Measurement of the index of
refraction for uranium dioxide in the
extreme ultraviolet and some other
stuff to make the name longer
Presented by Heidi Dumais
Some Background

XUV: 1nm – 60nm

Borders molecular scale

Things like to absorb
it… in particular air
Applications – Why We Might Care

Microelectronics

Astronomical imaging

Microscopy
Procedure

Anatomy of a thin film

ALS beamline

Transmission
measurements

Reflection
measurements
Analysis

Transmission data
gives alpha*thickness

Reflection data gives
thickness

Together we get alpha
→ complex index of
refraction
Reflection Analysis

Reflection data fit to
Parratt recursive
model – vary the index
and the thickness
Transmission Analysis (1st Approx)

Fit the “rocking
transmission” curves to a
model to extract
alpha*thickness

Divide out thickness from
Reflection to get alpha

Alpha gives beta
Redo
Acknowledgments

Dr. Turley and Dr. Allred

Zephne Larsen, Allison Wells, Keith Jackson

NASA

BYU

DOE and Eric Gullikson