Hewlett-Packard’s newest silicon detector diodes were developed to meet the requirements for receiver service in radio frequency identification tags. 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"!33%18 3. ,!)-3!)- )-3%1-!+ ,%,.18 )-&.1: ,!3).- )- 1%!$61)3% !//+)#!3).-2 (% 31!$%:.&& )2 3(!3 /!2: 2)5% 3!'2 (!5% ! 2(.13%1 1%!$ 1!-'% 3(!- !#3)5% 3!'2 !-$ %#%,"%1 %6+%33:!#*!1$ .41-!+ Antenna Antenna Schottky Diode Mixer Video Out Video Out Local Oscillator (a) (b) ! 4/%1(%3%1.$8-% 1%#%)5%1 - !//+)#!3).-2 3()2 1%#%)5%1 38/% )2 42%$ ,!)-+8 )- )-3%11.'!3.12 " 1823!+ 5)$%. 1%#%)5%1 ()2 38/% )2 42%$ )- 3!'2 Automatic vehicle identification (AVI) is one aspect of intelligent vehicle-highway systems (IVHS). It is a good example of the use of RF/ID technology in a practical application. For example, RFID systems are being integrated into electronic toll collection at bridges so that tolls can be deducted from an account by using information stored in a tag mounted in the vehicle’s windshield. One of the key requirements of these systems is that the stationary reader (interrogator) be able to discriminate between individual tags passing the toll booth without interference from other tags or other transmitters that may be operating at the same frequency. Backscatter modulation technology is one method that can be used for such an application. A block diagram of a typical transponder (tag) for backscatter technology is shown in Fig. 1. The interrogator (reader) sends a modulated RF signal that is received by the tag. The Schottky diode detector demodulates the signal and transfers the data to the digital circuits of the tag. The radar cross section of the tag is changed by a frequency shift keying encoder and switch driver so that the reflected (backscattered) signal from the tag is modulated and ultimately detected by the reader’s receiver antenna. Thus, communication between the tag and reader is established. By using backscatter technology, interference from nearby transmitters can be avoided, since the reader controls the frequency of operation and can shift it if nearby transmitters are operating at the same frequency. Also, the reflected signal strength from the tag is proportional to the incident interrogator signal, so tags outside the incident beam focus area will reflect a weaker signal that the reader antenna can reject. 424 ++8 $7'(!(32 3'$ +.6$23 %+("*$1 -.(2$ 3 (2 3'$1$%.1$ 3'$ #(.#$ .% "'.("$ %.1 3 & //+(" 3(.-2 '$ /$1%.1, -"$ .% - 2823$, (2 #(1$"3+8 1$+ 3$# 3. 3'$ %1$04$-"8 1 -&$ (- 6'("' (3 (2 42$# '$ '(&'$1 3'$ %1$: 04$-"8 3'$ % 23$1 3'$ # 3 31 -2%$1 1 3$ -# 3'$ +.-&$1 3'$ 1$ #61(3$ 1 -&$ '$ 3 &2 (2 ,.1$ %."42$# 3 '(&'$1 %1$04$-"8 $3 +2 !2.1! +.6:%1$04$-"8 2(&- +2 ,.1$ 3' - '(&':%1$04$-"8 2(&- +2 6'$1$ 2 .!2"41(-& , 3$1(: +2 24"' 2 #(13 -# &1$ 2$ !2.1! '(&':%1$04$-"8 2(&- +2 DC Bias Such a backscatter tag can have read/write capabilities that allow flexible digital formats. It can also contain various tag information that can be used in other IVHS applications. A specific minimum field strength is required to put the Schottky detector diode into forward bias so that the tag does not backscatter until the interrogator signal and message data are received, thus minimizing the power requirements of the tag. Backscatter Mismatch Antenna Switch Driver Detector Diode Data Encoders/ Decoders Fig. 1. Typical transponder block diagram for backscatter RF/ID technology. ,.1$ 3' - +.6 %1$04$-"8 2(&- +2 .23 2823$,2 ./$1: 3$ (- 3'1$$ ! 2(" %1$04$-"8 1 -&$2 '$ '(&':%1$04$-"8 1 -&$2 (-"+4#$ 3. 9 -# 3. 9 '$ +.6 %1$04$-"8 1 -&$ (2 3. *9 "+.2$ 3. 3'$ 1 -&$ .% 1 #(. 23 3(.-2 .,$ //+(" 3(.-2 24"' 2 43. 3.++ ".++$": 3(.- +2. 42$ 9 -# 9 "'.33*8 #(.#$ (2 2(,/+8 ,$3 + + 8$1 #$/.2(3$# .2$,(".-#4"3.1 24"' 2 2(+(".- . (,/1.5$ (32 /$1%.1, -"$ -# 1$+( !(+(38 (3 " - !$ / 22(5 3$# 6(3' 2(+(".- #(.7(#$ .1 2(+(".- -(31(#$ .1 !.3' '$ $04(5 +$-3 "(1"4(3 .% "'.33*8 #(.#$ (2 2'.6- (- (& +.-& 6(3' / "* &$ / 1 2(3(" $+$,$-32 - 3'$ #(.#$ "'(/ 2 1$/1$2$-32 3'$ 2$1($2 1$2(23 -"$ .% 3'$ #(.#$ 6'("' (-"+4#$2 !4+* -# ".-3 "3 1$2(23 -"$2 4-"3(.- " / "(3 -"$ ) (2 #$: 3$1,(-$# 3. %(123:.1#$1 //1.7(, 3(.- !8 3'$ ,$3 + 42$# 3'$ 2(+(".- #./(-& -# 3'$ "3(5$ 1$ ) (2 3'$ )4-"3(.1$2(23 -"$ .%3$- " ++$# 3'$ 5(#$. 1$2(23 -"$ 5 -# (2 DC Bias Cpkg Diode Chip Rj = Rv Lpkg (a) (b) (%%$1$-3 "1823 + 5(#$. 1$"$(5$1 ".-%(&41 3(.-2 $1. !( 2 "'.33*8 #(.#$2 ! .-5$-3(.- + -:38/$ "'.33*8 #(.#$2 Rs Cj '(2 ,.#$+ #$2"1(!$2 - : / "* &$# "'.33*8 #(.#$ 3. 9 6(3' &..# ""41 "8 $"$,!$1 $6+$33: "* 1# .41- + function of the total current flowing through the device. Low Cj, Rv, and Rs are desired for an efficient detector diode. The total current I flowing through a Schottky diode is given by: I I sexpV bnV t 1 , where Is is the diode saturation current, Vb is the voltage across the Schottky barrier, n is the ideality factor, and Vt is the thermal voltage. The voltage across the Schottky barrier is equal to an applied voltage Va minus any voltage drop across the series resistance Rs, that is, Vb = Va - IRs. At low bias levels, Rs can be neglected, so Vb Vaā. The video resistance is Rv = dVb/dI, so for small Isā: ąąRvĄ=ĄnVtā/āIĂ. For the zero bias condition, Va = 0, at room temperature with n = 1, the video resistance simplifies to: ąąRvĄ=Ą0.026ā/āIsĂ. By increasing Is, the video resistance of the diode at zero bias is minimized. Is is increased by proper selection of the metal type and the semiconductor doping. For silicon, pĆtype generally gives a higher Is than nĆtype. However, pĆtype silicon has higher Rs than nĆtype silicon with the same dopĆ ing. Increasing the silicon doping to lower the Rs also inĆ creases Cj, which degrades the detector performance. NĆtype Schottky diodes are seen in mixer applications because of the lower Rs and the fact that Rv can be kept low by using high local oscillator drive levels. An important performance characteristic used to describe video detector diodes is voltage sensitivity, or γ. This paramĆ eter specifies the slope of the curve of output video voltage versus input signal power, that is: V o P in . Neglecting parasitic and reflection losses, voltage sensitivity can be defined as: (IV) , where β is the current sensitivity and has a theoretical value1 of 20 A/W. Using the diode equation (with ideality factor n = 1): IV I0.026 . Therefore, 0.52I . For zero bias detectors, γ = 0.52ā/āIsā. This simple analysis of a perfect detector gives a poor approximation to the actual data on existing diodes. To bring the analysis closer to reality, effects of diode junction capacitance, diode series resistance, load resistance, and reflection loss must be considered. Diode Capacitance and Resistance. In most cases, the junction impedance associated with Rv and Cj is much greater than December 1995 HewlettĆPackard Journal Rs, especially at low frequencies. However, at high frequenĆ cies, the junction impedance is reduced so that the RF power dissipated in Rs is comparable to that of the junction. Incorporating the effects of the diode capacitance and resisĆ tance on the current sensitivity,2 the voltage sensitivity for the zero bias diode becomes: 1 0.52 I s1 2C 2jR sR v . where ω = 2πf, Cj is junction capacitance, Is is diode saturaĆ tion current, Rs is the series resistance, and Rv is the junction resistance. Load Resistance. The diode resistance Rv at zero bias is usuĆ ally not small compared to the load resistance RL. If the diode is considered as a voltage source with impedance Rv feeding the load resistance RL, the voltage sensitivity will be reduced by the factor RLā/ā(RL + Rv), or: 2 1R LR v R L . For example, a typical load resistance is 100 kΩā. If Rv is 5 kΩ, then 2 1(0.952) . Reflection Loss. Further reduction in voltage sensitivity is caused by reflection losses in the matching circuit in which the diode is used. In Fig. 3, the package capacitance Cpkg and package inductance Lpkg can be used to determine the packaged diode reflection coefficient. If this diode termiĆ nates a 50Ω system, the reflection coefficient ρ is: ρ Z D – 50 Z D 50 , where ZD is a function of frequency and the package paraĆ sitics. If there is no matching network, the voltage sensitivity can be calculated as: 3 21 – ρ2 . The chip, package, and circuit parameters all combine to define an optimum voltage sensitivity for a given application. Our design goal was to develop a diode to operate in the frequency range used in RF/ID tags. Using the voltage sensiĆ tivity analysis described above, we hoped to produce an optimum, lowĆcost, manufacturable part in the shortest time possible. HewlettĆPackard's preeminent zero bias detector diode (HSCHĆ3486) already provides excellent detection sensitivity in an axially leaded glass package, particularly at high freĆ quencies. To meet our design goals, the project team deĆ cided to leverage the HSCHĆ3486 technology. We chose the plastic SOTĆ23 package because of its low manufacturing costs for highĆvolume products. Using the SOTĆ23 package, several modifications were possible that we hoped we could take advantage of. Before building protoĆ type devices, we made a detailed device model for the HSCHĆ3486. The model helped us fabricate an optimum deĆ vice with minimum design iterations. 4*/( 5)& 7"3*064 &26"5*0/4 '03 70-5"(& 4&/4*5*7*5: *5 *4 $0.< .0/ 50 1-05 γ "4 " '6/$5*0/ 0' 5)& 4"563"5*0/ $633&/5 4 "4 4)08/ */ *( '03 (*7&/ 7"-6&4 0' + 4 "/% */$& + 4 7 "/% 4 */5&3"$5 8*5) 0/& "/05)&3 *5 *4 /05 4*.1-& 50 Voltage Sensitivity 3 (mV/ W) 40 1000 Voltage Sensitivity 2 (mV/ W) 80<%*.&/4*0/"- 130$&44 "/% %&7*$& 4*.6-"5034 8&3& 64&% 50 .0%&- "/% 13&%*$5 5)& 1&3'03."/$& 0' 5)& < *0%& 1"3".&5&34 46$) "4 4*-*$0/ %01*/( "3&" &1*5"9*"-":&3 5)*$,/&44 .&5"- 1"% 4*;& "/% 1"44*7"5*0/ 5)*$,/&44 8&3& */$-6%&% 50 456%: 5)& &''&$54 5)"5 5)&4& 130$&44 1"3".< &5&34 )"% 0/ %*0%& &-&$53*$"- 1&3'03."/$& "/% 6-5*."5&-: 0/ %&5&$503 1&3'03."/$& 5:1*$"- 4&/4*5*7*5: "/"-:4*4 *( 4)08&% 5)& &''&$5 0' $0/5"$5 "3&" "/% &1*5"9*"- 5)*$,/&44 0/ 70-5"(& 4&/4*5*7*5: γ "446.*/( "/ *%&"- ."5$)*/( $*3$6*5 )& .0%&- 8"4 "-40 64&% 50 $)&$, '03 4&/4*5*7*5: 50 1"3".&5&34 5)"5 "3& /05 %*3&$5-: .&"463"#-& %63*/( 130$&44*/( 46$) "4 463'"$& 45"5&4 "/% 3&$0.#*/"5*0/ 7&-0$*5*&4 )& .0%&- 8"4 (00% '03 53&/% "/"-:4*4 #65 $06-% /05 #& 64&% 50 13&%*$5 "#40-65& 7"-6&4 6/5*- %&7*$&4 8&3& '"#3*$"5&% "/% 5&45&% Cj = 0.1 pF Rs = 50 RL = 105 1 GHz 100 3 GHz 10 10 GHz 1 10–8 10–7 10–6 10–5 10–4 Saturation Current Is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etal Layers Trilayer Passivation 0 Increasing Epitaxial Layer Thickness (0.2 m/div) Schottky Contact Silicon Substrate and Epitaxy Backside Metallization 70 (a) Voltage Sensitivity 3 (mV/ W) 60 50 40 30 20 Increasing Contact Diameter (1 m/div) ''&$54 0' &1*5"9*"- -":&3 5)*$,/&44 "/% $0/5"$5 "3&" 0/ 70-5"(& 4&/4*5*7*5: ' ; ,Ω (b) " < %*0%& $3044 4&$5*0/ # *& -":065 &$&.#&3 &8-&55<"$,"3% 063/"- 200 930 MHz 100 100 2.45 GHz 10 5.8 GHz 10 GHz 1 0.1 10–9 10–8 10–7 10–6 10–5 Saturation Current + Bias Current (A) 10 6 1 #-* 5&(0&,*) )*;.(* (&3 '* 9*89*) +47 ;&7.4:8 )( 5&@ 7&2*9*78 8:(- &8 +47<&7) ;419&,* '.&8 $+ &3) '7*&0)4<3 ;419&,* $'7 &3> 4+ 9-* )( 5&7&2*9*78 -&;* '**3 (477*1&9*) <.9- -.,-@+7*6:*3(> 5&7&2*9*78 9-:8 *38:7.3, 9-* 5*7+47@ 2&3(* 4+ *&(- 5&79 &3) *1.2.3&9.3, 9-* -.,- (4898 &884(.&9*) <.9- -.,-@+7*6:*3(> 9*898 #-* .3.9.&1 1498 9-&9 <*7* 574(*88*) &+9*7 '*.3, )*8.,3*) .3 9-* 574(*88 &3) )*;.(* 8.2:1&947 5*7+472*) ;*7> (148*1> 94 9-* 57*).(9*) ;&1:*8 .3.2&1 24)*1 (-&3,*8 <*7* 3*(*8@ 8&7> 3 +&(9 9-* 7*8:198 <*7* 8:++.(.*391> ,44) 9-&9 34 )*8.,3 .9*7&9.438 <*7* 3*(*88&7> &3) 9-* )&9& 8-**9 85*(.+.(&9.438 <*7* 8*9 :8.3, 9-48* 1498 19-4:,- <* ).) 349 *=5*7.*3(* 9-* 3472&1 0.3)8 4+ 574(*88 ;&7.&9.43 9-&9 <* <4:1) *=5*(9 4;*7 & 143, 5*7.4) 4+ 9.2* 4:7 (43+.)*3(* .3 9-* 24)*1 &((:7&(> &114<*) :8 94 8.2:1&9* 9-*8* ;&7.&9.438 94 8-4< 9-&9 9-* 85*(.+.(&9.43 <4:1) 89.11 '* 2*9 3 &)).9.43 <* (4:1) :8* 9-* 24)*1 94 )*9*72.3* <-&9 574(*88 &3) )*;.(* 5&7&2@ *9*78 (4:1) '* (-&3,*) +47 +:9:7* .2574;*2*398 94 9-* ).4)* 2 3 4 5 6 7 Frequency (GHz) 8 9 10 425&7.843 4+ 9<4 ?*74 '.&8 "(-4990> ).4)*8 .,8 &3) 8-4< &(9:&1 ;419&,* 8*38.9.;.9> (425&7*) 94 9-* (&1(:1&9*) ;&1:*8 47 (425&7.843 <.9- 9-* "@ ,1&88 5&(0&,* ).4)* ., 8-4<8 γ &8 & +:3(9.43 4+ +7*6:*3(> #-* ).++*7*39 ;&1:*8 4+ / !8 &3) 8 4+ 9-* 9<4 ).4)*8 (&:8* 9-* ""@ 94 574;.)* ,7*&9*7 5*7+472&3(* &9 +7*6:*3(.*8 1*88 9-&3 ? <-.1* 9-* "@ .8 8:5*7.47 &'4;* ? *(&:8* 4+ .98 8.251*7 5&(0&,.3, &3) 9*89.3, 9-* ""@ .8 2:(- 14<*7 .3 (489 9-&3 9-* "@ *<1*99@ &(0&7)8 3*<*89 8.1.(43 ?*74 '.&8 )*9*(947 ).4)* -&8 43* 4+ 9-* '*89 57.(*5*7+472&3(* 7&9.48 43 9-* 2&70*9 %* +**1 9-&9 9-*8* ).4)*8 <.11 '*(42* &3 .39*,7&1 5&79 4+ 2&3> 9&, &551.(&9.438 '*.3, )*8.,3*) 94)&> &3) <.11 '* (43@ 8.)*7*) .3 +:9:7* )*8.,38 &3) 9*(-3414,> #-*> 574;.)* *=@ (*11*39 ;419&,* 8*38.9.;.9> +47 2&3> 4+ 9-* +7*6:*3(> 7&3,*8 '*.3, :8*) .3 9-* ! .3):897> &9 & ;*7> 14< (489 9-*7 2*2'*78 4+ 9-* 574/*(9 9*&2 <*7* !&> %&:,- &;.) "&1:897. .11 >5*3 &9.3)*7 :2&7 &3) 1&3 (** &3> 49-*7 .3).;.):&18 (4397.':9*) 94 9-* 8:((*88+:1 (4251*9.43 4+ 9-* 574/*(9 "5*(.&1 2*39.43 8-4:1) '* 2&)* 4+ !*2*).48 "41.8 +47 <&+*7 574(*88 )*;*1452*39 &3) 9*89.3, &9&1.& (+** +47 5&(0&,.3, .3 "#@ &3) $> 7*)*7.(0 +47 9*89.3, 9-* 2&3> )*;.(*8 .3 9-* "#@ 5&(0&,* 10 0 Voltage Sensitivity 2 (mV/ W) HSCH-3486 10–4 &1(:1&9*) ;419&,* 8*38.9.;.9> +47 ?*74 '.&8 "(-4990> ).4)*8 -&;.3, !8 Ω &3) / 5 ! 0Ω 498 8-4< 2*&8:7*) ;&1:*8 +47 ? ? &3) ? 10 %&9843 Microwave Semiconductor Devices and Their Circuit Applications (7&<@.11 5 #477*> &3) %-.92*7 Crystal Rectifiers # !&).&9.43 &'47&947> "*7.*8 $41 (7&<@.11 3 0 1 2 3 4 5 6 7 Frequency (GHz) 8 9 &1(:1&9*) ;419&,* 8*38.9.;.9> 4+ 9-* ""@ ?*74 '.&8 "(-4990> )*9*(947 ).4)* 498 8-4< 2*&8:7*) ;&1:*8 HSMS-2850 Voltage Sensitivity 2 (mV/ W) Voltage Sensitivity 2 (mV/ W) 300 *(*2'*7 *<1*99@ &(0&7) 4:73&1 10 11