Metal-semiconductor junctions FYS 4310 Jan H. Bleka May 2005 Fys 4310 Electrical Contacts - p. 1/16 Metal- 12 -cond. junctions There are two kinds of possible contacts between metals and 12 -cond. Which is formed depends on the difference in work functions. Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 2/16 Metal- 12 -cond. junctions There are two kinds of possible contacts between metals and 12 -cond. Which is formed depends on the difference in work functions. The two are ■ Schottky contacts, where the charge carriers can be more easily moved from the 12 -cond. to the metal than vice versa Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 2/16 Metal- 12 -cond. junctions There are two kinds of possible contacts between metals and 12 -cond. Which is formed depends on the difference in work functions. The two are ■ Schottky contacts, where the charge carriers can be more easily moved from the 12 -cond. to the metal than vice versa ■ Ohmic contacts, which are not really ohmic in the real world, but are much less rectifying than the Schottky contact Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 2/16 Schottky contacts What happens when joining a metal and a 1 -cond. (φm > φs )? 2 Ec Ev φm > φ s φn φb χs φs Ec EF,s φm V0 EF,m Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories φn Ev EF Fys 4310 metal n-type 12 -cond. Electrical Contacts - p. 3/16 φs metal n-type 12 -cond. Schottky contacts What happens when φjoining a metal and a m > φs 1 -cond. (φm > φs )? χs 2 EF,m EF,s Ec Ev Ec φm > φ s φn φb Ev χs φn Ec EF,s Fys 4310 φb V0 Ec EF φn Ev EF + + + φs φm V0 EF,m − − − metal n-type 12 -cond. Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories φn Ev Electrical Contacts - p. 3/16 Forward bias Applying a positive potential to the metal, causes a flow of electrons to that side − − − Sfrag replacements + + + φb V0 − V a EF,m Ec EF,s Ev Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories qVa I = I0 exp −1 kT Fys 4310 Electrical Contacts - p. 4/16 Forward bias Applying a positive potential to the metal, causes a flow of electrons to that side − − − Sfrag replacements + + + φb EF,m V0 − V a Ec EF,s Ev Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories qVa qVa I = I0 exp − 1 ≈ I0 exp kT kT Fys 4310 Electrical Contacts - p. 4/16 Reverse bias Applying a positive potential to the 12 -cond. does not cause a large change in the current − − − Sfrag replacements + + + φb V0 − V a EF,m Ec EF,s Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Ev qVa I = I0 exp −1 kT Fys 4310 Electrical Contacts - p. 5/16 Reverse bias Applying a positive potential to the 12 -cond. does not cause a large change in the current − − − Sfrag replacements + + + φb EF,m V0 − V a Ec EF,s Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Ev qVa I = I0 exp − 1 ≈ −I0 kT Fys 4310 Electrical Contacts - p. 5/16 IV of Schottky contacts Thus, a Schottky contact gives IV characteristics with properties similar to that of a pn junction I PSfrag replacements Va Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories qVa −1 I = I0 exp kT Fys 4310 Electrical Contacts - p. 6/16 Real-life problems qVa I = I0 exp −1 kT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 7/16 Real-life problems qVa I = I0 exp −1 kT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: ■ Schottky effect (image-force & E-field lowering) Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 7/16 Real-life problems qVa I = I0 exp −1 kT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: ■ Schottky effect (image-force & E-field lowering) ■ Series and parallel resistance Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 7/16 Real-life problems qVa I = I0 exp −1 kT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: ■ Schottky effect (image-force & E-field lowering) ■ Series and parallel resistance ■ Presence of other mechanisms Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 7/16 Real-life problems qVa I = I0 exp −1 kT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: ■ Schottky effect (image-force & E-field lowering) ■ Series and parallel resistance ■ Presence of other mechanisms ■ Inhomogeneous barrier height Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 7/16 Real-life problems qVa I = I0 exp −1 kT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: ■ Schottky effect (image-force & E-field lowering) ■ Series and parallel resistance ■ Presence of other mechanisms ■ Inhomogeneous barrier height Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Abay et al., Semicond. Sci. Technol. 18 (2003) 75 Fys 4310 Electrical Contacts - p. 7/16 Real-life problems qVa I = I0 exp −1 ηkT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: ■ Schottky effect (image-force & E-field lowering) ■ Series and parallel resistance ■ Presence of other mechanisms ■ Inhomogeneous barrier height Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Abay et al., Semicond. Sci. Technol. 18 (2003) 75 Fys 4310 Electrical Contacts - p. 7/16 Real-life problems qVa I = I0 exp −1 ηkT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: ■ Schottky effect (image-force & E-field lowering) ■ Series and parallel resistance ■ Presence of other mechanisms ■ Inhomogeneous barrier height Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Abay et al., Semicond. Sci. Technol. 18 (2003) 75 ■ Image-force-induced barrier lowering Fys 4310 Electrical Contacts - p. 7/16 Real-life problems qVa I = I0 exp −1 ηkT ! Several authors have identified the most important causes of non-ideal IV behaviour to be: ■ Schottky effect (image-force & E-field lowering) ■ Series and parallel resistance ■ Presence of other mechanisms ■ Inhomogeneous barrier height Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Abay et al., Semicond. Sci. Technol. 18 (2003) 75 ■ ■ Image-force-induced barrier lowering Surface states Fys 4310 Electrical Contacts - p. 7/16 Image-force-induced barrier lowering A charge in the proximity of a metal induces an attractive mirror charge in the metal ag replacements φb V0 Ec EF Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Ev Fys 4310 Electrical Contacts - p. 8/16 Image-force-induced barrier lowering A charge in the proximity of a metal induces an attractive mirror charge in the metal ag replacements φb V0 Ec EF Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Ev Fys 4310 Electrical Contacts - p. 8/16 Surface states There is also band bending due to surface states. Electrons occupy the lower surface states and thereby lower the Fermi level. ag replacements Ec EF Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Ev Fys 4310 Electrical Contacts - p. 9/16 Ohmic contacts 1 -cond. 2 devices usually need to be connected to the rest of the world. Ohmic contacts are preferred, because then the voltage is, ideally, proportional to the current and nonlinear elements are not introduced into the circuit. There are two general types of ohmic contacts that are possible: ■ Non-rectifying barriers ■ Tunneling barriers Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 10/16 Ideal, non-rectifying barrier Ec Occurs when φm < φs . Electrons then flow from the metal to the 12 -cond. and cause a rise in the Fermi level. Ev φm < φ s φn φm φbE χs φs F,m Ec EF,s V0 φn Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Ev EF Fys 4310 metal n-type 12 -cond. Electrical Contacts - p. 11/16 metal 1 Ideal, non-rectifying n-type -cond. 2 barrier φm < φ s Ec χs Occurs when φm < φs . Electrons then flow from the metal to the 12 -cond. andEF,m cause a rise in the Fermi EF,s level. Ec Ev φm < φ s φn φm φbE Ev χs φn φs F,m V0 φn Ev Fys 4310 Ec EF Ec EF,s V0 EF φb metal φn Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Ev n-type 12 -cond. Electrical Contacts - p. 11/16 Tunneling barrier If the 12 -cond. is very highly doped, the depletion region and the Schottky barrier will be very narrow Sfrag replacements φb Ec EF Ev Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 12/16 Tunneling barrier If the 12 -cond. is very highly doped, the depletion region and the Schottky barrier will be very narrow Sfrag replacements φb Ec EF Ev eφb J ∝ exp − , E∞ ! where e} E∞ = 2 Fys 4310 s Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Nd εs m∗n Electrical Contacts - p. 12/16 Specific contact resistance The specific contact resistance, occasionally called contact resistance per unit area, is defined by Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 13/16 Specific contact resistance The specific contact resistance, occasionally called contact resistance per unit area, is defined by " ∂J Rc = ∂V Fys 4310 #−1 V=0 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 13/16 Specific contact resistance The specific contact resistance, occasionally called contact resistance per unit area, is defined by " ∂J Rc = ∂V #−1 V=0 Specific contact resistance according to Jan: Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 13/16 Specific contact resistance The specific contact resistance, occasionally called contact resistance per unit area, is defined by " ∂J Rc = ∂V #−1 V=0 Specific contact resistance according to Jan: Warning! Will be wrong! Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 13/16 Specific contact resistance The specific contact resistance, occasionally called contact resistance per unit area, is defined by " ∂J Rc = ∂V #−1 V=0 Specific contact resistance according to Jan: Warning! Will be wrong! Rc,Jan Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories R = A Electrical Contacts - p. 13/16 Specific contact resistance (cont.) A more successful approach is conductance per unit area: Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 14/16 Specific contact resistance (cont.) A more successful approach is conductance per unit area: Gc,Jan Fys 4310 G = A Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 14/16 Specific contact resistance (cont.) A more successful approach is conductance per unit area: Gc,Jan Rc,Jan,new&improved Fys 4310 G = A Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 14/16 Specific contact resistance (cont.) A more successful approach is conductance per unit area: Gc,Jan Rc,Jan,new&improved = Fys 4310 G = A 1 Gc,Jan Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 14/16 Specific contact resistance (cont.) A more successful approach is conductance per unit area: Gc,Jan Rc,Jan,new&improved = Fys 4310 G = A 1 Gc,Jan A = G Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 14/16 Specific contact resistance (cont.) A more successful approach is conductance per unit area: Gc,Jan Rc,Jan,new&improved = Fys 4310 G = A 1 Gc,Jan A = =R·A G Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 14/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter ■ 1 current source Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter ■ 1 current source ■ 1 evaporation system Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter ■ 1 current source ■ 1 evaporation system ■ 2 spare fuses for the evaporation system Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter ■ 1 current source ■ 1 evaporation system ■ 2 spare fuses for the evaporation system ■ ∼ 1 × 103 fuses to replace the spare fuses for the evaporation system Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter ■ 1 current source ■ 1 evaporation system ■ 2 spare fuses for the evaporation system ■ ∼ 1 × 103 fuses to replace the spare fuses for the evaporation system ■ 1 sputtering system Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter ■ 1 current source ■ 1 evaporation system ■ 2 spare fuses for the evaporation system ■ ∼ 1 × 103 fuses to replace the spare fuses for the evaporation system ■ 1 sputtering system ■ 1 ion implanter Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter ■ 1 current source ■ 1 evaporation system ■ 2 spare fuses for the evaporation system ■ ∼ 1 × 103 fuses to replace the spare fuses for the evaporation system ■ 1 sputtering system ■ 1 ion implanter ■ 7 engineers to fix the ion implanter Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 Accessories needed To make a metal- 12 -cond. junction, make sure you have at hand: ■ 1 ohmmeter ■ 1 current source ■ 1 evaporation system ■ 2 spare fuses for the evaporation system ■ ∼ 1 × 103 fuses to replace the spare fuses for the evaporation system ■ 1 sputtering system ■ 1 ion implanter ■ 7 engineers to fix the ion implanter ■ 1 ion implanter that works to replace the one that doesn’t Fys 4310 Metal on 12 -cond. Schottky Forward bias Reverse bias IV (not 4) Non-ideality Image force Surface states Ohmic contacts Non-rectifying Tunneling Rc Rc cont. Accessories Electrical Contacts - p. 15/16 The End Created with the free power of LATEX HA-prosper www.latex-project.org prosper.sourceforge.net Fys 4310 www.gnu.org Electrical Contacts - p. 16/16