Chapter 4: Semiconductor Physics Crystal structures of solids Energy band structures of solids Charge carriers in semiconductors Carrier transport PHY4320 Chapter Four (II) 1 Equilibrium Distribution of Electrons and Holes The densities of electrons and holes are related to the density-of-states function and the Fermi distribution function. n(E ) = g c ( E ) f F (E ) p(E ) = g v (E )[1 − f F (E )] The total electron/hole concentration per unit volume is found by integrating the corresponding function over the entire conduction/valence band energy. We need to determine the Fermi energy in order to find the thermalequilibrium electron and hole concentrations. We first consider an intrinsic semiconductor. An ideal intrinsic semiconductor is pure semiconductor without impurities or lattice defects. At T = 0 K, all the energy states in the valence band are filled with electrons and all the energy states in the conduction band are empty. The Fermi energy must be somewhere between Ec and Ev. At T > 0 K, the number of electrons in the conduction band is equal to that of holes in the valence band. PHY4320 Chapter Four (II) 2 Equilibrium Distribution of Electrons and Holes ( 4π 2m g c (E ) = 3 h g v (E ) = ) * 3/ 2 n ( 4π 2m h 3 ) * 3/ 2 p E −E c Ev − E If mn* = mp*, the Fermi energy is at the midgap energy. If mn* ≠ mp*, the Fermi level for an intrinsic semiconductor will slightly shift away from the midgap energy. PHY4320 Chapter Four (II) 3 The n0 and p0 Equations n0 = ∫ g c (E ) f F (E )dE Because the Fermi distribution rapidly approaches zero with increasing energy, therefore ∞ n0 = ∫ g c (E ) f F (E )dE Ec If (Ec−EF) >> kT, then (E−EF) >> kT, so that f F (E ) = n0 = ∫ ∞ Ec If we let ( [− (E − EF )] 1 ≅ exp ( E − EF ) kT 1 + exp kT 4π 2m h3 ) ⎡ − (E − E F ) ⎤ E − Ec exp ⎢ dE ⎥ kT ⎣ ⎦ E − Ec η= kT * 3/ 2 n PHY4320 Chapter Four (II) 4 Then ( 4π 2m kT n0 = h * n 3 ) 3/ 2 ⎡ − ( Ec − E F ) ⎤ ∞ 1 / 2 exp ⎢ η exp(− η )dη ∫ ⎥ kT ⎣ ⎦0 The integral is a gamma function. ∫ ∞ 0 So η 1/ 2 1 π exp(− η )dη = 2 ⎛ 2πm kT ⎞ ⎟⎟ n0 = 2⎜⎜ ⎠ ⎝ h * n 2 We define a parameter Nc as 3/ 2 ⎡ − ( Ec − E F ) ⎤ exp ⎢ ⎥ kT ⎣ ⎦ ⎛ 2πm kT ⎞ ⎟⎟ N c = 2⎜⎜ ⎠ ⎝ h Then * n 2 3/ 2 Nc is called the effective density-of-states function in the conduction band. ⎡ − ( Ec − E F ) ⎤ n0 = N c exp ⎢ ⎥ kT ⎣ ⎦ PHY4320 Chapter Four (II) 5 Nc is called the effective density-of-states function in the conduction band. If we were to assume that mn* = m0, then at T = 300 K, ( )( ⎡ 2π 9.109 ×10 1.381×10 N c = 2⎢ −34 2 6.626 ×10 ⎢⎣ For holes: −31 ( ) − 23 )(300)⎤⎥ ⎥⎦ 3/ 2 = 2.5 ×1019 cm −3 p0 = ∫ g v (E )[1 − f F (E )]dE ⎛ E − EF ⎞ exp⎜ ⎟ 1 1 kT ⎠ ⎝ 1 − f F (E ) = 1 − = = ⎛ EF − E ⎞ ⎛ E − EF ⎞ ⎛ E − EF ⎞ 1 + exp⎜ ⎟ ⎟ 1 + exp⎜ ⎟ 1 + exp⎜ ⎝ kT ⎠ ⎝ kT ⎠ ⎝ kT ⎠ If (EF−Ev) >> kT, then (EF−E) >> kT. ⎡ − (E F − E ) ⎤ 1 − f F (E ) ≈ exp ⎢ ⎥⎦ kT ⎣ PHY4320 Chapter Four (II) 6 p0 = ∫ ( 4π 2m Ev h3 −∞ If we let Then p0 = ( − 4π 2m kT h * p 3 ) 3/ 2 ) * 3/ 2 p ⎡ − (E F − E ) ⎤ Ev − E exp ⎢ dE ⎥ kT ⎦ ⎣ Ev − E η' = kT ⎡ − ( E F − Ev ) ⎤ 0 1/ 2 ( exp ⎢ η' ) exp(− η' )dη' ∫ ⎥ kT ⎣ ⎦ +∞ ⎛ 2πm kT ⎞ ⎟ p0 = 2⎜ ⎜ h ⎟ ⎝ ⎠ * p 2 If we let ⎛ 2πm kT ⎞ ⎟ N v = 2⎜ ⎜ h ⎟ ⎝ ⎠ * p 2 3/ 2 3/ 2 ⎡ − ( E F − Ev ) ⎤ exp ⎢ ⎥ kT ⎣ ⎦ then ⎡ − ( E F − Ev ) ⎤ p0 = N v exp ⎢ ⎥ kT ⎣ ⎦ Nv is called the effective density-of-states function in the valence band. PHY4320 Chapter Four (II) 7 The Intrinsic Carrier Concentration We use ni and pi to denote electron and hole concentrations in an intrinsic semiconductor. Since ni = pi, we usually use ni to denote either the intrinsic electron or hole concentration. The Fermi level for an intrinsic semiconductor is called the intrinsic Fermi energy, EFi. ⎡ − (Ec − E Fi ) ⎤ n0 = ni = N c exp ⎢ ⎥ kT ⎣ ⎦ ⎡ − (EFi − Ev )⎤ p0 = pi = ni = N vexp ⎢ ⎥ kT ⎣ ⎦ ⎡ − (EFi − Ev ) ⎤ ⎡ − (Ec − EFi ) ⎤ n = N c N v exp ⎢ exp ⎢ ⎥ ⎥ kT kT ⎣ ⎦ ⎣ ⎦ 2 i ⎡ − Eg ⎤ ⎡ − ( Ec − E v ) ⎤ n = N c N v exp ⎢ = N c N v exp ⎢ ⎥ ⎥ kT kT ⎣ ⎦ ⎣ ⎦ 2 i PHY4320 Chapter Four (II) 8 At T = 300 K Nc, Nv, and ni are constant for a given semiconductor material at a fixed temperature. PHY4320 Chapter Four (II) 9 ⎛ 2πm kT ⎞ ⎟⎟ N c = 2⎜⎜ ⎝ h ⎠ * n 2 3/ 2 ⎛ 2πm kT ⎞ ⎟ N v = 2⎜ ⎜ h ⎟ ⎝ ⎠ * p 2 3/ 2 ⎡ − Eg ⎤ n = N c N v exp ⎢ ⎥ ⎣ kT ⎦ 2 i PHY4320 Chapter Four (II) 10 The Intrinsic Fermi Level Position We can calculate the Fermi level position since the electron and hole concentrations are equal for an intrinsic semiconductor: ⎡ − (EFi − Ev ) ⎤ ⎡ − (Ec − EFi ) ⎤ n0 = N c exp ⎢ = p0 = N v exp ⎢ ⎥ ⎥ kT kT ⎦ ⎣ ⎣ ⎦ ⎛ Nv ⎞ ⎟⎟ − Ec + E Fi + EFi − Ev = kT ln⎜⎜ ⎝ N c ⎠ If m * = m *, the intrinsic Fermi p n level will be in the center of the ⎛ Nv ⎞ 1 1 ⎟⎟ bandgap. If mp* > mn*, the EFi = (Ec + Ev ) + kT ln⎜⎜ 2 2 ⎝ Nc ⎠ intrinsic Fermi level will be * ⎛ mp ⎞ * 3 slightly above the center. If m p EFi = Emidgap + kT ln⎜ * ⎟ *, the intrinsic Fermi level ⎜m ⎟ < m 4 n n ⎠ ⎝ * will be slightly below the center ⎛ mp ⎞ 3 EFi − Emidgap = kT ln⎜ * ⎟ of the bandgap. ⎜m ⎟ 4 ⎝ n⎠ PHY4320 Chapter Four (II) 11 Donor Atoms and Energy Levels Real power of semiconductors is realized by adding controlled amounts of specific dopant, or impurity atoms. The doped semiconductor is called an extrinsic material. Doping is the primary reason that we can fabricate various semiconductor devices. Add a group V element, such as phosphorus, to silicon as a substitutional impurity. The group V element has five valence electrons. Four of these will contribute to the covalent bonding with the silicon atoms, leaving the fifth more loosely bound to the phosphorus atom. PHY4320 Chapter Four (II) 12 Donor Atoms and Energy Levels At very low temperatures, the extra electron is bound to the phosphorus atom. However, it should be clear that the energy required to elevate the extra electron into the conduction band is considerably smaller than that for the electrons involved in the covalent bonding. The electron elevated into the conduction band can move through the crystal to generate a current, while the positively charged phosphorous atoms are fixed in the crystal. This type of atom is called a donor impurity atom. The donor atoms add electrons to the conduction band without creating holes in the valence band. The resulting material is referred to as an n-type semiconductor. PHY4320 Chapter Four (II) 13 Acceptor Atoms and Energy Levels Consider adding a group III element, such as boron, which has three valence electrons. One covalent bonding position is empty. If an electron were to occupy this “empty” position, its energy would have to be greater than that of the valence electrons, since the net charge of the B atom would become negative. However, the electron occupying this “empty” position does not have sufficient energy to be in the conduction band, so its energy is far smaller than the conduction band energy. The “empty” position associated with the B atom can be occupied and other valence electron positions become vacated. These other vacated electron positions can be thought of as holes. PHY4320 Chapter Four (II) 14 Acceptor Atoms and Energy Levels The hole can move through the crystal to generate a current, while the negatively charged boron atoms are fixed in the crystal. The group III atom accepts an electron from the valence band and so is referred to as an acceptor impurity atom. The acceptor atom can generate holes in the valence band without generating electrons in the conduction band. This type of semiconductor material is referred to as a p-type semiconductor. An extrinsic semiconductor will have either a preponderance of electrons (n-type) or a preponderance of holes (p-type). PHY4320 Chapter Four (II) 15 Ionization Energy We can calculate the approximate distance of the donor electron from the donor impurity ion, and also the approximate energy required to elevate the donor electron into the conduction band. This energy is referred to as the ionization energy. We will use the Bohr model of the atom for these calculations. The permittivity of the semiconductor material instead of the permittivity of free space will be used, and the effective mass of the electron will be used. From the Coulomb force of attraction being equal to the centripetal force of the orbiting electron: e 2 * 2 mv = 2 4πεrn rn Assume that the angular momentum is quantized, PHY4320 Chapter Four (II) m rn v = nh * 16 nh v= * m rn The Bohr radius is n = 1,2,3,… n 2 h 2 4πε rn = m *e 2 4πε 0 h 2 a0 = = 0.053nm 2 m0 e rn ⎛ m0 ⎞ 2 = n εr ⎜ * ⎟ a0 ⎝m ⎠ Then If we consider n = 1 state, and if we consider silicon, for which εr = 11.7, m*/m0 = 0.26, then we have r1 = 45 a0 r1 = 2.39nm PHY4320 Chapter Four (II) For silicon, a = 0.543 nm. 17 e2 v= 4πεnh * 4 1 m e * 2 The kinetic energy is T= mv = 2 2 2 2(nh ) (4πε ) 2 * 4 − − e m e The potential energy is = V= 4πεrn (nh )2 (4πε )2 − m *e 4 The total energy is E = T +V = 2 2 2(nh ) (4πε ) The lowest energy state of the hydrogen atom is E = −13.6 eV. For silicon, the lowest energy is E = −25.8 meV (Eg = 1.12 eV at T = 300 K). PHY4320 Chapter Four (II) 18 Group III-V Semiconductors The donor and acceptor impurities in III-V compound semiconductors is more complicated than that in Si. When we talk about donors or acceptors in III-V semiconductors, we need to know for which atoms (III or V) impurity atoms are substituted. For example, for Si atoms in gallium arsenide semiconductor, if Si atoms replace gallium atoms, Si impurities will act as donors. But if Si atoms replace arsenic atoms, they will act as acceptors. For gallium arsenide PHY4320 Chapter Four (II) 19 Equilibrium Distribution of Electrons and Holes in Extrinsic Semiconductors Adding donor or acceptor impurity atoms to a semiconductor will change the distribution of electrons and holes in the material. Since the Fermi energy is related to the distribution function, the Fermi energy will change as dopant atoms are added. In general, when EF > Emidgap, the density of electrons is larger than that of holes, and the semiconductor is n-type. PHY4320 Chapter Four (II) 20 Equilibrium Distribution of Electrons and Holes in the Extrinsic Semiconductor In general, when EF < Emidgap, the density of electrons is smaller than that of holes, and the semiconductor is p-type. ⎡ − ( Ec − E F ) ⎤ n0 = N c exp ⎢ ⎥ kT ⎣ ⎦ ⎡ − ( E F − Ev ) ⎤ p0 = N v exp ⎢ ⎥ kT ⎣ ⎦ The above are general equations for n0 and p0 in terms of the Fermi energy. The values of n0 and p0 will change with the Fermi energy, EF. PHY4320 Chapter Four (II) 21 Example: consider silicon at T = 300 K so that Nc = 2.8 × 1019 cm−3 and Nv = 1.04 × 1019 cm−3. If we assume the Fermi energy is 0.25 eV below the conduction band, calculate the thermal equilibrium concentrations of electrons and holes. The bandgap energy of silicon is 1.12 eV. Solution: Ec − E F = 0.25eV E F − Ev = 0.87eV ( ) ⎡ − (0.25) 1.602 ×10 −19 ⎤ 15 −3 1 . 8 10 cm = × n0 = 2.8 × 10 exp ⎢ ⎥ − 23 ( ) 1 . 381 10 300 × ⎦ ⎣ ⎡ − (0.87 ) 1.602 ×10 −19 ⎤ 4 −3 19 = 2 . 6 × 10 cm p0 = 1.04 × 10 exp ⎢ ⎥ − 23 ( ) 1 . 381 10 300 × ⎣ ⎦ ( ( 19 ) ) ( ( ( ) ) ) Comment: electron and hole concentrations change by orders of magnitude from the intrinsic carrier concentrations (at 300 K, ni = 1.5 × 1010 cm-3) as the Fermi energy changes by a few tenths of an eV. In an n-type semiconductor, n0 > p0, electrons are referred to as majority carriers and holes as minority carriers. In an p-type semiconductor, p0 > n0, holes are referred to as majority carriers and electrons as minority carriers. PHY4320 Chapter Four (II) 22 We can derive another form of the equations for the thermalequilibrium concentrations of electrons and holes: ⎡ − ( Ec − E F ) ⎤ ⎡ − (Ec − EFi ) + (EF − E Fi ) ⎤ n0 = N c exp ⎢ = N c exp ⎢ ⎥ ⎥ kT kT ⎣ ⎦ ⎣ ⎦ ⎛ EF − EFi ⎞ n0 = ni exp⎜ ⎟ ⎝ kT ⎠ ⎡ − (EFi − Ev ) + (EFi − E F ) ⎤ ⎡ − ( E F − Ev ) ⎤ p0 = N v exp ⎢ = N v exp ⎢ ⎥ ⎥ kT kT ⎣ ⎦ ⎣ ⎦ ⎡ EFi − EF ⎤ ⎡ − (EF − E Fi ) ⎤ p0 = ni exp ⎢ = ni exp ⎢ ⎥ ⎥ kT ⎣ kT ⎦ ⎣ ⎦ PHY4320 Chapter Four (II) 23 The n0p0 Product ⎡ − ( E F − Ev ) ⎤ ⎡ − ( Ec − E F ) ⎤ exp ⎢ n0 p0 = N c N v exp ⎢ ⎥ ⎥ kT kT ⎦ ⎣ ⎦ ⎣ ⎡ − Eg ⎤ 2 n0 p0 = N c N v exp ⎢ ⎥ = ni ⎣ kT ⎦ The product of n0 and p0 is always a constant for a given semiconductor material at a given temperature. It is one of the fundamental principles of semiconductors in thermal equilibrium. It is important to keep in mind that the above equation is derived using the Boltzmann approximation. We may think of the intrinsic concentration ni simply as a parameter of the semiconductor material. PHY4320 Chapter Four (II) 24 The Fermi-Dirac Integral ∞ n0 = ∫ g c (E ) f F (E )dE Ec 4π n0 = 3 2mn* h ( ) 3/ 2 E − Ec η= kT If we define E − Ec dE ∫Ec ⎛ E − EF ⎞ 1 + exp⎜ ⎟ ⎝ kT ⎠ EF − E c η = and F kT ∞ ⎛ 2m kT ⎞ ⎟⎟ n0 = 4π ⎜⎜ ⎝ h ⎠ * n 2 F1/ 2 (η F ) = ∫ ∞ 0 3/ 2 ∫ ∞ 0 η 1/ 2 dη 1 + exp(η − η F ) η 1 / 2 dη 1 + exp(η − η F ) PHY4320 Chapter Four (II) Fermi-Dirac integral 25 For holes: p0 = ∫ g v (E )[1 − f F (E )]dE Ev −∞ 4π p0 = 3 2m*p h ( ) 3/ 2 Ev − E dE ∫−∞ ⎛ EF − E ⎞ 1 + exp⎜ ⎟ ⎝ kT ⎠ Ev If we define Ev − E η' = kT We need to use the FermiDirac integral when EF is above Ec or below Ev. ⎛ 2m kT ⎞ ⎟ p0 = 4π ⎜ ⎟ ⎜ h ⎠ ⎝ PHY4320 Chapter Four (II) * p 2 and η' F = 3/ 2 Ev − E F kT (η' )1/ 2 dη' ∫0 1 + exp(η' −η' F ) ∞ 26 Degenerate and Nondegenerate Semiconductors When discussing donors and acceptors, the concentration of dopant atoms is assumed to be small compared to the density of host atoms. The impurities introduce discrete, non-interacting donor and acceptor energy states in the ntype and p-type semiconductor, respectively. These types of semiconductors are referred to as nondegenerate semiconductors. As the impurity concentration increases, the distance between the impurity atoms decreases and the electrons from the impurity atoms will begin to interact. When this occurs, the discrete donor or acceptor energy level will split into a band of energies. As the impurity concentration further increases, the band of donor or acceptor states widens and overlaps with the bottom of the conduction band or the top of the valence band. When the concentration of electrons in the conduction band exceeds the density of states Nc, the Fermi energy lies within the conduction band. This type of semiconductors is called degenerate n-type semiconductors. When the concentration of holes exceeds the density of states Nv, the Fermi energy lies in the valence band. This type of semiconductors is called degenerate p-type semiconductors. PHY4320 Chapter Four (II) 27 Degenerate and Nondegenerate Semiconductors Nondegenerate Degenerate PHY4320 Chapter Four (II) 28 Statistics of Donors and Acceptors The probability of the donor energy level being occupied is 1 1 ⎛ Ed − E F ⎞ 1 + exp⎜ ⎟ 2 ⎝ kT ⎠ Each donor level could be empty, contain one electron of either spin, or two electrons of opposite spins. However, the Coulomb repulsion of two localized electrons raises the energy of the doubly occupied level so high that double occupation is essentially prohibited. This is the reason for the factor of ½ appearing in the probability function. Nd nd = 1 ⎛ Ed − E F ⎞ 1 + exp⎜ ⎟ 2 ⎝ kT ⎠ nd = N d − N d+ Na pa = 1 ⎛ E − Ea ⎞ 1 + exp⎜ F ⎟ g ⎝ kT ⎠ pa = N a − N a− nd is the density of electrons occupying the donor level. Nd is the concentration of donor atoms. Nd+ is the concentration of ionized donors. g is a degeneracy factor. The ground state g is normally taken as 4 for the acceptor level in Si and GaAs because of the detailed band structure. PHY4320 Chapter Four (II) 29 Complete Ionization and Freeze-Out If (Ed − EF) >> kT, we then have nd = Because Nd ⎡ − (Ed − E F ) ⎤ ≈ 2 N d exp ⎢ ⎥ 1 kT ⎛ Ed − E F ⎞ ⎦ ⎣ 1 + exp⎜ ⎟ 2 ⎝ kT ⎠ ⎡ − ( Ec − E F ) ⎤ n0 = N c exp ⎢ ⎥ kT ⎦ ⎣ We can determine the ⎡ − (Ed − E F ) ⎤ percentage of electrons 2 N d exp ⎢ ⎥⎦ n kT ⎣ d in the donor state = nd + n0 ⎡ − (Ed − E F ) ⎤ ⎡ − ( Ec − E F ) ⎤ compared with the N + 2 N d exp ⎢ exp c ⎥⎦ ⎢⎣ ⎥⎦ kT kT ⎣ total number of electrons: nd = nd + n0 1 Nc ⎡ − ( Ec − E d ) ⎤ 1+ exp ⎢ ⎥⎦ kT 2Nd ⎣ PHY4320 Chapter Four (II) 30 For phosphorus-doped silicon at T = 300 K, Nc = 2.8 × 1019 cm-3, Nd = 1016 cm-3, and the ionization energy is 0.045 eV: nd = nd + n0 1 2.8 ×10 ⎛ − 0.045 ⎞ exp⎜ 1+ ⎟ 16 2 10 ⎝ 0.0259 ⎠ 19 = 0.004 = 0.4% ( ) At room temperature, the donor states are almost completely ionized, which is also true for the acceptor states at room temperature. Complete ionization PHY4320 Chapter Four (II) 31 At T = 0 K, all electrons are in their lowest energy state. For an n-type semiconductor, each donor state must contain an electron, therefore, nd = Nd. ⎧exp[(Ed − EF ) / kT ] = 0 ⇒ E F > Ed ⎨ ⎩T = 0 The Fermi level is above the donor level for an n-type semiconductor at T = 0 K. Similarly, the Fermi level will be below the acceptor level for a p-type semiconductor at T = 0 K. Freeze-out (T = 0 K) PHY4320 Chapter Four (II) 32