III-Nitride Light-Emitting Diodes for Solid-State Lighting Hongping Zhao Department of Electrical Engineering and Computer Science, Case Western Reserve University Cleveland, Ohio, USA Hongping.zhao@case.edu SOLAR DURABILITY WORKSHOP Case Western Reserve University, Cleveland, OH April 9th, 2012 Impact of Solid State Lighting Lighting 22% Commercial 59% NASA Image: Earth’s City Lights Industrial 14% Residential 27% US Electricity Consumption Source: Cree “Solid State Lighting Revolution” LED lighting can reduce electricity needs for lighting by more than 60%! 2 Outline Introduction on Current State-of-the-Art III-Nitride LEDs Enhancement of LED total external quantum efficiency Nanostructure Engineering for Enhancing LED Radiative Efficiency Staggered InGaN QW Linear-Shaped Staggered InGaN QW Type-II InGaN-GaNAs QW Strain-compensated InGaN-AlGaN QW InGaN-delta-InN QW Effect of Current Injection on Efficiency Droop in InGaN QW LEDs InGaN-AlInN QW-barrier structure to suppress efficiency droop Enhancement of LED Light Extraction Efficiency III-nitride microspheres LED Reliability and Tests Failure modes and mechanisms in LEDs Summary 3 Outline Introduction on Current State-of-the-Art III-Nitride LEDs Enhancement of LED total external quantum efficiency Nanostructure Engineering for Enhancing LED Radiative Efficiency Staggered InGaN QW Linear-Shaped Staggered InGaN QW Type-II InGaN-GaNAs QW Strain-compensated InGaN-AlGaN QW InGaN-delta-InN QW Effect of Current Injection on Efficiency Droop in InGaN QW LEDs InGaN-AlInN QW-barrier structure to suppress efficiency droop Enhancement of LED Light Extraction Efficiency III-nitride microspheres LED Reliability and Tests Failure modes and mechanisms in LEDs Summary 4 Energy Gap (eV) III-Nitride Material System and Applications 6.5 6 5.5 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 AlN Deep UV-LEDs, Lasers, Solar blind detectors AlGaN Electronics HEMTs Near UV/visible LEDs, Photovotaics GaN III-Nitride Material System InGaN InN Direct band gap Wide spectrum coverage 3 3.1 3.2 3.3 3.4 3.5 3.6 UV up to near infrared In-plane Lattice Constant a (Ǻ) III-Nitride Material Applications High-Al AlGaN Deep UV-LEDs, Lasers, Solar blind detectors Low-Al AlGaN High power transistors for high power electronics InGaN Near UV / Visible LEDs, Lasers, Photovoltaic InN Photovoltaic, Terahertz generation 5 White LEDs Red, λ ~ 650-nm 1) Multi-chip RGB approach: 1 RED (λ ~ 620 nm) InGaAlP LED 1 GREEN (λ ~ 540 nm) InGaN LED White Green, λ ~ 535-nm 1 BLUE (λ ~ 455 nm) InGaN LED Pros: theoretically best efficiency; variable color temp Blue, λ ~ 450-nm InGaN LED Cons: high cost; efficiency of green LED 4000 Intensity Ce: YAG Phosphor 2) Single Blue InGaN (λ ~ 450-460 nm) die + Phosphors 3000 Pros: relatively low cost, currently highest efficiency 2000 Cons: non-trivial control of color temperature 1000 0 300 400 500 600 Wavelength (nm) 700 800 6 Outline Introduction on Current State-of-the-Art III-Nitride LEDs Enhancement of LED total external quantum efficiency Nanostructure Engineering for Enhancing LED Radiative Efficiency Staggered InGaN QW Linear-Shaped Staggered InGaN QW Type-II InGaN-GaNAs QW Strain-compensated InGaN-AlGaN QW InGaN-delta-InN QW Effect of Current Injection on Efficiency Droop in InGaN QW LEDs InGaN-AlInN QW-barrier structure to suppress efficiency droop Enhancement of LED Light Extraction Efficiency III-nitride microspheres LED Reliability and Tests Failure modes and mechanisms in LEDs Summary 7 III-Nitride Light-Emitting Diodes Ni / Au Transparent Metal InGaN / GaN MQW Active Region P-GaN Ti / Au N-GaN Sapphire Substrate 8 Device Physics of III-Nitride LEDs High Efficiency LEDs: η external = ηinj ⋅η Rad ⋅η extraction η IQE = ηinj ⋅η Rad Injection Efficiency η inj Fraction of Injected Current that Recombine in the Active Region Radiative Efficiency η Rad Fraction of Injected Current in the Active Region that Recombine Radiatively Generating Photons inside the Semiconductors Extraction Efficiency η extraction Fraction of Photon Generated in the Active Region that Exists the Semiconductor Cavity into Free Space η Wall Plug ηOptical Output = η Electrical Input 9 Non-Polar Vs. Polar In0.2Ga0.8N-GaN QW Without Polarization dQW = 30-Å ψe ψhh λ = 463-nm dQW = 30-Å 1.6 Ec & Ehh (eV) λ= 417-nm With Polarization 2.4 ψe 0.8 0.0 -0.8 ψhh -1.6 -2.4 -3.2 0 20 40 60 80 100 120 140 160 180 200 z(Å) Growth Direction Γe-hh = 97.44% Reduce Γe-hh = 34.4% Large Reduction in Γe-hh due to Polarization Effect 10 Approaches for Enhancing the Overlap (Γe_hh) Nonpolar InGaN QW1 Remove the polarization field Less mature epitaxy 1. Cost issue T. Koyama, T. Onuma, H. Masui, A. Chakraborty, B. A. Haskell, S. Keller, U. K. Mishra, J. S. Speck, S. Nakamura, S. P. DenBaars, T. Sota, and S. F. Chichibu, Appl. Phys. Lett. 89, 091906 (2006) Nanostructure Engineering (on c-plane GaN) Enhance electron-hole wavefunction overlap (Γe_hh) Conventional QW Novel QW / QD Ec ψe ψe Ec Growth Direction Ev • • • • ψh Low electron-hole wavefunction overlap (Γe_hh) Large built-in Quantum Confined Stark Effect Low spontaneous emission rate and optical gain Large threshold carrier / current density ψh • • • • Ev High electron-hole wavefunction overlap (Γe_hh) Reduces Quantum Confined Stark Effect Enhances spontaneous emission rate and optical gain 11 Reduces threshold carrier / current density Concept of Staggered InGaN QW Structures InzGa1-zN GaN GaN InxGa1-xN InyGa1-yN InxGa1-xN InyGa1-yN InyGa1-yN GaN GaN GaN Ec Ec Ec Ev Ev Ev (a) Conventional InzGa1-zN QW III-V Nitrides Staggered QW GaN (b) Two-Layer Staggered (c) Three-Layer staggered InxGa1-xN/InyGa1-yN QW InyGa1-yN/InxGa1-xN /InyGa1-yN QW Existence of spontaneous and piezoelectric field Band lineups engineering Low electron-hole wave function overlap Enhance electron-hole wave function overlap 1. H. Zhao, R. A. Arif, and N. Tansu, IEEE J. Sel. Top. in Quantum Electronics, 15 (4), 1104 (2009). 12 Bottom-Emitting InGaN LED Devices Bottom-Emitting Device Structure good contact low resistivity Three-Layer Staggered InGaN QWs for active region 1. H. Zhao, G. Liu, X. H. Li, G. S. Huang, J. D. Poplawsky, S. Tafon Penn, V. Dierolf, and N. Tansu, Appl. Phys. Lett., 95, 061104 (2009). 2. (Invited Paper) H. Zhao, G. Liu, X. H. Li, R. A. Arif, G. S. Huang, J. D. Poplawsky, S. Tafon Penn, V. Dierolf, 13 and N. Tansu, IET Optoelectronics,vol.3(6),pp. 283-295 (2009). Electroluminescence Vs. Injection Current 4 4 EL Intensity (a.u.) 4 4.5 Conventional InGaN QW LED Area = 510 µ m x 510 µ m 3 2 I = 200 mA I = 150 mA I = 100 mA I = 80 mA I = 50 mA I = 30 mA 1 0 350 400 x 10 Staggered InGaN QW LED 4 EL Intensity (a.u.) 4.5 x 10 450 500 550 Wavelength (nm) 600 650 Area = 510 µ m x 510 µ m 3 2 I = 200 mA I = 150 mA I = 100 mA I = 80 mA I = 50 mA I = 30 mA 1 0 350 400 450 500 550 Wavelength (nm) 600 650 Conventional InGaN QW LED Vs. Staggered InGaN QW LED Staggered InGaN QW LED shows improved peak EL intensity Staggered InGaN QW LED shows broader EL spectrum Larger FWHM Both LEDs show blue-shift as injection current increases 1. H. Zhao, G. Liu, X. H. Li, G. S. Huang, J. D. Poplawsky, S. Tafon Penn, V. Dierolf, and N. Tansu, Appl. Phys. Lett., 95, 061104 (2009). 2. (Invited Paper) H. Zhao, G. Liu, X. H. Li, R. A. Arif, G. S. Huang, J. D. Poplawsky, S. Tafon Penn, V. Dierolf, 14 and N. Tansu, IET Optoelectronics,vol.3(6),pp. 283-295 (2009). CW Comparison of Output Power Conventional Vs. Staggered InGaN QW LEDs 1000 In0.21Ga0.79N GaN Output Power (a.u.) 800 GaN λ peak ~ 520-525 nm Area = 510 µ m x 510 µ m Room Temp EL Ec 600 3-Layer staggered QW 400 3-Layer Staggered InGaN LED Ev In0.28Ga0.72N 200 Conventional InGaN LED 0 0 20 40 Current Density 60 (A/cm2) 80 Conventional InGaN QW LED Vs. Staggered InGaN QW LED Staggered InGaN QW LED shows improved output power (2.0 - 3.5 times) 1. H. Zhao, G. Liu, X. H. Li, G. S. Huang, J. D. Poplawsky, S. Tafon Penn, V. Dierolf, and N. Tansu, Appl. Phys. Lett., 95, 061104 (2009). 2. (Invited Paper) H. Zhao, G. Liu, X. H. Li, R. A. Arif, G. S. Huang, J. D. Poplawsky, S. Tafon Penn, V. Dierolf, 15 and N. Tansu, IET Optoelectronics,vol.3(6),pp. 283-295 (2009). Outline Introduction on Current State-of-the-Art III-Nitride LEDs Enhancement of LED total external quantum efficiency Nanostructure Engineering for Enhancing LED Radiative Efficiency Staggered InGaN QW Linear-Shaped Staggered InGaN QW Type-II InGaN-GaNAs QW Strain-compensated InGaN-AlGaN QW InGaN-delta-InN QW Effect of Current Injection on Efficiency Droop in InGaN QW LEDs InGaN-AlInN QW-barrier structure to suppress efficiency droop Enhancement of LED Light Extraction Efficiency III-nitride microspheres LED Reliability and Tests Failure modes and mechanisms in LEDs Summary 16 High Power LED Package Encapsulant Housing Die Attach Die LEDs Lead Frames Metal heat slug Solder joints Bond Wires 1. Moon-Hwan Chang, Diganta Das, P. V. Varde, Michael Pecht, Microelectronics Reliability, February 2012. 17 LED Reliability Test Operating life tests Applying electrical power loads at various operating environment temperatures to LEDs room temperature test high temperature test low temperature test wet/high temperature test temperature humidity cycle test on/off test Environmental tests Non-operating life tests reflow soldering test thermal shock test temperature cycle test moisture resistance cyclic test high / low temperature storage test temperature humidity storage test vibration test electro-static discharge test 1. Moon-Hwan Chang, Diganta Das, P. V. Varde, Michael Pecht, Microelectronics Reliability, February 2012. 18 LED Lifetime Estimation The Alliance for Solid-State Illumination Systems and Technologies (ASSIST) 50% light output degradation (L50) for display industry 70% light output degradation (L70) for lighting industry Accelerated test approach measuring the light output of samples at each test readout time estimating LED life under the accelerated test conditions (using functional curve fitting) calculating an acceleration factor (AF) predicting lifetime by using the AF multiplied by the lifetime of the test condition 19 Failure modes and mechanisms Semiconductor related Defect and dislocation generation and movement Die cracking Dopant diffusion Electromigration Interconnection related Electrical overstress-induced bond fatigue Electrostatic discharge Electrical contact metallurgical interdiffusion Package related Carbonization of the encapsulant Delamination Encapsulant yellowing Lens cracking Phosphor thermal quenching Solder joint fatigue 1. Moon-Hwan Chang, Diganta Das, P. V. Varde, Michael Pecht, Microelectronics Reliability, February 2012. 20 Semiconductor related Defect and dislocation generation and movement Light output degradation due to nonradiative recombination Crystal defects are mainly generated in contacts active region Lead to reduction of non-equilibrium electron hole pairs lifetime increase of multi-phonon emission under high drive current 1. Sugiura L. Dislocation motion in GaN light-emitting devices and its effect on device lifetime. J Appl Phys; 81:1633–8, 1997 21 Semiconductor related Die Cracking Thermal Expansion Coefficient (x10-6/K-1) Thermal Expansion Coefficient (x10-6/K-1) GaN 5.6 GaN 5.6 Si 2.4 Sapphire 7.5 Lattice mismatch between epitaxial layer and substrate Different thermal expansion coefficient Extreme thermal shock can break LED dies 1. Moon-Hwan Chang, Diganta Das, P. V. Varde, Michael Pecht, Microelectronics Reliability, February 2012. 22 Semiconductor related Dopant Diffusion & Electromigration Dopant Diffusion InGaN QW LEDs use Mg as p-type dopant Mg diffuses into QWs during the growth Mg acts as nonradiative recombination center reduction of IQE Electromigration Movement of metal atoms in the electrical contact to the LED die surface Causes short circuit Metal diffuses toward inner region from p-contact across the junction create spikes along the direction of current flow 23 Interconnection related Electrical overstress induced bond fatigue and wire bond fatigue Thermal mechanical stress Mismatch of thermal expansion coefficients between wire bond and chip Repetitive, high-magnitude thermal cycles lead to rapid failure The reliability of the joint varies with bond wire length and loop height bond wire material 1. Moon-Hwan Chang, Diganta Das, P. V. Varde, Michael Pecht, Microelectronics Reliability, February 2012. 24 Package-related failure mechanisms Carbonization of the encapsulant Optical micrograph of LED after plastic removal (the darkened areas over the p-contact area are damaged plastic which could not be removed) Carbonization of plastic encapsulation material leads to Joule heating Carbonization of encapsulant Reduction of insulation resistance Initiate a thermal runaway process Carbonization of encapsulant 1. D. L. Barton, M. Osinski, P. Perlin, P. G. Eliseev, Jinhyun Lee,Microelectronics Reliability 39, 1219-1227 (1999). 25 Package-related failure mechanisms encapsulant yellowing Transparent epoxy resin yellowing due to Prolonged exposure to short wavelength emission (blue/UV radiation) Excessive junction temperature The presence of phosphors Leads to photodegradation The degradation and associated yellowing increases exponentially with exposure energy 1. D. L. Barton, M. Osinski, P. Perlin, P. G. Eliseev, Jinhyun Lee,Microelectronics Reliability 39, 1219-1227 (1999). 26 Package-related failure mechanisms Phosphor thermal quenching Efficiency of phosphor degrades when temperature rises Reduction of light output at high temperature Change of color temperature 1. Moon-Hwan Chang, Diganta Das, P. V. Varde, Michael Pecht, Microelectronics Reliability, February 2012. 27 Outline Introduction on Current State-of-the-Art III-Nitride LEDs Enhancement of LED total external quantum efficiency Nanostructure Engineering for Enhancing LED Radiative Efficiency Staggered InGaN QW Linear-Shaped Staggered InGaN QW Type-II InGaN-GaNAs QW Strain-compensated InGaN-AlGaN QW InGaN-delta-InN QW Effect of Current Injection on Efficiency Droop in InGaN QW LEDs InGaN-AlInN QW-barrier structure to suppress efficiency droop Enhancement of LED Light Extraction Efficiency III-nitride microspheres LED Reliability and Tests Failure modes and mechanisms in LEDs Summary 28 Summary Enhancement of External Quantum Efficiency of LEDs Novel Nitride based Quantum Well (QW) LEDs with Enhanced radiative efficiency Staggered InGaN QW Linearly-Shaped Staggered InGaN QW Type-II InGaN-GaNAs QW Strain-Compensated InGaN-AlGaN QW InGaN-delta-InN QW Enhanced overlap with wavelength extension Surface Plasmon (SP) Based Nitride LEDs SP Dispersion Engineering via Double-Metallic Layers Efficiency droop and current injection efficiency in nitride LEDs Novel QW-barrier designs to suppress efficiency-droop Enhancement of LED light extraction efficiency III-nitride microspheres LED Reliability and Tests LED lifetime measurement and estimation Failure modes and mechanisms in LEDs 29 Acknowledgments Case Nanophotonics Group PI: Dr. Hongping Zhao Graduate Students: Peng Zhao Xuechen Jiao Collaborators Lehigh: Dr. N. Tansu (PhD advisor), Dr. R. Arif, Dr. Y. Ee, Dr. G. Huang, Dr. M. Jamil, Dr. H. Tong, G. Liu, X. Li, J. Zhang CWRU: R. French (Material Science), K. Kash (Physics), W. Lambrecht (Physics), M. Sankaran (Chemical Engineering) Ferro Corporation Rambus Sanan Thank You ! 30