A 120 Watt GaN Power Amplifier MMIC Utilizing Harmonic Tuning Circuits For S-band Applications Andrew Alexander, Jonathan Leckey M/A-COM Technology Solutions, Belfast, N.Ireland jonathan.leckey@macom.com Abstract — The design of a 120 Watt S-band GaN power amplifier MMIC is presented. The amplifier was designed using the 0.25um GaN on SiC process from GCS. At Vds= 40V, this two stage amplifier achieved greater than 135W saturated output power, with higher than 47% power added efficiency and with 22dB gain in the 2.8 – 3.5 GHz band. Additionally mid band output power of 195W was achieved at Vds=50V. This result is the highest power ever reported for a two stage GaN MMIC. The use of input and output harmonic terminations for broadband efficiency enhancement was demonstrated. Index Terms — GaN HEMT, MMIC, Power Amplifier. I. INTRODUCTION S-Band power amplifier MMICs are important components in many commercial and military radar systems, for many of these systems high power and efficiency are critical parameters. GaN on SiC technology offers an order of magnitude improvement in power density compared to the previous generation of GaAs MMICs. [1-5] The aim of this design was to demonstrate the suitability of the GCS 0.25um GaN SiC process for power amplifier MMICs. The design goals for the MMIC were for operation from 2.7-3.5GHz, greater than 120W saturated output power, greater than 50% PAE and small signal gain of 25dB for a pulse of 20us duration and 10% duty cycle. channel phase synchronized VNA and multiplexer based active load pull system that enabled control of three separate source or load impedances. The unit cell contained a second (2f0) harmonic resonance circuit on the input consisting of a MIM capacitor and a spiral inductor to ground as shown in Fig 1. Under CW load pull of both the output fundamental and second harmonic load such that the best compromise in performance between power and efficiency was obtained, power density of 6.66W/mm and an associated PAE of 77% were demonstrated at 40V and 20mA/mm quiescent drain bias as shown in Fig.2 and Fig.3. It was shown that the inclusion of the input harmonic tuning circuit enabled high efficiency to be achieved for a much larger range of output 2nd harmonic load impedances. Additional characterization and modeling of the active unit cell was carried out by initially S-parameters, pulsed IV characteristics and by fundamental load pull to 10GHz. The measurements were supplemented by a preliminary CAD model based on the Parker-Skellern large signal model. The model supported the observation that the second harmonic impedances in particular at both input and output were critical in obtaining the required efficiency performance. Resistive loading at the HEMT input was employed to help maintain over unity stability factors over the full frequency range. II. PROCESS DESCRIPTION AND MODELING The GCS 0.25um GaN on SiC process (on four inch wafer diameter) uses an optically defined 0.25um gate length with integrated gate and source connected field plated to support high breakdown voltages and offer high gain, power density and efficiency for S-Band applications. The key features of the process are Imax of 1000mA/mm peak Gm of 250mS/mm and a pinch of voltage of – 3.5V. The process has back side vias, a high voltage MIM capacitor option and the SiC substrate is thinned to 3mil thickness. Slot vias of size 30um by 60um were employed in order to provide an efficient utilization of die area over circular vias and to allow the option of an inter finger via. A plated thick metal option of 5um was also available to accommodate the relatively high static current densities associated with GaN HEMT devices. Active harmonic load pull at a fundamental frequency of 3.5GHz was performed on a 6x250um unit cell, using a four Fig. 1 6x250um unit cell with integrated input harmonic termination. 978-1-4799-8275-2/15/$31.00 ©2015 IEEE Fig. 4 Photograph of the S-band MMIC C, chip size is 6 x 5.1mm. Fig. 2 Drain efficiency variation with 2f0 load, m measured by active load pull on a 6x250um unit cell at 40V. III. DESIGN A single ended two stage class AB ampliffier topology was selected. Based on the load pull data, a 24m mm output stage consisting of 16, 6x250um cells was chosenn, given gain and efficiency considerations a 4:1 drive ratio waas used resulting in an 8mm driver stage. Given the critical roole of the output matching network for circuit performance a topology was chosen which yielded both accurate control off the fundamental and second harmonic load impedance ovver the required bandwidth, while minimizing output matchingg network losses. The various matching networks were syynthesized using Microwave office and finalized with exxtensive use of electromagnetic simulation. This yielded a M MMIC with final dimensions of 6x5.1mm as shown in Fig4. Fig. 3 Measured power and efficiency of 6x250 0um unit cell with optimally tuned fundamental and 2nd harmonic loadd impedances. Fig 5: CW S-parameter measurementss show a small signal gain of ~22dB, with input return loss of 12dB. Fig. 6 Gain versus output power by y frequency, with Vds=40V showing output power of over 110W is achieved across the band, and a peak power of 160W. 978-1-4799-8275-2/15/$31.00 ©2015 IEEE IV. Results and Conclusion S-parameters are shown in Fig.5 showing a typical small signal gain of 22dB, with input return loss of 12dB. Measured power and PAE performance in pulse mode (200uS/10%) is shown in figs. 6 and 7. At Vds=40V, this two stage amplifier achieved greater than 135W saturated output power, with higher than 47% power added efficiency with 22dB gain in the 2.8 – 3.5 GHz band. Additionally mid band output power of 160W was achieved. As shown in fig 8, with Vds=50V, peak output power achieved at 3GHz was 53dBm or 195W. This is the highest power reported to date for a two stage GaN MMIC. Efficacy of harmonic terminations to provide broadband efficiency enhancement has also been demonstrated. In particular second harmonic impedances at both the transistor input and output terminals, as derived from the unit cell active load pull characterization, enabled the fabricated MMIC amplifier to maintain excellent levels of power and efficiency across the 2.7-3.5GHz band. ACKNOWLEDGEMENT The authors would like to thank the staff at MACOM, Belfast for skilled assistance in assembly and measurement of the realized amplifier, and the staff at GCS for valuable discussion and support in wafer fabrication. REFERENCES [1] Pengelly, R.S.; Wood, S.M.; Milligan, J.W.; Sheppard, S.T.; Pribble, W.L., "A Review of GaN on SiC High ElectronMobility Power Transistors and MMICs," Microwave Theory and Techniques, IEEE Transactions on , vol.60, no.6, pp.1764,1783, June 2012. [2] Shuoqi Chen; Reese, E.; Tuong Nguyen, "A Compact 70 Watt Power Amplifier MMIC Utilizing S-Band GaN on SiC HEMT Process," Compound Semiconductor Integrated Circuit Symposium (CSICS), 2012 IEEE , vol., no., pp.1,4, 14-17 Oct. 2012. [3] Jardel, O.; Olivier, M.; Lancereau, D.; Aubry, R.; Chartier, E.; Sarazin, N.; Di Forte Poisson, M.; Piotrowicz, S.; Stanislawiak, M.; Rimbert, D.; Delage, S.L.; Eudeline, P., "A 30W, 46% PAE S-band GaN HEMT MMIC power amplifier for radar applications," Microwave Conference (EuMC), 2012 42nd European , vol., no., pp.1019,1022, Oct. 29 2012-Nov. 1 2012. [4] Poulton, M.; Martin, J.; Martin, J.; Aichele, D., "A compact S Band 100W integrated gallium nitride multistage power amplifier," Microwave Integrated Circuits Conference (EuMIC), 2010 European , vol., no., pp.13,16, 27-28 Sept. 2010 [5] Ezzeddine, B.A.; Hung, H.A.; Viveiros, E.; Huang, H.-C., "High-power GaN MMIC PA Over 40–4000MHz," Microwave Symposium Digest (IMS), 2013 IEEE MTT-S International , vol., no., pp.1,4, 2-7 June 2013. 978-1-4799-8275-2/15/$31.00 ©2015 IEEE