The Boston University Photonics Center's 235,000 net square foot facility opened
in June of 1997. Its ten floors house state-of-the-art research laboratories,
laboratory support space, a business innovation center, and instructional and
seminar facilities specially designed for photonics research.
The Photonics Center has four core-shared facilities. The Optoelectronic
Processing Facility (OPF) is a 2,500 square foot multi-user cleanroom facility. It
includes both Class 100 and 1,000 cleanrooms with equipment facilitating
photolithography, wet chemical processing, thin film depositions, plasma etching
and cleaning, thermal oxidation, thermal annealing and electrical
characterization. The Integrated Optics Laboratory, comprising 900 sq. ft. Class
100 Cleanroom and laboratory on the 5th floor of the Boston University Photonics
Center, is a multi-user facility equipped with state-of-the-art equipment for
bonding, testing, and analysis of components that were processed in the OPF or
purchased from outside vendors as part of a research project. The Precision
Measurement Laboratory (PML) comprises several laboratories measuring 1,500
square feet and provides capabilities to measure material composition as well as
surface morphology. The Focused Ion Beam/Transmission Electron Microscope
Facility (FTF) provides capabilities to measure material composition, image
surface morphology and micro/nano machine materials.and instrumentation and
is located in a 600 square foot space.