University of California at Berkeley
EE 105:
Microelectronic Devices and Circuits
Spring 1997 MWF Version
Roger T. Howe
EE 105 Spring 1997
Lecture 1
A Motivating Example
■
An analog-to-digital converter for data transmission -- the analog voltage is
converted into a 13 bit digital word at 5 Msamples /sec.
From D. W. Cline and P. R. Gray, IEEE J. Solid-State Circuits, 31, March 1996,
pp. 294-303. © 1996 IEEE. Used by permission.
EE 105 Spring 1997
Lecture 1
Understanding this Microsystem on a Chip -1.2 µm n-well CMOS process
Technology and Devices:
n+ drain
n+ source
p+
p+ source
n well
p+ drain
p-type substrate
n+
Lecture 10
Digital Integrated Circuits: switches, shift register for collecting samples
C
C
IN
OUT
OUT
IN
C
C
(a)
Lecture 18
(b)
Analog Integrated Circuits: 12 opertional ampliÞers used in signal processing
V+
M8
M6
M7
1
2
_
vI−
M1
+
vI+
M2
IREF
M3
3
Cc
CL
+
vO
−
4
M4
M5
Lecture 38
V−
EE 105 Spring 1997
Lecture 1
Silicon Crystal Structure
°
5.43 A
°
2.35A
3sp tetrahedral bond
■
diamond lattice
■
atoms are bonded tetrahedrally with covalent bonds
4 valence electrons (Ð 4 q),
contributed by each ion
silicon ion (+ 4 q)
border of bulk silicon region
■
two electrons in bond
Two-dimensional crystal for sketching
EE 105 Spring 1997
Lecture 1
Intrinsic (Pure) Silicon (T > 0)
Ð
+
border of bulk silicon region
mobile electron
incomplete bond (mobile hole)
■
electron: mobile negative unit charge, concentration n (cm-3)
■
hole: mobile positive unit charge, concentration p (cm-3)
Unit of charge: q = 1.6 x 10-19 Couloumbs [C]
EE 105 Spring 1997
Lecture 1
Thermal Equilibrium
Generation rate: G units: cm-3 s-1
(thermal, optical processes)
Recombination rate: R ∝ n ⋅ p
n = electron concentration cm-3
p = hole concentration cm-3
With the absense of external stimulus,
Go = Ro
subscript ÒoÓ indicates thermal equilibrium
no po = constant = ni2 = 1020 cm-3 at room temperature (approximately)
Since holes and electrons are created together in intrinsic silicon,
no = po
which implies that both are equal to ni = 1010 cm-3
EE 105 Spring 1997
Lecture 1
Doping
Donors (group V) donate their 5th valence electron and become fixed positive
charges in the lattice. Examples: Arsenic, Phosphorus.
–
As+
mobile electron
border of bulk silicon region
immobile ionized donor
How are the thermal equilibrium electron and hole concentrations changed by
doping?
> region is Òbulk siliconÓ -- in the interior of the crystal, away from
surfaces
> charge in region is zero, before and after doping:
ρ = charge density (C/cm3) =
0
=
(- qno) +
electrons
( qpo) + (qNd)
holes donors
where the donor concentration is Nd (cm-3 )
EE 105 Spring 1997
Lecture 1
Electron Concentration in Donor-Doped Silicon
Since we are in thermal equilibrium, no po = ni2 (not changed by doping):
Substitute po = ni2 / no into charge neutrality equation and Þnd that:
2
qn i
0 = Ð qn o + --------- + qN d
no
Quadratic formula -->
2
2
2
4n i
N d + N d + 4n i
Nd Nd
n o = ---------------------------------------- = ------- + ------- 1 + --------2
2
2
2
N
d
We always dope the crystal so that Nd >> ni ... (Nd = 1013 - 1019 cm-3), so the
square root reduces to 1:
no = Nd
The equilibrium hole concentration is:
po = ni2 / Nd
Òone electron per donorÓ is a way to remember the electron concentration in silicon
doped with donors.
EE 105 Spring 1997
Lecture 1
Numerical Example
Donor concentration: Nd = 1015 cm-3
Thermal equilibrium electron concentration:
n o ≈ N d = 10
15
cm
Ð3
Thermal equilibrium hole concentration:
2
2
p o = n i ⁄ n o ≈ n i ⁄ N d = ( 10
10
Ð3 2
cm ) ⁄ 10
15
cm
Ð3
5
= 10 cm
Ð3
Silicon doped with donors is called n-type and electrons are the majority carriers.
Holes are the (nearly negligible) minority carriers.
EE 105 Spring 1997
Lecture 1
Doping with Acceptors
Acceptors (group III) accept an electron from the lattice to fill the incomplete
fourth covalent bond and thereby create a mobile hole and become fixed negative
charges. Example: Boron.
BÐ
+
mobile hole and later trajectory
immobile negatively ionized acceptor
Acceptor concentration is Na (cm-3 ), we have Na >> ni typically and so:
one hole is added per acceptor:
po = Na
equilibrium electron concentration is::
no = ni2 / Na
EE 105 Spring 1997
Lecture 1
Doping with both Donors and Acceptors:
Compensation
■
Typical situation is that both donors and acceptors are present in the silicon
lattice ... mass action law means that n o ≠ N d and p o ≠ N a !
positively ionized donors
As+
As+
BÐ
−
negatively ionized acceptor
mobile electron and trajectory
■
Applying charge neutrality with four types of charged species:
ρ = Ð qn o + q p o + qN d Ð qN a = q ( p o Ð n o + N d Ð N a ) = 0
we can substitute from the mass-action law no po = ni2 for either the electron
concentration or for the hole concentration: which one is the majority carrier?
answer (not surprising): Nd > Na
Na > Nd
-->
-->
electrons
holes
EE 105 Spring 1997
Lecture 1
EE 105 Spring 1997
Lecture 1