THE ENGINEERING RESEARCH CENTER FOR
WIRELESS INTEGRATED MICROSYSTEMS
A TEN-YEAR FANTASTIC VOYAGE
Ken D. Wise
ERC Director
ERC Site Visit and Celebration
May 18, 2010
NSF ERC for Wireless Integrated MicroSystems (WIMS)
1
WIRELESS INTEGRATED MICROSYSTEMS
(WIMS)
The WIMS ERC was formed recognizing that
technology was approaching a tipping point. By
combining six things, a flood of advances could be
unleashed to improve health care, the environment,
the national infrastructure, and other areas, changing
the way we live and improving the quality of life.
THE WIMS ERC HAS BEGUN THIS REVOLUTION
NSF ERC for Wireless Integrated MicroSystems (WIMS)
2
WIRELESS INTEGRATED MICROSYSTEMS
(WIMS)
High-performance microsystems combining
MEMS
PACKAGING
NANOSTRUCTURES
WIRELESS INTERFACES
ADVANCED POWER SOURCES
MICROPOWER INTEGRATED CIRCUITS
in
a platform suitable
for a wide range of applications,
COUPLING
MICROELECTRONICS
TO THE
customized
by sensor selectionWORLD
and by software.
NON-ELECTRONIC
NSF ERC for Wireless Integrated MicroSystems (WIMS)
3
WIRELESS INTEGRATED MICROSYSTEMS:
The Autonomous Gathering of Information
• Focus for Microelectronics in the “More than Moore” Era
• Key to Meeting the Challenges of the 21st Century
NSF ERC for Wireless Integrated MicroSystems (WIMS)
4
WIMS CORE PERSONNEL
Kensall D. Wise
Director
R. O. Warrington
Assoc. Director, MTU
Leo C. McAfee
Education
D. Sylvester
µpower Circuits
J. M. Giachino
Industrial Liaison
Michael
Flynn
Wireless
Karen Richardson
Administrative
Director
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Dean M. Aslam
Assoc. Director, MSU
Edward Zellers
Environ. Sensors
Daryl
EuisikKipke
Yoon
Biomed.
Biomed. Sensors
Sensors
Khalil Najafi
Y. Gianchandani
Deputy
Director
Deputy Director
Y. Gianchandani
Packaging
Barbara Rice
Financial
Director
5
PARTICIPANTS IN THE WIMS ERC
• Core Faculty
• Outreach Faculty (MSIs)
• Universities
• Departments/Disciplines
• Major Faculty Awards and Honors
Michigan
Tech
49
8
10
16
>20
University of
Michigan
Michigan State
Howard University
North Carolina A&T
University of Utah
•
Spelman College
Prarie View
A&M
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Tulane
University of
Puerto Rico
Mayaguez
6
PUBLICATIONS OF THE WIMS ERC
• Journal Articles Published
• Archival Conference Papers
• Major Invited Journal Articles
• Invited Keynote Presentations
346
811
>10
>25
Covers
NSF ERC for Wireless Integrated MicroSystems (WIMS)
7
ERC IMPACTS ON EDUCATION
•
The WIMS ERC has made extensive contributions to education, graduating
over 150 PhDs to date. Five new microsystems courses have been created
to form the cornerstones of UM M.Eng. and Certificate programs.
•
The multi-year Integrated Microsystems Enterprise program at Michigan
Tech has enrolled >175 students to date, with 79 graduations.
•
The ERC has offered 72 K-12 short courses to date, enrolling 3424 students
(including (for 7-12) 1055 women and 1319 minorities) and changing many
lives. Over 60% of HS graduates have entered college in engineering.
•
WIMS is an ideal tool for encouraging more of our young people to pursue
careers in science and engineering, addressing what is increasingly
recognized as a critical national problem.
NSF ERC for Wireless Integrated MicroSystems (WIMS)
8
WIMS K-12 SHORT COURSES
(of 2149 7-12 Students: 61% underrepresented, 49% female)
MS Research Experience (10)
Research Experience for Teachers (4)
Design Day for Middle & High School (800)
Spartan Challenge FLL – East Lansing Tourney
Shell SITES/10 First LEGO League (FLL) Teams (200)
WIMS for Teens Summer (50)/Spring DAPCEP (30)
Drew Kim
Pre-College
Coordinator
NSF ERC for Wireless Integrated MicroSystems (WIMS)
9
WIMS UNDERGRADUATE PROGRAMS
• Undergraduates are now routinely involved in graduate research,
•
reaching well over 100 students per year and aided by programs such as
REU, LSAMP/REU, WUGR, and REU/WUGR
The Integrated Microsystems Enterprise (IME) program at Michigan
Tech is a multi-year undergraduate project experience engaging teachers
and delivering data-gathering hardware to seven Upper-Peninsula highschools. It has involved over 175 students to date.
MTU
NSF ERC for Wireless Integrated MicroSystems (WIMS)
10
WIMS ERC NEW COLLEGE COURSES
M.Eng. Degree
• 30 credit hours
• Course options in mgmt. & mfg.
• Practicum with industrial mentor
Engineering & Science
Students (Grad & UG)
EECS 414
Introduction to MEMS
EECS 425
MEMS/Integ. µSys Lab
EECS 413
Monolithic Amplifiers
EECS 514
Adv. MEMS Dev. & Tech.
MTU ENT 19xx, 29xx, 39xx, 49xx
Integrated Microsystems Enterprise
MTU ME 4640/5640
Micromanufacturing Processes
CASE Certificate
• 15 credit hours
• Wide choice of engineering
courses
EECS 515
Adv. Integrated µSystems
EECS 427
VLSI Design I
EECS 511
Analog/Digital Interface Circuits
EECS 522
Analog Integrated Circuits
EECS 509
BioMEMS
EECS 523
Digital IC Technology
MTU EE 5470
Semiconductor Fabrication
Technologies
EECS 830
Societal Impact of Microsystems
Key:
Undergraduate
Graduate
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Other Courses:
Manufacturing
Optical MEMS
Wireless Communication
Environmental Chemistry
Business Fundamentals
Patent Law
EECS 627
VLSI Design II
1,317 UM Students
+724 Dist.Ed.
11
WIMS INTERNATIONAL COLLABORATIONS
•
•
•
•
Formal (MicRO) Alliance with the University of
Freiburg and the University of Kyoto
Model for activities at IME Singapore
Research interactions with IME, IMEC, KAIST,
KIST, ETH, Freiburg, Seoul National, Shanghai
Jiao Tong …
Courses offered at the University of Freiburg,
University of Kyoto, University of Lille, Middle
East Technical University, …
SERVICE
•
•
•
Clark Nguyen served 3 years as MEMS Program
Manager, DARPA/MTO
Yogesh Gianchandani served 2 1/2 years as
Micro/Nano Program Manager at NSF
Richard Brown became Dean of Engineering at
the University of Utah, where he continues to
direct a component of WIMS research
NSF ERC for Wireless Integrated MicroSystems (WIMS)
12
WIMS GRADUATE RESEARCH AND IMPACT
• Graduated over 150 WIMS PhDs to date
• Led developments in WIMS to where it is now a
major focus for industry in the “More than
Moore” era
• Authored invited papers at virtually every major
MEMS/microelectronics conference, including
IEDM (3), Sensors Expo, ISCAS, MRS, MTT,
EMBS, COMS, Hilton Head, NSTI Nanotech,
ISSCC (3), SPIE, ISCC, IROS, AVS, CICC,
Eurosensors, Transducers (4), Oliphant CMB,
VLSI Circuit Symposium, µTAS, and DRC.
Many of these talks were plenary.
• Authored invited journal articles in the Proc.
IEEE (4), Sensors and Actuators, Hearing
Research, EMB Magazine, J. Neurophysiology,
Neuron
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Comprehensive
Microsystems:
Fundamentals, Technology, and
Applications,
Eds. Y.B. Gianchandani, O.
Tabata, H. Zappe, Elsevier,
3 volumes, 2100 pages.
13
PRODUCTS OF THE WIMS ERC
• Industrial Members
• Affiliate Members (Sandia)
• Contributing Members
• Spin-off Companies Formed
• Invention Disclosures
• Patents Awarded
NSF ERC for Wireless Integrated MicroSystems (WIMS)
38
1
7
11
103
59
14
WIMS START-UP COMPANIES
Sensicore
Discera
(Water Quality Sensing; ---> GE)
(Integrated MEMS Communications Transceivers)
2000
2001
Mobius Microsystems (MEMS Clocking, ---> IDT)
2002
PicoCal (Thermal Microsystems; Microcalorimetry)
2003
NeuroNexus Technologies
2004
NanoBrick (MEMS
ePack
(Neural Interfaces)
Educational Products)
2006
(MEMS Packaging)
2007
Sakti3 (Battery Technology)
2007
Enertia
2010
(Energy Harvesting)
Ambiq Micro
(Ultra-Low-Power Microsystems)
Structured Microsystems (Implantable Microsystems)
NSF ERC for Wireless Integrated MicroSystems (WIMS)
2010
2010
15
OTHER UNIVERSITY OF MICHIGAN
MEMS/MICROSYSTEM START-UPS
Integrated Sensing Systems (ISSYS)
1995
Pressure and Flow Instrumentation; Medical Products
HandyLab
1999
DNA/Genetic Instrumentation; (----> Becton Dickenson)
Ardesta
2000
Venture Capital; MEMS Commercialization
Sonetics
2003
Infrared and Ultrasonic Imaging Systems
Accuri Instruments
2004
Microflowmeters and Flow Cytometers
Evigia Systems
2004
RFID Technologies and Sensing Microsystems
NSF ERC for Wireless Integrated MicroSystems (WIMS)
16
RESEARCH ACTIVITIES
• Organized in Five Thrusts Areas
– Micropower Circuits
– Wireless Interfaces
– Advanced Processes/Packaging
– Biomedical Sensors
– Environmental Sensors
All Producing Results that Define the State of the Art
• Typically over 100 Projects
• NSF Core Support Typically One-Fourth of Total
• Projects are Linked by Testbeds
– Active Cardiovascular Stent
– Intraocular Pressure Sensor
– Cochlear and Cortical Neural Interfaces
– Environmental Monitoring Microsystem
NSF ERC for Wireless Integrated MicroSystems (WIMS)
17
6mo Rec
ENV SENSORS •µPWR CKTS •WIRELESS •PACKAGE •BIOSENSORS
Passive Probes
Primate Testing
Platform
Spike Detection
In-Vivo Materials
Interface Ckts
Cochlear Modeling
Position Sensing
Cochlear Ckts
Backing
Si-Glass Packaging
Diamond Dep
Si-Si Packages
USM
WIMS µController1
Low-V ADC SOI Studies
Detectors
Preconcentrator
Calibration Source
2001
2003
Subthreshold Design
Narada3 Motes
RF µController
Integrated SOC
SOI Library
LP Software
CVD Columns
Scavenging
Gen1 Env
Microsystem
20cc
µValves
2004
On-Chip Antenna
Cognitive Radio
CMOS Narada2
MICS
Motes
Ratio
MEMS/CMOS Radio
Network Layer
1st-Gen Vac Pump
2002
Digital Radio
Ultrafast Separations
Column Coatings
TE Cooler
Scavenging Structures
PwrAware Compiler
Software
Si-Glass Columns
2000
Narada1 Motes
CIS DSP
WIMS Compiler
In-Vivo Testing
RESEARCH THRUSTS
WIMS Cube
Scaled BioInterface
Solid-Gap Resonators
WIMS µController2
UMSI Bus Interface
Inlet Filter
WIMS Cub
MAC Layer, OS
MEMS Clock
Metal Polymer Packages
SprRegenRadio
MEMS Ref Freq
Fluidic Connectors
Diamond Coatings
Biocables
EDM
GHz µmech Resonator
FDA2
Articul Insrtn
Wireless BioInterface
Antenna Scaling
128-Site
Cochlear
Microsystem
Low-R Leads
Diamond Packaging
PiezoActuation
256-Site
Cortical
Microsystem
Active Probes
Robustness
Display
3D Milling
Drug Delivery
Efficacy
32-Site
Cochlear
Microsystem
Diamond Sensors
FDA1
64-Site
Cortical
Microsystem
Aerosols
2D GC
Field Test
NanoArrays
Field Test
Gen2 Env
MicroSystem
5cc
2nd-Gen Vac Pump
2005
NSF ERC for Wireless Integrated MicroSystems (WIMS)
2006
2007
2008
2009
2010
18
WIMS MICROCONTROLLER EVOLUTION
28% area reduction
3.54mm
PERIPHERALS
16KB
SRAM
8KB
SRAM
16KB
SRAM
CACHE
PIPELINE
PIPELINE
8KB
SRAM
DSP
8KB
SRAM
8KB
SRAM
I/O CLK
WIMS Gen-1 Microcontroller
WIMS Gen-2 Microcontroller
–
–
–
–
–
–
–
–
–
–
–
–
–
TSMC 0.18µm MM/RF bulk CMOS
3.5 million transistors
Core+mem: 33.9mW @ 1.8V & 92MHz
Core+mem: 1.41mW @ 1.15V & 10MHz
MEMS clk: 17.28mW @ 1.8V & 200MHz
Sleep mode: 740µW @ 1.1V
Professor Richard Brown
NSF ERC for Wireless Integrated MicroSystems (WIMS)
3mm
ANALOG
TEST
CLK
16KB
SRAM
CACHE
16KB
SRAM
TSMC 0.18µm MM/RF bulk CMOS
2.3 million transistors
Core+mem: <20mW @ 100MHz
Core+mem: <1mW @ 10MHz
Ring clk: <1mW @ 20MHz
Sleep mode: <50µW
DSP runs CIS
19
PHOENIX: A 30pW Platform for Sensing Applications
• Minimizes sleep energy to realize the
world’s lowest-power processors
• The Phoenix microprocessor has been
designed with comprehensive sleep
strategy
—Unique power gating approach
—Event-driven CPU with compact
instruction set
—H/W supported compression
—Low leakage SRAM cell
—Adaptive leakage management in DMEM
• Measurements
—Psleep,avg= 30pW
—Eactive= 2.8pJ/Inst at 0.5V
—Psram = 10.9fW/bit (retentive)
Professor Dennis Sylvester
—915 x 915μm2 in TSMC 0.18µm
—10 yr lifetime with 1mm2 thin-film battery
NSF ERC for Wireless Integrated MicroSystems (WIMS)
20
AN 0.13µM CMOS 2.4GHZ ISM BAND SUPER
REGENERATIVE RADIO
The first fully integrated super-regenerative radio
Supply
•
•
1.2 V
Supply current
2.5 mA
Area
1mm2
Sensitivity
-90 dBm
Data rate
< 500 Kbits/s
Channel
spacing
10 MHz
BER
< 1/1000
Professor Michael Flynn
Record energy efficient ~ 5.8nJ/bit
New multi-channel architecture with excellent selectivity
NSF ERC for Wireless Integrated MicroSystems (WIMS)
21
ON-CHIP ANTENNAS
World Record
Size and
Efficiency for an
On-Chip Antenna
LNA
9 GHz Miniaturized Antenna
Antenna Type
Gain
[dBi]
fr
[GHz]
Max.
Linear
Dimension
This work
-10.0
9.0
780 µm
Dipole Ant. [1]
-31.2
7.4
2000 µm
Zig Zag Ant.
[2]
-17.0
15.0
2000 µm
Professor Kamal Sarabandi
NSF ERC for Wireless Integrated MicroSystems (WIMS)
22
WIRELESS INTEGRATED SENSING PLATFORMS
2006: WIMS Narada Nodes
• 16b ADC resolution on four channels
• ISM band transceiver (802.15.4)
• Range: 300m, Data Rate: 250Kbps
• Sample Rate: 100kHz
• Volume 60cc
• Power 200mW
Deployed Worldwide
nW Processor
Super-Regen Radio + Tx
2mm
2010: Single-Chip Nodes
Antenna
Vapor Sensor
Battery
• On-chip vapor/temp sensors
• Wireless on-chip transceiver
• On-chip antenna
• Single chip, Volume < 0.002cc
• Power: 2mW/1µW/1nW
Professors Michael Flynn, Jerome Lynch, and Dennis Sylvester
NSF ERC for Wireless Integrated MicroSystems (WIMS)
23
NARADA-BASED INFRASTRUCTURE MONITORING
Grove Street Bridge, Ypsilanti, Michigan (2005)
Geumdang Bridge, Korea (2005 - present)
18 wireless sensors measuring acceleration and displacement
16 wireless sensors measuring acceleration
Voigt Bridge, San Diego, California (2006)
Wu Yuan Bridge, China (2005 - present)
20 wireless sensors measuring acceleration
8 wireless sensors measuring acceleration
Professor Jerome Lynch
NSF ERC for Wireless Integrated MicroSystems (WIMS)
24
ACTIVE CARDIOVASCULAR STENTS
Wireless Readout of Intra-Arterial Blood Pressure/Flow on Demand
Andrew Dehennis
Ken Takahata
Yogesh Gianchandani
Ken Wise
0.002cc
Detects flow drops >13%
due to re-stenosis in the
carotid arteries.
NSF ERC for Wireless Integrated MicroSystems (WIMS)
25
A WIRELESS INTRAOCULAR
PRESSURE SENSOR FOR TREATING GLAUCOMA
• Intraocular pressure is a significant key in treating glaucoma, the second•
•
•
•
•
leading cause of blindness, affecting 65 million worldwide
Sensor will take readings every 15min, storing them in memory
Powered by energy scavenging; read out once a day over an UWB link
Integrates the pressure sensor, rechargeable microbattery, wireless link,
and embedded processor in a parylene-covered glass package
Size: 0.5mm x 1mm x 2mm
Phoenix processor holds data at 30pW; operates at 300nW.
Fill Ports
Electrolyte
MicroBattery
Processor ASIC
Razi Haque, Ken Wise, Dennis Sylvester, Paul Lichter
NSF ERC for Wireless Integrated MicroSystems (WIMS)
26
A GLASS-IN-SILICON PROCESS FOR THE
INTRAOCULAR PRESSURE SENSOR
Hermetically-sealed pressure
sensors in glass packages
on a U.S. penny
Sensitivity: 25fF/mmHg
Resolution: 0.2mmHg
Range: 600-900mmHg
Linear Response
NSF ERC for Wireless Integrated MicroSystems (WIMS)
27
ANATOMY OF A COCHLEAR PROSTHESIS
External
Transmitter
Coil
Receiver/Stimulator
Over 150,000
Ball Reference Electrode cochlear prostheses
have been
implanted to date.
250 million people
worldwide are
classified as
disabled due to
hearing loss.
Wire Electrode Bundle
Speech Processor
(worn behind the ear)
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Courtesy of Cochlear Corporation
28
A HIGH-DENSITY COCHLEAR MICROSYSTEM
Roger A. Haken Best Student Paper Award
2005 IEEE International Electron Devices Meeting
Thin-film electrode technology; up to 128 high-density IrO sites
Embedded sensors for array position and wall contact
Biocompatible silicon-quartz-parylene structure; integrated 8-lead microcable
Articulated insertion tools being developed to allow deep placement
All Firsts
A Five University Collaboration
NSF ERC for Wireless Integrated MicroSystems (WIMS)
29
AN ALL-PARYLENE 32-SITE
THIN FILM COCHLEAR ELECTRODE
A triple-parylene process provides
flexibility, robustness, and the biocompatibility needed for long-term
implants. Molded and monolithicallyformed backings are in development
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Cochlear
Corporation
30
CORTICAL
MICROSYSTEMS:
Electronic Interfaces to
the Nervous System
Gateway to
Prostheses for:
Deafness
Blindness
Epilepsy
Paralysis
Parkinson’s Disease
NSF ERC for Wireless Integrated MicroSystems (WIMS)
31
A LOW-PROFILE HIGH-DENSITY CORTICAL ARRAY
64 Sites on 200µm Centers Instrumenting 1mm3
• World-leading
•
•
technology for neural
interfaces
Driving revolutionary
advances in neuroscience
Foundation for neural
prostheses for treating
– Deafness
– Blindness
– Epilepsy
– Parkinson’s Disease
– Paralysis
NSF ERC for Wireless Integrated MicroSystems (WIMS)
1mm x 1mm x 0.5mm
with 4mm long shanks
32
DIAMOND NEURAL PROBES
MSU: Mike Varney,
H. Chan, Dean Aslam
Earlier Diamond Probes:
Diamond Single Material MEMS (SMM) Probe:
EC Potential Window = 3V
EC Potential Window = 4 V
1 mm
Nor-epinephrine Detection
5 µm
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Stimulus
Noise
Recordings in
Guinea Pig
Auditory Cortex
in Response to
Acoustic
Stimulation
Tip
10μV
500 ms
33
LATTICE PROBES: Scaling to Cellular Dimensions
10 µm
NSF ERC for Wireless Integrated MicroSystems (WIMS)
34
UNDERSTANDING THE
FOREIGN-BODY RESPONSE
Horizontal Section at 8 weeks Post-Implant
Shank Positions
Collaborators:
John Skousen and Prof. Patrick Tresco, University of Utah
NSF ERC for Wireless Integrated MicroSystems (WIMS)
100µm
35
SOLID VS. LATTICE SHANKS: HORIZONTAL SECTIONS
“Distance from electrode face to end of ED-1
positive zone greater on solid vs. lattice probe”
8 weeks post-implant
300µm
NSF ERC for Wireless Integrated MicroSystems (WIMS)
36
MEAN ED-1 IMMUNOREACTIVITY
Fluorescent Intensity (Arbitrary Units)
70
60
50
40
Activated Microglia/Macrophages
For both ED-1 (microphages)
and IgG (blood-brain barrier)
staining, the extent of the
reaction zone is greatly
reduced along with the amount
of reaction.
Electrode Thickness
Solid
Lattice
For the blood-brain barrier, the
reduction is much more
dramatic than for
macrophages, reaching a peak
of only 15 within the lattice
holes themselves
30
20
10
0
-400
-200
0
200
400
Distance from Center of Electrode (µm)
NSF ERC for Wireless Integrated MicroSystems (WIMS)
37
A 5-PROBE 160-SITE ARRAY FOR CN MAPPING
Sr. Mary Elizabeth Merriam
Prof. Susan E. Shore
NSF ERC for Wireless Integrated MicroSystems (WIMS)
38
FREQUENCY MAPPING IN THE
COCHLEAR NUCLEUS (VCN)
Frequency tuning seen across the VCN
rostral-caudal tonotopic axis.
Enabling Breakthroughs in our Understanding of the CNS
NSF ERC for Wireless Integrated MicroSystems (WIMS)
39
MEDICAL COLLABORATORS
with thanks to
James Baker
György Buzsáki
Daniel Hayes
Paul Lichter
John Middlebrooks
William O’Neill
James Patrick
Bryan Pfingst
Ken Pienta
Robert Shannon
Susan Shore
Russell Snyder
Patrick Tresco
Blake Wilson
University of Michigan
Rutgers University
University of Michigan
University of Michigan
UC — Irvine
Beaumont Hospital
Cochlear Corporation
University of Michigan
University of Michigan
House Ear Institute
University of Michigan
UC — San Francisco
University of Utah
Duke University
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Cell Sorting
Systems Neurophysiology
Cancer Screening
Intraocular Implants
Auditory Implants
Active Stents
Cochlear Implants
Cochlear Implants
Cell Sorting
Cochlear Implants
CN/VCN Mapping
Cochlear Implants
Foreign Body Response
Speech Coding
40
A 32-CHANNEL DIGITAL SPIKE DETECTOR
•
Accepts/digitizes 32 multiplexed channels to 5b; calculates
per-channel means and standard deviations; sets biphasic
thresholds; transmits signals at 2.56Mbps.
•
Identifies spikes, saving 10-15X in system bandwidth and
increasing the number of channels from 25 to 312.
•
Operates at 1.2mW from a 3V supply and a 2.56MHz clock
with a die size of 2mm x 3mm.
NSF ERC for Wireless Integrated MicroSystems (WIMS)
41
A 32-CHANNEL MIXED-MODE PROCESSOR
8-Channel Spike
Detector Module 0
Neural
Data
Digital Data
Organizer
8-Channel Spike
Detector Module 1
Timing/
Control
8-Channel Spike
Detector Module 2
8-Channel Spike
Detector Module 3
M
U
X
ADC
Data Fusion Core
Front-End Site Selection
Analog Site Access (Monitor Mode)
DIGITAL SIGNAL PROCESSOR
Scan mode: Transmits addresses of active sites
Monitor mode: Digitizes and transmits the full spike shape
NSF ERC for Wireless Integrated MicroSystems (WIMS)
42
A FIRST-GENERATION CORTICAL MICROSYSTEM
Monitor and scan modes;
64 channels: Programmable
threshold, gain, and LF
cutoff; Output data rate:
64kS/sec@2MHz clock,
2Mbps; Per-channel gain:
1000
Demonstrated
functionality but too big
and too many bonds.
Reconstructed Signal
Original Signal
3
250
Recorded Signal
2.5
Reconstructed Signal
200
2
150
1.5
100
1
50
0.5
0
690
700
710
720
730
740
750
Time(msec.)
NSF ERC for Wireless Integrated MicroSystems (WIMS)
0
690
700
710
720
730
740
750
Time(msec.)
43
A SECOND-GENERATION CORTICAL MICROSYSTEM
Stimulation mode;
Monitor and scan
recording modes;
Site Selection;
32 recording
channels;
16 stimulating
channels;
Programmable
per-channel
threshold; Output
data rate:
64kS/sec@2MHz
clock, 2.5Mbps;
Nominal
per-channel gain:
1000
NSF ERC for Wireless Integrated MicroSystems (WIMS)
44
GAS CHROMATOGRAPHY: Separation and
Identification of Complex Gaseous Mixtures
The WIMS µGC
100X Smaller
100X Cheaper
100X Faster
TARGETED
PERFORMANCE:
• 30-50 Organic-Vapor
Pollutants per Analysis
• Detection Levels: <1ppb
per analyte
Table-top instruments that offer precision analysis • Analysis time: 5-50sec
• Size: 5-50cc
but are relatively expensive, slow, and not
portable enough for field use
NSF ERC for Wireless Integrated MicroSystems (WIMS)
45
µGCs FOR COMPLEX GASEOUS MIXTURES
(2003)
Dual-column (tunable)
(2006)
Comprehensive
µGC x µGC
(2009)
Single column
(2010)
Mercury
NSF ERC for Wireless Integrated MicroSystems (WIMS)
46
ENABLING TECHNOLOGIES
High-volume micropumps
High-capacity, low-mass
preconcentrators
10µm
High-resolution, low-mass
µcolumns
NSF ERC for Wireless Integrated MicroSystems (WIMS)
High-sensitivity nano-arrays
47
µGC PRECONS, COLUMNS, AND DETECTORS
Mercury
Detector, 50cm column, and
single-bed precon on
a U.S. quarter
5
10
15
20 Time (sec)
NSF ERC for Wireless Integrated MicroSystems (WIMS)
48
SEPARATION OF SIX TUBERCULOSIS
BIOMARKERS FROM 30 INTERFERENCES
Analysis conditions
Professor Ted Zellers
11, 12, 13
10
9
7
6
17-19
15
Carrier gas: Air
Split: splitless
Inlet: 200ºC, 8 psi
Column: two 3m
Flow: 0.3mL/min
Detector: FID
31
30
16
14
3
4
1 2
5
Biomarkers
1.
2.
3.
4.
5.
1-dimethylcyclohexane (cis)
1-dimethylcyclohexane (trans)
3-heptanone
2,2,4,6,6-pentamethylheptane
1-methyl-4-(1-methylethyl)- b
enzene (p-cymene)
6. 1-methylnaphthalene
24
23
20
22 26
21 25 28
33
27 29 32
8
36
34
0
1
2
3
4
5
35
6
7
8
9
10
Retention Time (min)
NSF ERC for Wireless Integrated MicroSystems (WIMS)
49
DETECTION OF EXPLOSIVES
INTREPID µGC
•
CS2
•
Partial separation
coupled with sensorarray pattern permits
determination of nitroaromatic explosives
LOD (2,6-DNT) = 35ppt!
Professor Ted Zellers
C14
DMNB
2
5
2,6-DNT
2,4-DNT
C15
0.1
11
0.8
0.8
0.6
0.6
0.4
0.4
0.2
0.2
00
0.2
11
0.8
0.8
0.6
0.6
0.4
0.4
0.2
0.2
00
1
C8
C16
7
C13
2,3-dimethyl-2,3dinitrobutane
n-pentadecane
2
3
4
0.3
Time (min)
NSF ERC for Wireless Integrated MicroSystems (WIMS)
1
C8
2
3
OPH DPA
4
HME
2
3
4
OPH DPA HME
2,6-dinitrotoluene
2,4-dinitrotoluene
11
0.80.8
0.60.6
0.40.4
0.20.2
00
1
C8
OPH DPA HME
11
0.8
0.8
0.6
0.6
0.4
0.4
0.2
0.2
00
1
C8
2
3
4
OPH DPA HME
50
A FULLY-INTEGRATED MERCURY MICROSYSTEM
Robert J. M. Gordenker
Hassan Lajihi
Mercury µGC with preconcentrator, 50cm separation column, and detector.
Temperature sensors, heaters, drivers, processor, memory, USB interface.
NSF ERC for Wireless Integrated MicroSystems (WIMS)
51
THE ORION µGC
Pushing the limits to reduce
size, analysis time, and power.
NSF ERC for Wireless Integrated MicroSystems (WIMS)
52
THE ORION µGC
hexane
methane
heptane
octane
Monolithically-formed
cold
spots.
2
4
6
8 plug-in
10 connections
12
14 eliminate
16
18
< 8J/analysis;
<50mW average
Time (s)
On an
Apple “Shuffle” MP3 Player
NSF ERC for Wireless Integrated MicroSystems (WIMS)
Circle is about the size of a U.S. quarter
53
•The WIMS ERC has:
IMPACTS
– Graduated over 150 doctoral students; offered short courses enrolling over
3500 pre-college students, with 60% selecting engineering careers.
– Created 11 startups, with an impact on the State estimated at over $400M.
– Led a worldwide revolution in microsystems and its core technology areas.
– Demonstrated smart stents, biopsy needles, and intraocular pressure
sensors to improve cardiovascular care, cancer diagnosis, and the
treatment of glaucoma.
– Demonstrated low-cost widely-deployable radiation detectors for ensuring
the safety and integrity of containerized shipping worldwide.
– Sparked worldwide efforts to develop neuro-electronic interfaces for
neuroscience and neural prostheses.
– Realized the first thin-film cochlear electrode arrays, with the prospect of
providing improved hearing to millions.
– Developed smart air-quality monitors to help address global warming.
– Demonstrated hand-held breath analyzers for biomarkers of tuberculosis
and lung cancer, for use in developed and undeveloped areas of the world.
NSF ERC for Wireless Integrated MicroSystems (WIMS)
54
Technology has passed a tipping point. By combining
micropower circuits, sensors, wireless interfaces,
power sources, packaging, and nanostructures,
WIMS has unleashed a flood of advances for health
care, the environment, the national infrastructure,
and other areas that will change the way we live and
improve the quality of life.
The WIMS Institute will continue to drive core research
in microsystems and their use in addressing critical
national needs.
NSF ERC for Wireless Integrated MicroSystems (WIMS)
55