Joel Voldman*
Massachusetts Institute of Technology
*with thanks to SDS
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 1
> What is hard about BioMEMS
> BioMEMS success stories
> DNA amplification and PCR
> Two designs
• A static PCR thermocycler
• A flow-thru design
• Comparison
> Design evolution of static approach
> Conclusions
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 2
> Applications of microsystems to bioscience
• Neural probes
• Capillary electrophoresis
• Drug delivery
• Cellular engineering
• Tissue engineering
Univ. Michigan
Courtesy of Kensall D. Wise.
Used with permission.
Berkeley
Courtesy of Richard A. Mathies.
Used with permission.
Image removed due to copyright restrictions.
Image removed due to copyright restrictions.
Image removed due to copyright restrictions.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 3
> The biological system is poorly defined
• We fundamentally understand physics
• We DON’T fundamentally understand biology
• Thus, only part of system can be truly predictively designed
> “Intrinsic” biological limitations can dictate system performance
• Protein-protein interaction kinetics
• Polymerase error rates
> The materials (and thus processes) are often NOT silicon (and thus harder)
• We must move away from the most established fabrication technologies
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 4
> Depending on the definition, there are very few
> Commercial successes
• Blood pressure sensors
» Low-cost “widget” allows devices to be disposable
• Affymetrix DNA microarrays
» Vastly decreases time and cost for analyzing nucleic acids
» But these are not really bioMEMS
Image removed due to copyright restrictions.
PCB-mountable pressure sensor for medical applications.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 5
> Depending on the definition, there are very few
> Commercial successes
• Blood pressure sensors
» Low-cost “widget” allows devices to be disposable
• Affymetrix DNA microarrays
» Vastly decreases time and cost for analyzing nucleic acids
» But these are not really bioMEMS
Courtesy of Affymetrix,
Inc. Used with permission.
Courtesy of Affymetrix, Inc. Used with permission.
Courtesy of Affymetrix, Inc. Used with permission.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 6
> In the commercial sector, there has been lots of hype
• Success is uncertain
> Caliper/Aclara
• Lab-on-a-chip
> I-stat
• Portable blood analyzer
• Uses ion-selective electrodes, conductivity, etc. to measure salts, glucose, etc.
• Introduced ~1997
• Purchased by Abbott
Image removed due to copyright restrictions.
Lab-on-a-chip is about the size of a U. S. dime.
Image removed due to copyright restrictions.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 7
> Away from commercial sector and into basic science, more successes arise
> Success can be defined as having impact on the target audience
> Ken Wise’s neural probes
• CMOS + bulk micromachining
Univ. Michigan
Courtesy of Kensall D. Wise.
Used with permission.
• Puts op-amp right near neural recording sites Î amplifies and buffers weak (~ μ V) signals
• These are being used by neuroscientists in actual experiments
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 8
> What is hard about BioMEMS
> BioMEMS success stories
> DNA amplification and PCR
> Two designs
• A static PCR thermocycler
• A flow-thru design
• Comparison
> Design evolution of static approach
> Conclusions
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 9
> DNA contains the genetic information (genotype) that determines phenotype (i.e., you)
> It consists of a two antiparallel helical strands
• Read 5’ to 3’
• A sugar-phosphate backbone
• Specific bases (A, C, G, T) that contain genetic code
> This code determines the sequence of amino acids in proteins
(B)
-O
O
3'
P
O
3'
4'
2'
1'
O
CH
3
O
5
6
N
1
T
4
2
3 N
O
H
H
H
N
N 1
6
2
A
5
3
N
4
N
7
H
8
9
N
-O
O
-O
-O
O
O
P
P
O
O
O
O
3' 2'
4'
1'
O
3' 2'
4'
O
1'
N
8
9
N
7
N
8
9
N
7
O
H
4
5
3
G
6
2
N
1
N
N
H
N
H
5
4
H
N
3
A
6
2
1 N
P
O
O
N
6
N
5 4
C
1 2
3
O
N
H
H
H
CH
2
3' 2'
4'
1'
O
H
H
H
H
O
N
N
1
6
G
2 3
5
4
N
H
N
N 3
4
2
C
5
6
1
N
O
O
N
9
N
N
O
N 3
4
2
T
5
1
6
N
O
1'
2'
O
1'
2'
4'
3'
O
O
O
4'
3'
O
1'
2'
O
4'
3'
P
O
P
P
5'
1'
5'
O
2'
4'
3'
O
CH
2
O
P
-O
O
O
-O
O
-O
O
-O
5' 3'
Lodish, MCB
Image by MIT OpenCourseWare.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 10
> The bases pair specifically
• A with T
• C with G
> Specific enzymes (DNA polymerases) can add complementary nucleotides to an existing template + primer
• This is done in vivo in DNA replication
> Was capitalized in vitro in polymerase chain reaction (PCR)
• Invented in 1985, Nobel Prize in
1993
Incoming deoxyribonucleoside triphosphate
5'
3'
Template strand
3'
Gap in helix
Repaired
DNA helix
Image by MIT OpenCourseWare.
Alberts, MBC
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 11
> Specifically amplify DNA starting from 1 doublestranded copy
5'
3'
5'
3'
5'
3'
3'
3'
{
{
Region to be amplified
Primer 1
5'
5'
}
Add excess primers 1 and 2, dNTPs, and Taq polymerase
Heat to 95 o
Cool to 60 o
C to melt strands
C to anneal primers
3'
5'
Primer 2
Primers extended by Taq polymerase at 72 o
C
3'
Heat to 95 o
Cool to 60 o
5'
C to melt strands
C to anneal primers
5'
3'
Primers extended by Taq polymerase at 72 o
C
5'
Heat to 95 o
3'
Cool to 60 o
C to melt strands
C to anneal primers
Image by MIT OpenCourseWare.
Lodish, MCB
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 12
{
Cool to 60 o
C to anneal primers
Primers extended by Taq polymerase at 72 o
C
Heat to 95
Cool to 60 o
C to melt strands o C to anneal primers
And so on
{
Primers extended by polymerase at 72 o
C
Taq
Image by MIT OpenCourseWare.
Lodish, MCB
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 13
> Key technological improvement was use of polymerase that could withstand high temperatures
• Isolated from Thermus aquaticus
( Taq )
• Don’t have to add new polymerase at each step
> The device is a simple thermocycler
> Allows amplification and detection of small quantities of DNA
Image removed due to copyright restrictions.
PCR machine by MJ Research.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 14
> Taq extension rate ~60 nt/sec
> PCR products are typically a few hundred bases
• Need ~5 sec for extension
• Plus time for diffusion
> Typical protocols
• ~25-35 cycles at 1-3 min/cycle
• ~30 cycles Æ 75 minutes
100
Step 1: Denature template
90
80
Step 3:
Primer extension
70
60
50
40
30
0
Step 2:
Anneal primer
One " Cycle"
2 4 6 8
Minutes
10 12 14 16
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Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 15
> Cycle time is dominated by ramp times due to thermal inertia
• Usually much longer than kinetically needed
> Transient and steady-state temperature uniformity limits cycle time & specificity
Property Spec
Temp range
Set-point accuracy
5-105 ºC
± 0.25 ºC
Temperature uniformity ± 0.4 ºC within 30 sec
Heating/cooling rate ~ 3 ºC/sec
Sample volume 50 μ l
Number of samples 96
Power required 850 W
BioRad DNA Engine
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 16
> What is hard about BioMEMS
> BioMEMS success stories
> DNA amplification and PCR
> Two designs
• A static PCR thermocycler
• A flow-thru design
• Comparison
> Design evolution of static approach
> Conclusions
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 17
> Decrease size of chamber
• Vary temperature in time
> Use a flow-thru approach
• Vary temperature in space (and therefore time)
> In both cases, the device is a thermal MEMS device and the key is to reduce thermal response times
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 18
> First reported by Northrup et al.
in 1993
• Essentially a miniaturized thermal cycler
Cover glass
Polyethylene tubing
0.5 mm
10 mm Silicone rubber
Silicon
Low-stress silicon nitride
Aluminum bond pad
Polysilicon heater
Image by MIT OpenCourseWare.
Adapted from Northrup, M. A., M. T. Ching, R. M. White, and R. T. Watson. "DNA Amplification with a
Microfabricated Reaction Chamber." In Transducers '93: the 7th International Conference on Solid-State
Sensors and Actuators: digest of technical papers: June 7-10, 1993, PACIFICO, Yokohama, Japan . Japan:
Hiroyuki Fujita, 1993, p. 924-926. ISBN: 9784990024727.
Northrup et al., Transducers ’93, p924
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 19
> Daniel et al.
improved thermal isolation
Courtesy of Elsevier, Inc., ___________________ . Used with permission.
Figure 5 on p. 84 in: Daniel, J. H., S. Iqbal, R.
B. Millington, D.
F. Moore, C.
R. Lowe,
D.
L. Leslie, M.
A. Lee , and M.
J. Pearce. "Silicon Microchambers for DNA Amplification.“
Sensors and Actuators A, Physical 71, nos. 1-2 (November 1998): 81-88.
mesh isolati on chamber beams
Courtesy of Elsevier, Inc., ___________________ . Used with permission.
Figure 3 on p. 83 in: Daniel, J. H., S. Iqbal, R.
B. Millington, D.
F. Moore, C.
R. Lowe,
D.
L. Leslie, M.
A. Lee , and M.
J. Pearce. "Silicon Microchambers for DNA Amplification.“
Sensors and Actuators A, Physical 71, nos. 1-2 (November 1998): 81-88.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 20
> Developed by Kopp et al.
in 1998
Buffer in Sample in Product out
Output capillary
60 o
C MM
Input capillaries
77 o C
95 o
C
Annealing
zone
Extension zone
Denaturing zone
Two-layer glass with etched flow channels
Image by MIT OpenCourseWare.
Adapted from Figure 1 on p. 1046 in Kopp, M. U., A. J. de Mello, and
A. Manz. "Chemical Amplification: Continuous-flow PCR on a Chip."
Science, New Series 280, no. 5366 (May 15, 1998): 1046-1048.
Image by MIT OpenCourseWare.
Adapted from Kopp, M. U., A. J. de Mello, and A. Manz. "Chemical Amplification:
Continuous-flow PCR on a Chip." Science, New Series 280, no. 5366 (May 15,
1998): 1046-1048.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 21
> Daniel reactor
• SiN mesh structure, undercut with KOH
» Made hydrophobic to keep water in chamber during loading
• Platinum heater resistors heat up beams
• Two temperature sensing resistors
» One on beams for feedback control
» One on membrane to sense “liquid” temp
• Use oil drop on top of liquid to prevent evaporation
Courtesy of Elsevier, Inc., ___________________ .
Used with permission. Figure 3 on p. 83 in: Daniel, J. H.,
S. Iqbal, R. B. Millington, D. F. Moore, C. R. Lowe, D. L. Leslie,
M. A. Lee, and M. J. Pearce. "Silicon Microchambers for DNA
Amplification." Sensors and Actuators A, Physical 71, nos. 1-2 (November 1998): 81-88.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 22
> Three steps
> Model chamber
> Model beams
> Combine the two, with heating at beams substrate chamber substrate beams
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 23
> Chamber model y
> Assume rectangular crossx section
> Assume dominant heat loss through beams
Î 2-D heat flow problem
• Neglect conduction along top and bottom
• Temperature does not vary in z
> Interested in dominant time constant
Eigenfunction expansion solution to heat-flow eqn.
=
n m
( , , ) = A
1
A cos
⎛
⎝
π
L
⎞
⎠ cos
⎛
⎝ L ⎠ e − α cos
⎜
π
L x
⎟ cos
⎜
π
L y
⎟ e − α
1 t
Lowest mode t
τ f
=
1
α
1
=
2 π
L 2
2 D
=
L 2
2 π m
2
ρ
κ m
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 24
> Obtain lumped heat capacity by weighing over mode volume
C f
> Extract thermal resistance from time constant
> Thermal resistance same as zeroth-order model
R f suggests
=
1
κ length ⋅ area
1
4
=
L
κ
2
1
LH
4
=
1
8 κ H
C f
C f
τ f
=
=
=
ρ m
ρ m m
~ m
−
L
L
/
/
2
−
L
L
/
2
2 H
2 L
π
2 L
π
H cos
⎛
⎝
π x
L
4 ρ m
π m
2
L 2 H
= R f
C f
⇒ R f cos
⎛
⎝
π y
L
=
1
8 κ H dxdydz
> For L =2 mm, τ= 1.4 s
> H =400 μ m, volume = 2 μ l
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 25
> Lumped elements for beams
• Include beam capacitance
> Two circuits to model beams
• Capacitor in center
• Capacitor at edge
> Both circuits contain same energy in capacitor at steady state
• Capacitor at edge is simpler
R b
C b
=
=
1
4
ρ
1 length m
κ
~ m area volume substrate wall beam
Substrate
R b
/ 2 R b
/ 2
Wall
C b
Substrate
R b
Wall
C b
/ 2
Image by MIT OpenCourseWare.
Adapted from Figure 22.14 in Senturia, Stephen D. Microsystem Design . Boston, MA: Kluwer
Academic Publishers, 2001, p. 617. ISBN: 9780792372462.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 26
> Lumped circuit model of reactor
> First-order lag between wall and fluid temperature
T f
=
1 +
1
τ f s
T w
τ f
=
2 π
L 2
2 D substrate
R b wall
+
R f fluid
+
> Making L smaller reduces lag
P T w
-
C b
/2 T f
-
C f
Substrate Wall Fluid in chamber
Image by MIT OpenCourseWare.
Adapted from Figure 22.15 in Senturia, Stephen D. Microsystem Design . Boston, MA: Kluwer
Academic Publishers, 2001, p. 618. ISBN: 9780792372462.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 27
> Simulink proportional control circuit
> Saturation needed for maximum +/- voltage swing
• Set to 0 to 15 V
Signal 1
Signal builder
-
+ As0 s + As0/K
Op-amp gain K
Saturation u[1]^2/Rh
Joule heat P
Switch
Fluid
1
Rf*Cf.s + 1
Fluid temp
0 Select feedback
Wall
Rb*Rf*Cf.s + Rb
Rb*Rf*Cf*Cb/2.s
2 + (Rb *Cb/2 + (Rf + Rb) *Cf)s + 1
Transfer Fcn
Image by MIT OpenCourseWare.
Adapted from Figure 22.16 in Senturia, Stephen D. Microsystem Design . Boston, MA: Kluwer Academic Publishers, 2001, p. 619. ISBN: 9780792372462.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 28
.
> Wall temperature can be controlled very quickly
> Wall to fluid heat transfer limits performance
> Sensing fluid temperature marginally reduces response times
• But creates high-temp regions at chamber wall
100
90
80
70
60
50
40
30
20
0
120
100
80
10 20
T (s)
30 40
Control
Fluid
Wall
60
40
20
0 10 20
T (s)
30 40
Image by MIT OpenCourseWare.
Adapted from Figure 22.17 in Senturia, Stephen D. Microsystem Design . Boston,
MA: Kluwer Academic Publishers, 2001, p. 620. ISBN: 9780792372462.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 29
> System partitioning: put heaters off-chip
> Etch channels in glass, bond glass cover
Buffer in Sample in Product out
60 o C
77 o
C
95 o C
Two-layer glass with etched flow channels
Image by MIT OpenCourseWare.
Adapted from Figure 1 on p. 1046 in Kopp, M. U., A. J. de Mello, and A. Manz.
"Chemical Amplification: Continuous-flow PCR on a Chip." Science, New Series
280, no. 5366 (May 15, 1998): 1046-1048.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 30
> Wall-to-fluid time constant is same as in batch device
>
L
1
=40 μ m,
L
2
=90 μ m
>
D
=1.4x10
-7 m 2 /s
> τ f
= 1.2 ms
> 1000 × faster than batch device!
f
=
2
L
1
2
L
2
D
> Entrance length for thermal equilibration
L e
3 v f
f
> Average flow velocity v f
Q f area
20 mm/s
L
1
L e
60
m
This is much smaller than zone lengths
> Thermal Pe number is ~10 -3
L
2
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OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 31
> What about Taylor dispersion?
> Pressure-driven may cause multiple samples to coalesce
> Hydrodynamic radius of 1 kb
DNA ~ 50 nm
> Dispersivity is dominated by convection
• Samples will spread out a lot, limiting usefulness for multiple samples
D =
6 k
B
T
πη R
Pe =
LU
D
K
=
=
( 40 μ m )( 0 .
02 m
4 .
4 x 10 − 8 cm 2 /
/ s s )
D
⎛
⎝
1 +
Pe 2
210
⎞
⎟⎟ f
⎛
⎜⎜
L
1
L
2
⎞
⎟⎟
~ 2 x 10 5
K
L
1
L
2
~
~ 0 .
4
8 x 10 8
→
⋅ D f
⎛
⎜⎜
L
L
1
2
⎞
⎟⎟
=
~ 35 cm 2
4
/ s
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 32
> Wall temperature in most microsystems can be quickly controlled
> Limiting step is wall-to-fluid heat transfer
> Solution is to minimize fluid characteristic length for heat diffusion
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 33
> Speeding up amplification is only half the battle…
> DNA is not normally visible
> In conventional PCR, detect products by separating stained DNA using electrophoresis in gel sieving matrix
• This can take 0.5-2 hrs
Image removed due to copyright restrictions.
Loading gel in electrophoresis apparatus.
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Photograph of an illuminated gel after electrophoresis.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 34
> Newer techniques allow real-time detection
• “Real-time PCR”
> Integrate illumination/detection optics, thermal cycler, and chemistry
Polymerization Cleavage
R
R Q
5'
3'
5'
Forward primer
Reverse primer
5'
3'
5'
3'
5'
Q
5'
3'
5'
5'
3'
5'
Strand displacement
R
Q
Image by MIT OpenCourseWare.
5'
3'
5'
5'
3'
5'
3'
Polymerization completed
R
Q
ABI Taqman assay
5'
3'
5'
3'
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 35
Roche LightCycler > Real-time thermocycler
> 1.5 mm-wide capillaries
> τ ~2-3 sec up and down
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Schematic of the thermal chamber for the LightCycler(R) 2.0.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 36
Comparison of two microfluidic PCR approaches
Continuous flow
Faster thermal response
No temp overshoot
Static protocol
Taylor dispersion effects, and sample carryover
Optical detection more complicated
Batch
Slower
Depends on control system
Can change protocol easily
Sample carryover only
Simpler optical detection
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 37
> Reactor surface must be compatible with PCR reagents
• DNA, nucleoside triphosphates, polymerase, buffers
> Decreasing length scale and increasing SA/V hurts here
• More molecules start to interact with surface
> Bare Si or SiN inhibits PCR
• Probably due to denaturing of polymerase at surface
• Silanizing or depositing/growing SiO
2 helps
• Add carrier protein (e.g., BSA) to “block” surface
> Kopp uses glass, silanization, surfactant, and buffer!
> Northrup use deposited SiO
2 plus BSA
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 38
> What is hard about BioMEMS
> BioMEMS success stories
> DNA amplification and PCR
> Two designs
• A static PCR thermocycler
• A flow-thru design
• Comparison
> Design evolution of static approach
> Conclusions
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 39
> Initial device introduced in
1993
Cover glass
Polyethylene tubing
10 mm Silicone rubber
Silicon
> 1995-6 0.5 mm
• Two-heater chambers
• Improved surface coating: silanize+BSA+polypro insert
Aluminum bond pad
Polysilicon heater
Image by MIT OpenCourseWare.
Adapted from Northrup, M. A., M. T. Ching, R. M. White, and R. T. Watson. "DNA Amplification with a
• Fan for cooling
Hiroyuki Fujita, 1993, p. 924-926. ISBN: 9784990024727.
Low-stress silicon nitride
Microfabricated Reaction Chamber." In Transducers '93: the 7th International Conference on Solid-State
Sensors and Actuators: digest of technical papers: June 7-10, 1993, PACIFICO, Yokohama, Japan . Japan:
• Chamber volume 20 μ l
• 30 sec cycle time
• ~10 ºC/s up, 2.5 ºC/s down
• “Real time”-PCR via coupled electrophoresis
Image removed due to copyright restrictions.
Image removed due to copyright restrictions.
• Cepheid formed
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 40
> 1998
> Same two-heater chambers
> Portable application
> Up to 30 ºC/s up, 4 ºC/s down
> 17 sec minimum cycle time
> Usually use 35+ sec
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Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 41
Heater - rapid, precise temperature control > 2001 to present
> Abandoned Silicon Î Move to plastic and NOT microfabricated
> Tubes are disposable thin-wall
(50 μ m) plastic that expands upon introduction
> Tube is flat to decrease thermal response
> ~30 sec cycle time
> Ceramic chamber with thin film heater
> Thermistor temp sensor
Image by MIT OpenCourseWare.
Ex cit ati on
Optics blocks - optical analysis, detect and quantify up to four different DNA targets simultaneously
Thin-film wall
Optical excitation window
B
Optical detection window
Dete ctio n
Circuitry - passes optical information to computer for analysis and display
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Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 42
> BioMEMS commerical successes are still not here
> Designing the engineered part is often routine
> Interfacing with biology is where it gets hard
> Sometimes the right solution is to NOT microfab
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 25 - 43