Semiconductor Instruments Inc.
491 Skyline Drive
Woodland Park, Colorado, 80863 USA
Tel. 719-229-6066 Fax 775-262-0409
www.fabsurplus.com e-mail support@fabsurplus.com
Product Profile
Mattson Steag AST 2800 CS Alloy
SDI ID: 7191
Manufacturer: Steag SHS
Model: AST2800CS
Type: Alloy
Version: 6 Inch, can be converted to 8 inch
Condition: good
Vintage: Jun 2001
Sale condition: as is where is
Sales price: 285,000 USD
Quantity: 1
Comments: Running in the FAB.
Inspection Available with conditional PO
Payment Term: 100% before shipping
Temperature Range: 250~1200 degree C
Temperature Uniformity: < +/-3 degree C( 6 inch, no visible slips, no visib; 870 degree C, 30 Sec )
Heat up Rate ( recommended) 5 ~ 30 degree C / Sec ( GaAs )
Temperature Overshoot: < 5 degree C
Cool down rate: Max 30 Degree C / Sec
Rated Lamp Life > 1000 Hrs.
Dimension (mm): w/D/H (1380/1280/2060) 580 Kg
Buyer should arrange de-install
Power: 208V 3P 4W
Tube cooling (N2 or CDA) : 40 M3/h connection, 3/4'' swagelok
Cooling station: purity N2 30psi~45 psi, flow 2.5 m3/h. connection 3/8" swagelok
CDA: pressure 90~120 psi, connection: 1/4'' swagelok
Exhaust:
1. Blower exhaust: connection: 100mm diameter: max flow: 200 m2/h
2. Scavenger: connection: 40 mm diameter.
Located in Asia
Serial number TBD
Deinstalled July 2005
1)What is the range of the pyrometer?
Ans: 300C~600C
2)How many graphite box stations is it configured with?
Ans: Two, left & right
3)What is the current gas configuration?
Ans:N2,Air
4)Does it have an O2 sensor?
Ans: No
5)What if any spare parts does it come with i.e. quartz, graphite
boxes etc.
Ans: No
6)Does it have a quartz liner for GaAs processing?
Ans: Yes
7)Does it have a door heater?
Ans: No
8)Does have a prealigner?
Ans: Yes
9)Does it have a sapphire end effector?
Ans: No
10)Does it have a slot sensor?
Ans: Yes
11)Does it have a SECS/GEM interface?
Ans: Yes
12)Does it have a door aperture?
Ans: No
13)Does it have a connector for external UPS?
Ans: No
14)Does it come with a printer and interface?
Ans: Yes, it has the interface but no printer
15) What is the version of software?
Ans: SHSP 1.2.1 AST2800e/AST2900
16) What is the up time percentage for the tool?
90% average in the past
17) How many gas ports does it have, both used and not used?
CPA and N2 used
18) Does it come with all of the applicable equipment documentation?
YES~
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