ 12J 1.4 3.6 11 [ 2, 3] 3.60 [1] l.l 1.2 3.607 [ 2, 3J 1.3 1.2 3.606 [1 2] [2, 3] [1 ] [12J Gallium Phosphide (GaP) A. BORGHESI and G. GUIZZETTI Dipartimento di Fisica "A. Volta" and Gruppo Nazionale di Struttura della Materia del CNR Universita di Pavia Pavia, Italy The room-temperature values of nand k tabulated here were ·obtained from the following works and references therein: Kleinman and Spitzer [1], Barker [2], Parsons and Coleman [3], Abagyan et al. [4, 5], Giehler and Jahne [6], and Pikhtin et al. [7] for the medium and far infrared; Spitzer et al. [8], Bond [9], Dean and Thomas [10], Dean et al. [11], Remenyuk et al. [12], Nelson and Turner [13], and Pikhtin and Yas'kov [7, 14, 15] for the near infrared and visible; and Philipp and Ehrenreich [16], Cardona et al. [17, 18], Stokowski and Sell [19], Gudat et ai. [20], and Jungk [21] for the visible- ultraviolet and the vacuum ultraviolet. A composite smooth-curve plot is given in Fig. 3. Numerical values are given in Table IV with appropriate references. In the infrared near the transverse optic mode (VT ~ 27.5 pm), where the absorption coefficient IY. is too large to allow transmission T measurements using the thinnest samples available, bulk reflectance R measurements at near-normal incidence were performed [1,6]' Values for nand k were obtained from a Kramers-Kronig (KK) analysis [2] or by fitting R (from 13 to 42 pm) within the experimental error by classical dispersion theory [1]. As a by-product of this procedure, the optical constants were calculated and checked against T measurements in the regions outside the fundamental band. At longer wavelengths, transmission samples of thicknesses from 30 pm to 1 mm were used; k was derived from T and R, including multiplereflection effects; n was deduced from the interference transmission pattern. All the samples, except those in Kleinman and Spitzer [1], were single crystals grown by different techniques [floating zone, Czochralski, vapor transport, and liquid encapsulation Czochralski (LEC)], both of n- and p-type with free-carrier density N ranging from < 5 x 10 15 to 10 18 cm - 3. Some transmission samples [1,4] were copper compensated to reduce the background absorption, and their surfaces were mechanically polished and etched 445 HANDBOOK OF OPTICAL CONSTANTS OF SOLIDS Copyright © 1985 by Academic Pr ess, Inc. All rights of reproduction in any form reserved , ISBN 0-12-544420-6 446 A. Borghesi and G. Guizzetti in concentrated bromine. In the other cases no description of the surface treatment was given. The R values in the infrared from various labs agree to within the experimental uncertainty. It was determined that differences in the free-carrier concentration had no effect on R. The n values for A : : : 50 Jim from Parsons and Coleman [3] and Abagyan et al. [4] present a difference of 0.28% at A = 50 Jim, which lowers to 0.2% at A = 1000 Jim. In Abagyan et al. [4] the error fln in n, resulting from the measurement of the sample thickness and of wavelength A, is quoted not exceeding 0.005, while in Parsons and Coleman [3] n is quoted with four decimal places and its values are those reported in Table IV for 50 Jim S; A S; 400 Jim. Parsons and Coleman [3] fit the infrared data and the accurate n data from Bond [9] and Nelson and Turner [13] in the 0.5-4.0-Jim range by using for the complex dielectric function g the following form proposed by Barker [2]: i.e., a classical-oscillator equation, where Si' vf, and Yi are the osciIIator strength, restoring force, and linewidth, respectively. The second term in Eq. (1) represents the electronic contribution and the third one the lattice contribution with frequency-dependent damping. The fit parameters, given in Table III, are the same used by Barker [2] to fit IX, R, and Raman data near the transverse optic mode, except So, which had to be increased from 2.01 to 2.056 for best fit. The net result of this fit is that the refractive index of GaP can be calculated from Eq. (1) to an accuracy somewhat better than four figures from microwave to visible frequencies. In particular, in the range 30-200 Jim the fit agrees with the experimental n to a few units in the fourth decimal place (±0.03%) and yields the precise value eo = 11.147 for the static relative dielectric constant. In Table IV we have labeled this fit with nf for the data of Barker [2]. Also, Pikhtin et al. [7] proposed an analytic dispersion relationship for n in the 0.5-1000-Jim spectral range; it has only six parameters and is simpler than Eq. (1) but less accurate (±0.8%). However, it is useful to report it, since by means of a relation in Pikhtin et al. [7] it has been possible also to fit spectra at 105 K. The fit parameters are from Pikhtin et al. [7]. For frequencies above or below VT == vo , the k spectrum has considerable structure and values much higher than those predicted from Eq. (1). Since the same bands are observed in compensated and uncompensated samples, they are attributed to absorption by the lattice (combination bands) [1, 2]. However, the IX spectra from different labs are in qualitative but not in quantitative agreement. In the 12-20-Jim region we have tabulated the Gallium Phosphide (GaP) 447 data from Pikhtin and Yas'kov [15] because the n-type sample was monocrystalline, not intentionally doped, with the lowest carrier concentration (1.15 x 10 17 cm- 3 ). Besides, T spectra were obtained with a double-beam spectrophotometer, and R was checked against accurate measurements of n. Near VT the reported values (labeled kr) were obtained from Eq. (1). As for the 4-23-pm range, Table IV contains experimental values of n deduced from the positions of interference peaks in T [5,7J. The thickness of the samples and the interference order were accurately determined by comparing, in the 0.5-4-pm range, the results obtained with this method and with the more precise results obtained by using the prism method. The data from Abagyan et at. [5] and Pikhtin et at. [7] agree to within the 0.1 %, with an error [7] of ±0.2% at 4 pm and of ±0.47% at 23 pm. The samples were n type, undoped, and high resistivity (N < 5 x 10 16 cm - 3). Measurements performed on low-resistivity samples, doped both n- and p-type up to 1.7 X 10 18 cm - 3 have shown that for )" :;::: 3-pm doping reduces n [5, 7]. For this reason we have disregraded older data for n [22, 23] that are '" 2% lower. The absorption coefficient between 1 and 12 pm is free-carrier-like; it typically increases with wavelength and with free-carrier concentration. Besides, all the n-type samples show a broad absorption band in the 1-4-pm region that does not occur in p-type material. In this region there are many measurements of a [8, 12, 15] on crystals doped with different impurities and with carrier densities ranging from 10 17 to 10 18 cm - 3. We have tabulated those from Pikhtin and Yas'kov [15] on the basis of the same reasons that determined the choice in the 12-20-pffi region. In the 0.53-4-pm range, where GaP is nearly transparent, n measurements were carried out by the method of prism minimum deviation [7, 9, 13] and by interference spacing [11] at 2.24 eV (0.5536 pm) and 2.62 eV (0.4733 pm). The scattering of n data from different authors is within ± 0.0025. In Pikhtin et at. [7] the absolute values of n were determined to within ±0.0025; in Bond [9J n was measured to the fourth decimal. In Nelson and Turner [13J the uncertainty in the individual value was ±0.0002; however, the value obtained for different prisms differed by substantially more than this. The differences are believed to be real and to reflect the variation that can be expected from different samples of GaP. To include the value for all of the prisms, an uncertainty of ±0.0012 would have to be assigned to the n values from 0.545 to 0.70 pm in Table IV. These variations were not correlated with the level of doping, which varied from no intentional doping to 10 18 cm - 3 with the type of dopant (Te, Sn, Zn) or the method of crystal growth (highpressure boat growth, floating zone, or solution growth). The intrinsic electronic absorption edge of single crystals was presented and analyzed by Spitzer et al. [8] at 300 K, by Dean and Thomas [10J between 1.6 and 300 K, and by Pikhtin and Yas'kov [14J between 4.2 and 500 K. The results agree qualitatively, although there is some quantitative difference. In Table IV we have reported in the 0.54-0.57-pm range the values from Dean and Thomas [lOJ that are a little lower than those reported 448 A. Borghesi and G. Guizzetti by Spitzer et al. [8J and Pikhtin and Yas'kov [14J and were obtained with exceptionally perfect single crystals grown by a modified wet-hydrogen transport process. All crystals had very high resistivities and three different thicknesses (0.0212,0.0724, and 0.362 cm). The 0.8-0.2-/lm region straddling the fundamental band gap has been measured more recently by ellipsometry on surfaces containing native oxides that are mathematically "removed" in the analysis, or samples are chemically polished to remove this oxide and then put into an inert atmosphere while the measurement of the ellipsometric parameters !/J and d are performed [24]. We have included these values and at the ends of this spectral region have overlapped other data for comparison. The optical properties from the fundamental absorption edge (0.53 /lm) to about 0.08 pm can be determined by KK analysis of normal-incidence reflectance data. The R data between 0.53 and 0.21 /lm obtained with a sensitive double-beam spectrophotometer by Stokowski and Sell [19J provide a considerable improvement in sensitivity over the older measurements reported by Philipp and Ehrenreich [16J and Seraphin and Bennett [23]. The samples used in Stokowski and Sell [19J were grown by the Czochralski method, were sliced parallel to a {111} face, and a weak ( '" 0.2%) brominemethanol solution was used as a polishing etch. The absolute-reflectance values were accurate to within ± 3% of the reflectivity. The data were about 10% higher than those in Philipp and Ehrenreich [16J, in agreement within 1% with those calculated from n at 0.4733 /lm as measured by Dean et al. [11]. In the 0.21-0.08-/lm range no other R data are available except those from Philipp and Ehrenreich [16]. Absorption and !"eflection measurements in the 0.08-0.03-/lm range [18, 20J and only absorption measurements in the 0.08-0.008-/lm range [17J were performed with synchrotron radiation and with a typical resolution of 2 A over the whole spectral range. The crystalline samples for transmission were obtained by flash evaporation and samples of at least three different thicknesses between 500 and 1500 A were used. The thicknesses were determined with a Tolansky interferometer with an accuracy of about 10% and also during evaporation with a calibrated quartz-crystal monitor. The absolute values determined for the absorption coefficient were affected by an error of less than 20%, which arose mainly from uncertainties in the thicknesses. The R measurements [20J were performed under nearly normal incidence [15J on polished bulk samples, etched in bromine-methanol solution. Since the incoming and reflected intensities were not determined simultaneously, no accurate absolute values of R were obtained (± 50%); therefore the measured reflectivities were scaled so as to coincide around the first maximum at 0.059 /lm with the ones calculated by the KK analysis transforms from II data. Some discrepancies between scaled Rand R from KK analysis may be due to a structural difference between the thin films used to measure T and the bulk samples for R. Also, there may be some influence of the surface treatment and of light scattering. Larger discrepancies be- Gallium Phosphide (GaP) 449 tween the a experimental data from Cardona et al. [17, 18] and the a values obtained from KK processing of early R data [16] can be attributed to R-limited range of R spectra and to the inadequacy of the conventional gasdischarge spectroscopic sources; in fact, hot-cathode argon lamps have typical separation of about 1 e V between adjacent lines, equal to the expected spin-orbit splitting of core levels (0.53 eV for Ga) and to separation between peaks in the density of conduction states. In Table IV nand k values in the 0.44-0.08-J-lm range have been obtained by KK transform on R spectra from Philipp and Ehrenreich [16J and Stokowski and Sell [19J, extended to shorter wavelengths with the data of Gudat et al. [20] and longer wavelengths (visible and infrared) with those of Kleiman and Spitzer [lJ, Giehler and lahne [6J, and Bond [9]. The results are in fair agreement with the dielectric function ellipsometrically determined between 0.36 and 0.31 J-lm [21]. REFERENCES 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16. 17. 18. 19. 20. 21. 22. 23. 24. D. A. Kleinman and W. G. Spitzer, Phys. Rev. lIS, 110 (1960). A. S. Barker, Jr., Phys. Rev. 165,917 (1968). D. F. Parsons and P. D. Coleman, App/. Opt. 10, 1683 (1971). S. A. Abagyan, G. A. Ivanov, Y. E. Shanurin, and V. I. Amosov, Sov. Phys. Semicond. 5, 889 (1971). S. A. Abagyan, G. A. Ivanov, A. P. Izergin, and Y. E. Shanurin, Sov. Phys. Semicond. 6, 985 (1972). M. Giehler and E. Jahne, Phys. Status Solidi B 73,503 (1976). A. N. Pikhtin, V. T. Prokopenko, and A. D. Yas'kov, Sov. Phys. Semicond. 10, 1224 (1976). W. G . Spitzer, M. Gershenzon, C. 1. Forsch, and D. F. Gibbs, J. Phys. Chem. Sol. 11, 339 (1959). W. L. Bond, J. Appl. Phys. 36, 1674 (1965). P.1. Dean and D. G. Thomas, Phys. Rev. 150,690 (1966). P.1. Dean, G. Kaminsky, and R. B. Zetterstrom, J. Appl. Phys. 3S, 3551 (1967). A. D. Remenyuk, L. G. Zabelina, Yu. 1. Ukhanov, and Y. V. Shmartzev, Sov. Phys. Semicond. 2, 557 (1968). D. F. Nelson and E. H. Turner, J. App/. Phys. 39, 3337 (1968). A. N. Pikhtin and D. A. Yas'kov. Sov. Phys. Solid State 11, 455 (1969). A. N. Pikhtin and D. A. Yas'kov. Phys. Status Solidi 34, 815 (1969). H. R. Philipp and H. Ehrenreich, in "Semiconductors and Semimetals" (R. K. Willardson and A. C. Beer, eds.), Vol. 3, Chapter 4. Academic, New York, 1967. M. Cardona, W. Gudat, B. Sonntag, and P. Y. Yu, Proc. Int. ConI Phys. Semicond. Cambridge, 1970, p. 208. U.S. Atomic Energy Commission, Oak Ridge, Tennessee, 1970. M. Cardona, W. Gudat, E. E. Koch, M. Skibowski, B. Sonntag, and P. Yu, Phys. Rev. Lett. 25, 659 (1970). S. E. Stokowski and D. D. Sell, Phys. Rev. B 5, 1636 (1972). W. Gudat, E. E. Koch, P. Y. Yu, M. Cardona, and C. M. Penchina, Phys. Status Solidi B 52,505 (1972). G. Jungk, Phys. Status Solidi B 67,85 (1975). H. Welker, J. Electron. I, 181 (1955). B. O. Seraphin and H. E. Bennett, in "Semiconductors and Semi metals" (R. K. Willardson and A. C. Beer, eds.), Vol. 3, p. 219. Academic, New York, 1967. D. E. Aspnes and A. A. Studna, Phys. Rev. B 27, 985 (1983); D. E. Aspnes and A. A. Studna, private communication (1982). 450 A. Borghesi and G. Guizzetti 105~ll-~~~~~~~~--~~~~~~~~-L~~~ 10- 1 100 WAVELENGTH 102 10 1 10 2 10 3 (}Jm) Fig 3. Log-log plot of n (---) and k(----) versus wavelength in micrometers for gallium phosphide. TABLE III Dielectric Parameters for Gallium Phosphide at 300 Ka Electronic Sel Vel Se2 Ve2 Se3 Ve3 2.570 29,000 em-I 4.131 42,700 em-I 1.390 58,000 em-I Ionic Goo So Vo Yo SI VI 1'1 S2 v2 1'2 a 9.091 2.056 363.4 em-I 1.1 em-I 7.0 x 10- 4 349.4 em-I 21 em-I 3.5 x 10- 4 358.4 em-I 12.6cm- 1 Data from Parsons and Coleman [3]. TABLE IV {j) ~ Values of nand k for Gallium Phosphide Obtained from Various References" eV em - I c JLm n n, k k, 3 "U 154.0 144.0 134.0 131.2 126.0 122.0 119.0 115.0 110.0 109.2 107.0 106.1 105.0 104.0 100.0 96.0 90.0 80.0 70.0 66.0 60.0 50.0 45.0 40.0 37.0 0.00805 0.00861 0.00925 0.00945 0.00985 0.0102 0.0104 0.0108 0.0113 0.DI14 0.011 6 0.0117 0.011 8 0.0119 0.0124 0.0129 0.0138 0.0155 0.0177 0.01 88 0.0207 0.0248 0.0275 0.0310 0 .0335 ::T 1.7 x 10- 2 [17] 1.8 1.7 1.85 1.7 1.8 1.9 2.0 2.15 2.2 2.2 2.25 2.25 2.1 2.15 2.25 2.5 3.0 3.6 3.8 4.15 4.7 5.0 5.5 6. 1 0 (J) "0 ::T 0: (I) G3 III ~ (continued) " References are indicated in brackets. Here n, and k, are fits to experimental data obtained with Eq. (I) and the parameters of Table III. .,. .... C11 ~ 0'1 TABLE IV (Continued) l\:) Gallium Phosphide eV 35.0 33.0 31.0 29.0 27.0 25.0 24.2 23.5 23.1 22.6 22.2 21.8 21.4 21.2 21.0 20.6 20.5 20.0 19.5 19.0 18.0 17.0 16.0 15.0 14.0 13.0 12.0 cm - 1 Jlm 0.0354 0.0376 0.0400 0.0427 0.0459 0.0496 0.0512 0.0528 0.0537 0.0549 0.0558 0.0569 0.0579 0.0585 0.0590 0.0602 0.0605 0.0620 0.0636 0.0652 0.0689 0.0729 0.0775 0.0826 0.0886 0.0954 0.1033 n 0.730 [16-20] 0.748 0.759 0.780 0.822 nf k 6.1 6.7 7.3 [20] 8.0 9.3 x 10- 2 0.122 0.141 0.162 0.169 0.167 0.174 0.187 0.193 0.197 0.195 0.190 0.188 0.180 0.192 0.213 0.269 0.323 0.537 [16-20] 0.628 0.718 0.825 0.938 kf ?> CD , 0 co :T CD ~. III ::J 0.. G) G) c: N' N ~ 11.0 10.5 9.95 9.5 9.05 8.5 8.05 7.5 7.0 6.75 6.55 6.4 6.0 48,390 0.1127 0.1181 0.1246 0.1305 0.1370 0.1459 0.1540 0.1653 0.1771 0.1837 0.1893 0.1937 0.2066 5.94 5.9 5.84 5.8 47,910 47,590 47,100 46,780 0.2087 0.2101 0.2123 0.2138 5.74 5.7 5.64 5.6 5.54 5.5 5.44 5.4 5.38 5.36 5.34 46,300 45,970 45,490 45,170 44,680 44,360 43,880 43,550 43,390 43,230 43,070 0.2160 0.2175 0.2198 0.2214 0.2238 0.2254 0.2279 0.2296 0.2305 0.2313 0.2322 0.873 0.875 0.998 1.076 1.047 0.943 0.872 0.944 1.054 1.200 1.301 1.207 0.906 1.309 [24] 1.327 1.327 1.342 1.348 0.988 [16-20] 1.368 [24] 1.385 1.418 1.444 1.494 1.543 1.660 1.778 1.851 1.936 2.028 1.040 1.104 1.224 1.183 1.151 1.224 1.401 1.652 1.876 1.968 1.896 1.836 2.281 2.690 [24] 2.766 2.803 2.882 2.934 2.657 [16-20] 3.028 [24] 3.096 3.211 3.297 3.441 3.556 3.752 3.889 3.955 4.019 4.077 G) ~ c: 3 "0 :J' 0 (fl '0 :J' 0. ([) Gl III ~ (continued) ,J:.. (J'1 v:> .". 0'1 .". TABLE IV (Continued) Gallium Phosphide eV em-I 5.32 5.30 5.28 5.26 5.24 5.22 5.20 5.18 5.16 5.14 5.12 5.10 5.08 5.06 5.04 5.02 5.00 4.98 4.96 4.94 4.92 4.90 4.88 4.86 4.84 4.82 42,910 42,750 42,590 42,420 42,260 42,100 41,940 41,780 41,620 41,460 41,300 41,130 40,970 40,810 40,650 40,490 40,330 40,170 40,000 39,840 39,680 39,520 39,360 39,200 39,040 38,880 J1.m 0.2331 0.2339 0.2348 0.2357 0.2366 0.2375 0.2384 0.2394 0.2403 0.2412 0.2422 0.2431 0.2441 0.2450 0.2460 0.2470 0.2480 0.2490 0.2500 0.2510 0.2552 0.2530 0.2541 0.2551 0.2562 0.2572 n 2.134 2.248 2.368 2.490 2.607 2.718 2.825 2.930 3.036 3.144 3.248 3.342 3.424 3.498 3.561 3.615 3.661 3.701 3.739 3.774 3.806 3.844 3.880 3.923 3.970 4.018 nr k 4.128 4.168 4.192 4.201 4.197 4.185 4.170 4.150 4.123 4.086 4.036 3.975 3.909 3.839 3.768 3.698 3.631 3.567 3.509 3.454 3.404 3.358 3.316 3.269 3.218 3.162 kr ~ III 0 ..., to ;;r CD ~. Dl :::J 0.. G) G) c: N' N CD ;; 4.80 4.78 4.76 4.74 4.72 4.70 4.68 4.66 4.64 4.62 4.60 4.54 4.50 4.44 4.40 4.34 4.30 4.24 4.20 4.14 4.10 4.04 4.00 3.94 3.90 3.88 3.86 3.84 3.82 3.80 38,710 38,550 38,390 38,230 38,070 37,910 37,750 37,590 37,420 37,260 37,100 36,620 36,290 35,810 35,490 35,000 34,680 34,200 33,880 33,390 33,070 32,580 32,260 31,780 31,460 31,290 31,130 30,970 30,810 30,650 0.2583 0.2594 0.2605 0.2616 0.2627 0.2638 0.2649 0.2661 0.2672 0.2684 0.2695 0.2731 0.2755 0.2792 0.2818 0.2857 0.2883 0.2924 0.2952 0.2995 0.3024 0.3069 0.3100 0.3147 0.3179 0.3195 0.3212 0.3229 0.3246 0.3263 4.062 4.100 4.132 4.157 4.173 4.181 4.181 4.173 4.158 4.137 4.113 4.031 3.978 3.907 3.867 3.817 3.792 3.765 3.754 3.748 3.752 3.769 3.790 3.840 3.890 3.923 3.966 4.021 4.095 4.196 G) 3.096 3.024 2.949 2.871 2.791 2.712 2.634 2.560 2.491 2.427 2.371 2.241 2.180 2.117 2.090 2.066 2.058 2.057 2.063 2.082 2.100 2.137 2.171 2.240 2.303 2.343 2.389 2.443 2.502 2.562 ~ c 3 "U ::T 0 (J) "0 ::T 0: <1l G) III ..::g (continued) .j:>. 01 01 ~ 01 0> TABLE IV (Continued) Gallium Phosphide eV em-I 3.78 3.76 3.74 3.72 3.70 3.68 3.66 3.64 3.62 3.60 3.58 3.56 3.54 3.52 3.50 3.48 3.46 3.44 3.42 3.40 3.38 3.36 3.34 3.32 3.30 3.28 30,490 30,330 30,160 30,000 29,840 29,680 29,520 29,360 29,200 29,040 28,870 28,7 10 28,550 28,390 28,230 28,070 27,910 27,750 27,580 27,420 27,260 27, 100 26,940 26,780 26,620 26,450 pm 0.3280 0.3297 0.3315 0.3333 0.3351 0.3369 0.3388 0.3406 0.3425 0.3444 0.3463 0.3483 0.3502 0.3522 0.3542 0.3563 0.3583 0.3604 0.3625 0.3647 0.3668 0.3690 0.3712 0.3734 0.3757 0.3780 n 4.328 4.497 4.700 4.927 5.149 5.328 5.437 5.472 5.454 5.406 5.339 5.268 5.194 5.121 5.050 4.983 4.920 4.861 4.805 4.751 4.700 4.651 4.604 4.560 4.518 4.479 nr k 2.615 2.649 2.646 2.585 2.451 2.250 2.010 1.766 1.550 1.368 1.217 1.089 0.982 0.893 0.819 0.752 0.697 0.649 0.605 0.568 0.534 0.503 0.475 0.449 0.426 0.407 kr ?> OJ 0 .., co ::T CD !!1. III :l a. G) G) c N' N CD a:. 3.26 3.24 3.22 3.20 3. 18 3. 16 3. 14 3.12 3.1 0 3.08 3.06 3.04 3.02 3.00 2.98 2.96 2.94 2.92 2.90 2.88 2.86 2.84 2.82 2.80 2.78 2.76 2.743 2.74 2.73 1 2.72 26,290 26,130 25,970 25,810 25,650 25,490 25,330 25, 160 25,000 24,840 24,680 24,520 24,360 24,200 24,040 23,870 23,710 23,550 23,390 23,230 23,070 22,9 10 22,740 22,580 22.420 22,260 22,120 22, 100 22,030 21,940 0.3803 0.3827 0.3850 0.3875 0.3899 0.3924 0.3949 0.3974 0.4000 0.4025 0.4052 0.4078 0.4 105 0.4133 0.4161 0.41 89 0.4217 0.4246 0.4275 0.4305 0.4335 0.4366 0.4397 0.4428 0.4460 0.4492 0.452 0.4525 0.454 0.4558 4.442 4.406 4.372 4.339 4.308 4.278 4.249 4.222 4.196 4.171 4.147 4.124 4.102 4.08 1 4.060 4.041 4.023 4.006 3.990 3.976 3.964 3.952 3.936 3.919 3.904 3.896 3.869 3.835 (j) ~ 0.388 0.369 0. 353 0.337 0.323 0.310 0.298 0.285 0.275 0.264 0.253 0.244 0.233 0.224 0.218 0.208 0.202 0.194 0.183 0.1 76 0.1 65 0.1 52 0.1 35 0.11 8 0.103 8.5 x 10- 2 3.12 [ 8, 23] 5.7 [24] 2.36 [8, 23J 3.5 [ 24J c: 3 "U ::T 0 CJ) 1:1 ::T a. (I) G) III ~ (continued) -"" ...... 01 01 """ CO TABLE IV (Continued) Gallium Phosphide eV 2.719 2.713 2.701 2.70 2.678 2.672 2.64 2.638 2.621 2.60 2.599 2.583 2.572 2.541 2.54 2.52 2.500 2.480 2.475 2.460 2.44 2.431 2.412 2.40 2.389 2.380 CID- 1 21,930 21,880 21,780 21,780 21,600 21,550 21,290 21,280 21,140 20,970 20,960 20,830 20,750 20,490 20,490 20,320 20,160 20,000 19,960 19,840 19,680 19,610 19,450 19,360 19,270 19,190 n !lID 0.456 0.457 0.459 0.4592 0.463 0.464 0.4696 0.470 0.473 0.4769 0.477 0.480 0.432 0.488 0.4881 0.492 0.496 0.500 0.501 0.504 0.5081 0.510 0.514 0.5166 0.519 0.521 3.805 3.730 3.73 [l1J 3.691 [24J k nr kr 1.87 [8, 23J 1.59 1.43 2.7 [24J 1.16 x 10- 2 [8, 23J 9.49 x 10- 3 1.5 x 10- 2 [24J 7.68 x 10- 3 [8,23J 6.37 5.47 4.66 4.29 3.41 3.638 [24J 3.605 3.590 3.4595 [9J 3.06 2.54 2.47 2.18 1.85 ~ OJ 0 ..... co =<I> !!.!. I» :::J 3.561 [24J a. 1.42 1.19 3.535 1.04 x 10- 3 8.57 x 10- 4 P G> c N' N <I> s:. 2.34 2.339 2.322 2. 322 2.30 2.29 2.28 2.275 2.27 2.26 2.254 2.24 2.23 2.22 2.21 4 2.21 2.20 2.19 2.18 2.175 2.1 4 2.138 2.101 2.1 0 2.066 18,870 18,870 18,730 18,730 18,550 18,470 18,390 18,350 18,310 18,230 18,1 80 18,070 17,990 17,910 17,860 17,820 17,740 17,660 17,580 17,540 17,260 17,240 16,950 16,940 16,670 0.5299 0.530 0.534 0.5 34 0.5 39 1 0.541 4 0.5438 0. 545 0.5462 0.5486 0.55 0.5535 0.5560 0.5585 0.56 0.5610 0.5636 0.566 1 0.5687 0.57 0.5794 0.58 0.59 0.5904 0.60 3.497 2.04 2.033 2.000 16,450 16,390 16,130 0.6078 0.61 0.62 1.968 15,870 0.63 3.350 [ 24] 3.3384 [ 13J 3.3254 3.334 [24] 3.3 132 [ 13] Gl 3.474 3.463 3.4522 [ 13] ~ 5.34 3.34 3.34 2.48 [10] 1.88 [10] 1.3 x 10 - 4 c: 3 "U ::T 0 en "0 ::T a. 3.449 1 CD Q 10- 5 3.452 [ 24] 3.4411 [1 3J 3.441 [ 24] 3.430 3.4203 [ 13J 3.421 [2~] 3.411 3.4012 [1 3] 3.393 [ 24] 3.3837 [ 13] 3.3675 3.375 [ 24] 3.3524 [13J 3.4382 9.3 x 6.2 4.2 2.7 1.5 x 10 - 5 3.1 x 10- 6 III -:g 3.0 1.4 x 10- 6 6.5 x 10- 7 2.8 .",. (continued) 01 <.0 "'0 " 0) TABLE IV (Continued) Gallium Phosphide eV em-I 1.94 1.937 1.907 1.90 1.879 1.851 1.84 1.823 1.80 1.797 1.771 1.74 1.70 1.64 1.60 1.550 1.54 1.50 1.378 1.240 1.127 1.033 0.8856 0.8551 0.7749 0.7085 15,650 15,630 15,380 15,320 15,150 14,930 14,840 14,710 14,520 14,490 14,290 14,030 13,710 13,230 12,900 12,500 12,420 12,100 11 ,110 10,000 9,091 8,333 7,143 6,897 6,250 5,714 n pm 0.639[ 0.64 0.65 0.6526 0.66 0.67 0.6738 0.68 0.6888 0.69 0.70 0.7 [26 0.7293 0.7560 0.7749 0.80 0.8051 0.8266 0.90 1.0 l.l 1.2 1.4 3.311 [24] 3.3018 [13] 3.2912 3.295 [24] 3.2811 [13] 3.2716 3.275 [24] 3.2626 [13J 3.262 [ 24] 3.2541 [13] 3.2462 3.245 [ 24] 3.234 3.219 3.209 3.1830 [9J 3.191 [24] 3.178 3.1430 [9] 3.1192 3.0981 3.0844 3.0646 3.0509 kf 3.289[ » OJ 0 ..., (Q :::T <D !!? 3.1173 III :J a. G) 3.0646 [.45 1.6 1.75 k nf G) 1.27 x 10- 5 [15] c N' 3.27 ~ N 3.0522 0.6888 0.6199 0.5767 0.5636 0.5166 0.4959 0.4769 0.4428 0.4275 0.4133 0.3875 0.3647 0.3444 0.3263 0.3100 0.2952 0.2583 0.2480 0.2254 0.2175 0.2066 0.1907 0.1771 0.1653 0.1590 0.1550 0.1459 0.1378 0.1305 0.1292 0.1240 5,556 5,()()() 4,651 4,545 4,167 4,000 3,846 3,571 3,448 3,333 3,125 2,941 2,778 2,632 2,500 2,381 2,083 2,000 1,818 1,754 1,667 1,538 1,429 1,333 1,282 1,250 1,176 1,111 1,053 1,042 1,000 1.8 2.0 2.15 2.2 2.4 2.5 2.6 2.8 2.9 3.0 3.2 3.4 3.6 3.8 4.0 4.2 4.8 5.0 5.5 5.7 6.0 6.5 7.0 7.5 7.8 8.0 8.5 9.0 9.5 9.6 10 3.0439 3.0379 Gl ~ 7.70 x 10- 5 3.0331 3.0296 C 3 "U ::r 3.0292 1.71 x 10- 0 4 (J) "0 ::r 3.0271 3.0236 0: ('I) G3 2.88 3.0215 ~ 3.0217 .3! 3.18 3.0181 3.0166 3.0159 3.0137 3.0166 3.0137 3.004 [5,7] 3.001 3.007 2.998 2.995 2.992 2.98 3.001 1.69 1.53 1.47 1.91 2.95 4.29 2.993 7.14 x 10- 4 2.984 2.980 2.975 2.970 2.985 2.975 1.3 x 10- 3 2.964 2.964 ~ (COlli illued) 01 ...... .j:>. 0> TABLE IV (Continued) I'\) Gallium Phosphide eV 0.1127 0.1033 0.09537 0.08856 0.08266 0.07749 0.07293 0.06888 0.06526 0.06199 0.05904 0.05636 0.05391 0.05166 0.05123 0.05081 0.05040 0.04999 0.04959 0.04881 0.04805 0.04769 0.04696 0.04626 0.04592 0.04575 0.04558 cm - 1 909.1 833.3 769.2 714.3 666.7 625.0 588.2 555.6 526.3 500.0 476.2 454.5 434.8 416.7 413.2 409.8 406.5 403.2 400.0 393.7 387.6 384.6 378.8 373.1 370.4 369.0 367.6 /Jm 11 12 13 14 15 16 17 18 19 20 21 22 23 24.0 24.2 24.4 24.6 24.8 25.0 25.4 25.8 26.0 26.4 26.8 27.0 27.1 27.2 n 2.951 2.936 2.918 2.896 2.871 2.841 2.803 2.755 2.694 [ 7] 2.615 2.511 2.354 k nr kr 2.29 2.868 4.49 2.606 2.076 1.585 1.421 1.208 0.908 0.360 0.108 0.086 0.103 0.123 0.208 0.515 1.064 1.740 3.231 7.16 x 10- 3 2.6 x 10- 2 3.3 4.6 7.2 x 10- 2 0.22 0.89 1.74 2.52 2.96 4.05 5.86 7.48 8.69 10.22 }> III 0 .... (Q :::T CD (/) III ::::l 0- (j) (j) c: N' N CD ~ 0.04541 0.04525 0.04509 0.04492 0.04460 0.04428 0.04366 0.04275 0.04217 0.04133 0.04000 0.03875 0.03815 0.03757 0.03647 0.03542 0.03397 0.03306 0.03163 0.03100 0.02917 0.02755 0.02695 0.02610 0.02480 0.02356 0.02280 0.02244 0.02173 0.02080 366.3 365.0 363.6 362.3 359.7 357.1 352.1 344.8 340.1 333.3 322.6 312.5 307.7 303.0 294.1 285.7 274.0 266.7 255.1 250.0 235.3 222.2 217.4 210.5 200.0 190.0 183.93 181.0 175.29 167.78 27.3 27.4 27.5 27.6 27.8 28.0 28.4 29.0 29.4 30 31 32 32.5 33 34 35 36.5 37.5 39.2 40 42.5 45 46 47.5 50 52.63 54.37 55.25 57.05 59.60 4.732 [4] 4.339 4.115 6.580 10.314 10.483 9.501 8.060 7.348 6.431 5.578 5.182 4.765 11.19 8.62 5.15 3.40 2.10 1.54 0.78 0.31 0.16 6.5 x 10- 2 2.07 x 10· 3.971 3.869 3.793 3.809 3.594 3.606 3.508 3.518 3.461 3.470 3.4440 [3] 3.4435 3.4302 3.4238 2 Q ~ c 3 -U :::T 0 en "0 :::T 0: (!) G3 III ~ [2] 1.67 1.54 2.24 2.09 1.81 1.15 1.11 1.06 1.17 x 10- 2 5.77 x 10- 3 [3] 4.90 5.18 x 10- 3 2.31 1.46 1.06 x 10- 3 7.03 5.67 4.03 (continued) oj::. O"l (.,) TABLE IV (Continued) "'0>" "'" Gallium Phosphide eV 0.02066 0.02009 0.01859 0.01771 0.01727 0.01594 0.01459 0.01363 0.01240 0.01168 0.01090 0.008935 0.008266 0.007360 0.006567 0.006199 0.005724 0.004186 0.004133 0.003387 0.003100 0.002480 0.002066 0.001771 0.001550 0.001378 0.001240 cm- 1 166.7 162.00 149.96 142.9 139.27 128.54 117.70 109.90 100.0 94.21 87.92 72.07 66.67 59.36 52.97 50.00 46.17 33.76 33.33 27.32 25.00 20.00 16.67 14.29 12.50 11.11 10.00 n !-1m 60 61.73 66.68 70 71.80 77.80 84.96 90.99 100 106.1 113.7 138.8 150 168.5 188.8 200 216.6 296.2 300 366.0 400 500 600 700 800 900 1000 nf 6.9 x 10-4 3.4200 3.4134 3.4010 3.3922 3.3830 3.3754 3.3706 3.3621 3.3584 3.3522 3.3463 3.3450 3.3438 3.3399 3.3407 3.3331 [4] 3.3326 3.3323 3.3321 3.3320 3.33195 3.3319 3.4015 3.3947 3.3915 3.3826 3.3747 3.3697 3.3639 3.3609 3.3579 3.3513 3.3494 3.3472 3.3454 3.3447 3.3438 3.3414 3.3413 3.3405 3.3402 3.3397 3.3394 3.3392 3.3391 3.3390 3.3389 kf k 3.67 5.31 5.2 4.34 3.84 3.65 3.77 3.0 4.26 3.53 3.81 2.95 3.00 1.3 x 10-4 ;:r> 3.19 4.53 3.93 OJ .,0 7.2 X 10- 5 co =sCD ~. III ::J 0. 0 G) c N· N CD :; Germanium (Ge) ROY F. POTTER Department of Physics and Astronomy Western Washington University Bellingham, Washington Germanium transistor technology in the 1950s was the basis for extensive research activity. Good-quality single crystals became available for studies of the electrical, elastic, and optical properties. Because infrared systems were also developing, Ge was investigated for its photoelectric characteristics as well as its optical properties. Much of the work during this period concerned impurity or doping effects in terms of free-carrier absorption and forbiddengap determinations. Early optical measurements made on evaporated Ge films had widely scattered results, depending strongly on the conditions of preparation. However, when quality bulk samples became available, measurement results were obtained that have withstood the passage of time remarkably well. Briggs's tabular data [1] for refractive indices between 1.8 and 2.6 jim are within 0.25% of the present-day accepted values. We include these values since they have stood the test of time. Salzberg and Villa [2] measured single-crystal and polycrystalline material almost a decade later for wavelengths between 2 and 16 jim. Their data served as the basis for IR optical design parameters until present day and are within 0.025% of present-day measurements. Cardona et ai. [3J published results for Ge for several temperatures between 87 and 197 K. An examination of their figures indicates a similar degree of agreement with today's values. In 1976, Icenogle et ai. [4] reported refractive-index values for a series of temperatures and wavelengths between 2.':> and 13 jim. These authors claimed a conservative error of approximately 6 x 10- 4 in index n for a percentage error of ~0.0125%. A few years later, Edwin et al. [5] reported very precise results for wavelengths between 8 and 14 jim. The value of their results lies in the fact that two different experimental setups, each in a separate laboratory, were used on the same crystal sample of Ge. The differences between the two laboratories were between 1 x 10 - 4 and 3 x 10 - 4 (10- 2 and 3 x 10 - 2%). This represents the apparent level of precision currently available for measuring refractive indices of high-index materials. All the experiments discussed so far are based on high-quality, single-crystal (in most instances) germanium 465 HANDBOOK OF OPTICAL CONSTANTS OF SOLIDS Copyright © 1985 by Academic Press. Inc. All rights of reproduction in any form reserved. [SBN 0-12-544420-6 466 Roy F. Potter cut as polished prisms having included angles ranging between 5 and 18°. The angle of minimum deviation was measured to obtain the refractive index. Data of Icenogle et al. [4] at 297 K and some data of Edwin et al. [5] at 25°C, originally given in tabular form, are listed in Table V. The tabulated data are plotted in Fig. 4. The precision of the data of Icenogle et al. [4] was such that Barnes and Piltch [6] used them as a basis for evaluating the coefficients of a temperaturedependent, Sellmeier-type equation n2 = A + BA 2 /(J.? - C) + DA 2 /(A 2 - E). Using the temperature-dependent values of n, they found the following values for the coefficients: A = -6.040 x 1O- 3 T + 11.05128, + 4.00536, C = -5.392 x 1O- 4 T + 0.5999034, D = 4.151 x 1O- 4 T + 0.09145, E = 1.51408T + 3426.5. 3 B = 9.295 x 1O- T We have evaluated this expression for "room temperture" of 18°C (291 K), over a large infrared wavelength range, and these values are included in Table V. Some comparison with the results from the several experiments outlined here can be made in the table. The Sellmeier equation represents the accurate values for high-grade optical-quality germanium within 0.025%, or better, over the infrared spectral range 2.5-14 p.m and can be extrapolated to 2.0 and 40 p.m. Many more measurements have been reported for this spectral range, but in most cases the specimens were thin films, amorphous material, or heavily doped. Evaporated films do not, in general, have properties representative of bulk material, so such results are applicable only to material evaporated or sputtered by a given recipe. Li [7] tabulates most such measurements that have appeared in the literature in the past half-century. Li [7] also gives a table of recommended values for the infrared at various temperatures. In the infrared spectral region there are two contributions to the intrinsic absorption properties of germanium. When the infrared radiation field interacts with the crystal lattice, it is described as a photon-phonon interaction. Since selection rules include the conservation of energy and wave vector or momentum, the spectrum will include features related to the photon excitation of multiple phonons. Such "phonon" bands have been observed for Ge. Collins and Fan [8] reported absorption coefficients for phonon bands for 300 K. These have been read from a graph and are listed in Table V. Values of Lax and Burstein [9] are comparable. More recently, Aronson et al. [10] have measured the absorption coefficient for high-resistivity Ge ( '" 50 n em) at 300 K. They used samples of different thickness measuring the transmit- Germanium (Ge) 467 tance. We have read values from a graph and tabulate these. Their results overlap the data of Collins and Fan [8]. The band at 300 cm - 1 in the data of Collins and Fan [8J occurs at 280 cm -1 in the data of Aronsen et al. [10]. Stierwalt and Potter [11 J measured the spectral emittance of Ge at 50°C from 24.um > A > lO.um. The reader should note that k ~ 10- 5 at 10 .urn and becomes very much smaller at shorter wavelengths corresponding to three and more phonon interactions. Randall and Rawcliffe [12J used channel spectra, while Afsar et al. [13J used asymmetric Fourier-transform spectroscopy to measure nand k for high-resistivity Ge (l0-50 n cm -1). Their results are in good agreement and the data of Randall and Rawcliffe [12J are in Table V, although room temperature was not defined. At ,{ > 200-.um free-carrier absorption is beginning to appear. As the photon energy is increased, the values of k due to phonon bands will decrease to insignificant values until the onset of electronic transitions in the near IR. Absorption increases for frequencies less than the first "edge" in Ge, again due to phonon or lattice interactions with electrons. Some of the data of MacFarlane and Roberts [14J obtained on ultrathin bulk samples by using transmittance at 291 K, as read from a graph, have been tabulated to show that k has measured values in the 10- 7 range. At wavelengths shorter than 2 .urn, Ge becomes increasingly absorbing because of the dominance of electronic interband transitions; hence it is no longer possible to use the angle-of-deviation method for determining n. Transmittance measurements can be used to measure the absorption coefficient rJ. (or k), but data are not valid for ,{ < 0.6 .urn. Data of Dash and Newman [15J at 300 K, as read from a graph, are given for 2.um > ,{ > 0.7 .urn. The agreement in the wavelength overlap with MacFarlane and Roberts [14J is good, except for the shift of the indirect absorption edge due to the temperature difference. The optical-measurement methods remaining for shorter wavelengths are related to aspects of the Fresnel reflectivity coefficients, i.e., ellipsometry and reflectance. Because the Fresnel reflectivity is a complex quantity obeying causality laws, it can be expressed as a modulus R1/2 and a phase function. The Kramers-Kronig (KK) relation yields the spectral phase function, given R over the entire frequency spectrum [16]. Philipp and Taft [17J determined the reflectance R over a wide spectral region, applying the KK relations to give nand k. Some of their results as extracted from a graph are tabulated for ). < 0.25 .urn for 300 K. Another type of reflectance method is to measure reflectances at nonzero angles of incidence. Potter [18J measured the ratio Rp/Rs at several angles of incidence to get the minimum value Rp/Rs and the associated pseudoBrewster angle. Some room-temperature values of nand k for Ge are given for the spectral range 1.77 .urn > ,{ > 0.6 .urn. Ellipsometry has been used to measure optical properties from the visible spectral region to 6 eV (0.207 .urn). The tabulated data of Aspnes and Studna 468 Roy F. Potter [19] are listed in Table V. Room temperature was not stated. Archer [20] also measured the optical properties over a reduced spectral range with less spectral detail. Cardona et al. [21] prepared crystalline and amorphous Ge films on heated and room-temperature KCI substrates, respectively. Samples were floated off and picked up with a copper mesh. Transmission measurements were done with synchrotron radiation. The data in Table V were read from a graph. Room temperature was not stated. Lukirskii et al. [22] have measured the unpolarized reflectance for Ge as a function of angle of incidence at four x-ray wavelengths (since e < 1, this gives a type of external attenuated total reflection). Samples were deposited on glass substrates. Room temperature was not specified. Note that the angles as given in Lukirskii et al. [22] are grazing angles, i.e., nl2 - </J, where </J is angle of incidence. These data are obtained from a table and are listed as four points but plotted in Fig. 4 as a continuous line. Note in Fig. 4 that the k data tend to join the longer-wavelength data of Cardona et al. [21] and that these data, in turn, tend to join the data of Philipp and Taft [17]. Aspens and Studna's data [19] overlap Potter's [18] for 0.83 flm > A > 0.41 flm (1.5-3eV). When the extinction coefficient is low, the agreement in n between the two sets is quite good (better than 0.25% for 0.83 flm > A > 0.74 flm). As k becomes larger, the discrepancy increases to about 1% at 2 eV and 4% at 3 eV. At the longer wavelengths Archer's data [20] are about 4% below those of Aspnes and Studna [19], coming into reasonable agreement (less than 1% difference) for 0.54 flm > A > 0.36 flm. Thus, the data of Aspnes and Studna [19] for 0.82 flm > A > 0.2 flm appear to be the best choice for refractive-index values. Data of Philipp and Taft [17] appear to be too low. In the spectral region of interband transitions the extinction coefficient becomes quite large (k > 4), corresponding to absorption coefficients of the order of 106 cm - 1. Reflectance-type measurements must be used. However, some overlap with transmittance measurements exists for comparison. Measurements of Dash and Newman [15] extend to 0.69 flm, which permits comparison with Potter [18J as well as with Aspnes and Studna [19]. The former appears to be low by about a factor of 2, whilte the agreement with the latter is within 10-20%, which, given sample treatment and technique differences, must be considered good. As k becomes larger, Potter's data [18J come closer to agreeing with those of Aspnes and Studna [19]. For 0.62 flm > A> 0.4 flm, Potter's data [18J are consistently larger than the data of Aspnes and Studna [19J by 10-20%. Again, it seems that the data of Aspnes and Studna [19J would be the choice for values of k. For values of n overlap regions occur for the data of Briggs [1], Potter [18J, and the Sellmeier fit. Given that the data of Briggs [lJ and Potter [18] were taken at 20°C or more, the agreement is good. Below about 2 flm, the Sellmeier results would increasingly deviate from the measured values. That the reflectance method agrees with the angle-of-deviation method better than 0.25% in this spectral region establishes the compatibility of the two methods. Germanium (Ge) 469 Reflectivity-type experiments can presents serious problems to the unwary for reducing the experimental data to intrinsic material parameters such as nand k. The condition of the reflecting surface must be well established. Any damage layer present due to grinding, polishing, etc., must be removed. Chemical polishes can avoid this problem. Another incipient problem is the likely presence of a native oxide. A stable oxide grows on germanium to thicknesses of 50 to 100 A in ambient air. For high-index materials such as Ge, such a layer must be removed or accounted for. Aspnes et al. [19J stripped the oxide and took steps to inhibit the oxide growth during the experimental run. While ellipsometry is very sensitive to the presence of a low-index layer, reflectance measurements also become quite sensitive to such a layer as k becomes significant. Both Potter [18J and Archer [20J assumed the presence of an oxide on their specimens and corrected for it. Archer [20J assumed a thickness of 10 to 20 A, while Potter [18J assumed a layer with thickness of 50 A and an index of 2.0. (See Aspnes and Stunda [19J for further discussion.) REFERENCES 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16, 17. 18. 19, 20. 21. 22. H. B. Briggs, Phys. Rev. 77, 286 (1950). C. D. Salzberg and J. J. Villa, J. Opt. Soc. Am. 47, 244 (1957). M. Cardona, W. Paul, and H. Brooks, J. Phys. Chem. Solids 8, 204 (1959). H. W. Icenogle, B. C. Platt, and W. L. Wolfe, Appl. Opt. 15, 2348 (1976). R. P. Edwin, M. T. Dudermel, and M. Lamare, Appl. Opt 17, 1066 (1978). N. P. Barnes and M. S. Piltch, J. Opt. Soc. Am. 69,178 (1979). H. H. Li, J. Phys. Chem. Ref Data, 9,561 (1980). R. J. Collins and H. Y. Fan, Phys. Rev. 93, 674 (1954). M. Lax and E. Burstein, Phys. Rev. 97, 39 (1955). 1. R. Aronson, H. G. McLinden, and P.1. Gielisse, Phys, Rev. 135, A785 (1964). D. L. Stierwalt and Roy F. Potter, Rep. Int. Conf Phys. Semicond., Exter, 1962, p.513. Institute of Physics and Physical Society, London. 1962. C. M. Randall and R. D. Rawcliffe, Appl. Opt. 6,1889 (1967). M. N. Afsar, D. D. Honijk, W. F. Passchier, and J. Goulon, IEEE Trans. Micro. Theor. Tech. MTT-25, 505 (1977). G. G. MacFarlane and V. Roberts, Phys. Rev. 98, 1865 (1955). W. C. Dash and R. Newman, Phys. Rev. 99,' 1151 (1955). M, Cardona, in "Optical Properties of Solids" (S, Nudelman and S. S. Mitra, eds,), p, 137, Plenum, New York, 1969. H. R, Philipp and E. A, Taft, Phys. Rev. 113, 1002 (1959), Roy F. Potter, Phys. Rev, 150, 562 (1966), D, E. Aspnes and A, A. Studna, Phys, Rev, B 27, 985 (1983); D. E. Aspnes, private communication (1983). R,1. Archer, Phys, Rev, 110, 354 (1958). M. Cardona, W. Gudat, B. Sonntag, and p, y, Yu, Proc. 10th Int. Can! Phys. Semicond., Cambridge, 1970, p. 208, U.S, Atomic Energy Commission, Oak Ridge, Tennessee, 1970. A. P. Lukirskii, E. P. Savinov, O. A. Ershov, and Y. F. ShepeJov, Opt. Spectrosc. 16, 168 (1964); A. P. Lukirskii, E. P. Savinov, O. A. Ershov, and Y. F. Shepelov, Opt. Spektrosk. 16, 310 (1964). 470 Roy F. Potter Jl // '\ I \ 1\ :~ :1' \ I \1 I I I I / c I I 105L-~~~~~~~~~~~~L-~~~~~~ 103 10 2 101 WAVELENGTH 100 10 1 102 103 (}J-ml Fig. 4. Log-log plot of n (--) and k (----) versus wavelength in micrometers for germanium. Data from various references sometimes do not join together in overlap regions. 471 Germanium (Ge) TABLE V Values of nand k for Germanium Obtained from Various References· eV 525.3 394.8 281.8 185.1 155 150 145 140 135 130 127.5 125 122.5 120 115 110 105 100 97.5 95 90 85 80 75 70 65 60 55 50 45 40 38 36 34 32 31 30 29 28 26 24 22 20 10 9.5 cm- 1 Jim 0.00236 0.00314 0.0044 0.0067 0.007999 0.008266 0.008550 0.008856 0.009184 0.009537 0.009725 0.009919 0.01012 0.01033 0.01078 0.01127 0.01181 0.01240 0.01272 0.01305 0.01378 0.01459 0.01550 0.01653 0.01771 0.01907 0.02066 0.02254 0.02480 0.02755 0.03100 0.03263 0.03444 0.03647 0.03875 0.04000 0.04133 0.04275 0.04428 0.04769 0.05166 0.05636 0.06199 0.1240 0.1305 0.99741 [22] 0.99590 0.99385 0.99050 k k n 4 9.8 x 10- [22] 2.05 x 10- 3 4.30 9.50 x 10- 3 1.47 x 10- 2 [21] 1.55 1.63 1.71 0.93 [17] 1.77 1.98 1.94 1.98 2.02 1.99 2.06 2.21 2.37 2.57 2.65 2.71 2.79 3.03 3.26 3.39 3.52 3.67 3.94 4.23 4.52 5.04 6.04 6.51 7.40 8.56 9.99 x 10- 2 0.106 0.102 7.14 x 10- 2 7.47 x 10- 2 0.110 0.144 0.179 0.237 0.86 [17] 1.0 (continued) • References are indicated in brackets. Data from Stierwalt and Potter [11] obtained at 50 e are included because no room-temperature data were available in the 1O-15-Jim region. 0 472 Roy F. Potter TABLE V (Continued) Germanium eV cm-! n pm 9 8.5 8 7.5 7 6.5 6 48,390 0.1378 0.1459 0.1550 0.1653 0.1771 0.1907 0.2066 5.94 5.9 5.84 5.8 5.75 5.74 5.7 5.64 5.6 5.54 5.5 47,910 47,590 47,100 46,780 46,380 46,300 45,970 45,490 45,170 44,680 44,360 0.2087 0.2101 0.2123 0.2138 0.2156 0.2160 0.2175 0.2198 0.2214 0.2238 0.2254 5.44 5.4 5.34 5.3 5.25 5.24 5.2 5.14 5.1 5.04 5.0 43,880 43,550 43,070 42,750 42,340 42,260 41,940 41,460 41,130 40,650 40,330 0.2279 0.2296 0.2322 0.2339 0.2362 0.2366 0.2384 0.2412 0.2431 0.2460 0.2480 4.94 4.9 4.84 4.8 4.74 4.7 4.64 4.6 4.54 4.5 4.44 4.4 4.34 4.3 4.24 4.2 4.14 39,840 39,520 39,040 38,710 38,230 37,910 37,420 37,100 36,620 36,290 35,910 35,080 35,000 34,680 34,200 33,880 33,390 0.2510 0.2530 0.2562 0.2583 0.26i6 0.2638 0.2672 0.2695 0.2731 0.2755 0.2792 0.2818 0.2857 0.2883 0.2924 0.2952 0.2995 0.92 0.92 0.92 1.0 1.1 1.3 1.022 [19] 1.073 1.108 1.167 1.209 1.48 [17] 1.273 [19] 1.293 1.345 1.360 1.372 1.380 1.55 [17] 1.387 [19] 1.383 1.377 1.371 1.57 [17] 1.366 [19] 1.364 1.366 1.370 1.382 1.394 1.6 [17] 1.417 [19] 1.435 1.470 1.498 1.546 1.586 1.659 1.720 1.839 1.953 2.226 2.516 3.038 3.338 3.633 3.745 3.837 k 1.14 1.2 1.4 1.6 1.8 2.05 2.34 2.774 [19] 2.801 2.831 2.862 2.873 2.4 [17] 2.874 [19] 2.163 2.852 2.846 2.842 2.842 2.4 [17] 2.849 [19] 2.854 2.877 2.897 2.7 [17] 2.938 [19] 2.973 3.031 3.073 3.146 3.197 2.86 [17] 3.282 [19] 3.342 3.439 3.509 3.624 3.709 3.852 3.960 4.147 4.297 4.543 4.669 4.653 4.507 4.207 4.009 3.756 k 473 Germanium (Ge) TABLE V (Continued) Germanium eV cm-! 4.1 4.04 4.0 3.94 3.9 3.84 3.8 3.74 3.7 3.64 3.6 3.54 3.5 3.44 3.4 3.34 3.3 3.24 3.2 3.14 3.1 3.04 3.0 2.94 2.9 2.84 2.8 2.74 2.7 2.64 2.6 2.54 2.5 2.44 2.4 2.34 2.3 2.24 2.2 2.14 2.1 2.05 2.04 2.0 33,070 32,580 32,260 31,780 31,460 30,970 30,650 30,160 29,840 29,360 29,040 28,550 28,230 27,750 27,420 26,940 26,620 26,130 25,810 25,330 25,000 24,520 24,200 23,710 23,390 22,910 22,580 22,100 21,780 21,290 20,970 20,490 20,160 19,680 19,360 18,870 18,550 18,070 17,740 17,260 16,940 16,530 16,450 16,130 0.3024 0.3069 0.3100 0.3147 0.3179 0.3229 0.3263 0.3315 0.3351 0.3406 0.3444 0.3502 0.3542 0.3604 0.3647 0.3712 0.3757 0.3827 0.3875 0.3949 0.4000 0.4078 0.4133 0.4217 0.4275 0.4366 0.4428 0.4525 0.4592 0.4696 0.4769 0.4881 0.4959 0.5081 0.5166 0.5299 0.5391 0.5535 0.5636 0.5794 0.5904 0.6048 0.6078 0.6199 1.95 1.9 15,730 15,320 0.6358 0.6526 11 m n 3.869 3.896 3.905 3.916 3.920 3.930 3.936 3.949 3.958 3.974 3.985 4.005 4.020 4.048 4.070 4.106 4.128 4.150 4.157 4.153 4.141 4.107 4.082 4.052 4.037 4.030 4.035 4.058 4.082 4.133 4.180 4.267 4.340 4.482 4.610 4.883 5.062 5,198 5.283 5.554 5.748 5.9 [18J 5.708 [19] 5.588 5.64 [18] 5.5 5.38 5.294 [19J k k 3.614 3.436 3.336 3.209 3.137 3.043 2.986 2.909 2.863 2.799 2.759 2.702 2.667 2.615 2.579 2.517 2.469 2.392 2.340 2.262 2.215 2.164 2.145 2.135 2.140 2.162 2.181 2.215 2.240 2.281 2.309 2.353 2.384 2.429 2.455 2.434 2.318 2.125 2.049 1.924 1.634 1.1 [18J 1.150 [19] 0.933 0.8 0.66 0.54 0.638 (continued) 474 Roy F. Potter TABLE V (Continued) Germanium eV cm- 1 JIm 1.85 1.84 1.8 14,920 14,840 14,520 0.6702 0.6738 0.6888 n 5.21 [18] 5.152 [19] 5.067 5.08 [18] k k 0.4 0.537 0.500 0.26 0.466 [15] 1.75 1.74 1.7 14,110 14,030 13,710 0.7085 0.7126 0.7293 1.64 1.6 13,230 12,900 0.7560 0.7749 1.54 1.5 12,420 12,100 0.8051 0.8266 1.4 1.3 1.240 1.2 I.l 1.033 1.0 0.9 0.8856 0.88 0.86 0.84 0.82 0.8 0.78 0.775 0.76 0.75 0.74 0.725 0.72 0.7 0.6888 11 ,280 10,490 10,000 9,679 8,872 8,333 8,065 7,259 7,143 7,098 6,936 6,775 6,614 6,452 6,291 6,251 6,130 6,049 5,968 5,847 5,807 5,646 5,556 0.8856 0.9537 1.0 1.033 1.127 1.2 1.240 1.378 1.4 1.409 1.442 1.476 1.512 1.550 1.590 1.600 1.631 1.653 1.675 1.710 1.722 1.771 1.8 0.68 0.675 0.6702 0.66 0.6525 0.65 0.64 0.625 0.6199 5,485 5,444 5,405 5,323 5,263 5,243 5,162 5,041 5,000 1.823 1.837 1.85 1.879 1.90 1.907 1.937 1.984 2.0 4.99 4.961 [19] 4.897 4.95 [18] 4.816 [19] 4.763 4.75 [18] 4.684 [19] 4.653 4.64 [18] 4.56 4.495 4.61733 [6] 4.42 [18] 4.385 4.35673 [6] 4.325 [18] 4.285 4.23840 [6] 4.275 [16] 0.2 0.430 [19] 0.401 0.18 0.389 [15J 0.364 [19] 0.345 0.308 [15] 0.316 [19] 0.298 0.237 [IS] 0.190 0.167 0.123 0.103 8.09 x 10- 2 7.45 6.73 6.88 6.58 5.66 x 10- 2 5.67 x 10- 3 3.42 x 10- 3 8.15 x 10- 4 [19] 4.17262 [6] 7.79 x 10- 4 5.06 6.67 3.01 4.18 [18] 4.13164 [6] 4.143 [I] 4.66 2.82 1.27 x 10- 4 1.31 x 10- 4 4.22 x 10- 5 4.135 6.73 x 10- 5 4.129 9.71 x 10- 6 7.71 x 10- 6 1.42 x 10 - 6 4.116 475 Germanium (Ge) TABLE V (Continued) Germanium eV cm - 1 Jlm n k k 4.10415 [6] 0.6 0.5904 0.5636 4,8 39 4,762 4,545 2.066 2.1 2.2 0.5391 0.5166 4,348 4,167 2.3 2.4 0.4959 0.4854 0.4769 4,000 3,9 15 3,846 2.5 2.554 2.6 0.4675 0.4538 0.4428 0.4341 0.4191 0.4133 0.4012 0.3874 0.3647 0.3444 0.3263 0.3100 0.3009 0.2952 0.2818 0.2695 0.2583 0.2480 0.2389 0.2384 0.2296 0.2214 0.2138 0.2066 0.2000 0.1937 0.1879 0.1823 0.1771 0.1722 0.1675 0.1631 0.1590 0.1550 3,771 3,660 3,571 3,501 3,381 3,333 3,236 3,125 2,94 1 2,778 2,632 2,500 2,427 2,381 2,273 2, 174 2,083 2,000 1,927 1,923 1,852 1,786 1,724 1,667 1,613 1,563 1,515 1,471 1,429 1,389 1,351 1,316 1,282 1,250 2.652 2.732 2.8 2.856 2.958 3.0 3.09 3.2 3.4 3.6 3.8 4.0 4.12 4.2 4.4 4.6 4.8 5.0 5.19 5.2 5.4 5.6 5.8 6.0 6.2 6.4 6.6 6.8 7.0 7.2 7.4 7.6 7.8 8.0 0.1512 1,220 8.2 6.58 x 10- 7 4.104 [1] 4.092 4.08469 [6] 4.085 [1] 4.078 4.07038 [6] 4.072 [1] 4.06230 [4] 4.068 [1] 4.05951 [6] 4.05754 [4] 4.05310 4.05105 [6] 4.04947 [4] 4.04595 4.04433 [6] 4.04292 [4] 4.03889 [6] 4.03443 4.03072 4.02760 4.02495 4.02457 [4] 402268 [6] 4.02072 4.01901 4.01751 4.01619 4.01617 [4] 4.01503 [6] 4.01399 4.01305 4.01222 4.01146 4.01078 4.01015 4.00958 4.00906 4.00858 4.00814 4.00773 4.00736 4.00701 4.00668 4.00748 [ 5] 4.00637 [6] (continu ed) 476 Roy F. Potter TABLE V (Continued) Germanium eV cm- 1 0.1506 0.1476 0.1442 0.1409 0.1378 1,215 1,190 1,163 1,136 1,111 0.1348 0.1319 0.1292 0.1265 0.1240 1,087 1,064 1,042 1,020 1,000 pm 8.23 8.4 8.6 8.8 9.0 9.2 9.4 9.6 9.8 10.0 0.1207 0.1181 0.1137 0.1127 973.7 952.4 917.4 909.1 10.27 10.5 10.9 11.0 0.1078 0.1033 869.6 833.3 11.5 12.0 0.1003 0.09919 0.09840 0.09537 809.1 800.0 793.7 769.2 12.36 12.5 12.6 13.0 0.09460 0.09184 0.08920 0.08856 763.4 740.7 719.4 714.3 13.1 13.5 13.9 14.0 0.08551 0.08431 0.08307 0.08266 0.08183 0.08157 0.08059 0.07999 0.07935 0.07811 0.07749 0.07687 0.07563 0.07514 0.07439 0.07377 0.07315 0.07293 0.07191 689.7 680 670 666.7 660 657.9 650 645.2 640 630 625.0 620 610 606.1 600 595 590 588.2 580 14.5 14.71 14.93 15.0 15.15 15.2 15.38 15.5 15.63 15.87 16.0 16.13 16.39 16.5 16.67 16.81 16.95 17.0 17.24 k n 4.00743 4.00609 4.00582 4.00556 4.00533 4.00620 4.00510 4.00489 4.00469 4.00449 4.00431 4.00525 4.00571 4.00389 k [4] [6] [5] [6] 1.43 x 10- 5 [11] [5] [4] [6] 1.30 4.00351 4.00436 4.00316 4.00285 4.00398 4.00627 4.00255 [5] [6] 3.82 [5] [4] [6] 3.51 4.00228 4.00352 [5] 4.59 4.00202 [6] 3.98 4.00177 4.00315 [5] 4.00153 [6] 5.77 2.34 x 10- 5 [8] 3.56 9.78 x 10- 5 4.00130 5.30 1.2 x 10- 4 6.24 1.71 x 10- 4 4.00107 7.34 7.33 9.55 x 10- 5 4.00086 6.54 5.61 1.58 x 10- 4 4.91 6.02 9.44 x 10- 5 4.00043 2.57 1.64 x 10- 4 477 Germanium (Ge) TABLE V (Continued) Germanium eV 0.07085 0.07067 0.06943 0.06888 0.06819 0.06757 0.06702 0.06695 0.06633 0.06571 0.06526 0.06447 0.06358 0.06323 0.06199 0.06075 0.06048 0.05951 0.05904 0.05827 0.05767 0.05703 0.05636 0.05579 0.05455 0.05331 0.05269 0.05207 0.05166 0.05083 0.05021 0.04959 0.04897 0.04835 0.04769 0.04711 0.04587 0.04463 0.04428 0.04401 0.04370 0.04339 0.04308 0.04277 0.04215 0.04133 0.04092 0.03968 cm-! 571.4 570 560 555.6 550 545 540.5 540 535 530 526.3 520 512.8 510 500 490 487.8 480 476.2 470 465.1 460 454.5 450 440 430 425 420 416.7 410 405 400 395 390 384.6 380 370 360 357.1 355 352.5 350 347.5 345 340 333.3 330 320 11 m 17.5 17.54 17.86 18.0 18.18 18.35 18.5 18.52 18.69 18.87 19.0 19.23 19.5 19.61 20.00 20.41 20.5 20.83 21 21.28 21.5 21.74 22.0 22.22 22.73 23.26 23.53 23.81 24.0 24.39 24.69 25.00 25.32 25.64 26.0 26.32 27.03 27.78 28.0 28.17 28.37 28.57 28.78 28.99 29.41 30.0 30.30 31.25 k n k 3.90 2.09 2.56 4.00001 3.01 2.68 2.63 4.27 2.51 2.68 3.00 3.99958 4.53 3.21 4.03 3.99915 3.12 2.39 1.94 3.98 3.92 2.49 5.01 3.39 7.70 x 10- 4 4.67 3.99825 5.84 7.24 x 10- 4 1.11 x 10- 3 1.27 1.10 x 10- 3 1.02 x 10- 3 6.0 x 10- 4 [10] 8.0 X 10- 4 1.1 X 10- 3 1.35 3.99728 7.77 x 10- 4 6.17 8.06 x 10- 4 1.73 x 10- 3 1.4 x 10- 3 9.0 x 10- 4 8.0 x 10- 4 1.5 X 10- 3 2.0 2.30 2.80 3.76 2.1 2.5 3.4 3.99621 3.99500 6.92 4.68 5.5 6.7 6.3 6.7 6.5 3.2 3.62 2.98 2.95 2.9 5.23 3.99363 (continued) 478 Roy F. Potter TABLE V (Continued) Germanium eV 0.03844 0.03782 0.03720 0.03658 0.03596 0.03542 0.03534 0.03472 0.03410 0.03348 0.03224 0.03100 0.02976 0.02852 0.02728 0.02604 0.02480 0.02356 0.02232 0.02108 0.01984 0.1860 0.01736 0.01643 0.01612 0.01550 0.01488 0.01457 0.01364 0.01302 0.01271 0.01240 0.01178 0.01116 0.01085 0.009919 0.008989 0.008059 0.007129 0.006199 0.005269 0.004339 0.003410 0.002480 cm- 1 310 305 300 295 290 285.7 285 280 275 270 260 250 240 230 220 210 200 190 180 170 160 150 140 132.5 130 125 120 117.05 110 105 102.5 100 95 90 87.5 80 72.5 65 57.5 50 42.5 35 27.5 20 /Lm 32.26 32.79 33.33 33.90 34.48 35 35.09 35.71 36.36 37.04 38.46 40.00 41.67 43.48 45.45 47.62 50.00 52.63 55.56 58.82 62.50 66.67 71.43 75.47 76.92 80.00 83.33 85.11 90.91 95.24 97.56 100.0 105.3 111.1 114.3 125.0 137.9 153.8 173.9 200.0 235.3 285.7 363.6 500.0 n k k 2.82 3.00 3.18 2.83 2.74 2.7 2.75 3.05 3.98925 3.98272 4.0060 [12] 4.0060 1.02 [12] 1.14 4.0060 1.27 4.0060 4.0063 1.62 2.10 4.0064 2.41 4.0067 2.01 4.0068 4.0067 4.0067 4.0065 4.0061 4.0059 4.0056 4.0052 4.0047 4.0043 1.73 1.59 1.43 1.34 1.10 1.11 1.50 2.04 2.89 4.77 x 10- 3 3.45 3.55 3.3 2.75 1.55 0.85 0.7 0.65 0.85 1.25 1.5 1.53 1.55 1.6 1.6 1.5 1.5 1.55 1.7 2.4 2.8 3.0 2.5 2.1 x 10- 3