WEEKLY REPORT
Name: Uli Thumser
Weekly Report for: 10/21/02 – 10/25/02
1. Accomplishments:
Training:
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SVG coater/dev
two users
Stress tester
three users
Wbgen/gaas
one user
All Litho
two users
Wbmetal
three users (I didn’t qualify them, they
came late and didn’t read the operating instructions)
Correct wet bench tests:
wbgen, wbgaas, wbdiff, wbnonmetal,
wbsilicide, wbmetal
2. Problems:
3. Projects:
Movie project: continue to work on
SVG coater script
4. Plans:
MEMS wet bench: meeting next week
5. Equipment Issues:
Wet bench general: Jim Haydon
installed a new temperature controller!
Zygo: Jim Haydon (and Uli) removed
the Gaertner Ellipsometer from the
testing room to the lab in the extension,
room 213x. Jim McVittie will install it.
Oldtimers (like Chris Storment) are
allowed to use it there.
6. Other:
Attended DUV248 nm presentation by F.Yoghmaie, Shipley.
Attended Nano-Or 250 presentation.
7. Quote of the week (from a pretty nasty user):
“If you guys (staff) would do a reasonable job…”