Agilent Ultra Low Current Measurement Equipment Selection Guide Agilent’s stellar lineup of measurement equipment, from nanotechnology to high-power The best-suited equipment for your effective use Nanoscale devices require both lower signal levels and lower power levels for proper operation. In order to characterize these devices and the semiconductor processes on which they are made, it is essential to be able to make accurate low-level current measurements. Agilent’ s multimeters, source/measure units (SMUs) and power analyzers provide subtle solutions to the needs. Poor choice of tools, however, is still a persistent problem, and an unwitting mistake in current measurement fails to yield anticipated results. This guide helps you make the right choice of ultra low current measurement equipment from our strong lineup to maximize the effects of the product. Single-channel accurate low current measurement IV characterization SMU 34410A/11A 6½ Digit Digital Multimeter U2322A/23A USB Modular Source/Measure Unit 3458A 8½ Digit Digital Multimeter B2900A Series Precision Source/Measure Unit 4339B High-Resistance Meter B1500A Semiconductor Device Analyzer Industry-standard general bench-top digital multimeter Capable of measurements of currents from 100 pA to 3 A Renowned as the best-in-industry digital multimeter High-resolution measurements of currents from 1 pA to 1 A Superior high-resolution 10 nV voltage measurements Supports high-resistance measurements, 103 ohm to 1.6 x 1016 ohm Surface resistance and volume resistance measurements also available Capable of measurements of currents from 10 fA to 100 µA Prominent power evaluation N6705B DC Power Analyzer All-in-one DC power analyzer housing the power source, digital multimeter, oscilloscope, arbitrary function generator and data logger Cost-effective 3-channel SMU Capable of measurements of currents from 100 pA to 120 mA High-performance SMU with 1- or 2-channel configuration Capable of measurements of currents from 10 fA to 10 A Suitable for versatile application with the wide coverage of 210 V and 3 A DC/10 A pulse Single-box solution for current/voltage (IV), capacitance/ voltage (CV), pulse generation, fast IV, and time-domain measurements Supports current-voltage (IV) measurement to 0.1 fA and 0.5 µV Wide IV sourcing range, from high-power to low current characterization B1505A Power Device Analyzer/Curve Tracer All-in-one module type instrument designed for high power devices up to 10 kV/1500 A, performing a double function of curve tracer and semiconductor parameter analyzer Ultra low current measurement equipment lineup Product model B2901A/2A B2911A/12A B1500A B1505A Product name Precision Source/ Measure Unit Precision Source/ Measure Unit Semiconductor Device Analyzer Power Device Analyzer/ Curve Tracer SMU SMU SMU SMU 100 nA–10 A 100 fA 10 nA–10 A 10 fA — 1 pA–1 A 0.1 fA — 1 nA–1500 A 10 fA +/- (0.06 % of rdg + 100 pA) +/- (0.10 % of rdg + 50 pA) +/- (0.9 % of rdg + 15 fA) 1 ch/2 ch 1 ch/2 ch Expandable (10 slots) +/- (0.1 % of rdg + 300 fA + 1 fA x force voltage) Expandable (10 slots) Product picture Measurement type Voltage Force/Current Measure Current measurement (floating) Current measurement range Minimum current resolution Minimum current measurement accuracy Number of channels Product model Product name 34410A/11A 3458A 4339B N6705B (N6784A) U2722A/23A Digital Multimeter 8½ Digit Digital Multimeter High-Resistance Meter DC Power Analyzer USB Modular Source/ Measure Unit Ammeter — Ammeter — Ammeter SMU SMU 100 µA–3 A 100 pA 100 nA–1 A 1 pA — 100 pA–100 µA 10 fA — 10 µA–3 A 100 pA — 1 µA–120 mA 100 pA +/- (0.05 % of rdg + 0.025 % of range) +/- (30 ppm of rdg + 400 ppm of range) +/- ((2.57 + (6E -12/ measuring current source)) % of rdg) +/- (0.025 % of rdg + 8 nA) +/- (0.085 % of rdg + 0.85 nA) 1 ch 1 ch 1 ch 1 ch 3 ch Product picture Measurement type Voltage Force/Current Measure Current measurement (floating) Current measurement range Minimum current resolution Minimum current measurement accuracy Number of channels Difference between source measure unit (SMU) and ammeter Source Measure (or Monitor) Unit, referred to as SMU, General SMU structure is a DC power source that enables force and measurement of voltage and current. Key features include: - High-accuracy, low-noise voltage and current output - Ultra low current measurement capabilities - 4-quadrant (at least 2-quadrant) measurement capabilities An ammeter is only capable of measurements. For more information on Agilent Technologies’ products, applications or services, please contact your local Agilent office. The complete list is available at: www.agilent.com/find/contactus Americas Canada Brazil Mexico United States Asia Pacific Australia China Hong Kong India (877) 894 4414 (11) 4197 3600 01800 5064 800 (800) 829 4444 1 800 629 485 800 810 0189 800 938 693 1 800 112 929 Japan Korea Malaysia Singapore Taiwan Other AP Countries I x1 SMU Guard A SMU Force SMU Sens 0120 (421) 345 080 769 0800 1 800 888 848 1 800 375 8100 0800 047 866 (65) 375 8100 *0.125 €/minute source source sink v V Europe & Middle East Belgium 32 (0) 2 404 93 40 Denmark 45 45 80 12 15 Finland 358 (0) 10 855 2100 France 0825 010 700* Germany Ireland Israel sink 49 (0) 7031 464 6333 1890 924 204 972-3-9288-504/544 Italy Netherlands Spain Sweden United Kingdom 39 02 92 60 8484 31 (0) 20 547 2111 34 (91) 631 3300 0200-88 22 55 44 (0) 118 927 6201 For other unlisted countries: www.agilent.com/find/contactus Product specifications and descriptions in this document subject to change without notice. © Agilent Technologies, Inc. 2013 Published in USA, January 28, 2013 5990-9804EN