Master’s of Science in
Applied Physics
Internship in
Semiconductor Industry
Charley Myles
Department of Physics
Texas Tech University
Lubbock, Texas 79409-1051
•Program started in 1996.
•Strong support from industry.
•Closely affiliated with PSPE in
Electrical Engineering.
Purposes
• Provide excellent education and training for Texas
Tech students in microelectronics.
• Emphasize fundamental, analytical, and practical
degree work.
• Produce strong programs, alternative to traditional
M.S. and Ph.D. programs, which offer advanced
training.
• Relieve human resources crunch in semiconductor
industry.
• Serve as national prototype for university-industry
educational programs.
Year 1
• Prior to internship (two
semesters)*
Year 2
– Quantum Mechanics
• Electives base (one
– Semiconductor Processing
semester following
– Processing and
Characterization
Summer & Fall internship)
Laboratory
– Electromagnetic Theory
Internship
– Device Physics
– Statistical Mechanics
– Semiconductor Physics
– Solid State Physics
– Computational Physics
– Advanced Semiconductor
Processing Laboratory
– VLSI Design
– Failure Analysis
* 5 of 6 required.
– ...
2x P-5000 Cluster Tools
CVD
ETCH
Canon Proximity Printer
Spin Coater
Bake Ovens
Hitachi S-5000 SEM
Phillips X’Pert XRD
“STRATEGY FOR IMPROVING LITHOGRAPHY LAYERS”
Duke Phasirakul (1999)
“MOS GATE PATTERNING USING DEEP UV STEP-AND-SCAN LITHOGRAPHY”
and “PATTERN FIDELITY OPTIMIZATION IN 0.35 m OPTICAL LITHOGRAPHY”
Jerome deGuzman (1998)
“INLINE USE OF IN-FAB AMRAY SEM” and
“THE USE OF OPTICAL PROXIMITY CORRECTION (OPC) IN RESOLVING METAL
LINE PULLBACK ISSUES OF SIMICONDUCTOR LITHOGRPHY”
Marvin Partin (1998)
“AIRBORNE CONTAMINATION OF CHEMICALLY AMPLIFIED PHOTORESIST”
Brian Weber (1998)
“INTEGRATAION AND ELECTRICAL TEST”
Yvonne Emil (1998)
“GATE OXIDE CHARACTERIZATION FOR MOS DEVICES”
Ric Justus (1997)
“MOBILE ION CONTAMINATION: DETECTION METHODS”
David Bunch (1999)
“CHALLENGES IN RESOLUTION FOR MICROELECTRONICS FAILURE ANALYSIS”
Nick A. Martinez (1999)
“FAILURE ANYLYSIS AND MECHANICS IN INTEGRATED CIRCUITS”
Jianbai Zhu (1999)
“FLIP CHIP FAILURE ANALYSIS”
Chris Carty (1998)
“FAILURE ANALYSIS TECHNIQUE DEVELOPMENTS:LOCALIZED DELAYING AND
FOCUSSED ION BEAM MICRO-MACHINING” and
“INVESTIGATIONS INTO DEEP SILICON TRENCH ETCHING FOR FLIPCHIP PACKAGE
FAILURE ANALYSIS”
Preston Scott (1998)
“PHOTOMETRIC EVALUATION OF THIN FILM OPTICAL CONSTANTS” and
“MEASUREMENT OF COMPLEX REFRACTIVE INDICES”
David Bessire(1997)
“EFFECT OF ARRAY IMPLANT DOSE ON FLASH MEMORY PROGRAMMABILITY”
Richard Lawrence (1997)
Kilby Center - Kari Copeland, Jon Vanbuskirk
(May - December, 2000)
“DEVICE MODLING OF DRAM CAPACITORS
WITH TCAD SOFTWARE” and
“INTERFACE EFFECTS AND IONIC CONDITION
OF BARIUM TITANATE CAPACITORS”
Dan Janson (1999)
“INTEGRATION AND SPC IN DRAM PRODUCTION”
William A. Turmel (1999)
“DIAGNOSTIC MEASUREMENT BATTERY IN FA”
Paul D. Gamble
“THE HV5 PROCESS AND PROPERTIES OF
POWER BIPOLAR TRANSISTORS”
Chad E. Cox (1999)
“HIGH FREQUENCY MODELING OF BIPOLAR TANSISTORS” and
“ELECTRICAL TESTING AND CHARACTERIZATION OF BICMOS
Michel Baker (1998)
“QUALIFICATION OF AN ASYST WAFER MANAGEMENT SYSTEM FOR FAB USE”
and “INVESTIGATION OF DEFECTS FROM PLASMA OXIDE ETCHES AND PLASMA
PHOTORESIST ASHERS AND CHARACTERISTIC X-RAY ANALYSIS”
Jeremy O’Dell (1997)
• INFRASTRUCTURE
– National Science
Foundation
– Texas Instruments
– Applied Materials
– Texas Tech University
• STUDENT SUPPORT
– National Science
Foundation
– Texas Tech University
– Texas Instruments
– Applied Materials (2000)
– Intel
– AMD
– Motorola
Students interested in pursuing an advanced technical degree to
prepare for a fast-paced career in microelectronics.
B.S. degree in Electrical or Chemical Engineering, Physics,
Applied Physics, or a closely related field such as
Chemistry or Mathematics.
Good academic record.
GRE general exams.
Apply before March 1
Transcripts to Graduate School.
GRE scores to Graduate School.
Letters of recommendation to the Physics/EE Department.
Dr. Charley Myles
Department of Physics
Texas Tech University
Lubbock, TX 79409-1051
Phone: 806-742-3768
email: CMyles@gordian.phys.ttu.edu