Solid-State Electronics Textbook: “Semiconductor Physics and Devices” By Donald A. Neamen, 1997 Reference: “Advanced Semiconductor Fundamentals” By Robert F. Pierret 1987 “Fundamentals of Solid-State Electronics” By C.-T. Sah, World Scientific, 1994 Homework: 0% Midterm Exam: 60% Final Exam: 40% Solid-State Electronics Chap. 1 1 Instructor: Pei-Wen Li Dept. of E. E. NCU Contents Chap. 1 Chap. 2 Chap. 3 Chap. 4 Chap. 5 Chap. 6 Chap. 7 Solid-State Electronics Chap. 1 Solid State Electronics: A General Introduction Introduction to Quantum Mechanics Quantum Theory of Solids Semiconductor at Equilibrium Carrier Motions: Nonequilibrium Excess Carriers in Semiconductors Junction Diodes 2 Instructor: Pei-Wen Li Dept. of E. E. NCU Chap 1. Solid State Electronics: A General Introduction Introduction Classification of materials Crystalline and impure semiconductors Crystal lattices and periodic structure Reciprocal lattice Solid-State Electronics Chap. 1 3 Instructor: Pei-Wen Li Dept. of E. E. NCU Introduction Solid-state electronic materials: – Conductors, semiconductors, and insulators, A solid contains electrons, ions, and atoms, ~1023/cm3. ⇒ too closely packed to be described by classical Newtonian mechanics. Extensions of Newtonian mechanics: – – Quantum mechanics to deal with the uncertainties from small distances; Statistical mechanics to deal with the large number of particles. Solid-State Electronics Chap. 1 4 Instructor: Pei-Wen Li Dept. of E. E. NCU Classifications of Materials According to their viscosity, materials are classified into solids, liquid, and gas phases. Solid Liquid Gas Low Medium High Atomic density High Medium Low Hardness High Medium Low Diffusivity Low diffusivity, High density, and High mechanical strength means that small channel openings and high interparticle force in solids. Solid-State Electronics Chap. 1 5 Instructor: Pei-Wen Li Dept. of E. E. NCU Classification Schemes of Solids Geometry (Crystallinity v.s. Imperfection) Purity (Pure v.s. Impure) Electrical Classification (Electrical Conductivity) Mechanical Classification (Binding Force) Solid-State Electronics Chap. 1 6 Instructor: Pei-Wen Li Dept. of E. E. NCU Geometry Crystallinity – Single crystalline, polycrystalline, and amorphous Solid-State Electronics Chap. 1 7 Instructor: Pei-Wen Li Dept. of E. E. NCU Geometry Imperfection – A solid is imperfect when it is not crystalline (e.g., impure) or its atom are displaced from the positions on a periodic array of points (e.g., physical defect). – Defect: (Vacancy or Interstitial) – Impurity: Solid-State Electronics Chap. 1 8 Instructor: Pei-Wen Li Dept. of E. E. NCU Purity Pure v.s. Impure Impurity: – chemical impurities:a solid contains a variety of randomly located foreign atoms, e.g., P in n-Si. – an array of periodically located foreign atoms is known as an impure crystal with a superlattice, e.g., GaAs Distinction between chemical impurities and physical defects. Solid-State Electronics Chap. 1 9 Instructor: Pei-Wen Li Dept. of E. E. NCU Electrical Conductivity Material type Resistivity (Ω-cm) Conduction Electron density (cm-3) Examples Superconductor 0 (low T) 0 (high T) 1023 Good Conductor 10-6 – 10-5 1022 – 1023 metals: K, Na, Cu, Au Conductor 10-5 – 10-2 1017 – 1022 semi-metal: As, B, Graphite Semiconductor 10-2 – 10-9 106 – 1017 Ge, Si, GaAs, InP Semi-insulator 1010 – 1014 101 – 105 Amorphous Si Insulator 1014 – 1022 1 – 10 Solid-State Electronics Chap. 1 10 Sn, Pb Oxides SiO2, Si3N4, Instructor: Pei-Wen Li Dept. of E. E. NCU Mechanical Classification Based on the atomic forces (binding force) that bind the atom together, the crystals could be divided into: – Crystal of Inert Gases (Low-T solid): Van der Wall Force: dipole-dipole interaction – Ionic Crystals (8 ~ 10 eV bond energy): Electrostatic force: Coulomb force, NaCl, etc. – Metal Crystals Delocalized electrons of high concentration, (1 e/atom) – Hydrogen-bonded Crystals ( 0.1 eV bond energy) H2O, Protein molecules, DNA, etc. Solid-State Electronics Chap. 1 11 Instructor: Pei-Wen Li Dept. of E. E. NCU Binding Force Bond energy is a useful parameter to provide a qualitative gauge on whether – The binding force of the atom is strong or weak; – The bond is easy or hard to be broken by energetic electrons, holes, ions, and ionizing radiation such as high-energy photons and x-ray. In semiconductors, bonds are covalent or slightly ionic bonds. Each bond contains two electrons—electron-pair bond.A bond is broken when one of its electron is removed by impact collision (energetic particles) or x-ray radiation, —dangling bond. Solid-State Electronics Chap. 1 12 Instructor: Pei-Wen Li Dept. of E. E. NCU Semiconductors for Electronic Device Application For electronic application, semiconductors must be crystalline and must contain a well-controlled concentration of specific impurities. Crystalline semiconductors are needed so the defect density is low. Since defects are electron and hole traps where e--h+ can recombine and disappear, short lifetime. The role of impurities in semiconductors: 1. To provide a wide range of conductivity (III- B or V-P in Si). 2. To provide two types of charge carriers (electrons and holes) to carry the electrical current , or to provide two conductivity types, n-type (by electrons) and p-type (by holes) Group III and V impurities in Si are dopant impurities to provide conductive electrons and holes. However, group I, II, and VI atoms in Si are known as recombination impurities (lifetime killers)when their concentration is low. Solid-State Electronics Chap. 1 13 Instructor: Pei-Wen Li Dept. of E. E. NCU Crystal Lattices A crystal is a material whose atoms are situated periodically on interpenetrating arrays of points known as crystal lattice or lattice points. The following terms are useful to describe the geometry of the periodicity of crystal atoms: – Unit cell; Primitive Unit Cell – Basis vectors a, b, c ; Primitive Basic vectors – Translation vector of the lattice; Rn = n1a +n2b +n3c – Miller Indices Solid-State Electronics Chap. 1 14 Instructor: Pei-Wen Li Dept. of E. E. NCU Basis Vectors The simplest means of representing an atomic array is by translation. Each lattice point can be translated by basis vectors, â, b̂ , ĉ. Translation vectors: can be mathematically represented by the basis vectors. Rn = n1 â + n2 + n3 ĉ, where n1, n2, and n3 are integers. Solid-State Electronics Chap. 1 15 Instructor: Pei-Wen Li Dept. of E. E. NCU Unit Cell Unit cell: is a small volume of the crystal that can be used to represent the entire crystal. (not unique) Primitive unit cell: the smallest unit cell that can be repeated to form the lattice. (not unique) Example: FCC lattice Solid-State Electronics Chap. 1 16 Instructor: Pei-Wen Li Dept. of E. E. NCU Miller Indices To denote the crystal directions and planes for the 3-d crystals. Plane (h k l) Equivalent planes {h k l} Direction [h k l] Equivalent directions <h k l> Solid-State Electronics Chap. 1 17 Instructor: Pei-Wen Li Dept. of E. E. NCU Miller Indices To describe the plane by Miller Indices – Find the intercepts of the plane with x, y, and z axes. – Take the reciprocals of the intercepts – Multiply the lowest common denominator = Mliller indices Solid-State Electronics Chap. 1 18 Instructor: Pei-Wen Li Dept. of E. E. NCU Example Use of Miller Indices Wafer Specification (Wafer Flats) Solid-State Electronics Chap. 1 19 Instructor: Pei-Wen Li Dept. of E. E. NCU 3-D Crystal Structures In 3-d solids, there are 7 crystal systems (1) triclinic, (2) monoclinic, (3) orthorhombic, (4) hexagonal, (5) rhombohedral, (6) tetragonal, and (7) cubic systems. Solid-State Electronics Chap. 1 20 Instructor: Pei-Wen Li Dept. of E. E. NCU 3-D Crystal Structures In 3-d solids, there 14 Bravais or space lattices. N-fold symmetry: ⇒6-fold symmetry With 2π/n rotation, the crystal looks the same! Solid-State Electronics Chap. 1 21 Instructor: Pei-Wen Li Dept. of E. E. NCU Basic Cubic Lattice Simple Cubic (SC), Body-Centered Cubic (BCC), and Face-Centered Cubic (FCC) Solid-State Electronics Chap. 1 22 Instructor: Pei-Wen Li Dept. of E. E. NCU Surface Density Consider a BCC structure and the (110) plane, the surface density is found by dividing the number of lattice atoms by the surface area; Surface density = 2 atoms (a1 )(a1 2 ) Solid-State Electronics Chap. 1 23 Instructor: Pei-Wen Li Dept. of E. E. NCU Diamond Structure (Cubic System) Most semiconductors are not in the 7 crystal systems mentioned above. Elemental Semiconductos: (C, Si, Ge, Sn) lattice constant a v 1 1 1 v 1 1 1 a = (− , ,− ), b = ( , ,− ) 4 4 4v 4 4 4 v a •b 1 θ = cos −1 v v ,θ = cos −1( ) = 109.4o 3 a || b | (0,0,0) θ=109.4o 1 1 1 ( − , ,− ) 4 4 4 1 1 1 ( , ,− ) 4 4 4 The space lattice of diamond is fcc. It is composed of two fcc lattices displaced from each other by ¼ of a body diagonal, (¼, ¼, ¼ )a Solid-State Electronics Chap. 1 24 Instructor: Pei-Wen Li Dept. of E. E. NCU Diamond Structure Or the diamond could be visualized by a bcc with four of the corner atoms missing. Solid-State Electronics Chap. 1 25 Instructor: Pei-Wen Li Dept. of E. E. NCU Zinc Blende Structure (Cubic system) Compound Semiconductors: (SiC, SiGe, GaAs, GaP, InP, InAs, InSb, etc) – Has the same geometry as the diamond structure except that zinc blende crystals are binary or contains two different kinds of host atoms. Solid-State Electronics Chap. 1 26 Instructor: Pei-Wen Li Dept. of E. E. NCU Wurzite Structure (Hexagonal system) Compound Semiconductors (ZnO, GaN, ALN, ZnS, ZnTe) – The adjacent tetrahedrons in zinc blende structure are rotated 60o to give the wurzite structure. – The distortion changes the symmetry: cubic →hexagonal – Distortion also increase the energy gap, which offers the potential for optical device applications. Solid-State Electronics Chap. 1 27 Instructor: Pei-Wen Li Dept. of E. E. NCU Reciprocal Lattice Every crystal structure has two lattices associated with it, the crystal lattice (real space) and the reciprocal lattice (momentum space). The relationship between the crystal lattice vector ( aˆ , bˆ, cˆ ) and reciprocal lattice vector ( Aˆ , Bˆ , Cˆ ) is ˆ ˆ ˆA = 2π bxcˆ ; Bˆ = 2π cˆxaˆ ; Cˆ = 2π aˆxb aˆ ⋅ bˆxcˆ aˆ ⋅ bˆxcˆ aˆ ⋅ bˆxcˆ The crystal lattice vectors have the dimensions of [length] and the vectors in the reciprocal lattice have the dimensions of [1/length], which means in the momentum space. (k = 2π/λ) A diffraction pattern of a crystal is a map of the reciprocal lattice of the crystal. Solid-State Electronics Chap. 1 28 Instructor: Pei-Wen Li Dept. of E. E. NCU Example Consider a BCC lattice and its reciprocal lattice (FCC) Similarly, the reciprocal lattice of an FCC is BCC lattice. Solid-State Electronics Chap. 1 29 Instructor: Pei-Wen Li Dept. of E. E. NCU Chap 2. Introduction to Quantum Mechanics Principles of Quantum Mechanics Schrödinger’s Wave Equation Application of Schrödinger’s Wave Equation Homework Solid-State Electronics Chap. 2 1 Instructor: Pei-Wen Li Dept. of E. E. NCU Introduction In solids, there are about 1023 electrons and ions packed in a volume of 1 cm3. The consequences of this highly packing density : – Interparticle distance is very small: ~2x10-8 cm. ⇒the instantaneous position and velocity of the particle are no longer deterministic. Thus, the electrons motion in solids must be analyzed by a probability theory. Quantum mechanics ⇔Newtonian mechanics Schrodinger’s equation: to describe the position probability of a particle. Solid-State Electronics Chap. 2 2 Instructor: Pei-Wen Li Dept. of E. E. NCU Introduction – The force acting on the j-th particle comes from all the other 1023-1 particles. – The rate of collision between particles is very high, 1013 collisions/sec ⇒average electron motion instead of the motion of each electron at a given instance of time are interested. (Statistical Mechanics) equilibrium statistical mechanics: Fermi-Dirac quantum-distribution ⇔Boltzmann classical distribution Solid-State Electronics Chap. 2 3 Instructor: Pei-Wen Li Dept. of E. E. NCU Principles of Quantum Mechanics Principle of energy quanta Wave-Particle duality principle Uncertainty principle Solid-State Electronics Chap. 2 4 Instructor: Pei-Wen Li Dept. of E. E. NCU Energy Quanta Consider a light incident on a surface of a material as shown below: Classical theory: as long as the intensity of light is strong enough ⇒photoelectrons will be emitted from the material. Photoelectric Effect: experimental results shows “NOT”. Observation: – as the frequency of incident light ν < νo: no electron emitted. – as ν > νo:at const. frequency, intensity↑, emission rate↑, K.E. unchanged. at const. intensity, the max. K. E. ∝ the frequency of incident light. Solid-State Electronics Chap. 2 5 Instructor: Pei-Wen Li Dept. of E. E. NCU Quanta and Photon Planck postulated that thermal radiation is emitted from a heated surface in discrete energy called quanta. The energy of these quanta is given by E = hν, h = 6.625 x 10-34 J-sec (Planck’s constant) According to the photoelectric results, Einstein suggested that the energy in a light wave is also contained in discrete packets called photon whose energy is also given by E = hν. The maximum K.E. of the photoelectron is Tmax = ½mv2 = hν - hνo The momentum of a photon, p = h/λ Solid-State Electronics Chap. 2 6 Instructor: Pei-Wen Li Dept. of E. E. NCU Wave-Particle Duality de Broglie postulated the existence of matter waves. He suggested that since waves exhibit particle-like behavior, then particles should be expected to show wave-like properties. de Broglie suggested that the wavelength of a particle is expressed as λ = h /p, where p is the momentum of a particle Davisson-Germer experimentally proved de Broglie postulation of “Wave Nature of Electrons”. Solid-State Electronics Chap. 2 7 Instructor: Pei-Wen Li Dept. of E. E. NCU Davisson-Germer Experiment Consider the experimental setup below: Observation: – the existence of a peak in the density of scattered electrons can be explained as a constructive interference of waves scattered by the periodic atoms. – the angular distribution of the deflected electrons is very similar to an interference pattern produced by light diffracted from a grating. Solid-State Electronics Chap. 2 8 Instructor: Pei-Wen Li Dept. of E. E. NCU Conclusion In some cases, EM wave behaves like particles (photons) and sometimes particles behave as if they are waves. ⇒Wave-particle duality principle applies primarily to SMALL particles, e.g., electrons, protons, neutrons. For large particles, classical mechanics still apply. Solid-State Electronics Chap. 2 9 Instructor: Pei-Wen Li Dept. of E. E. NCU Uncertainty Principle Heisenberg states that we cannot describe with absolute accuracy the behavior of the subatomic particles. 1. It is impossible to simultaneously describe with the absolute accuracy the position and momentum of a particle. ∆p ∆x ≥ ħ. (ħ = h/2π = 1.054x10-34 J-sec) 2. It is impossible to simultaneously describe with the absolute accuracy the energy of a particle and the instant of time the particle has this energy. ∆E ∆t ≥ ħ The uncertainty principle implies that these simultaneous measurements are in error to a certain extent. However, ħ is very small, the uncertainty principle is only significant for small particles. Solid-State Electronics Chap. 2 10 Instructor: Pei-Wen Li Dept. of E. E. NCU Schrodinger’s Wave Equation Based on the principle of quanta and the wave-particle duality principle, Schrodinger’s equation describes the motion of electrons in a crystal. 1-D Schrodinger’s equation, − h 2 ∂ 2 Ψ ( x, t ) ∂Ψ ( x, t ) V x x t j ⋅ + ( ) Ψ ( , ) = h ∂x 2 ∂t 2m Where Ψ(x,t) is the wave function, which is used to describe the behavior of the system, and mathematically can be a complex quantity. V(x) is the potential function. Assume the wave function Ψ(x,t) = ψ(x)φ(t), then the Schrodinger eq. Becomes − h2 ∂ 2ψ ( x) ∂φ (t ) 2m Solid-State Electronics Chap. 2 φ (t ) ∂x 2 + V ( x)ψ ( x)φ (t ) = jhψ ( x) 11 ∂t Instructor: Pei-Wen Li Dept. of E. E. NCU Schrodinger’s Wave Equation − h 2 1 ∂ 2ψ ( x) 1 ∂φ (t ) + V ( x ) = j h =E 2 φ (t ) ∂t 2m ψ ( x) ∂x where E is the total energy, and the solution of the eq. is and the time-indep. Schrodinger equation can be written as φ (t ) = e − j ( E / h )t ∂ 2ψ ( x) 2m + 2 ( E − V ( x))ψ ( x) = 0 h ∂x 2 The physical meaning of wave function: – Ψ(x,t) is a complex function, so it can not by itself represent a real physical quantity. – |Ψ2(x,t)| is the probability of finding the particle between x and x+dx at a given time, or is a probability density function. – |Ψ2(x,t)|= Ψ(x,t) Ψ*(x,t) =ψ(x)* ψ(x) = |ψ(x)|2 -- indep. of time Solid-State Electronics Chap. 2 12 Instructor: Pei-Wen Li Dept. of E. E. NCU Boundary Conditions ∫ ∞ 2 ψ ( x) dx = 1 since |ψ(x)|2 represents the probability density function, then for a single particle, the probability of finding the particle somewhere is certain. If the total energy E and the potential V(x) are finite everywhere, 2. ψ(x) must be finite, single-valued, and continuous. 3. ∂ψ(x)/∂x must be finite, single-valued, and continuous. 1. −∞ Solid-State Electronics Chap. 2 13 Instructor: Pei-Wen Li Dept. of E. E. NCU Applications of Schrodinger’s Eq. The infinite Potential Well In region I, III, ψ(x) = 0, since E is finite and a particle cannot penetrate the infinite potential barriers. In region II, the particle is contained within a finite region of space and V = 0. 1-D time-indep. Schrodinger’s eq. becomes ∂ 2ψ ( x) 2mE + 2 ψ ( x) = 0 h ∂x 2 the solution is given by ψ ( x) = A1 cos Kx + A2 sin Kx, where K = Solid-State Electronics Chap. 2 14 2mE h2 Instructor: Pei-Wen Li Dept. of E. E. NCU Infinite Potential Well Boundary conditions: 1. ψ(x) must be continuous, so that ψ(x = 0) = ψ(x = a) = 0 ⇒A1 = A2sinKa ≡ 0 ⇒ K = nπ/a, where n is a positive integer. 2. ∞ 2 a 2 2 2 ψ ( x ) dx = 1 sin 1 ⇒ = ⇒ = A Kxdx A 2 2 ∫−∞ ∫ a 0 So the time-indep. Wave equation is given by ψ ( x) = 2 nπx sin( ) where n = 1,2,3... a a The solution represents the electron in the infinite potential well is in a standing waveform. The parameter K is related to the total energy E, therefore, h 2 n 2π 2 E = En = Solid-State Electronics Chap. 2 2ma 2 where n is a positive integer 15 Instructor: Pei-Wen Li Dept. of E. E. NCU Infinite Potential Well That means that the energy of the particle in the infinite potential well is “quantized”. That is, the energy of the particle can only have particular discrete values. Solid-State Electronics Chap. 2 16 Instructor: Pei-Wen Li Dept. of E. E. NCU The Step Potential Function Consider a particle being incident on a step potential barrier: In region I, V = 0, And the general solution of this equation is ∂ 2ψ 1 ( x) 2mE + 2 ψ 1 ( x) = 0 2 ∂x h ψ 1 ( x) = A1e jK x + B1e − jK x ( x ≤ 0) where K1 = 1 1 2mE h2 In region II, V = Vo, if we assume E < Vo, then ∂ 2ψ 2 ( x) ∂x Solid-State Electronics Chap. 2 2 − 2m h 2 (Vo − E )ψ 2 ( x) = 0 17 Instructor: Pei-Wen Li Dept. of E. E. NCU The Step Potential Function The general solution is in the form ψ 2 ( x) = A2e − K 2 x + B2e + K 2 x ( x ≥ 0) where K 2 = Boundary Conditions: 2m(Vo − E ) h2 ψ 2 ( x) = A2e − K 2 x ( x ≥ 0) – ψ2(x) must remain finite, ⇒B2 ≡ 0 ⇒ – ψ(x) must be continuous, i.e., ψ1(x = 0) = ψ2(x = 0) ⇒A1+B1 = A2 – ∂ψ(x)/ ∂x must be continuous, i.e., ∂ψ 1 ∂x = x =0 ∂ψ 21 ∂x ⇒ jK1 A1 − jK1 B1 = − K 2 A2 x =0 A1, B1, and A2 could be solved from the above equations. Solid-State Electronics Chap. 2 18 Instructor: Pei-Wen Li Dept. of E. E. NCU The Potential Barrier Consider the potential barrier function as shown: Assume the total energy of an incident particle E < Vo, as before, we could solve the Schrodinger’s equations in each region, and obtain ψ 1 ( x) = A1e jK x + B1e − jK x 1 1 ψ 2 ( x) = A2e K 2 x + B2e − K 2 x where K1 = ψ 3 ( x) = A3e jK x + B3e − jK x 1 1 2m(Vo − E ) 2mE and K = 2 h2 h2 We can solve B1, A2, B2, and A3 in terms of A1 from boundary conditions: – B3 = 0 , once a particle enters in region III, there is no potential changes to cause a reflection, therefore, B3 must be zero. – At x = 0 and x = a, the corresponding wave function and its first derivative must be continuous. Solid-State Electronics Chap. 2 19 Instructor: Pei-Wen Li Dept. of E. E. NCU The Potential Barrier The results implies that there is a finite probability that a particle will penetrate the barrier, that is so called “tunneling”. * A ⋅ A 3 3 The transmission coefficient is defined by T = A1 ⋅ A1* If E<<Vo, E E T ≅ 16 1 − exp(− 2 K 2 a ) Vo Vo This phenomenon is called “tunneling” and it violates classical mechanics. Solid-State Electronics Chap. 2 20 Instructor: Pei-Wen Li Dept. of E. E. NCU One-Electron Atom Consider the one-electron atom potential function due to the coulomb 2 attraction between the proton and electron: V (r ) = − e 4πε o r Then we can generalize the Schrodinger’s eq. to 3-D in spherical coordinates: 2mo 1 ∂ 2 ∂ψ 1 ∂ 2ψ 1 ∂ ∂ψ r ⋅ ( ) + ⋅ + ⋅ (sin θ ⋅ ) + ( E − V (r ))ψ = 0 r 2 ∂r r 2 sin 2 θ ∂φ 2 r 2 sin 2 θ ∂θ h2 ∂r ∂θ Assume the solution to the equation can be written as ψ (r ,θ , φ ) = R(r ) ⋅ Θ(θ ) ⋅ Φ(φ ) Then the solution Φ is of the form, Φ = ejmφ, where m is an integer. Solid-State Electronics Chap. 2 21 Instructor: Pei-Wen Li Dept. of E. E. NCU One-Electron Atom Similarly, we can generate two additional constants n and l for the variables θ and r. n, l, and m are known as quantum numbers (integers) n = 1,2,3,... l = n − 1, n − 2, n − 3,...,0 , each set of quantum numbers corresponds to a m = l , l − 1,...,0 quantum state which the electron may occupy. The solution of the wave equation is designated by ψnlm. For the lowest energy state (n=1, l=0, m=0), ψ 100 1 1 = ⋅ π ao 3/ 2 e − r / ao where ao = 0.529 angstrom The electron energy E is quantized, Solid-State Electronics Chap. 2 22 − mo e 4 En = (4πε o )2 2h 2 n 2 Instructor: Pei-Wen Li Dept. of E. E. NCU One Electron Atom The probability density function, or the probability of finding the electron at a particular distance form the nucleus, is proportional to ψ100ψ*100 and also to the differential volume of the shell around the nucleus. The electron is not localized at a given radius. Solid-State Electronics Chap. 2 23 Instructor: Pei-Wen Li Dept. of E. E. NCU Homework 2.1 2.15 2.23 Solid-State Electronics Chap. 2 24 Instructor: Pei-Wen Li Dept. of E. E. NCU Chap 3. Introduction to Quantum Theory of Solids Allowed and Forbidden Energy Bands k-space Diagrams Electrical Conduction in Solids Density of State Functions Statistical Mechanics Homework Solid-State Electronics Chap. 3 1 Instructor: Pei-Wen Li Dept. of E. E. NCU Preview Recall from the previous analysis that the energy of a bound electron is quantized. And for the one-electron atom, the probability of finding the electron at a particular distance from the nucleus is not localized at a given radius. Consider two atoms that are in close proximity to each other. The wave functions of the two atom electrons overlap, which means that the two electrons will interact. This interaction results in the discrete quantized energy level splitting into two discrete energy levels. Solid-State Electronics Chap. 3 2 Instructor: Pei-Wen Li Dept. of E. E. NCU Formation of Energy Bands Consider a regular periodic arrangement of atoms in which each atoms contains more than one electron. If the atoms are initially far apart, the electrons in adjacent atoms will not interact and will occupy the discrete energy levels. If the atoms are brought closer enough, the outmost electrons will interact and the energy levels will split into a band of allowed energies. Solid-State Electronics Chap. 3 3 Instructor: Pei-Wen Li Dept. of E. E. NCU Formation of Energy Bands Solid-State Electronics Chap. 3 4 Instructor: Pei-Wen Li Dept. of E. E. NCU Kronig-Penny Model The concept of allowed and forbidden energy levels can be developed by considering Schrodinger’s equation. Kronig-Penny Model Solid-State Electronics Chap. 3 5 Instructor: Pei-Wen Li Dept. of E. E. NCU Kronig-Penny Model The Kronig-Penny model is an idealized periodic potential representing a 1-D single crystal. We need to solve Schrodinger’s equation in each region. To obtain the solution to the Schrodinger’s equation, we make use of Bloch theorem. Bloch states that all one-electron wave functions, involving periodically varying potential energy functions, must be of the form, ψ(x) = u(x)ejkx, u(x) is a periodic function with period (a+b) and k is called a constant of the motion. The total wave function Ψ(x,t) may be written as Ψ(x,t) = u(x)ej(kx-(E/ħ)t). In region I (0 < x < a), V(x) = 0, then Schrodinger’s equation becomes d 2u1 ( x) du ( x) 2mE + 2 jk 1 − (k 2 − α 2 )u1 ( x) = 0 , α 2 ≡ 2 dx dx h Solid-State Electronics Chap. 3 6 Instructor: Pei-Wen Li Dept. of E. E. NCU Kronig-Penny Model The solution in region I is of the form, u1 ( x) = Ae j (α − k ) x + Be − j (α + k ) x for 0 < x < a In region II (-b < x < 0), V(x) = Vo, and apply Schrodinger’s eq. 2m V d 2u 2 ( x) du ( x) + 2 jk 2 − (k 2 − β 2 )u2 ( x) = 0 , β 2 ≡ α 2 − o2 o h dx dx The solution for region II is of the form, u2 ( x) = Ce j ( β − k ) x + De − j ( β + k ) x for -b < x < 0 Boundary conditions: u1 (0) = u 2 (0) ⇒ A + B − C − D = 0 du1 dx du1 dx = x =0 du2 dx ⇒ (α − k )A − (α + k )B − (β − k )C + (β + k )D = 0 x =0 u1 (a) = u2 (−b) ⇒ Ae j (α − k ) a + Be − j (α + k ) a − Ce − j ( β − k ) b − De j ( β + k ) b = 0 = x=a du2 dx ⇒ (α − k )Ae j (α − k ) a − (α + k )Be − j (α + k ) a − (β − k )Ce − j ( β − k )b + (β + k )De j ( β + k )b = 0 x=−b Solid-State Electronics Chap. 3 7 Instructor: Pei-Wen Li Dept. of E. E. NCU Kronig-Penny Model There is a nontrivial solution if, and only if, the determinant of the coefficients is zero. This result is ( ) − α2 + β2 − 1 ≤ f (ξ ≡ E / Vo ) = (sin αa )(sin βb) + (cos αa )(cos βb) = cos k (a + b) ≤ 1 2αβ The above equation relates k to the total energy E (through α) and the potential function Vo (through β). The allowed values of E can be determined by graphical or numerical methods. Solid-State Electronics Chap. 3 8 Instructor: Pei-Wen Li Dept. of E. E. NCU Kronig-Penny Model Recall -1≤cosk(a+b)≤1, so E-values which cause f(ξ) to lie in the range -1≤ f(ξ) ≤1 are the allowed system energies.— The ranges of allowed energies are called energy bands; the excluded energy ranges (|f(ξ)|≥1) are called the forbidden gaps or bandgaps . The energy bands in a crystal can be visualized by Energy 4 3 2 1 Solid-State Electronics Chap. 3 9 Instructor: Pei-Wen Li Dept. of E. E. NCU E-k Diagram Solid-State Electronics Chap. 3 10 Instructor: Pei-Wen Li Dept. of E. E. NCU k-space Diagram Consider the special case for which Vo = 0, (free particle case) ⇒ cosα(a+b) = cosk(a+b), i.e., α = k, ⇒α = 2mE h2 = 1 2m( mv 2 ) p 2 = =k h h2 ,where p is the particle momentum and k is referred as a wave number. We can also relate the energy and momentum as E = k2ħ2/2m Solid-State Electronics Chap. 3 11 Instructor: Pei-Wen Li Dept. of E. E. NCU E-k diagram More interesting solution occur for E < Vo (β = jγ), which applies to the electron bound within the crystal. The result could be written as γ 2 −α 2 (sin αa )(sinh γb) + (cos αa )(cosh γb) = cos k (a + b) 2αγ Consider a special case, b→0, Vo →∞, but bVo is finite, the above eq. becomes sin αa mV ba P' + cos αa = cos ka, P ' ≡ αa o 2 h The solution of the above equation results in a band of allowed energies. Solid-State Electronics Chap. 3 12 Instructor: Pei-Wen Li Dept. of E. E. NCU E-k diagram Consider the function of f (αa) = P' Solid-State Electronics Chap. 3 13 sin αa + cos αa graphically, αa Instructor: Pei-Wen Li Dept. of E. E. NCU E-k diagram E-k diagram could be generated from the above figure. This shows the concept of the allowed energy bands for the particle propagating in the crystal. Solid-State Electronics Chap. 3 14 Instructor: Pei-Wen Li Dept. of E. E. NCU Reduced k-space Solid-State Electronics Chap. 3 15 Instructor: Pei-Wen Li Dept. of E. E. NCU Electrical Conduction in Solids the Bond Model Energy Band E-K diagram of a semiconductor Solid-State Electronics Chap. 3 16 Instructor: Pei-Wen Li Dept. of E. E. NCU Drift Current If an external force is applied to the electrons in the conduction band and there are empty energy states into which the electrons can move, electrons can gain energy and a net momentum. n The drift current due to the motion of electrons is J = −e∑ vi i =1 where n is the number of electrons per volume and vi is the electron velocity in the crystal. Solid-State Electronics Chap. 3 17 Instructor: Pei-Wen Li Dept. of E. E. NCU Electron Effective Mass The movement of an electron in a lattice will be different than that of an electron in free space. There are internal forces in the crystal due to the positively charged ions or protons and electrons, which will influence the motion of electrons in the crystal. We can write Ftotal = Fext + Fint = ma Since it is difficult to take into account of all of the internal forces, we can write F = m* a ext m* is called the effective mass which takes into account the particle mass and the effect of the internal forces. Solid-State Electronics Chap. 3 18 Instructor: Pei-Wen Li Dept. of E. E. NCU Effective mass, E-k diagram Recall for a free electron, the energy and momentum are related by 1 dE p p 2 h 2k 2 dE h 2 k hp E= = ⇒ = = ⇒ = =v 2m 2m h dk m dk m m – So the first derivative of E w.r.t. k is related to the velocity of the particle. In addition, d 2E h2 1 d 2E 1 = ⇒ 2 = h dk 2 m dk 2 m – So the second derivative of E w.r.t. k is inversely proportional to the mass of the particle. In general, the effective mass could be related to 1 1 d 2E = m* h 2 dk 2 Solid-State Electronics Chap. 3 19 Instructor: Pei-Wen Li Dept. of E. E. NCU Effective mass, E-k diagram m* >0 near the bottoms of all band; m* <0 near the tops of all bands m* <0 means that, in response to an applied force, the electron will accelerate in a direction opposite to that expected from purely classical consideration. In general, carriers are populated near the top or bottom band edge in a semiconductor—the E-k relationship is typically parabolic and, therefore, d 2E = constant ...E near E edge dk 2 thus carriers with energies near the top or bottom of an energy band typically exhibit a CONSTANT effective mass Solid-State Electronics Chap. 3 20 Instructor: Pei-Wen Li Dept. of E. E. NCU Concept of Hole Solid-State Electronics Chap. 3 21 Instructor: Pei-Wen Li Dept. of E. E. NCU Extrapolation of Concepts to 3-D Brilliouin Zones: is defined as a Wigner-Seitz cell in the reciprocal lattice. Γ point: Zone center (k = 0) ⇒ (0 0 0 ) X point: Zone-boundary along a <1 0 0 > 2π direction ⇒ a (1,0,0) 6 symmetric points (1 0 0) (-1 0 0) (0 1 0) (0 -1 0) (0 0 1) (0 0 -1) L point: Zone-boundary along a <1 1 1> direction ⇒ 2π ( 1 , 1 , 1 ) 8 symmetric points a 2 2 2 Γ, X, and L points are highly symmetric ⇒ energy stable states ⇒ carriers accumulate near these points in the k-space. Solid-State Electronics Chap. 3 22 Instructor: Pei-Wen Li Dept. of E. E. NCU E-k diagram of Si, Ge, GaAs Solid-State Electronics Chap. 3 23 Instructor: Pei-Wen Li Dept. of E. E. NCU Energy Band Valence Band: – In all cases the valence-band maximum occurs at the zone center, at k = 0 – is actually composed of three subbands. Two are degenerate at k = 0, while the third band maximizes at a slightly reduced energy. The k = 0 degenerate band with the smaller curvature about k = 0 is called “heavy-hole” band, and the k = 0 degenerate band with the larger curvature is called “light-hole” band. The subband maximizing at a slightly reduced energy is the “split-off” band. – Near k = 0 the shape and the curvature of the subbands is essentially orientation independent. Solid-State Electronics Chap. 3 24 Instructor: Pei-Wen Li Dept. of E. E. NCU Energy Band Conduction band: – is composed of a number of subbands. The various subbands exhibit localized and abssolute minima at the zone center or along one of the high-symmetry diirections. – In Ge the conduction-band minimum occurs right at the zone boundary along <111> direction. ( there are 8 equivalent conduction-band minima.) – The Si conduction-band minimum occurs at k~0.9(2π/a) from the zone center along <100> direction. (6 equivalent conduction-band minima) – GaAs has the conduction-band minimum at the zone center directly over the valence-band maximum. Morever, the L-valley at the zone boundary <111> direction lies only 0.29 eV above the conduction-band minimum. Even under equilibrium, the L-valley contains a non-negligible electron population at elevated temp. The intervalley transition should be taken into account. Solid-State Electronics Chap. 3 25 Instructor: Pei-Wen Li Dept. of E. E. NCU Metal, Semiconductor, and Insulator Insulator Solid-State Electronics Chap. 3 Semiconductor 26 Metal Instructor: Pei-Wen Li Dept. of E. E. NCU The k-space of Si and GaAs Direct bandgap: the valence band maximum and the conduction band minimum both occur at k = 0. Therefore, the transition between the two allowed bands can take place without change in crystal momentum. Solid-State Electronics Chap. 3 27 Instructor: Pei-Wen Li Dept. of E. E. NCU Constant-Energy Surfaces A 3-D k-space plot of all the allowed k-values associated with a given energy E. The geometrical shapes, being associated with a given energy, are called constant-energy surfaces (CES). Consider the CES’s characterizing the conduction-band structures near Ec in Ge, Si, and GaAs. (a) Constant-energy surfaces Solid-State Electronics Chap. 3 (b) Ge surface at the Brillouin-zone boundaries. 28 Instructor: Pei-Wen Li Dept. of E. E. NCU Constant-Energy Surfaces of Ec For Ge, Ec occurs along each of the 8 equivalent <111> directions; a Si conduction band minimum, along each of 6 equivalent <100> directions. For GaAs, Ec is positioned at the zone center, giving rise to a single constant-energy surface. For energy slightly removed from Ec: E-Ec ≈ Ak12+Bk22+Ck32, where k1, k2, k3 are k-space coordinates measured from the center of a band minimum along principle axes. For example: Ge, the k1, k2, k3 coordinate system would be centered at the [111] L-point and one of the coordinate axes, say k1-axis, would be directed along the kx-ky-kz [111] direction. For GaAs, A = B = C, exhibits spherical CES; For Ge and Si, B=C, the CES’s are ellipsoids of revolution. Solid-State Electronics Chap. 3 29 Instructor: Pei-Wen Li Dept. of E. E. NCU Effective Mass In 3-D crystals the electron acceleration arising from an applied force is analogously by dv 1 = * ⋅F dt m where mxx−1 mxy−1 mxz−1 −1 1 −1 −1 = m yx m yy m yz m * −1 −1 −1 mzx mzy mzz 1 ∂2E m = 2 h ∂ki ∂k j −1 ij ..i, j = x, y , z For GaAs, E − Ec = A(k x2 + k y2 + k z2 ) , so mij = 0 if i≠j, and mxx−1 = m −yy1 = mzz−1 = 2A h2 therefore, we can define mii=me*, that is the the effective mass tensor reduces to a scalar, giving rise to an orientation-indep. equation of motion like that of a classical particle. h2 2 2 2 ⇒ E − Ec = Solid-State Electronics Chap. 3 30 2m 2 e (k x + k y + k z ) Instructor: Pei-Wen Li Dept. of E. E. NCU Effective Mass For Si and Ge: E-Ec = Ak12+B(k22+k32) so mij = 0 if i≠j, and mxx−1 = 2 A2 , myy−1 = mzz−1 = 2 B2 h h Because m11 is associated with the k-space direction lying along the axis of revolution, it is called the longitudinal effective mass ml*. Similarly, m22 = m33, being associated with a direction perpendicular to the axis of revolution, is called the transverse effective mass mt*. h2 2 h2 2 2 ⇒ E − Ec = k + ( k + k ) 1 2 3 2 2 2ml 2mt Solid-State Electronics Chap. 3 31 Instructor: Pei-Wen Li Dept. of E. E. NCU Effective Mass The relative sizes of ml* and mt* can be deduced by inspection of the Si and Ge constant-energy plots. length of the elliosoid along the axis of revolution m = max. width of the ellipsoid m perpendicu lar to the axis of revolution * l * t For both Ge and Si, ml* > mt*. Further, ml*/mt* of Ge > ml*/mt* of Si. The valence-band structure of Si, Ge, and GaAs are approximately spherical and composed of three subbands. Thus, the holes in a given subband can be characterized by a single effective mass parameter, but three effective mass (mhh*, mlh*, and mso*) are required to characterize the entire hole population. The split-off band, being depressed in energy, is only sparsely populated and is often ignored. Solid-State Electronics Chap. 3 32 Instructor: Pei-Wen Li Dept. of E. E. NCU Effective Mass measurement The near-extrema point band structure, multiplicity and orientation of band minima, etc. were all originally confirmed by cyclotron resonance measurement. Resonance experiment is performed in a microwave resonance cavity at temperature 4K. A static B field and an rf E-field oriented normal to B are applied across the sample. The carriers in the sample will move in an orbit-like path about the direction of B and the cyclotron frequency ωc = qB/mc. When the B-field strength is adjusted such that ωc = the ω of the rf E-field, the carriers absorb energy from the E-field (in resonance). ⇒m= qB/ωc Repeating the different B-field orientations allows one to separate out the effective mass factors (ml* and mt*) Solid-State Electronics Chap. 3 33 Instructor: Pei-Wen Li Dept. of E. E. NCU Effective Mass of Si, Ge, and GaAs Solid-State Electronics Chap. 3 34 Instructor: Pei-Wen Li Dept. of E. E. NCU Density of State Function To calculate the electron and hole concentrations in a material, we must determine the density of these allowed energy states as a function of energy. Electrons are allowed to move relatively freely in the conduction band of a semiconductor but are confined to the crystal. To simulate the density of allowed states, consider an appropriate model: A free electron confined to a 3-D infinite potential well, where the potential well represents the crystal. The potential of the well is defined as V(x,y,z) = 0 for 0<x<a, 0<y<a, 0<z<a, and V(x,y,z) = ∞ elsewhere Solving the Schrodinger’s equation, we can obtain 2 2mE 2 2 2 2 2 2 2 π ⇒ h2 Solid-State Electronics Chap. 3 = k = k x + k y + k z = (nx + n y + nz ) 2 a 35 Instructor: Pei-Wen Li Dept. of E. E. NCU Density of State Function The volume of a single quantum state is Vk =(π/a)3, and the differential volume in k-space is 4πk2dk Therefore, we can determine the density of quantum states in k-space 2 2 as 1 4πk dk k dk 3 = 2 ⋅a gT (k )dk = 2 3 π 8 π a – The factor, 2, takes into account the two spin states allowed for each quantum state; the next factor, 1/8, takes into account that we are considering only the quantum states for positive values of kx, ky, and kz. Solid-State Electronics Chap. 3 36 Instructor: Pei-Wen Li Dept. of E. E. NCU Density of State Function Recall that k2 = 2mE h2 We can determine the density of states as a function of energy E by gT ( E )dE = 3 4π 2 ⋅ ( 2 m ) ⋅ E ⋅ dE ⋅ a 3 3 h Therefore, the density of states per unit volume is given by gT ( E )dE = 3 4π 2 ⋅ ( 2 m ) ⋅ E ⋅ dE 3 h Extension to semiconductors, the density of states in conduction band 3 is modified as 4π * 2 gc (E) = h 3 ⋅ (2mn ) ⋅ E − Ec and the density of states in valence band is modified as gv (E) = Solid-State Electronics Chap. 3 3 4π * 2 ⋅ ( 2 m ) ⋅ E − Ev p 3 h 37 Instructor: Pei-Wen Li Dept. of E. E. NCU Density of State Function mn* and mp* are the electron and hole density of states effective masses. In general, the effective mass used in the density of states expression must be an average of the band-structure effective masses. Solid-State Electronics Chap. 3 38 Instructor: Pei-Wen Li Dept. of E. E. NCU Density of States Effective Mass Conduction Band--GaAs: the GaAs conduction band structure is approximately spherical and the electronss within the band are characterized by a single isotropic effective mass, me*, ⇒ mn* = me*...GaAs Conduction Band--Si, Ge: the conduction band structure in Si and Ge is characterized by ellipsoidal energy surfaces centered, respectively, at points along the <100> and <111> directions in k-space. mn* = 6 3 (ml*mt*2 ) 3 ...Si 1 2 mn* = 4 3 (ml*mt*2 ) 3 ...Ge 1 2 Valence Band--Si, Ge, GaAs: the valence band structures are al characterized by approximately spherical constant-energy surfaces (degenerate). * * * [ m p = (mhh ) + (mlh ) Solid-State Electronics Chap. 3 3 39 2 3 ] 2 2 3 Instructor: Pei-Wen Li Dept. of E. E. NCU Density of States Effective Mass Solid-State Electronics Chap. 3 40 Instructor: Pei-Wen Li Dept. of E. E. NCU Statistics Mechanics In dealing with large numbers of particles, we are interested only in the statistical behavior of the whole group rather than in the behavior of each individual particle. There are three distribution laws determining the distribution of particles among available energy states. Maxwell-Boltzmann probability function: – Particles are considered to be distinguishable by being numbered for 1 to N with no limit to the number of particles allowed in each energy state. Bose-Einstein probability function: – Particles are considered to be indistinguishable and there is no limit to the number of particles permitted in each quantum state. (e.g., photons) Fermi-Dirac probability function: – Particles are indistinguishable but only one particle is permitted in each quantum state. (e.g., electrons in a crystal) Solid-State Electronics Chap. 3 41 Instructor: Pei-Wen Li Dept. of E. E. NCU Fermi-Dirac Distribution Fermi-Dirac distribution function gives the probability that a quantum state at the energy E will be occupied by an electron. f (E) = 1 E −E F 1 + exp( ) kT the Fermi energy (EF) determine the statistical distribution of electrons and does not have to correspond to an allowed energy level. At T = 0K, f(E < EF) = 1 and f(E >EF ) = 0, electrons are in the lowest possible energy states so that all states below EF are filled and all states above EF are empty. Solid-State Electronics Chap. 3 42 Instructor: Pei-Wen Li Dept. of E. E. NCU Fermi-Dirac Distribution, at T=0K Solid-State Electronics Chap. 3 43 Instructor: Pei-Wen Li Dept. of E. E. NCU Fermi-Dirac Distribution For T > 0K, electrons gain a certain amount of thermal energy so that some electrons can jump to higher energy levels, which means that the distribution of electrons among the available energy states will change. For T > 0K, f(E = EF) = ½ Solid-State Electronics Chap. 3 44 Instructor: Pei-Wen Li Dept. of E. E. NCU Boltamann Approximation Consider T >> 0K, the Fermi-Dirac function could be approximated by f (E) = 1 − ( E − EF ) ≈ exp E −E F kT 1 + exp( ) kT which is known as the Maxwell-Boltzmann approximation. Solid-State Electronics Chap. 3 45 Instructor: Pei-Wen Li Dept. of E. E. NCU Homework 3.5 3.8 3.16 Solid-State Electronics Chap. 3 46 Instructor: Pei-Wen Li Dept. of E. E. NCU Chap 4. Semiconductor in Equilibrium Carriers in Semiconductors Dopant Atoms and Energy Levels Extrinsic Semiconductor Statistics of Donors and Acceptors Charge Neutrality Position of Fermi Energy Solid-State Electronics Chap. 4 1 Instructor: Pei-Wen Li Dept. of E. E. NCU Equilibrium Distribution of Electrons and Holes The distribution of electrons in the conduction band is given by the density of allowed quantum states times the probability that a state will be occupied. n( E ) = g c ( E ) f ( E ) The thermal equilibrium conc. of electrons no is given by ∞ no = ∫ g c ( E ) f ( E ) Ec Similarly, the distribution of holes in the valence band is given by the density of allowed quantum states times the probability that a state will not be occupied by an electron. p ( E ) = g v ( E )[1 − f ( E )] And the thermal equilibrium conc. Of holes po is given by Ev po = ∫ g v ( E )[1 − f ( E )] −∞ Solid-State Electronics Chap. 4 2 Instructor: Pei-Wen Li Dept. of E. E. NCU Equilibrium Distribution of Electrons and Holes Solid-State Electronics Chap. 4 3 Instructor: Pei-Wen Li Dept. of E. E. NCU The no and po eqs. Recall the thermal equilibrium conc. of electrons ∞ no = ∫ g c ( E ) f ( E ) Ec Assume that the Fermi energy is within the bandgap. For electrons in the conduction band, if Ec-EF >>kT, then E-EF>>kT, so the Fermi probability function reduces to the Boltzmann approximation, f ( E ) ≅ exp Then no = ∫ ∞ Ec ( 4π 2mn* h3 ) 32 [−( E − EF )] kT 2πmn* kT − ( E − EF ) E − Ec exp dE = 2 2 kT h 2πmn* kT We may define N c = 2 h 2 32 − ( Ec − E F ) exp kT 32 , (at T =300K, Nc ~1019 cm-3), which is called the effective density of states function in the conduction band Solid-State Electronics Chap. 4 4 Instructor: Pei-Wen Li Dept. of E. E. NCU The no and po eqs. The thermal equilibrium conc. of holes in the valence band is given by Ev po = ∫ g v ( E )[1 − f ( E )] −∞ For energy states in the valence band, E<Ev. If (EF-Ev)>>kT, Then, po = ∫ Ev −∞ 1 − f ( E ) ≅ exp ( 4π 2m ) * 32 p h3 [−( E F − E )] kT 2πm*p kT − ( EF − E ) dE = 2 Ev − E exp 2 kT h 2πm*p kT We may define N v = 2 h 2 32 − ( E F − Ev ) exp kT 32 , (at T =300K, Nv ~1019 cm-3), which is called the effective density of states function in the valence band Solid-State Electronics Chap. 4 5 Instructor: Pei-Wen Li Dept. of E. E. NCU nopo product The product of the general expressions for no and po are given by − Eg − ( Ec − E F ) − ( E F − Ev ) N N N no po = N c exp ⋅ exp exp = c v kT v kT kT ⇒ for a semiconductor in thermal equilibrium, the product of no and po is always a constant for a given material and at a given temp. Effective Density of States Function Solid-State Electronics Chap. 4 6 Instructor: Pei-Wen Li Dept. of E. E. NCU Intrinsic Carrier Concentration For an intrinsic semiconductor, the conc. of electrons in the conduction band, ni, is equal to the conc. of holes in the valence band, pi. The Fermi energy level for the intrinsic semiconductor is called the intrinsic Fermi energy, EFi. For an intrinsic semiconductor, 32 2πmn* kT − ( Ec − E Fi ) − ( Ec − E Fi ) no = ni = 2 N = exp exp c 2 h kT kT 32 2πm*p kT − ( E Fi − Ev ) − ( E Fi − Ev ) = exp exp po = pi = 2 N v h2 kT kT − Eg ⇒ n = N c N v exp , where E g is the bandgap energy kT 2 i For an given semiconductor at a constant temperature, the value of ni is constant, and independent of the Fermi energy. Solid-State Electronics Chap. 4 7 Instructor: Pei-Wen Li Dept. of E. E. NCU Intrinsic Carrier Conc. Commonly accepted values of ni at T = 300 K Silicon GaAs Germanium Solid-State Electronics Chap. 4 ni = 1.5x1010 cm-3 ni = 1.8x106 cm-3 ni = 1.4x1013 cm-3 8 Instructor: Pei-Wen Li Dept. of E. E. NCU Intrinsic Fermi-Level Position For an intrinsic semiconductor, ni = pi, − ( Ec − E Fi ) − ( EFi − Ev ) ⇒ N c exp[ ] = N v exp[ ] kT kT m*p Nv 1 3 1 3 ⇒ E Fi = ( Ec + Ev ) + kT ln( ) = ( Ec + Ev ) + kT ln( * ) 2 4 2 4 mn Nc Emidgap =(Ec+Ev)/2: is called the midgap energy. If mp* = mn*, then EFi = Emidgap (exactly in the center of the bandgap) If mp* > mn*, then EFi > Emidgap (above the center of the bandgap) If mp* < mn*, then EFi < Emidgap (below the center of the bandgap) Solid-State Electronics Chap. 4 9 Instructor: Pei-Wen Li Dept. of E. E. NCU Dopant and Energy Levels Solid-State Electronics Chap. 4 10 Instructor: Pei-Wen Li Dept. of E. E. NCU Acceptors and Energy Levels Solid-State Electronics Chap. 4 11 Instructor: Pei-Wen Li Dept. of E. E. NCU Ionization Energy Ionization energy is the energy required to elevate the donor electron into the conduction band. Solid-State Electronics Chap. 4 12 Instructor: Pei-Wen Li Dept. of E. E. NCU Extrinsic Semiconductor Adding donor or acceptor impurity atoms to a semiconductor will change the distribution of electrons and holes in the material, and therefore, the Fermi energy position will change correspondingly. Recall − (E − E ) − (E − E ) ni = N c exp c kT Fi N = exp v Fi kT v − ( Ec − E F ) − ( Ec − EFi ) + ( EF − EFi ) no = N c exp N = exp c kT kT − ( E F − Ev ) − ( E F − E Fi ) + ( Ev − EFi ) po = N v exp N = exp v kT kT E − E Fi − ( E F − E Fi ) ⇒ no = ni exp F p n = and exp o i kT kT Solid-State Electronics Chap. 4 13 Instructor: Pei-Wen Li Dept. of E. E. NCU Extrinsic Semiconductor When the donor impurity atoms are added, the density of electrons is greater than the density of holes, (no > po) ⇒ n-type; EF > EFi When the acceptor impurity atoms are added, the density of electrons is less than the density of holes, (no < po) ⇒ p-type; EF < EFi Solid-State Electronics Chap. 4 14 Instructor: Pei-Wen Li Dept. of E. E. NCU Degenerate and Nondegenerate If the conc. of dopant atoms added is small compared to the density of the host atoms, then the impurity are far apart so that there is no interaction between donor electrons, for example, in an n-material. ⇒nondegenerate semiconductor If the conc. of dopant atoms added increases such that the distance between the impurity atoms decreases and the donor electrons begin to interact with each other, then the single discrete donor energy will split into a band of energies. ⇒EF move toward Ec The widen of the band of donor states may overlap the bottom of the conduction band. This occurs when the donor conc. becomes comparable with the effective density of states, EF ≥ Ec ⇒degenerate semiconductor Solid-State Electronics Chap. 4 15 Instructor: Pei-Wen Li Dept. of E. E. NCU Degenerate and Nondegenerate Solid-State Electronics Chap. 4 16 Instructor: Pei-Wen Li Dept. of E. E. NCU Statistics of Donors and Acceptors The probability of electrons occupying the donor energy state was given by N nd = d 1 E − EF 1 + exp( d ) g kT , g : degeneracy factor where Nd is the conc. of donor atoms, nd is the density of electrons occupying the donor level and Ed is the energy of the donor level. g =2 since each donor level has two spin orientation, thus each donor level has two quantum states. Therefore the conc. of ionized donors Nd+ = Nd –nd Similarly, the conc. of ionized acceptors Na- = Na –pa, where pa = Na , g = 4 for the acceptor level in Si and GaAs 1 E F − Ea 1 + exp( ) g kT Solid-State Electronics Chap. 4 17 Instructor: Pei-Wen Li Dept. of E. E. NCU Complete Ionization If we assume Ed-EF>> kT or EF-Ea >> kT (e.g. T= 300 K), then − ( Ed − E F ) nd ≈ 2 N d exp ⇒ N d+ = N d − nd ≅ N d kT − ( E F − Ea ) pa ≈ 4 N a exp ⇒ N a− = N a − pa ≅ N a kT that is, the donor/acceptor states are almost completely ionized and all the donor/acceptor impurity atoms have donated an electron/hole to the conduction/valence band. Solid-State Electronics Chap. 4 18 Instructor: Pei-Wen Li Dept. of E. E. NCU Freeze-out At T = 0K, no electrons from the donor state are thermally elevated into the conduction band; this effect is called freeze-out. At T = 0K, all electrons are in their lowest possible energy state; that is for an n-type semiconductor, each donor state must contain an electron, therefore, nd = Nd or Nd+ = 0, which means that the Fermi level must be above the donor level. Solid-State Electronics Chap. 4 19 Instructor: Pei-Wen Li Dept. of E. E. NCU Charge Neutrality In thermal equilibrium, the semiconductor is electrically neutral. The electrons distributing among the various energy states creating negative and positive charges, but the net charge density is zero. Compensated Semiconductors: is one that contains both donor and acceptor impurity atoms in the same region. A n-type compensated semiconductor occurs when Nd > Na and a p-type semiconductor occurs when Na > Nd. The charge neutrality condition is expressed by no + N a− = po + N d+ where no and po are the thermal equilibrium conc. of e- and h+ in the conduction band and valence band, respectively. Nd+ is the conc. Of positively charged donor states and Na- is the conc. of negatively charged acceptor states. Solid-State Electronics Chap. 4 20 Instructor: Pei-Wen Li Dept. of E. E. NCU Compensated Semiconductor Solid-State Electronics Chap. 4 21 Instructor: Pei-Wen Li Dept. of E. E. NCU Compensated Semiconductor If we assume complete ionization, Nd+ = Nd and Na- = Na, then ni2 no + N a = po + N d , recall po = no ni2 2 no + N a = + N d ⇒ no − ( N d − N a )no − ni2 = 0 nn ⇒ no (N − N a ) + = d 2 Nd − Na 2 + ni 2 2 If Na = Nd = 0, (for the intrinsic case), ⇒no = po If Nd >> Na, ⇒no = Nd If Na > Nd, ⇒ po (N − N d ) + = a 2 Na − Nd 2 + ni 2 2 is used to calculate the conc. of holes in valence band Solid-State Electronics Chap. 4 22 Instructor: Pei-Wen Li Dept. of E. E. NCU Compensated Semiconductor Solid-State Electronics Chap. 4 23 Instructor: Pei-Wen Li Dept. of E. E. NCU Position of Fermi Level The position of Fermi level is a function of the doping concentration and a function of temperature, EF(n, p, T). Assume Boltzmann approximation is valid, we have and p = N exp − (E F − Ev ) o v kT kT N N ⇒ Ec − E F = kT ln c and EF − Ev = kT ln v no po no = N c exp − ( Ec − E F ) n or E F − E Fi = kT ln o ni Solid-State Electronics Chap. 4 p and EFi − Ev = kT ln o ni 24 Instructor: Pei-Wen Li Dept. of E. E. NCU EF(n, p, T) Solid-State Electronics Chap. 4 25 Instructor: Pei-Wen Li Dept. of E. E. NCU EF(n, p, T) Solid-State Electronics Chap. 4 26 Instructor: Pei-Wen Li Dept. of E. E. NCU Homework 4.18 4.20 4.24 Solid-State Electronics Chap. 4 27 Instructor: Pei-Wen Li Dept. of E. E. NCU Chap 5. Carrier Motion Carrier Drift Carrier Diffusion Graded Impurity Distribution Hall Effect Homework Solid-State Electronics Chap. 5 1 Instructor: Pei-Wen Li Dept. of E. E. NCU Carrier Drift When an E-field (force) applied to a semiconductor, electrons and holes will experience a net acceleration and net movement, if there are available energy states in the conduction band and valence band. The net movement of charge due to an electric field (force) is called “drift”. Mobility: the acceleration of a hole due to an E-field is related by * dv = qE F = mp dt If we assume the effective mass and E-field are constants, the we can obtain the drift velocity of the hole by eEt vd = * + vi ∝ t , E mp where vi is the initial velocity (e.g. thermal velocity) of the hole and t is the acceleration time. Solid-State Electronics Chap. 5 2 Instructor: Pei-Wen Li Dept. of E. E. NCU Mobility E=0 In semiconductors, holes/electrons are involved in collisions with ionized impurity atoms and with thermally vibration lattice atoms. As the hole accelerates in a crystal due to the E-field, the velocity/kinetic energy increases. When it collides with an atom in the crystal, it lose s most of its energy. The hole will again accelerate/gain energy until is again involved in a scattering process. Solid-State Electronics Chap. 5 3 Instructor: Pei-Wen Li Dept. of E. E. NCU Mobility If the mean time between collisions is denoted by τcp, then the average drift velocity between collisions is vdp eτ cp eτ cp µp = = * vd = * E ≡ µ p E m E mp p where µp (cm2/V-sec) is called the hole mobility which is an important parameter of the semiconductor since it describes how well a particle will move due to an E-field. Two collision mechanisms dominate in a semiconductor: – Phonon or lattice scattering: related to the thermal motion of atoms; µL ∝T-3/2 – Ionized impurity scattering: coulomb interaction between the electron/hole and the + − ionized impurities; µI ∝T3/2/NI., N I = N d + N a : total ionized impurity conc. ↑, µI ↓ If T↑, the thermal velocity of hole/electron ↑⇒carrier spends less time in the vicinity of the impurity. ⇒ less scattering effect ⇒ µI ↑ Solid-State Electronics Chap. 5 4 Instructor: Pei-Wen Li Dept. of E. E. NCU Mobility Electron mobility Solid-State Electronics Chap. 5 Hole mobility 5 Instructor: Pei-Wen Li Dept. of E. E. NCU Drift Current Density If the volume charge density of holes, qp, moves at an average drift velocity vdp, the drift current density is given by Jdrfp = (ep) vdp = eµppE. Similarly, the drift current density due to electrons is given by Jdrfn = (-en) vdp = (-en)(-µnE)=eµnnE The total drift current density is given by Jdrf = e(µnn+µpp) E Solid-State Electronics Chap. 5 6 Instructor: Pei-Wen Li Dept. of E. E. NCU Conductivity The conductivity σ of a semiconductor material is defined by Jdrf ≡ σ E, so σ= e(µnn+µpp) in units of (ohm-cm)-1 The resistivity ρ of a semiconductor is defined by ρ ≡ 1/ σ Solid-State Electronics Chap. 5 7 Instructor: Pei-Wen Li Dept. of E. E. NCU Resistivity Measurement Four-point probe measurement ρ = 2πs Solid-State Electronics Chap. 5 V Fc ; Fc : correction factor I 8 Instructor: Pei-Wen Li Dept. of E. E. NCU Velocity Saturation So far we assumed that mobility is indep. of E-field, that is the drift velocity is in proportion with the E-field. This holds for low E-filed. In reality, the drift velocity saturates at ~107 cm/sec at an E-field ~30 kV/cm. So the drift current density will also saturate and becomes indep. of the applied E-field. Solid-State Electronics Chap. 5 9 Instructor: Pei-Wen Li Dept. of E. E. NCU Velocity Saturation of GaAs For GaAs, the electron drift velocity reaches a peak and then decreases as the E-field increases. ⇒negative differential mobility/resistivity, which could be used in the design of oscillators. This could be understood by considering the E-k diagram of GaAs. Solid-State Electronics Chap. 5 10 Instructor: Pei-Wen Li Dept. of E. E. NCU Velocity Saturation of GaAs In the lower valley, the density of state effective mass of the electron mn* = 0.067mo. The small effective mass leads to a large mobility. As the E-field increases, the energy of the electron increases and can be scattered into the upper valley, where the density of states effective mass is 0.55mo. The large effective mass yields a smaller mobility. The intervalley transfer mechanism results in a decreasing average drift velocity of electrons with E-field, or the negative differential mobility characteristic. Solid-State Electronics Chap. 5 11 Instructor: Pei-Wen Li Dept. of E. E. NCU Carrier Diffusion Diffusion is the process whereby particles flow from a region of high concentration toward a region of low concentration. The net flow of charge would result in a diffusion current. Solid-State Electronics Chap. 5 12 Instructor: Pei-Wen Li Dept. of E. E. NCU Diffusion Current Density The electron diffusion current density is given by Jndif = eDndn/dx, where Dn is called the electron diffusion coefficient, has units of cm2/s. The hole diffusion current density is given by Jpdif = -eDpdp/dx, where Dp is called the hole diffusion coefficient, has units of cm2/s. The total current density composed of the drift and the diffusion current density. 1-D J = enµ n E x + epµ p E x + eDn dn − eD p dp dx or 3-D Solid-State Electronics Chap. 5 dx J = enµ n E x + epµ p E x + eDn∇n − eD p ∇p 13 Instructor: Pei-Wen Li Dept. of E. E. NCU Graded Impurity Distribution In some cases, a semiconductors is not doped uniformly. If the semiconductor reaches thermal equilibrium, the Fermi level is constant through the crystal so the energy-band diagram may qualitatively look like: Since the doping concentration decreases as x increases, there will be a diffusion of majority carrier electrons in the +x direction. The flow of electrons leave behind positive donor ions. The separation of positive ions and negative electrons induces an E-field in +x direction to oppose the diffusion process. Solid-State Electronics Chap. 5 14 Instructor: Pei-Wen Li Dept. of E. E. NCU Induced E-Field dφ d ( E /( −e)) 1 dE Fi Fi = The induced E-field is defined as E x = − = − dx dx e dx that is, if the intrinsic Fermi level changes as a function of distance through a semiconductor in thermal equilibrium, an E-field exists. If we assume a quasi-neutrality condition in which the electron concentration is almost equal to the donor impurity concentration, then N d ( x) E − Ei ( ) ln no ≈ ni exp F N x E E kT ≈ ⇒ − = d F i kT ni d ( EF − Ei ) d (− Ei ) kT dN d ( x) ⇒ = = dx dx N d ( x) dx kT 1 dN d ( x) ⇒ E x = − e N d ( x) dx So an E-field is induced due to the nonuniform doping. Solid-State Electronics Chap. 5 15 Instructor: Pei-Wen Li Dept. of E. E. NCU Einstein Relation Assuming there are no electrical connections between the nonuniformly doped semiconducotr, so that the semiconductor is in thermal equilibrium, then the individual electron and hole currents must be zero. dn ⇒ J n = 0 = enµ n E x + eDn dx Assuming quasi-neutrality so that n ≈ Nd(x) and dN d ( x) dx dN d ( x) kT 1 dN d ( x) ⇒ 0 = −en µ n N d ( x) + eDn dx e N d ( x) dx J n = 0 = eN d ( x) µ n E x + eDn Dn kT - - - -Einstein relation µn e D p kT ⇒ = Similarly, the hole current Jp = 0 µp e ⇒ Solid-State Electronics Chap. 5 = 16 Instructor: Pei-Wen Li Dept. of E. E. NCU Einstein Relation Einstein relation says that the diffusion coefficient and mobility are not independent parameters. Typical mobility and diffusion coefficient values at T=300K (µ = cm2/V-sec and D = cm2/sec) Silicon GaAs Germaium Solid-State Electronics Chap. 5 µn Dn µp Dp 1350 8500 3900 35 220 101 480 400 1900 12.4 10.4 49.2 17 Instructor: Pei-Wen Li Dept. of E. E. NCU Hall Effect The hall effect is a consequence of the forces that are exerted on moving charges by electric and magnetic fields. We can use Hall measurement to – Distinguish whether a semiconductor is n or p type – To measure the majority carrier concentration – To measure the majority carrier mobility Solid-State Electronics Chap. 5 18 Instructor: Pei-Wen Li Dept. of E. E. NCU Hall Effect A semiconductor is electrically connected to Vx and in turn a current Ix flows through. If a magnetic field Bz is applied, the electrons/holes flowing in the semiconductor will experience a force F = q vx x Bz in the (-y) direction. If this semiconductor is p-type/n-type, there will be a buildup of positive/negative charge on the y = 0 surface. The net charge will induce an E-field EH in the +y-direction for p-type and -y-direction for n-type. EH is called the Hall field. In steady state, the magnetic force will be exactly balanced by the induced E-field force. F = q[E + v x B] = 0 ⇒ EH = vx Bz and the Hall voltage across the semiconductor is VH = EHW VH >0 ⇒ p-type, VH < 0 ⇒ n-type Solid-State Electronics Chap. 5 19 Instructor: Pei-Wen Li Dept. of E. E. NCU Hall Effect VH = vx W Bz, for a p-type semiconductor, the drift velocity of hole is vdx = Jx Ix I B I B = ⇒ VH = x z ⇒ p = x z ep (ep )(Wd ) epd edVH for a n-type, n=− I x Bz edVH Once the majority carrier concentration has been determined, we can calculate the low-field majority carrier mobility. IxL epVxWd IxL ⇒ µn = enVxWd For a p-semiconductor, Jx = epµpEx. ⇒ µ p = For a n-semiconductor, Solid-State Electronics Chap. 5 20 Instructor: Pei-Wen Li Dept. of E. E. NCU Hall Effect Hall-bar with “ear” Solid-State Electronics Chap. 5 van deer Parw configuration 21 Instructor: Pei-Wen Li Dept. of E. E. NCU Homework 5.14 5.20 Solid-State Electronics Chap. 5 22 Instructor: Pei-Wen Li Dept. of E. E. NCU Solid-State Electronics Chap. 5 23 Instructor: Pei-Wen Li Dept. of E. E. NCU Chap 6. Nonequilibrium Excess Carriers in Semiconductor Carrier Generation and Recombination Continuity Equation Ambipolar Transport Quasi-Fermi Energy Levels Excess-Carrier Lifertime Surface Effects Solid-State Electronics Chap. 6 1 Instructor: Pei-Wen Li Dept. of E. E. NCU Nonequilibrium When a voltage is applied or a current exists in a semiconductor device, the semiconductor is operating under nonequilibrium conditions. Excess electrons/holes in the conduction/valence bands may be generated and recombined in addition to the thermal equilibrium concentrations if an external excitation is applied to the semiconductor. Examples: 1. A sudden increase in temperature will increase the thermal generation rate of electrons and holes so that their concentration will change with time until new equilibrium reaches. 2. A light illumination on the semiconductor (a flux of photons) can also generate electron-hole pairs, creating a nonequilibrium condition. Solid-State Electronics Chap. 6 2 Instructor: Pei-Wen Li Dept. of E. E. NCU Generation and Recombination In thermal equilibrium, the electrons are continually being thermal generated from the valence band (hereby holes are generated) to conduction band by the random thermal process. At the same time, electrons moving randomly through the crystal may come in close proximity to holes and recombine. The rate of generation and recombination of electrons/holes are equal so the net electron and hole concentrations are constant (independent of time). Solid-State Electronics Chap. 6 3 Instructor: Pei-Wen Li Dept. of E. E. NCU Excess Carrier Generation and Recombination When high-energy photons are incident on a semiconductor, electronhole pairs are generated (excess electrons/holes) ⇒ the concentration of electrons in the conduction band and of holes in the valence band increase above their thermal-equilibrium value. n = no +δn, p = po+ δp where no/po are thermal–equilibrium concentrations, and δn/δp are the excess electron/hole concentrations. np ≠ nopo = ni2 ( nonequilibrium) For the direct band-to-band generation, the generation rates (in the unit of #/cm3-sec) of electrons and holes are equal; gn’ = gp’ (may be functions of the space coordinates and time) Solid-State Electronics Chap. 6 4 Instructor: Pei-Wen Li Dept. of E. E. NCU Excess Carrier Generation and Recombination An electron in conduction band may “fall down” into the valence band and leads to the excess electron-hole recombination process. Since the excess electrons and holes recombine in pairs so the recombination rates for excess electrons and holes are equal, Rn’ = Rp’. (in the unit of #/cm3-sec). ⇒ δn(t) = δp(t) The direct band-to-band recombination is spontaneous, thus the probability of an electron and hole recombination is constant with time. Rn’ = Rp’ ∝ the electron and hole concentration. Solid-State Electronics Chap. 6 5 Instructor: Pei-Wen Li Dept. of E. E. NCU Recombination Process Band-to-Band: direct thermal recombination. This process is typically radiative, with the excess energy released during the process going into the production of a photon (light) R-G Center: Induced by certain impurity atoms or crystal defects. Electron and hole are attracted to the R-G center and lead to the annihilation of the electron-hole pair. Or a carrier is first captured at the R-G site and then makes an annihilating transition to the opposite carrier band. This process is indirect thermal recombination (nonradiative). Thermal energy (heat) is released during the process (lattice vibrations, phonons are produced) Solid-State Electronics Chap. 6 6 Instructor: Pei-Wen Li Dept. of E. E. NCU Recombination Process Recombination via Shallow Levels: —induced by donor or acceptor sites. At RT, if an electron is captured at a donor site, however, it has a high probability of being re-emitted into the conduction band before completing the recombination process. Therefore, the probability of recombination via shallow levels is quite low at RT. It should be noted that the probability of observing shallowlevel processes increases with decreasing system temperature. Recombination involving Excitons: It is possible for an electron and a hole to become bound together into a hydrogen-atom-like arrangement which moves as a unit in response to applied forces. This coupled e-h pair is called an “exciton”. The formation of an exciton can be viewed as introducing a temporary level into the bandgap slightly above or below the band edge. Solid-State Electronics Chap. 6 7 Instructor: Pei-Wen Li Dept. of E. E. NCU Recombination Process Recombination involving Excitons: Recombination involving excitons is a very important mechanism at low temperatures and is the major lightproducing mechanism in LED’s. Auger Recombinations: In a Auger process, band-to-band recombination at a bandgap center occurs simultaneously with the collision between two like carriers. The energy released by the recombination or trapping subprocess is transferred during the collision to the surviving carrier. Subsequently, this high energetic carrier “thermalizes”-loses energy through collisions with the semiconductor lattice. Auger recombination increases with carrier concentration, becoming very important at high carrier concentration. Therefore, Auger recombination mmust be considered in treating degenerately doped regions (like solar cell, junction lasers, and LED’s) Solid-State Electronics Chap. 6 8 Instructor: Pei-Wen Li Dept. of E. E. NCU Generation Process Band-to-Band generation: R-G center generation: Photoemission from band gap centers: Solid-State Electronics Chap. 6 9 Instructor: Pei-Wen Li Dept. of E. E. NCU Generation Process Impact-Ionization: An e-h pair is produced as a result of the energy released when a highly energetic carrier collides with the crystal lattice. The generation of carriers through impact ionization routinely occurs in the high e-filed regions of devices and is responsible for the avalanche breakdown in pn junctions. Solid-State Electronics Chap. 6 10 Instructor: Pei-Wen Li Dept. of E. E. NCU Momentum Consideration In a direct semiconductor where the kvalues of electrons and holes are all bunched near k = 0, little change is required for the recombination process to proceed. The conservation of both energy and crystal momentum is readily met by the emission of a photon. In a indirect semiconductor, there is a large change in crystal momentum associated with the recombination process. The emission of a photon will conserve energy but cannot simultaneously conserve momentum. Thus for band-to-band recombination to proceed in an indirect semiconductor a phonon must be emitted coincident with the emission of a photon. Solid-State Electronics Chap. 6 11 Instructor: Pei-Wen Li Dept. of E. E. NCU Excess Carrier Generation and Recombination Low-level injection: the excess carrier concentration is much less than the thermal equilibrium majority carrier concentration, e.g., for a ntype semiconductor, δn = δp << no. High-level injection: δn ≈ no or δn >> no For a p-type material (po >> no) under low-level injection, the excess carrier will decay from the initial excess concentration with time; δn(t ) = δn(t = 0)e −t /τ n0 where τn0 is referred to as the excess minority carrier lifetime (τn0 ∝1/p0) δn(t ) and the recombination rate of excess carriers Rn’ = Rp’= τ n0 For a n-type material (no >> po) under low-level injection, Rn’ = Rp’= δp (t ) − t / τ pn 0 δp (t ) = δp (t = 0)e τ p0 Solid-State Electronics Chap. 6 12 Instructor: Pei-Wen Li Dept. of E. E. NCU Continuity Equations Consider a differential volume element in which a 1-D hole flux, Fp+ (# of holes/cm2-sec), is entering this element at x and is leaving at x+dx. So the net change in hole concentration per unit time is + ∂Fp ∂p p =− + gp − ∂t ∂x τ pt ----continuity equation for holes Similarly, the continuity equation for electron flux is ∂Fn− ∂n n =− + gn − ∂t ∂x τ nt Solid-State Electronics Chap. 6 13 Instructor: Pei-Wen Li Dept. of E. E. NCU Ambipolar Transport If a pulse of excess electrons and holes are created at a particular point due to an applied E-field, the excess e-s and h+s will tend to drift in opposite directions. However, any separation of e-s and h+s will induce an internal E-field and create a force attracting the e-s and h+s back. The internal E-field will hold the pulses of excess e -s and h+s together, then the electrons and holes will drift or diffuse together with a single effective mobility or diffusion coefficient. This is so called “ambipolar diffusion” or “ambipolar transport”. Fig. Show the above situation Solid-State Electronics Chap. 6 14 Instructor: Pei-Wen Li Dept. of E. E. NCU Ambipolar Transport Solid-State Electronics Chap. 6 15 Instructor: Pei-Wen Li Dept. of E. E. NCU Ambipolar Transport Solid-State Electronics Chap. 6 16 Instructor: Pei-Wen Li Dept. of E. E. NCU Quasi-Fermi Levels At thermal-equilibrium, the electron and hole concentrations are functions of the Fermi level by E − E Fi E Fi − E F p n no = ni exp F = and exp o i kT kT Under nonequilibrium conditions, excess carriers are created in a semiconductor, the Fermi energy is strictly no longer defined. We may define a quasi-Fermi level, EFn, for electrons and a quasi-Fermi level, EFp, for holes that apply for nonequilibrium. So that the total electron and hole concentrations are functions of the quasi-Fermi levels. E − EFi E Fi − EF p p n no + δn = ni exp Fn + = and exp o i kT kT Solid-State Electronics Chap. 6 17 Instructor: Pei-Wen Li Dept. of E. E. NCU Quasi-Fermi Levels For a n-type semiconductor under thermal equilibrium, the band diagram is Under low-level injection, excess carriers are created and the quasiFermi level for holes (minority), EFp, is significantly different from EF. Solid-State Electronics Chap. 6 18 Instructor: Pei-Wen Li Dept. of E. E. NCU Excess-Carrier Lifetime An allowed energy state, also called a trap, within the forbidden bandgap may act as a recombination center, capturing both electrons and holes with almost equal probability. (it means that the capture cross sections for electrons and holes are approximately equal) Acceptor-type trap: – it is negatively charged when it contains an electron and it is neutrall when it does not contain an electron. Donor-type trap: – it is positively charged when empty and neutral when filled with an electron Solid-State Electronics Chap. 6 19 Instructor: Pei-Wen Li Dept. of E. E. NCU Shockley-Read-Hall Theory of Recombination Assume that a single recombination center exists at an energy Et within the bandgap. And there are four basic processes that may occur at this single trap. Process 1: electron from the conduction band captured by an initially neutral empty trap. Process 2: electron emission from a trap into the conduction band. Process 3: capture of a hole from the valence band by a trap containing an electron. Process 4: emission of a hole from a neutral trap into the valence band. Solid-State Electronics Chap. 6 20 Instructor: Pei-Wen Li Dept. of E. E. NCU Shockley-Read-Hall Theory of Recombination In Process 1: the electron capture rate (#/cm3-sec): Rcn = CnNt(1-fF(Et))n Cn=constant proportional to electron-capture cross section Nt = total concentration in the conduction band n = electron concentration in the conduction band fF(Et)= Fermi function at the trap energy For Process 2: the electron emission rate (#/cm3-sec): Ren = EnNtfF(Et) En=constant proportional to electron-capture cross section Cn In thermal equilibrium, Rcn = Ren, using the Boltzmann approximation for the Fermi function, − ( E c − Et ) C En = n 'Cn = N c exp In nonequilibrium, excess electrons exist, kT n [ ] Rn = Rcn − Ren = Cn N t n (1 − f F ( Et ) − n ' f F ( Et ) ) Solid-State Electronics Chap. 6 21 Instructor: Pei-Wen Li Dept. of E. E. NCU Shockley-Read-Hall Theory of Recombination In Process 3 and 4, the net rate at which holes are captured from the valence band is given by R p = C p N t [pf F ( Et ) − p ' (1 − f F ( Et )) ] − ( Et − E v ) p ' = N v exp kT In semiconductor, if the trap density is not too large, the excess electron and hole concentrations are equal and the recombination rates of electrons and holes are equal. ⇒ f F ( Et ) = Cn n + C p p ' Cn ( n + n ' ) + C p ( p + p ' ) and Rn = R p = CnC p N t (np − ni2 ) Cn ( n + n ' ) + C p ( p + p ' ) ≡R In thermal equilibrium, np = ni2 ⇒ Rn = Rp = 0 Solid-State Electronics Chap. 6 22 Instructor: Pei-Wen Li Dept. of E. E. NCU Surface Effects Surface states are functionally equivalent to R-G centers localized at the surface of a material. However, the surface states (or interfacial traps) are typically found to be continuously distributed in energy throughout the semiconductor bandgap. Solid-State Electronics Chap. 6 23 Instructor: Pei-Wen Li Dept. of E. E. NCU Surface Recombination Velocity As the excess concentration at the surface becomes smaller than that in the bulk, excess carriers from the bulk region diffuse toward the surface where they recombine, and the surface recombination velocity increases. An infinite surface recombination velocity implies that the excess minority carrier concentration and lifetime are zero. Solid-State Electronics Chap. 6 24 Instructor: Pei-Wen Li Dept. of E. E. NCU Homework 6.14 6.17 6.19 Solid-State Electronics Chap. 6 25 Instructor: Pei-Wen Li Dept. of E. E. NCU Chap 7. P-N junction P-N junction Formation Fermi Level Alignment Built-in E-field (cut-in voltage) Homework Solid-State Electronics Chap. 7 1 Instructor: Pei-Wen Li Dept. of E. E. NCU P-N junction P-Semiconductor N-Semiconductor EC EC EFi EFi EF EV EF EV P-Semiconductor EC N-Semiconductor EC EFi EF EV EFi EF EV Solid-State Electronics Chap. 7 2 Instructor: Pei-Wen Li Dept. of E. E. NCU P-N Junction P-Semiconductor EC N-Semiconductor EC EFi EF EV EFi EV Depletion region Solid-State Electronics Chap. 7 EF 3 Instructor: Pei-Wen Li Dept. of E. E. NCU Hetero-Junction Semiconductor B Semiconductor A EC EC EFi EF EFi EF EV EV ∆EC < 20 meV ∆EC ~0.15 eV EC Relaxed Si0.7Ge0.3 Strained Si0.8Ge0.2 bulk Si Eg = 1.17 eV Eg ~ 1.08 eV Eg ~ 1.0 eV ∆EV ~ 0.15 eV EV Eg ~ 0.88 eV ∆EV ~ 0.05 eV Type II Alignment Type I Alignment Solid-State Electronics Chap. 7 Strained Si 4 Instructor: Pei-Wen Li Dept. of E. E. NCU Quantum Well Electron Confinement ∆EC ~ 0.02 eV relaxed Si0.7Ge0.3 Eg = 1.08 eV ∆EC ~0.18 eV Strained Si0.3Ge0.7 Strained Si Eg ~ 0.72 eV Eg = 0.88 eV ∆EV ~0.34 eV ∆EV ~ 0.48 eV Hole Confinement Solid-State Electronics Chap. 7 5 Instructor: Pei-Wen Li Dept. of E. E. NCU .. .. .. .. .. .. .. .. Strained Si1-xGex Relaxed Si1-xGex Relaxed Si1-xGex misfit dislocation misfit dislocation bulk Si Solid-State Electronics Chap. 7 .. .. .. .. .. .. .. .. Strained Si bulk Si 6 Instructor: Pei-Wen Li Dept. of E. E. NCU