Analog Circuit Design in Nanoscale CMOS Technologies Opportunities and Challenges Trond Ytterdal Circuits and Systems Group Department of Electronics and Telecommunication Norwegian University of Science and Technology (NTNU) 2006-2007: Sabbatical at UofT Room: BA5106 trond@eecg.toronto.edu October 11, 2006 1 Trond Ytterdal, Department of Electronics and Telecommunication Outline • Introduction • Transistor performance – How does transistor performance change as technology is scaled down to nanoscale* nanoscale dimensions • Analog circuit performance – How does analog circuit performance change as technology is scaled down *The 2 term nanoscale is used for dimensions less than 100nm Trond Ytterdal, Department of Electronics and Telecommunication CMOS technology downscaling Printed gate length P h [μ m] 10 3μm 2μm Data from INTEL ITRS Roadmap 1.5μm 1 08 0.8μm 0.5μm 0.35μm 0.18μm 90nm 0.1 45nm 32 32nm 18nm 0.01 1970 1975 1980 1985 1990 1995 2000 2005 2010 2015 2005 2010 2015 Year Vdd [V] 10 1 0.1 1970 1975 1980 1985 1990 1995 2000 Year Gate length divided by two approximately every 5 years 3 Trond Ytterdal, Department of Electronics and Telecommunication Transistor performance • Transistor performance metrics for analog and RF design: – – – – – – – – – 4 Transconductance Intrinsic gain (gm/gds) Capacitances Maximum operating p g frequency q y Efficiency (gm/Id) Linearity Noise Mismatch Gate leakage Trond Ytterdal, Department of Electronics and Telecommunication Transconductance and intrinsic gain 1.E-03 1.E 03 • 65 nm 1.E-04 90 nm 0.13 um 0.18 um Transconductance is, for f all practical purposes, independent of the technology node gm [S] 1.E-05 F a velocity For l it saturated t t d channel: h l 1.E-06 I d = WcoxVeff vs 1.E-07 ⇒ g m = Wcox vs Minimum gate length, same W /L V ds = 1/2V DD 1.E-08 1 L ⇒ g m does d nott scale l W ∝ L; cox ∝ 1.E-09 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03 Drain current [A] 70 60 Minimum gate length, same W /L V ds = 1/2V DD 65 nm 90 nm 0.13 um 0.18 um gm /gds 50 40 30 20 • Intrinsic gain is reduced as technologies are scaled down down. At the 65nm node the maximum intrinsic gain is reduced by more than 80% compared to the g gain at the 0.18μm μ node. 10 0 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03 Drain current [A] 5 Trond Ytterdal, Department of Electronics and Telecommunication Transistor capacitances Capacitancee [fF] 1.1 1.0 0.9 0.8 0.7 Cgs Cdb Minimum gate length, same W /L ; V ds = 0 0.6 0.5 0.4 0.3 0.2 0.1 0.0 90nm 0.13um 0.18um Capacitances extracted from NMOS having minimum drain and source areas for the given W/L (~3). 6 Trond Ytterdal, Department of Electronics and Telecommunication Maximum operating frequency • The maximum speed of an amplifier is limited by the ratio of the transconductance and the capacitance of a transistor: fT = gm 2π(C gs + C gd + Cdb ) 2.5E-04 1.0E+12 Minimum Mi i gate length, l h same W /L / V ds = 1/2V DD 65 nm 1.0E+11 90 nm 2.0E-04 0.18 um 1 5E-04 1.5E 04 1.0E+09 Id [A] gm /(Cgs +Cdb )/2π [Hz] 0.13 um 1.0E+10 1.0E+08 1.0E-04 1.0E+07 1.0E+06 1.0E+05 1.E-10 5.0E-05 Minimum gate length, same W /L Vds = 1/2V DD 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 D i currentt [A] Drain 7 (1) 1.E-04 1.E-03 0.0E+00 1.E+06 90nm 130nm 180nm 1.E+07 1.E+08 1.E+09 1.E+10 1.E+11 f T [Hz] Trond Ytterdal, Department of Electronics and Telecommunication Potential speed improvement Potential speeed improvem ment of scaling 6.0 65 nm 90 nm 0 13 um 0.13 • By scaling down a potential improvement in speed can be obtained compared to realization in a 0.18μm technology 0 18 um 0.18 5.0 4.0 3.0 20 2.0 1.0 Minimum gate length, same W /L ; V ds = 1/2V DD Speed potential normalized to the 0.18μm node 0.0 0 0 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03 Drain current [A] 8 Trond Ytterdal, Department of Electronics and Telecommunication Transistor efficiency (gm/ID) 35 90nm 0.13um Minimum gate length; W /L = 5; V ds = 1V 30 0.18um 0.25um gm /ID [[1/V] 25 20 15 10 5 0 1.0E-12 1.0E-10 1.0E-08 1.0E-06 1.0E-04 1.0E-02 Drain current [A] • The transistor is most efficient (maximum bang for the buck) in weak inversion • Maximum value is nearly independent of technology 9 Trond Ytterdal, Department of Electronics and Telecommunication Linearity (1) The Taylor expansion of the small signal drain current of a MOS transistor can be written as: 2 id = g m v gs + a 2 g m v gs + a3 g m v 3gs + L 2 3 + g ds vds + a 2 g ds vds + a3 g ds vds +L 2 3 + g mbb vbs b + a 2 g mb vbs b + a3 g mb vbs b +L 2 2 + a 2 g m g ds v gs vds + a32 g m g ds v gs vds + a3 g m 2 g ds v gs vds +L 2 2 + a 2 g m g mb v gs vbs + a32 g m g mb v gs +L vbs + a3 g m 2 g mb v gs vbs 2 2 + a 2 g ds g mb vds vbs + a32 g ds g mb vds vbs + a3 g ds 2 g mb vds vbs +L + a3 g m g ds g mb v gs vds vbs + L Here, the coefficients are the higher order derivatives of the total drain current with respect to one or more of the control voltages. voltages For example: 1 ∂2Id a2 g m = 2 2 ∂Vgs 10 Trond Ytterdal, Department of Electronics and Telecommunication Linearity (2) 1.0E-03 1.0E-05 |a 2gds| [S/V V] Second order nonlinearity in channel conductance (gds) increases as t h l technology iis scaled down. 90nm 0.13um 0.18um 1.0E-04 1 0E 06 1.0E-06 1.0E-07 1.0E-08 1.0E-09 1.0E-10 1.0E-11 1.0E-12 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03 Id [A] 1.0E-02 a 2ggm [S/V] 1 0E 03 1.0E-03 Second order nonlinearity li it iin transconductance almost independent of technology 90nm 0 13um 0.13um 0.18um 1.0E-04 1 0E 05 1.0E-05 1.0E-06 1.0E-07 1 0E 07 1.0E-10 1.0E-09 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 Id [A] 11 Trond Ytterdal, Department of Electronics and Telecommunication Noise • Equivalent noise PSD (power spectral density) referred to the gate of a transistor connected in a common-source configuration*: ⎛ γ K 2 = 4k BT ⎜⎜ + Vng ⎝ g m WLcox f ⎞ ⎟⎟ ; K process dependent ⎠ Si-SiO2 interface noise Channel noise – Increases at low current – Minimum in weak inversion for given current Traditionally [1], the following expression is used for γ: ⎧2n / 3 in strong inversion γ=⎨ ⎩n / 2 in weak inversion *Transform 12 valid up to a frequency ω ~ gm/Cgd Trond Ytterdal, Department of Electronics and Telecommunication Potential SNR (1) Thermal noise I d2 • D Decreases att llow current • Minimum in weak inversion for a given current 13 120 65nm 90nm 100 10log((10-6Id 2/Ind 2) [[dB] 1 = 2 γ gm I nd 4 k BT Id Id 0.13um 0.18um 80 60 40 20 Minimum gate length, same W /L ; V ds = 1V 0 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03 Drain current [A] Trond Ytterdal, Department of Electronics and Telecommunication Potential SNR (2) Flicker noise 2 I nd = WLf ⎛g ⎞ 4k BTK ⎜⎜ m ⎟⎟ ⎝ Id ⎠ 80 65nm 2 • D Decreases att llow current • Minimum in weak inversion for a given current 14 10log(Id 2/(Ind 2Agate )) [dB] I d2 90nm (L = 0.1um) 75 0.13um 0.18um 70 65 60 55 Minimum gate length, same W /L ; V ds = V DD /2 50 1.E-11 1.E-09 1.E-07 1.E-05 1.E-03 Drain current [A] Trond Ytterdal, Department of Electronics and Telecommunication Mismatch (1) • Mismatch of two matched transistors identical by design can be characterized by: ΔVT = VT 1 − VT 2 with σVT = σ(ΔVT ) = AVT / WL Δβ /β = 2(β1 − β 2 ) /((β1 + β 2 ) with σβ = σ(Δβ /β) = Aβ / WL AVT and Aβ depends on process, layout and more … • Based on the quadratic MOS model, one can derive the following well known formulas: Same gate voltage: ⎛Δ ΔII σ⎜⎜ d ⎝ Id 15 ⎞ ⎛g ⎞ ⎟⎟ = σβ2 + ⎜⎜ m σVT ⎟⎟ ⎝ Id ⎠ ⎠ Same drain current: 2 ⎛I ⎞ 2 σ(ΔVG ) = σVT + ⎜⎜ d σβ ⎟⎟ ⎝ gm ⎠ 2 Trond Ytterdal, Department of Electronics and Telecommunication Mismatch (2) • Mismatch per unit area decreases as technologies are scaled down From theory and ideal scaling: Gate area required for any given σ(ΔVT) normalized to the Lmin = 70nm AVT ∝ tox ∝ Lmin 1000 Relative gate area IIn reality lit AVT does d nott scale l as fast as Lmin AVT [mV Vμm] 100 100 10 10 1 0.01 0.1 1 10 Minimum ggate length g [μ m]] 1 0.01 0.1 1 10 Minimum gate length [μm] Experimental Data from [2] 16 Trond Ytterdal, Department of Electronics and Telecommunication Gate leakage current (1) Gate current can NOT be neglected in scaled down technologies. Dominated by tunneling current => Relatively insensitive to device temperature. 1.E-04 Minimum gate length, gate width = 100μm 1.E-05 90nm (simulated) 0.13um 0.13um (simulated) 0.18um 1.E-06 IG VG Gate current [A] 1.E-07 1.E-08 1.E-09 1.E-10 1.E-11 1.E-12 1.E-13 1.E-14 0 0.5 1 1.5 2 Gate voltage [V] g-flavor technologies 17 Trond Ytterdal, Department of Electronics and Telecommunication Gate leakage current (2) vg VG IG Small signal equivalent circuit assuming low to moderate frequencies and strong inversion ig ic Cox itunnel gtunnel At a given frequency the impedance of the two branches have the same magnitude g and the currents ic and itunnel will be equal q in magnitude. This frequency is given by ω gateCox = gtunnel 1 gtunnel ⇒ f gate = 2π Cox Above this frequency, frequency the total gate current is dominated by ic as in the traditional case. 18 Trond Ytterdal, Department of Electronics and Telecommunication fgate versus technology fgate is almost gate area i d independent d t and d an approximate i t expression is given in [3] as: 104 102 101 t (V gs −13.6) Here, tox is the oxide thickness in nm and Kfg is 1 1.5⋅10 5⋅1016 for NMOS and 0.5⋅1016 for PMOS. 100 fgate [Hz] 2 ox f gate t ≅ K fg f Vgs e 90nm 0.13μm 0.18μm 103 10-1 10-2 10-3 10-44 10-5 10-6 A plot of this expression is shown to the right for three different technologies. 19 10-7 10-8 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 Veff [V] Trond Ytterdal, Department of Electronics and Telecommunication Analog circuit performance • Analog and RF circuit performance metrics: – Accuracy (Dynamic range) – Speed – Power consumption Accuracy 20 Trond Ytterdal, Department of Electronics and Telecommunication FOM definition • One commonly used Figure-of-merit (FOM) definition: FOM = P DR 2 ⋅ f Here, P is the power consumption, DR is the dynamic range and f is the highest signal frequency that can be processed by the circuit • Small is GOOD. 21 Trond Ytterdal, Department of Electronics and Telecommunication Dynamic range (1) • Here, we define the dynamic range (DR) as the ratio of the largest to the smallest possible signal amplitudes.* • If we assume that DR is limited by noise on the lower side and the power supply voltage on the upper side, we can write DR = V pp / 2 Vn _ rms = ηvVDD 2Vn _ rms (2) where, Vpp is the maximum peak-to-peak value of the signal, Vn_rms is the RMS noise voltage, ηv is the voltage l efficiency ffi i defined d fi d by b Vpp/VDD. *The 22 ratio of squared amplitudes is also a common definition Trond Ytterdal, Department of Electronics and Telecommunication Dynamic range (2) • If we assume that matching limits DR on the lower side we can write side, DR = V pp / 2 κσ(Vos ) = ηvVDD 2 κσ(Vos ) (3) • where κ is a yield parameter and σ(Vos) is the standard deviation of a critical offset voltage in the circuit. • We observe for both ((2)) and (3) ( ) that DR scales with VDD and ηv For the rest of the talk we assume that DR is limited by noise on the lower side 23 Trond Ytterdal, Department of Electronics and Telecommunication Signal-to-noise ratio (SNR) • SNR is defined as the ratio of the signal power to the noise power power. For a sinusoidal signal, signal the maximum SNR given by SNR = 2 V pp 8Vn2_ rms = (ηvVDD ) 2 8Vn2_ rms (4) • If we compare (4) with (2), we see that DR = 2 ⋅ SNR 24 (5) Trond Ytterdal, Department of Electronics and Telecommunication SNR versus power VDD Vpp IDD vout i(t) Gm vout C vin VSS 1/f 1 1 1 1 2 fΔq = VDD fV pp C = fV pp C ηi ηi ηv ηi Here, ηi is the current efficiency of the transconductor and Δq/ηi is the charge transferred from the power supply in one period and. and We have assumed that VSS = 0 Power: P = VDD I DD = VDD SNR: SNR = 2 V pp /8 k T 2 ⇔ V pp = 8 B SNR k BT / C C Only thermal noise is considered. Combining the two equations we get the power required per pole versus SNR: P= Based on [1] and [4] 25 8k BT ⋅ f ⋅ SNR ηi ηv (6) Trond Ytterdal, Department of Electronics and Telecommunication Theoretical FOM • Rewriting (6) in terms of FOM: P 8k BT P 4 k BT = ⇒ = 2 f ⋅ SNR ηi ηv ηi ηv f ⋅ DR 4k T ⇒ FOM = B ηi ηv • Ideal world (ηv = ηi = 1): FOM i = 4k BT (7) • Hence, H one iimportant question i becomes: b How does ηi and ηv depend on technology? 26 Trond Ytterdal, Department of Electronics and Telecommunication FOMs based on measurements • FOMs calculated based on measured performance of CMOS circuits are always larger than values obtained using (7) due to one or more of the following: DR limited by distortion Additional noise sources (e.g. flicker noise) Clock power in switched-capacitor circuits Poor current efficiency of MOS transistors (it is even bi dependent) bias d d t) – Parasitic capacitances – Matching requirements – – – – • Smaller mismatch => larger dimensions => larger parasitic capacitors 27 Trond Ytterdal, Department of Electronics and Telecommunication Reported FOMs for ADCs 1.0E+14 2 EN O B Fs FM = Pdiss 1997 1998 1999 2000 2001 2002 2003 2004 Selection from Walden Fig gure of meritt FM [Convers sions/J] Philips ISSCC04 1.0E+13 State-of-the-art 2004 Balmelli ISSCC04 Moyal ISSCC03 Miyazaki ISSCC02 Gaggl, ISSCC04 This design(03) Bjørnsen ESSCIRC05[5] Kwak (97) 1.0E+12 Kelly, ISSCC01 nAD12110-18(03) AD9245(03) Philips ISSCC03 Kulhalli ISSCC02 H Hernes ISSCC04 nAD10120-13(03) 1.0E+11 Siragusa ISSCC04 1.0E+10 1 MHz 100 MHz 10 MHz Conversion Rate [Sample/s] 1 GHz From [5] 28 Trond Ytterdal, Department of Electronics and Telecommunication Voltage efficiency (ηv) 0.30 • Assume that 65nm V pp = VDD − 2Vdsat d t 90nm 0.13um 0.20 Vdsatt [V] where Vdsat is the saturation voltage of our transistors • To keep ηv unchanged when we scale down technology, Vdsat must be scaled down at the same rate as VDD. 0.25 0.15 0.10 0.05 0.00 -0.6 -0.4 -0.2 0 0.2 0.4 0.6 Veff [V] Not possible to scale Vdsat much lower than 75mV ηv expected to decrease → FOM degrades 29 Trond Ytterdal, Department of Electronics and Telecommunication Current efficiency (ηi) Assuming CMOS implementation: The gain bandwidth (GBW) product of a single stage OTA is given by GBW = gm 2πC (8) Here gm is the transconductance of the input transistor and C is the load capacitance. Writing the square of the noise RMS voltages as: k T Vn2_ rms = B , C Inserting this equation in (2), (2) solving for C and inserting in (8) yields GBW = g m (ηvVDD ) 2 8πk BT ⋅ DR 2 (9) Hence, if DR and gm is kept constant, the speed of the circuit decreases with the square of the supply voltage. 30 Trond Ytterdal, Department of Electronics and Telecommunication Scenario 1: Dividing VDD by 2 while keeping GBW and DR: To keep it simple, assume that ηv does not change. From (9) we note that to keep GBW when supply voltage is reduced by a factor of 2, gm has to be increased by a factor of 4. It is common to change the W/L ratio and the drain current by th same relative the l ti amountt in i order d to t keep k Veff unchanged h d (adding devices in parallel). Hence, to increase gm by a factor of 4,, bias current and W/L are increased by y a factor of 4. If we assume that all stages of the amplifier are scaled in the same way, the current consumption will be increased by a factor of four. four → Power consumption doubles → ηi decreases → FOM degrades Downscaling will not help 31 Trond Ytterdal, Department of Electronics and Telecommunication Scenario 2: Increasing speed (1) 35 90nm Minimum gate length; W /L = 5; V ds = 1V while keeping DR and VDD: 0.13um 30 0.18um 0.25um 25 gm /ID [1/V] Assume that the frequency of the first non-dominant pole is given by (1) and that phase margin requirements forces a fixed ratio between fT and GBW . 20 15 10 5 0 1.0E-12 1.0E-10 1.0E-08 1.0E-06 1.0E-04 1.0E-02 Drain current [A] 2.5E-04 Minimum gate length, same W /L V ds = 1/2V DD 2.0E-04 1.5E-04 Id [A] Assume that the required speed eed is i suchh that th t wee have h e to t push the transistor deep into strongg inversion. 1.0E-04 5.0E-05 →ηi decreases → FOM degrades g Downscaling will probably help 0.0E+00 1.E+06 32 90nm 130nm 180nm 1.E+07 1.E+08 1.E+09 1.E+10 1.E+11 f T [Hz] fTmax@90nm Trond Ytterdal, Department of Electronics and Telecommunication Scenario 2: Increasing speed (2) • Watch out for gain degradation when increasing speed 70 60 Minimum gate length, length same W /L V ds = 1/2V DD 65 nm 90 nm 0.13 um 0.18 um • If speed increase is y increasing g obtained by Veff, gain will decrease gm /gds 50 40 30 20 10 0 1.E-10 →ηi decreases → FOM degrades Downscaling will not help 33 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03 Drain current [A] Trond Ytterdal, Department of Electronics and Telecommunication Maximizing FOM Some guidelines for maximizing FOM in nanoscale CMOS circuits: • Circuit level: – Maximize ηv by using as low Veffff as possible – Identify fTmax in your technology. Stay well below this frequency to maximize ηi * – Use U as hi high h supply l voltage lt as possible ibl (maybe ( b even higher than allowed by the foundry) • Architecture level: – Avoid high gain requirements (use, for example, gain calibration)) – Go to interleaved architectures if speed requirements cause you to move dangerously close to fTmax* *or 34 switch to a finer technology Trond Ytterdal, Department of Electronics and Telecommunication Summary • Back to near constant voltage scaling (at least for a while) ☺ • Back to near constant voltage scaling – Reliability issues: Have to verify circuits versus age • • • • • Speed of transistors ☺ SNR/DR Mismatch ☺ Linearity Potential for FOM improvement in some circuits by scaling down technology* ☺ *One example is ADCs where transistors are biased in regions of low current efficiency 35 Trond Ytterdal, Department of Electronics and Telecommunication List of symbols Parameter Parameter Description Agate Gate area μ Mobility β μcoxW/L n Subthreshold ideality factor Cgs Gate-source capacitance T Absolute temperature Cgd Gate-drain capacitance tox Oxide thickness Cdb Drain-bulk capacitance VDD Supply voltage cox Oxide capacitance per gate area Vds Drain-source voltage Cox O id capacitance Oxide it Veff Vgs – VT Frequency Vgs Gate-source voltage gm Transconductance vs Saturation velocity gds Channel conductance VT Threshold voltage Id Drain current W Gate width kB Boltzmann’s l ’ constant L Gate length f Lmin 37 Description Minimum ggate length g Trond Ytterdal, Department of Electronics and Telecommunication References [1] E.A. Vittoz, “Low Power Design: Ways to Approach the Limits”, SolidState Circuits Conference, 1994. Digest of Technical Papers. 41st ISSCC, pp 14 pp. 14-18, 18 Feb Feb. 1994. 1994 [2] K. Bult, “Analog Design in Deep Sub-Micron CMOS,” in Proc. ESSCIRC 2000, pp. 11-17. [3] A. Annema et al., “Analog Circuits in Ultra-Deep-Submicron CMOS,” IEEE J. of Solid-State Circuits, vol. 40, no. 1, Jan. 2005. [4] E.A. E A Vittoz, Vittoz “Low Low-power power Low Low-Voltage Voltage Limitations and Prospects in Analog Design”, in Analog Circuit Design, Editors R.S. van de Plaasche, W.M.C. Sansen, and J.H. Huijsing, Kluwer Academic Publishers, 1994. [5] J. Bjørnsen, Ø. Moldsvor, T. Sæther, T. Ytterdal, “A 220mW 14b 40MSPS Gain Calibrated Pipelined ADC,” in Proc. European Solid-State Circuits Conference f (ESSCIRC) ( ) 2005, Grenoble, Sept. p 12-14, pp pp. 165-168, 2005. 38 Trond Ytterdal, Department of Electronics and Telecommunication