Semiconductor Technology Improved InGaP/GaAs HBT technology facilitates high linearity PAs While innovative circuit techniques aid in improving the performance of highpower amplifiers, underlying RF power transistors play an equally important role in achieving PA performance goals. This article reports on the improvement in a recently developed InGaP/GaAs HBT for 24 V to 28 V linear PA operation. Key improvements include adjacent-channel leakage ratio under WCDMA modulation, ruggedness to sustain high VSWR, and reliability. Plus, it reports on lifetime tests conducted to guarantee the performance of the improved HBT technology. By Nan-Lei Larry Wang G allium arsenide (GaAs) heterojunction bipolar transistor (HBT) has become the dominant technology for handset power amplifier (PA) applications due to its linearity and efficiency. Consequently, GaAs HBT with the emitter made of indium gallium phosphide (InGaP) is widely used in handset PAs, and is gaining acceptance in infra-structure amplifier designs. To address base station applications with power levels above multi-Watt, operation voltage higher than the common 3 V to 7 V now used must be adopted. The base station PA application commonly requires 24 V to 28 V operation, and occasionally even above 30 V[1,2]. An InGaP/GaAs HBT technology was developed in our labs for 28 V power amplification[3-5], which is compatible with standard MMIC technology. To achieve high breakdown voltage in InGaP/GaAs HBT, a thick collector is required: 3 m thickness is commonly used. The thick collector presents challenges to semiconductor processing in lithography and step coverage of metal interconnection. Power transistors demand large total device size. Multiple fingers are arranged into a single building block. Such building blocks can deliver 2 W RF power in the 1 GHz to 3 GHz frequency band. Multiple building blocks can be arrayed into a single-power HBT for higher power levels. The fT and fmax of the basic HBT finger are 6.4 GHz and 25 GHz respectively. In a typical lineup of power amplifiers, the power stage is often a class B circuit for the best efficiency, and the driver stage a class AB for a trade-off of linearity and efficiency, and the pre-driver stage may be a class A amplifier. Working with InGaP/GaAs HBT, the goal is to operate the driver and pre-driver stages in near-class B operation for better efficiency, while achieving a superior linearity at the back-off power level. Class B operation with high linearity can 18 Figure 1. Single-building block layout. be achieved by a low-frequency low-source impedance, or a dynamic bias circuit[7]. The ruggedness is improved by increasing the ballasting to withstand high output mismatch of 10:1 VSWR with typical input power at 1 dB gain compression and overdrive condition of typical 8 dB gain compression into 50 load at 30 V. Accelerated lifetime test at 315 oC junction temperature and 28 V bias was repeated. More than 3000 hours lifetime test on HBTs was achieved; the Gummel plot before and after the 3000 hours lifetime test shows no increase of the leakage current. The high linearity power performance in class B condition in the back-off power level, the ruggedness under mismatch and overdrive condition, and the long lifetime of the InGaP/ GaAs HBT technology makes it a contender for the 28 V power amplifier application. High-voltage HBT fabrication InGaP/GaAs HBT for 28 V operation is www.rfdesign.com identical to common 5 V counterpart in its epitaxial layers except the collector thickness. Increasing collector thickness to 3 m enables the base-collector breakdown voltage to go more than 60 V. Likewise, monolithic microwave integrated circuit (MMIC) for 28 V HBT is achieved with two interconnection metal layers, MIM capacitor, thin-film resistor, spiral inductor, and through substrate via holes. The substrate is thinned to 4 mils. As a result, BVcbo of 70 V is achieved with BVceo over 30 V. With 28 V as the bias voltage, the collector voltage in RF operation will swing much above 28 V and exceed the BVceo. Such condition does not present any concern to the device operation or its reliability[8]. Power HBT design Power HBT, like other semiconductor technology, is made of multiple small devices strung in parallel. Thermal resistance design is the first task for any power device. Sufficient spreading of the active HBT fingers across October 2006 RF Design www.rfdesign.com 19 ��� ������ �� ��� ������ ������ ��� � ������ ���������� ������������������ �������������������� III ���� ���� 1.7 1.9 2.1 2.3 Figure 2. The analysis of the third-order intermodulation distortion (IMD3) contributed by the transconductance non-linearity in a bipolar transistor. the IC die is done in the conventional MMIC approach. Bipolar transistor is known to require ballasting since Vbe has a negative temperature coefficient. The individual HBT finger size is balanced between the RF performance and thermal resistance. Multiple HBT fingers are linked into the basic building block. The building block in the present design delivers around 2 W RF power at 2 GHz. Each building block has a MMIC prematch circuit. The bias circuit for the 28 V power HBT is implemented on the same chip through the current mirror approach. Excellent thermal stability is achieved: less than 9% change in the quiescent current is achieved over –40 oC to +85 oC. RF performance Linearity improvement: The driver stage for the power amplifier chain is often biased toward class A in order to provide the needed linearity. This approach sacrifices the operation efficiency. It was found that a low-frequency low-source impedance matching improves the linearity in near-class B operation[4,6]. At the dc side of the choke, a 6 µF shunt capacitor is used to provide a low impedance at the modulation frequency and 5 dB improvement in the IM3 is observed. The improvement comes from the elimination of the low-frequency component (ω1-ω2) at the input, which if existing will mix with ω1 and ω2 to generate the third-order distortion[6]. Further improvement on the linearity in class AB or class B operations were achieved ������������������������������������������������������� ���������������������������������������������������� ������ ������ ������ ������ ������ ������ ������ ������ ������ ������ ������ ������ ������ ���������� � ��� ������� ��� �� � ��� ������� ��� �� � ��� ������� ��� �� � ��� ������� ��� �� � ��� ������� ��� �� � ��� ������� ��� �� � ��� ������� ��� �� � ��� ������� ��� �� ��������������� �������������� ������������� ����� ����� ����� ����� ����� ����� ����� ����� ������������� ����� �������������� ����� ��������������� ����� ������ ������ ������ ������ ������ ������ ������ ������ ������ ������ ������ ������ ������ ���������� �������������������������������������������������������� ����������������������������������������������������� ���������� ���������� 1.5 ����������� ����� 1.3 ����� 1.1 ����� 0.9 ����� 0.7 ����� II ����� I ����� ���� ����� ��� via a dynamic bias circuit. The major nonlinearity in the bipolar transistor is found to come from the exponential I-V relationship. Following the previously reported analysis[11], HBTs are found to have similar behavior as LDMOS in the third-order derivative of the function Ic(Vin) as shown in Figure 2. The curve of Ic-Vin along the load line follows the exponential relationship with the ballasting resistor effect. The quiescent bias point is at point I. For conventional class B operation, the dc average voltage will remain at point I regardless of the RF swing. With the dynamic bias circuit, the time average bias point is lifted up to conditions II then III as the input power level is increased. The RF voltage avoids swinging into the peaking portion of the gm (Vin) curve as the bias point is lifted by the dynamic bias circuit. Thus, improving the linearity in near-class B operation. Figure 2 shows the analysis of the third-order intermodulation distortion (IMD3) contributed by the transconductance nonlinearity in the bipolar transistor. Memory effect was checked on the singlebuilding block HBT by varying the two-tone frequency spacing from 1 MHz to 120 MHz. Figure 3 demonstrates the test results for average power levels from 10 dBm to 30 dBm. The test was done from 1 MHz to 120 MHz. The curves are from 10 dBm to 30 dBm of the average power (PEP is 3 dB higher). The IMD3 is fairly flat across this frequency band. Figure 4 compares the 1BB power HBT (with Psat ~ 33 dBm) tested under two-tone and WCDMA signals at 2.14 GHz with and without the dynamic bias circuit in the nearclass B bias condition. The improvement in linearity by the dynamic bias circuit is most noticeable over the output power range within 15 dB of the P1dB. At 20 dBm average Pout, the ACLR of WCDMA signal improves over 10 dB. The IM3 improves by 15 dB at 23 dBm ����� ��� ���������� Figure 3. Two-tone test result of the building block HBT with dynamic bias circuit vs. the frequency separation. 20 www.rfdesign.com October 2006 RF Design www.rfdesign.com 21 ��� ���������� ��� �������� ��� ����������� �������� ��� ����������� ��� ��� ��� ���� ��� ��� ��� ��� ��� ��� ���� ���� ����� ����� ���������� ����� ����� ���������� ��� ��� ��� Figure 4. Comparison of linearity with and without the dynamic bias circuit. ���� ����� ���� ����� ���� ����� ��� ����� ����� ������� ���������� ����� ��������� ��������� ���������� �������� �������� ��������� ��� ����� ����� ����� ���������� Figure 5. ACLR and efficiency vs. temperature for 2BB size HBT. output power. At high power levels where the peak power exceeds Psat, the clipping of current or voltage waveforms becomes the dominant non-linear effect and cannot be improved by the dynamic bias circuit. Temperature response of the dynamic bias circuitry: The RF performance of the 28 V HBT with dynamic bias circuit scales well with the sizes up to four building blocks (or ~38 dBm saturated power). The dynamic bias circuit also demonstrates excellent temperature stability in RF operation as evaluated over the –40 oC to +85 oC range. A 2BB size HBT with the dynamic bias circuit was evaluated over temperature with its result shown in Figure 5. At ACLR = –50 dBc under the WCDMA signal, the output power is maintained within 1 dB; the efficiency at ACLR = –50 dBc is 16% over the same temperature range. 22 The power HBT with dynamic bias circuit also performs well on other modulation schemes. Lifetime, reliability and ruggedness Several rounds of accelerated lifetime tests were conducted. At 28 V bias and 0.05 mA/µm2 quiescent bias current, 3000 hour tests were repeated at a junction temperature of 310 oC. This level of lifetime is expected as the 28 V HBT operates at lower current density than its 5 V counterpart since the current density is one key factor to the lifetime. The collector sidewall in the 28 V HBT has not shown any leakage in the accelerated lifetime test. These tests demonstrate that 28 V HBT not only maintains the same level of lifetime as the 5 V InGaP/GaAs HBT[12], but also is rugged against mismatch, RF power overdrive, and VCC fluctuations. www.rfdesign.com The result is shown in Figure 6. A Gummel plot was taken before and after the 3000 hours accelerated life test. Figure 6 presents the outcome. Little change can be noticed down to the nA range. The power device, under normal usage, may be subjected to mismatch or overdrive conditions and it must be rugged enough to survive such conditions. The ruggedness is related to the level of ballasting. Under the presently chosen ballasting level, the three HBTs of 1BB, 2BB and 4BB were individually tested for output mismatch. The input power is held constant at the level providing output power of P1dB under normal operation; then the output load is changed from 50 to 10:1 under all phases. The test started at VCC = 24 V and went all the way up to 30 V without any observed device degradation. With the peak-to-average ratio (PAR) of the modulation signal in the 6 dB to 10 dB range, it is not uncommon to have the peak power level overdrive the amplifier way beyond the 1 dB gain compression point. Therefore, another test was conducted with the RF overdrive under the normal matching condition with the collector biased at 28 V. For all three sizes, 8 dB gain compression at 2.14 GHz was achieved without damage or degradation with the sine wave CW signal. A small number of samples also underwent an RF burn-in. The HBT hybrid amplifier was driven to P1dB level at room temperature for more than 500 hours, and no change can be noticed. All these experiments demonstrate that a InGaP/GaAs HBT can be a rugged, reliable, and linear device for industrial applications such as a base station amplifiers. A 28 V solution InGaP/GaAs HBTs were designed for the 28 V power application. The semiconductor device structure and microfabrication procedure were introduced. The 28 V process borrows many steps from its low-voltage counterpart. Power transistor design to the 10 W level was discussed. Special attention to the balance of the phase and magnitude of the RF signal across all the HBT fingers is essential to maintain the performance. High linearity in class AB and near-class B operation was achieved with the dynamic bias circuit approach. The combination of the high linearity RF performance in the back-off power level, the ruggedness in RF power overdrive and the output mismatch condition, and the long lifetime demonstrated that InGaP/GaAs HBT technology is mature to serve the 28 V linear power operation in infrastructure applications. October 2006 RF Design www.rfdesign.com 23 Buckle up for speed ����������������������������������������� �������� �������� �������� �������� Shift gears to what’s possible. The new Agilent MXA has broken all speed limits with measurement ������� A signal analyzer clocked at 5 ms. �������� �������� �������� �������� times 30-300% faster than other �������� analyzers. Pressure to keep ahead �������� requires driving down test time. The MXA signal analyzer helps �������� ��� ������� � �� �� � ������� � �� �� ���������� ���� �� �� ���������� ���� �� �� ��� ��� ��� ��� ����������� ��� ��� ��� you keep the lead with exceptional speed and performance. Figure 6. Gummel plot at room temperature of the HBT before and after more than 3000 hours accelerated lifetime test. Stay ahead, find the edge, move Acknowledgment it forward. To see how the new MXA lets you perform at speeds never before possible, go to www.agilent.com/ find/possible1. It’s signal and spectrum analysis at the edge of possibility. Agilent MXA Midrange Signal Analyzer Marker Peak Search < 5 ms W-CDMA ACLR (0.2 dB, standard deviation) � 14 ms Measurement Mode Switching < 75 ms Analysis Bandwidth 25 MHz Absolute Amplitude Accuracy 0.3 dB W-CDMA ACLR Dynamic Range 73 dB u.s. 1-800-829-4444, ext. 5461 canada 1-877-894-4414, ext. 5461 www.agilent.com/find/possible1 The authors acknowledge the fruitful discussions with Walter Strifler and the technical assistance of Huy Pham and Sindolfo Gacayan. The effort by C. Dunnrowicz in the early phase of the project is appreciated. RFD References 1. D. Hill, T.S. Kim, “28 V Low Thermal-Impedance HBT with 20 W CW Output Power,” IEEE Trans. Microwave Theory and Tech., vol. MTT-45, No. 12, pp. 2224-2228, December 1997. 2. P. Kurpas et al, “High-voltage GaAs Power-HBTs for Base-station Amplifiers,” 2001 IEEE MTT-S Int. Microwave Symposium Digest, pp. 633-636, June 2001. 3. N. L. Wang, C. Dunnrowicz, X. Chen, H. F. Chau, X. Sun, Y. Chen, B. Lin, I. L. Lo, C. H. Huang and M.H. T. Yang, “High-efficiency 28 V class AB InGaP/GaAs HBT MMIC Amplifier with Integrated Bias Circuit,” 2003 IEEE MTT-S International Microwave Symposium Digest, vol 3, pp, June 2003, pp. 2397-2402. 4. N. L. Wang, C. Dunnrowicz, W. Ma, X. Chen, H. F. Chau, X. Sun, Y. Chen, B. Lin, I. L. Lo, C. H. Huang and M.H. T. Yang, “Linearity Improvement of Multi-Watts 24 V28 V InGaP/GaAs HBT by Low-frequency Low-source Impedance Matching,” 2004 IEEE MTT-S International Microwave Symposium Digest, vol. 3, pp. 1721-1724, June 2004. 5. N.L.Wang, W. Ma, C. Dunnrowicz, X. Chen, H.F. Chau, X. Sun, Y. Chen, B. Liin, I.L. Lo, C.H. Huang, M.H.T. Yang, C.P. Lee, “28 V High-efficiency High-linearity InGaP/GaAs Power HBT,” 2003 PA Workshop 6-2, UCSD. 6. J.H.K. Vuolevi, T. Rahkonen, J.P.A. Manninen, “Measurement Technique for Characterizing Memory Effects in RF Power Amplifier,” IEEE Trans. MTT, vol. 49, No. 8, pp. 1383-1389, August 2001. 7. N.L.Wang, W. Ma, S Xu, e. Camargo, XP Sun, P. Hu, Z. Tang, H.F. Chau, A. Chen, CP Lee, “28 V High-linearity and Rugged InGaP/GaAs Power HBT,” 2006 IEEE MTT-S International Microwave Symposium Digest, WE4-B, June 2006. 8. M. Rickelt, H-M Rein, E. Rose, “Influence of Impact-ionization-induced Instabilities on the Maximum Usable Output Voltage of Si-Bipolar Transistors,” IEEE Trans. ED, vol. 48, No. 4, pp. 774-779, April 2001. 9. D.E. Dalson et al, “CW measurement of HBT Thermal Resistance,” IEEE Trans. Elec. Dev. 39-10, pp. 2235-2239, 1992. 10. K. Goverdhanam, W. Dai, M. Frei, D. Farrell, J. Bude, H. Safar, M. Mastrapasqua, T. Bambridge, “Distributed Effects in Highpower RF LDMOS Transistors,” 2005 IEEE MTT-S International Microwave Symposum Digest, pp. 455-458, June 2005. 11. J. C. Pedro and N. B. Carvalho, “Intermodulation Distortion in Microwave and Wireless Circuits,” Artech House 2003. 12. H.F. Chau et al, “Wafer Level Reliability Tests of InGaP HBTs Using High Current Stress,” 2002 IEEE GaAs Mantech Digest. ABOUT THE AUTHOR Nan-Lei Larry Wang received his BSEE from National Taiwan University, and MSEE and PhD from UC Berkeley. He has more than 20 years industry experience on RF, microwave, millimeter-wave IC and cellular phone RF transceiver design, which includes work at Raytheon Research Division, Rockwell International Science Center and Denso’s cellular phone design center. He co-founded EiC Corp., which pioneered the development of high-reliability InGaP/GaAs HBT for wireless infrastructure base station and handset power amplifiers. In 2004, the business was merged into WJ Communications, where he is the vice president of Advanced Power Devices. © Agilent Technologies, Inc. 2006 24 www.rfdesign.com October 2006