Table of Contents
Introduction ..
1.0
1.1
1.2
1.3
1.4
1.5
1.6
....................................
.....................
xi
1.15
Submicron Structures Technology and Research ........................
Submicron Structures Laboratory .............................................
Microfabrication at Linewidths of 100nm and Below ..............................
Improved Mask Technology For X-Ray Lithography ...............................
Theoretical Analysis Of The Lithography Process .................................
Studies of Electronic Conduction In One-Dimensional Semiconductor Devices ..........
Surface Superlattice Formation In Silicon Inversion Layers Using 200 pm Period
Grating-Gate Field-Effect Transistors .....................................
Study of Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped
Field-Effect Transistors ..................................
.. ............
Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines ......
Study Of Electron Transport In MOSFET's In Si With Deep-Submicron Channel Lengths .
Crystalline Films On Amorphous Substrates ....................................
Ion-Bombardment-Enhanced Grain Growth In Thin Films ...........
.....
.........
Epitaxy via Surface-Energy-Driven Grain Growth ................................
Submicrometer- Period Gold Transmission Gratings for X-Ray Spectroscopy ...........
High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray
Spectroscopy .................. ................................
Soft X-Ray Interferometer Gratings ...................................
.......
2.0
2.1
2.1.1
2.1.2
2.1.3
2.1.4
2.2
2.3
2.4
2.5
2.6
2.7
Kinetic Phenomena in Thin Film Electronic Materials
. . . . . . . . . . . . . . . . . . . 17
Grain Growth in Thin Films ................................................
17
Dopant Enhanced Grain Growth in Silicon Thin Films ............................
18
Ion Bombardment Enhanced Grain Growth in Thin Films ..........................
18
Graphoepitaxy by Grain Growth in Thin Films ..................................
18
Modeling of Microstructural Evolution in Thin Films .............................
19
Post-Nucleation Heteroepitaxy in Lattice Mismatched Systems .....................
19
Thin Film Zone Melting Recrystallization of Silicon ..............................
20
Capillary Instabilities in Thin Solid Films ......................................
20
Kinetics of Thin Film Silicide Formation .......................................
20
Reliability and Microstructures of Interconnects .................................
21
Focussed Ion Beam Induced Deposition ......................................
21
3.0
3.1
3.1.1
3.1.2
3.1.3
3.1.4
Focused Ion Beam Fabrication .....................................
Focused Ion Beam Program ................................................
Development of Focused Ion Beam Patterning ..................................
Fabrication of Devices by Direct Focused Ion Beam Implantation ...................
Planar Vias Through Si3N4 Fabricated by Focused Ion Beam Implantation .............
Growth of Gold Films by Ion Induced Deposition ...............................
23
23
23
24
24
25
4.0
4.1
4.2
4.3
4.4
4.5
4.6
Chemical Reaction Dynamics at Surfaces ............................
Methane Dissociative Chemisorption: Origin of the Pressure Gap in Catalysis ..........
New Mechanisms for Dissociative Chemisorption and Desorption ...................
Chemical Reaction Dynamics on Semiconductor Surfaces .........................
Spectroscopic Study of the Adsorption of C2H4 and C2H2 on Oxidized Gd(0001)
.......
Synthesis and Chemistry of New Kinds of Adsorbates ............................
Definition of the CO Precursor Molecule to Molecular Chemisorption ................
27
27
28
29
29
30
30
1.7
1.8
1.9
1.1 0
1.11
1.12
1.13
1.14
1
1
1
3
3
3
5
6
9
. 9
10
11
12
12
12
13
5.0
5.1
5.2
5.3
5.4
5.5
5.6
5.7
5.8
5.9
5.10
5.11
5.11.1
5.11.2
5.11.3
5.11.4
5.11.5
Optics and Quantum Electronics ....................................
The Nonlinear Waveguide Interferometer ......................................
Picosecond Optical Signal Sampling .........................................
.........................
Solitons ......................................
Strained Layer Superlattices on <111 > Oriented Substrates for Optical Devices ........
Diffraction Coupled Diode Laser Arrays .......................................
Multiple Quantum Well Semiconductor Waveguide Optical Devices .................
Femtosecond Laser Systems and Pulse Generation ..............................
Femtosecond Carrier Dynamics in GaAs .......................................
Femtosecond Spectroscopy of Electronic and Optoelectronic Materials ...............
Ultrashort Pulse Laser Medicine .............................................
Short W avelength Lasers ..................................................
Monopole Collisional Excitation Scheme ......................................
Concept of a Benchtop Short Wavelength Laser Facility ..........................
The Optical Pumping System ..............................................
Whisper-Gallery Mode Mirrors in the Soft X-Ray Regime .........................
A Fast High Resolution Soft X-Ray Detector ...................................
33
33
34
35
36
38
39
40
42
43
46
48
49
49
50
51
53
6.0
6.1
6.2
6.3
6.4
6.5
6.6
.........
................
Optical Propagation and Communication
Atmospheric Optical Communications in Local Area Networks ......................
Squeezed States of Light ..................................................
U.S.-Japan Seminar on Quantum Mechanical Aspects of Quantum Electronics .........
...........
Laser Radar System Theory ......................................
..........
Fiber-Coupled External-Cavity Semiconductor High Power Laser .........
Analog Processing of Optical Wavefronts Using Integrated Guided-Wave Optics .......
57
57
59
61
61
64
64
7.0
7.1
7.2
7.3
Infrared Nonlinear Optics ........................................
Nonlinear Optics in HgCdTe ................................................
.
..........
.......
Optical Nonlinearity in Superlattices ...................
Negative Magnetoresistance and Current-Voltage Characteristics of
...........................
HgTe/CdTe Superlattices. ...................
Negative Magnetoresistance and Current-Voltage Characteristics of HgMnTe ..........
67
67
67
7.4
....
68
68
........
Phase Transitions in Chemisorbed Systems ...................
Selenium Chemisorbed onto Nickel (100): Deviations from the Ashkin-Teller Model .....
HCP versus FCC Freezing of Hard Spheres: A Variational Density Functional Study .....
Reentrant Behavior of an Anti-Metamagnet in Magrnetic Field ......................
The Hard Ellipsoid Fluid: First-Order Phase Transitions to Plastic Crystal, Liquid Crystal,
and Crystal Phases using Optimized Direct Pair Correlations .....................
Exact Statistical Mechanics of a One-Dimensional Fluid of Hard Cores with
Orientational and Translational Degrees of Freedom ...........................
71
71
71
72
9.0
9.1
9.2
9.3
........................................
X-Ray Diffuse Scattering
Metal Surface Studies .....................................................
Rare Gases on Graphite ...................................................
Surface Roughening of Ag .................................................
75
75
76
77
10.0
10.1
10.2
10.3
...................................
Semiconductor Surface Studies
Surface Reconstruction Geometries ..........................................
Structural Phase Transitions ................................................
Hydrogenation ..........................................................
79
79
81
83
11.0
Ultralow-Temperature Measurements of Submicron Devices
...................
Nanometer-Scale Semiconductor Devices
8.0
8.1
8.2
8.3
8.4
8.5
12.0
12.1
Quantum Transport in Low Dimensional Disordered Systems
Resonant Tunnelling in Two Directions .......................................
13.0
13.1
13.2
Graphoepitaxy of Colloidal Crystals ................................
Graphoepitaxy of Colloidal Crystals ..........................................
Growth of Colloidal Crystals ................................................
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. ............
72
73
85
87
87
89
89
89
14.0
14.1
14.2
14.3
Photon Correlation Spectroscopy and Applications ....................
Structure, Interaction and Thermodynamics of Surfactant and Polymer Micellar Solutions
Hydrophobicity of the Solvent and Phase Transition in Micellar and Mixed
M ice lla r So lu tio ns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Basic Studies of Laser-Cell Interactions .......................................
15.0
15.1
15.2
15.3
15.4
15.5
15.6
15.7
15.8
15.9
Custom Integrated Circuits ..........................
Custom Ingegrated Circuits .................................
Extracting Masks from Optical Images of VLSI Chips ..............
Cellular Array for Image Processing ...........................
Algorithmic Fault Tolerance in Digital Signal Processing ...........
Sim ulation of VLSI Circuits ....................
M ixed Circuit and Device Sim ulation ..........................
Detailed Simulation of Phase-Locked Loops ....................
Numerical Algorithms for Hydrodynamics-Based Device Simulation
Parallel Numerical Simulation Algorithms .......................
16.0
16.1
109
16.5.5
Speech Com m unication .........................................
Acoustic Correlates of Breathiness: First Harmonic Amplitude, Turbulence Noise, and
Tracheal Coupling
'' ' ' ' '
Speech Recognition .................................
Acoustic Segmentation and Classification ................
Recognition of Semivowels in American English ...........
Recognition of Continuously-Spoken Letters by Listeners and Spectrogran Readers
Vowel Recognition Using Artificial Neural Nets ............
Speech Planning ..............................
Studies of the Acoustics and Perception of Speech Sounds . . .
Stops, Fricative, and Affricate Consonants ................
Vow el Perception ...................................
Voicing for Fricatives ................................
Cross-Language Study of Nasalization ...................
Physiology of Speech Production .......................
Articulatory Movement Transduction ....................
A Quantitative Study of Anticipatory Coarticulation .........
Glottal Airflow and Pressure Measurements for Male and Femalce Speakers with
Normal Voices
...........
....
.............
. . . . . . .. . . . . . .. . . . . .
Objective Assesment of Vocal Hyperfunction: An Experimental Framework and
Prelim inary Results ...............
..........
.... ..
The Speech of Cochlear Implant Recipients ...............
17 .0
Ling u istics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
121
18.0
18.1
18.1.
18.1.
18.1.
18.1.
18.1.
18.1.
18.1.
18.1.
18.1.
18.1.
Auditory Physiology ..........................
Signal Transmission in The Auditory System ..............
Basic and Clinical Studies of the Auditory System ..........
Signal Transmission in the External and Middle Ear .........
Cochlear M echanism s ................................
Membrane Properties of Inner-Ear Neurons In Vitro .........
Stimulus Coding in the Auditory Nerve ..................
M iddle Ear M uscle Reflex .............................
Cochlear Efferent System ..............
Central Neural Pathways: Evoked Responses .... .........
Cochlear Implants: Current Spread During Electrical Stimulation
Cochlear Implants: Electrical Stimulation of the Auditory Nerve
19.0
19.1
19.1.
19.1.
19.1.
19.1.
Sensory Communication . . . . . . . . . . .
Auditory Psychophysics and Aids for the Deaf
Perceptual Anchors ...................
Binaural Hearing ......................
Hearing Aid Research ..................
Tactile Communication of Speech ........
16.2
16.2.1
16.2.2
16.2.3
16.2.4
16.3
16.4
16.4.1
16.4.2
16.4.3
16.4.4
16.5
16.5.1
16.5.2
16.5.3
16.5.4
95
95
98
100
101
102
104
104
105
106
..
.
.
.
.
110
111
111
112
113
113
114
115
115
116
116
116
117
117
118
1 18
119
120
131
131
131
131
132
...
t....u...........
.................. 133
133
135
....
... ... ....... 136
136
of the Human Cochlea . 137
. .. .. ..... . . . . . .. 138
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.
•
•• ,
•
• •
•
.•
. •
•
141
141
141
141
142
142
142
142
142
19.1.5
19.1.6
19.1.7
Multimicrophone Hearing Aids .............................................
Cochlear Prostheses .....................................................
Hand Function ........................................................
20.0
20.1
20.2
20.3
20.4
20.5
......................................
Physiology
Introduction .........................................................
Visual Function in Dyslexia ...............................................
Physiology of Vision in the Frog ............................................
Image Processing in the Photo-receptors .....................................
Voltage Control of Cell Membrane ..........................................
21.0
21.1
21.2
..........................
M olecular Physics ...................
.....................
Molecule Microscopy .................
Electrical Neutrality of Molecules ...........................................
22.0
22.1
22.2
Quantum Optics and Photonics ...................................
Measurement of Fresnel-Drag in Moving Media Using Aring Resonator Technique .....
Observation of Ultra-Narrow Raman Ramsey Fringes in a Cesium Atomic Beam
Using a Semiconductor Laser ..........................................
Coupled Pendulum Model of the Stimulated Resonance Raman Effect ..............
Laser Raman Clock Using Sodium ..........................................
Alignment Insensitive Technique for Wideband and Tuning of an Unmodified
Semiconductor Laser ..................................................
153
153
23.0
23.1
23.1.1
23.1.2
23.1.3
23.2
23.2.1
23.2.2
23.2.3
23.2.4
Atomic Resonance and Scattering .................................
Basic Atomic Physics ....................................................
Rydberg Atoms in a Magnetic Field .........................................
Microwave Quantum Optics ...........................................
Millimeter Wave Measurements of Rydberg Constant ............................
Magnetic Trap for Neutral Atoms ...........................................
Light Trap ........................................
Atom Wave Interferometer ................................................
Precision Mass Spectroscopy of Ions ........................................
Experimental Study of Momentum Transfer to Atoms by Light .....................
163
163
163
165
170
171
174
177
178
180
24.0
24.1
24.1.1
24.2
24.2.1
24.2.2
24.3
24.3.1
24.4
24.4.1
24.4.2
24.4.3
24.4.4
24.4.5
24.4.6
24.4.7
24.4.8
24.5
24.5.1
24.5.2
24.5.3
.............................................
Plasm a Dynam ics
Relativistic Electron Beams ................................................
Coherent, Free-Electron Radiation Sources ...................................
Plasma Wave Interactions - RF Heating and Current Generation ...................
Diffusion in Velocity and Configuration Space due to Waves ......................
Singular Layer Reduction Theory for Wave Propagation in ICRH ...................
Ray Tracing for the Mode Converted IBW in ICRH .............................
Kinetic EM Mode Near Ion-Cyclotron Harmonics ...............................
Physics of Thermonuclear Plasmas ..........................................
Anomalous Ion Thermal Conductivity ........................................
Profile Consistency: Global and Nonlinear Transport ............................
Sawtooth and Fishbone Stabilization in Auxiliary Heated and Fusion Burning Plasmas ..
Density Limit and D-T ignition Conditions ....................................
Alpha Particle Induced Fishbone Oscillations in Fusion Burning Plasmas ............
Transport Simulations of Thermonuclear Ignition in Compact Experiments ............
Transport Simulations of Ohmic TFTR Discharges ..............................
The Role of the Ubiquitous Mode in Anomalous Electron Energy Transport ...........
Tokamak Research: RF Heating and Current Drive .............................
Combined Electron Cyclotron Heating and Current Drive Experiments ...............
High f/P Plasma Equilibria by LHCD and ECRH Heating ..........................
800 MHz Fast Wave Current Drive Experiments ................................
183
183
183
186
186
188
189
190
193
194
194
195
195
196
196
197
197
198
199
201
202
25.0
25.1
25.2
25.3
25.4
Digital Signal Processing ........................................
Introduction ...........................................................
Motion Compensation for Undersea Cameras ..................................
Reconstruction Of Nonlinearly Distorted Images From Zero Crossings
Digital Processing of Side Scan Sonographs ..................................
205
205
207
207
208
22.3
22.4
22.5
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RLE Progress Report Number 130
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. 147
147
147
149
149
150
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151
151
152
154
158
158
160
25.5
25.6
25.7
25.8
25.9
25.10
25.11
25.12
25.13
25.14
25.15
25.16
Representation and Manipulation of Signal Processing Knowledge and Expressions
Iterative Algorithms for Parameter Estimation from Incomplete Data and their
Applications to Signal Processing ....................
M ulti-Band Excitation Vocoder .........................
Television Signal Deghosting by Noncausal Recursive Filtering
.Threshold C.
A 4.8 Kbps Multi-Band Excitation Speech Coder ...........
Image Interpolation Using Edge Information ..............
Multi-Level Signal Matching for Vector Quantization ........
Detection of Narrowband Signal in Wideband Noise ........
Estimation of Coronary Artery Dimensions from Angiograms . .
Chaotic Dynamics in Digital Signal Processing ............
Image Texture Modeling ...................
.......
....
Reconstruction of Multidimensional Signals from Multiple Level
rossings
210
211
212
213
213
214
215
216
217
217
218
26.0
26.1
2 6 .1.1
26 .1.2
26.1.3
26.2
2 6 .2 .1
26.2.2
26.3
2 6 .3 .1
26.3.2
Cognitive Information Processing . . . . . . . . . . . . . . . .
Advanced Television Research Program ..................
Go a ls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Backgro und .......................................
Research A ctivities ..................................
Computer-Aided Fabrication System Structure .............
A bstract . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Computer-Aided Fabrication System Structure .............
Programmable Frame Buffer Systems ....................
A b stract . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Fram e Buffer System s ................................
221
221
221
221
222
223
223
223
226
226
226
27.0
27.1
27.2
27.3
27.4
27.5
Electromagnetic Wave Theory and Applications
Electromagnetic Waves in Multilayer Media ...............
Remote Sensing of Earth Terrain .......................
Remote Sensing of Upper Atmosphere ...................
Remote Sensing of Sea Ice ............................
SAR Image Interpretaion and Simulation ............
229
229
233
236
238
240
28.0
28.1
28.2
28 .2 .1
28.2.2
28.3
28 .3 .1
28.3.2
28.3.3
28.3.4
Microwave and Quantum Magnetics
Microwave Hyperthermia .............
Synthesis of Optimum Microwave Antenna Applicators
Localized Tum ors .................
A bstract ..........................
Table of Contents ...................
M icrowave Ferrites ..................
A bstract ..........................
Table of Contents ...................
Introduction .......................
.
Summary .......
29.0
29.1
29.2
29.3
29.4
29.5
29.6
29.7
29.8
29.9
..............
Radio Astronomy
Galactic and Extragalatic Research ......
M illimeter-W ave VLBI ...............
.......
O rbiting VLBI ..............
Studies of Planetary Systems of Other Stars
Long-Baseline Astrometric Interferometer .
Tiros-N Satellite Microwave Sounder ....
High Resolution Passive Microwave Imagin
Video Image Processing ..............
Planets....................
Nonthermal Radio Emission from the Jovian
253
253
254
254
255
255
257
258
258
259
30.0
30.1
30.2
30.2.1
30.2.2
30.3
RLE Publications and Papers Presented
Meeting Papers Presented . . ..
Journal Articles ............
Published Journal Articles . . ..
Articles Accepted for Publication in Journals
Letters to the Editor .........
261
261
278
278
281
282
.T .
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209
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245
245
Treating
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245
245
246
248
248
248
249
252
30.3.1
30.3.2
30.4
30.5
30.6
Published Letters ...........
Letters to the Editor Accepted for Publication
Chapters in Books ..........
Reports Published ..........
Special Publications .........
31.0
Current RLE Personnel
32.0
Research Support Index
33.0
Research Project Staff Index
viii
RLE Progress Report Number 130
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. ... .... ... ... ........ 282
283
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... ... ... ... .. . . . . . I. 284
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... .. .. ... .. .. . . . . . . . 285
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. 287
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293
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299