MODELING AND DESIGN OF SUPERCONDUCTING MICROWAVE PASSIVE DEVICES AND INTERCONNECTS by LAURENCE H. LEE B.S., State University of New York at Buffalo, June 1989 S.M., Massachusetts Institute of Technology, September 1990 Submitted to the Department of Electrical Engineering and Computer Science in Partial Fulfillment of the Requirements for the Degree of DOCTOR OF PHILOSOPHY at the MASSACHUSETTS INSTITUTE OF TECHNOLOGY May 1994 ©Massachusetts Institute of Technology 1994 All Rights Reserved Signature of Author Department of Electrical Engineering and Computer Science _ Certified by / _____l May 6, 1994 / ,Professor, Certified by r x,, - y- Terry P. Orlando Electrical Engineering and Computer Science IY I W. Gregory Lyons - SrfMember, Lincoln Laboratory Accepted by r JUL 1 2 MODELING AND DESIGN OF SUPERCONDUCTING MICROWAVE PASSIVE DEVICES AND INTERCONNECTS by LAURENCE H. LEE Submitted to the Department of Electrical Engineering and Computer Science on May 6, 1994 in Partial Fulfillment of the Requirements for the Degree of Doctor of Philosophy ABSTRACT A spectral-domain volume-integral-equation method is developed for analyzing superconducting planar transmission lines. This method rigorously accounts for the complex conductivity, the finite metallization thickness, and the anisotropy of superconductors. Calculated effective dielectric constants and quality factors for microstrip lines and coplanar waveguides show good agreement with measured data. The effects due to the anisotropy of high-temperature superconductors are found to be negligible for c-axis oriented films. The characteristics of a microstrip line with a thin buffer-layer and a stripline with a small air gap are also analyzed. Based upon the current distribution, a quantitative analysis is made of the power-handling capability of superconducting non-TEM resonators. Among several commonly used planar transmission lines, microstrip lines are found to have the largest power-handling capability. A more efficient full-wave method is developed based upon an equivalent surface impedance concept. In the formulation, the superconducting strips are transformed to infinitely thin strips. A full-wave integral equation method is then used to solve the problem with infinitely thin strips. This method reduces the computation time by nearly two orders of magnitude compared to the volume-integral-equationmethod. The validity of the equivalent surface impedance approach is verified by measurements and by the volume-integralequation method. This method is extended to model single and coupled microstrip lines on anisotropic substrates with a rotated optic axis. In the development of the equivalent surface impedance method, a closed-form expression for the current distribution in isolated superconducting strips is obtained. This closed-form expression is valid for strip thicknesses less than a few penetration depths. The equivalent surface impedance method is used to develop a set of computer routines for modeling and designing superconducting edge-coupled bandpass filters. In the design procedure and the simulation, the secondary coupling effects are neglected. A sensitivity analysis is performed on a 4-pole 1% bandwidth microstrip filter centered at 10 GHz and a 4-pole 0.05% bandwidth shielded microstrip filter centered at 2 GHz. The analysis shows that the filters remain well matched with a shift in center frequency when the superconducting 3 material is replaced by another superconductor or the thickness of the superconductor is changed. The filter remains acceptably matched with a slight symmetric variation in the dimensions of the resonators, but random variations must be smaller than 2 ,um for the 1% filter and 0.25 pumfor the 0.05% filter. The 4-pole 1% microstrip filter design is fabricated using silver and niobium. The measured results indicate significant secondary coupling effects. The characteristics of coupled shielded microstrip lines are studied using the full-wave method developed in this thesis. The structures are found to be highly dispersive. A parallelplate mode supported by the ground plates greatly deteriorates the shielding property. The effects of the parallel-plate mode predicted by the analysis are confirmed by experiments made on several quarter-wavelength couplers. Closed-form expressions for the open-end equivalent length in single and coupled shielded microstrip lines are derived based upon the open-end models for the stripline and the microstrip. The equivalent lengths given by these expressions agree well with those obtained using a commercial field simulator. Thesis Supervisor: Title: Prof. Terry P. Orlando Professor of Electrical Engineering Thesis Supervisor: Title: Dr. W. Gregory Lyons Staff Member of Lincoln Laboratory 4 "...I cannot doubt but that these things, which now seem to us so mysterious, will be no mysteries at all; that the scales will fall from our eyes; that we shall learn to look on things in a different way - when that which is now a difficulty will be the only common-sense and intelligible way of looking at the subject." Lord Kelvin (William Thomson) discussed the skin effect in 1889. "The purpose of computing is insight, not numbers." Hamming commented on numerical analysis. 5 6 To Phoebe Taylor Brandon Justin 7 8 Acknowledgement I would like to express my gratitude to my supervisors Professor Terry P. Orlando and Dr. W. Gregory Lyons, and to my former supervisor Dr. Sami M. Ali for years of supports, guidance, and encouragement. Their professional advise and supervision have made the completion of this thesis possible. I am also very thankful for their caring friendship. I would also like to thank my former supervisor Professor Jin Au Kong. Professor Kong's enthusiasm in teaching his graduate electromagnetic wave course motivated me to pursue research in electromagnetics. I thank Professor Jacob K. White for taking his valuable time to be my thesis reader, and for making helpful suggestions. I express my gratitude to Dr. Timothy R. Dinger and Dr. G. Arjavalingam and the Superconductivity Group at IBM T. J. Watson Research Center for their hospitality during my visit. I would like to acknowledge valuable conversations with Dr. Richard Withers on microwave filters and couplers. I am thankful to Dr. Cheung-Wei Lam for his friendship and for making numerous inspiring suggestions. His assistance in my job search is deeply appreciated. Dr. Daniel E. Oates and Dr. Jeffrey D. Goettee provided the measurement results on resonators. I thank Robert P. Konieczka for his assistance in packaging the filters and couplers measured in thesis, and Douglas M. Dugas for his valuable discussion on filter design. I would also like to take this opportunity to thank my present and former colleagues for many enlightening conversations and for their friendship; especially William Au, David Berman, David Carter, Amy Duwel, Dr. Hsiu Han, Derek Linden, John Oates, Joel Phillips, Dr. David Sheen, Enrique Trias, Li-Fang Wang, and Dr. Herre van der Zant. Margery Brothers, Charmaine Cudjoe-Flanders, Kit-Wah Lai, and Angela Odoardi have also helped in many ways. Most of all I thank my wife, Phoebe, and my sons, Taylor, Brandon, and Justin, for their love, supports, and companionship, and for their sacrifices during this difficult effort. They have brought new meanings to my life. This work was conducted under the auspices of the Consortium for Superconducting Electronics with the full support of the Advanced Research Projects Agency under Contract MDA972-90-C-0021. Laurence H. Lee 1994 9 10 Contents List of Figures 13 List of Tables 17 1 Introduction 1.1 Background ........................ 1.2 Description of the Thesis ................. 19 2 Spectral-Domain Volume-Integral-Equation Method 27 2.1 2.2 2.3 2.4 2.5 2.6 2.7 Introduction. The Two-Fluid Model .................. Generalized Formulation ................. Volume-Integral-Equation for Microstrip Lines ..... Method of Moments ................... Results and Discussions ................. Summary ......................... 20 22 ...... ..... . .27 ........... ..29 .... ....... . .32 ........... ..35 ........... ..44 ........... ..56 . . .. . . . . . . . . .37 3 Equivalent Surface Impedance Approach 3.1 Introduction . ............................ 3.2 Equivalent Surface Impedance ................... 3.3 Current Distribution in Superconducting Thin-Film Strips . . . 3.3.1 Approximate Solution for the Current Distribution . . . 3.3.2 Applications of Isolated Strip Approximation ....... 3.4 Superconducting Microstrip on Anisotropic Substrate ...... 3.4.1 Integral Equation Formulation and Method of Moments . 3.4.2 Numerical Results and Discussion ............. 3.4.3 Summary .......................... 4 Superconducting Bandpass Filter 4.1 Introduction. ............................ 4.2 Transmission-Line Resonators ................... 4.2.1 Power-Handling Capability ................. 4.2.2 Packaging .......................... 11 59 59 61 62 63 68 70 71 74 88 91 91 92 92 94 CONTENTS 12 Filter Design Procedure ........ Filter Simulation Method ....... Numerical Simulations and Discussion 4.5.1 A Four-Pole 1% Filter ..... 4.5.2 A Four-Pole 0.05% Filter .... 4.6 Experimental Results .......... 4.7 Summary ................ 4.3 4.4 4.5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ............... ............... ............... ............... ............... ............... ............... 5 Shielded Microstrip Lines 5.1 Introduction. 5.2 Edge-Coupled Shielded Microstrip Lines ....... 5.3 Experimental Verification of Parallel-Plate Mode. . . .. . 5.4 Open-End Discontinuity in Shielded Microstrip Lines 5.5 Summary ........................ 6 Conclusions 98 104 107 107 113 123 125 129 .... .... . . . 129 130 ... . 135 ... . 139 ... . 144 145 A Dyadic Green's Function for Isotropic Media 149 B Dyadic Green's Function for Anisotropic Media 155 Bibliography 157 Publications from Thesis 163 List of Figures 2.1 2.2 2.3 2.4 2.5 2.6 2.7 2.8 The two-fluid model. ............................... Electric field generated by current sources enclosed in a volume V' ... Geometric Configuration of a layered medium with embedded current sources. A superconducting strip is embedded in layer (0) of a layered dielectric medium. Superconducting microstrip line. ................... A nonuniform grid is imposed on the cross section of a superconducting strip. Sommerfeld integration path in k,-plane ..................... Sommerfeld integration path in ks-plane ..................... . 30 32 34 35 37 38 42 42 2.9 Effective dielectric constant 45 of Nb microstrip transmission lines ........ 2.10 Quality factor of superconducting microstrip resonators ............ 46 2.11 Longitudinal current density at the bottom of the signal strips of microstrip transmission lines. ................................ 46 2.12 Superconducting microstrip transmission line with a thin dielectric buffer layer and a perfectly conducting ground plate . .................... 47 2.13 Effective dielectric constant and attenuation constant of a superconducting microstrip line with and without a thin dielectric buffer layer ........ . 48 2.14 Effective dielectric constant and attenuation constant of an isotropic and an anisotropic superconducting microstrip line ................... 50 2.15 Effective dielectric constant and attenuation constant of an isotropic and an anisotropic superconducting microstrip line.......... .... 50 2.16 Stripline transmission line with an air gap .................... 51 2.17 Effective dielectric constant and attenuation constant of superconducting striplines with (lines 1 and 2) and without (lines 3 and 4) an air gap ........... 53 2.18 Configuration of a coplanar waveguide ... ................... . 54 2.19 Effective dielectric constant of Nb coplanar waveguides............. 54 2.20 Quality factor of Nb coplanar waveguide resonators ............... 55 2.21 Longitudinal current density at the bottom of the center strips of Nb coplanar waveguides .................................... 56 2.22 Longitudinal current density at the bottom of the ground plates of coplanar waveguides ..................... 57 3.1 3.2 A superconducting microstrip line. ....... Cross section of an isolated superconducting strip ................ 13 ... .. 61 63 LIST OF FIGURES 14 Current distribution in an isolated superconducting strip ............ AC resistance at 2 GHz of an isolated superconducting strip .......... Total resistance and center strip resistance of superconducting striplines. . Superconducting microstrip line with a perfectly conducting ground plate on an anisotropic substrate. ............................. 3.7 Superconducting coupled microstrip lines with a perfectly conducting ground plate on an anisotropic substrate ......................... 3.8 Measured and calculated effective dielectric constant of three Nb microstrip lines on LaA103. ................................. 3.9 Calculated quality factor at 2 GHz for a Nb microstrip line on LaA10 3 as a function of strip thickness normalized to the penetration depth. ....... 3.10 Calculated quality factor and characteristic impedance of a YBCO microstrip 3.3 3.4 3.5 3.6 line on LaA1O3 as a function of frequency. .................... 3.11 Calculated effective dielectric constant at 2 and 20 GHz for YBCO microstrip lines on M-plane sapphire as a function of the rotation angle 0 of the optic axis. 3.12 Calculated attenuation constant at 2 and 20 GHz for YBCO microstrip lines on M-plane sapphire as a function of the rotation angle 0 of the optic axis. . 3.13 Calculated real and imaginary parts of the characteristic impedance at 2 and 20 GHz for YBCO microstrip lines on M-plane sapphire as a function of the rotation angle 0 of the optic axis ......................... 3.14 Effective dielectric constant of a perfectly conducting coupled microstrip line on M-plane sapphire ................................ 3.15 Calculated c- and 7r-mode effective dielectric constants of YBCO coupled microstrip lines on M-plane sapphire as functions of the rotation angle 0 of the optic axis at 2 GHz. ................................ 66 67 68 71 73 75 76 77 78 79 80 82 83 3.16 Calculated c- and r-mode attenuation constants of YBCO coupled microstrip lines on M-plane sapphire as functions of the rotation angle 0 of the optic axis at 2 GHz ...................................... 83 3.17 Calculated c- and r-mode characteristic impedances (real part) of YBCO coupled microstrip lines on M-plane sapphire as functions of the rotation angle 0 of the optic axis at 2 GHz ............................ 3.18 Calculated c- and 7r-mode effective dielectric constants of YBCO coupled microstrip lines on M-plane sapphire as functions of the normalized line separation at 2 GHz. .................................. 3.19 Calculated c- and 7r-mode attenuation constants of YBCO coupled microstrip lines on M-plane sapphire as functions of the normalized line separation at ....... 2 GHz ................................. 3.20 Calculated c- and 7r-mode characteristic impedances of YBCO coupled microstrip lines on M-plane sapphire as functions of the normalized line separation at 2 GHz. .................................. 84 85 86 86 LIST OF FIGURES 15 3.21 Calculated c- and r-mode characteristic impedances of YBCO coupled microstrip lines on M-plane sapphire as functions of reduced temperature T/TC at 2 GHz 4.1 4.2 4.3 4.4 4.5 4.6 4.7 4.8 4.9 ...................................... 87 Configuration of coupled shielded microstrip lines ................ Configuration of a quarter-wavelength coupled microstrip line. ........ The magnitude of S21 of a quarter-wavelength coupled microstrip line as a function of the distance from the side wall .................... Calculated even- and odd-mode impedances of coupled shielded microstrip lines on 508 gm-thick LaAlO3 for Nb at 4.2 K .................. Configuration of an edge-coupled microstrip bandpass filter. ......... Equivalent circuit of the edge-coupled bandpass filter .............. Simulated response of a YBCO (71 K) 4-pole 2% microstrip bandpass filter on sapphire with a center frequency at 10 GHz. ................ Layout of an edge-coupled bandpass filter. ................... Network representation of a bandpass filter. .................. 4.10 A schematic of a two-port network. ........................ 4.11 Transmission model for a coupled section in a bandpass filter. ........ 4.12 Simulated response of a 4-pole 1% Nb microstrip filter on 508 gm-thick LaA103 with a center frequency at 10 GHz . ....................... 4.13 Simulated response of a Nb (4.2 K) 4-pole 1% microstrip bandpass filter on LaA10 3 with a center frequency at 10 GHz. .................. 4.14 Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter with the substrate thickness reduced by 10%. ........................ 4.15 Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter with the substrate thickness reduced by 2m .m ................... 4.16 Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter with the dimensions of the resonators uniformly reduced by 2 um. ............. 4.17 Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter with the dimensions of the resonators randomly reduced by 0 to 2 /m ......... 4.18 Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter with the dimensions of the resonators randomly reduced by 0 to 0.25 #m ........ . 4.19 Simulated response of a 4-pole 0.05% YBCO shielded microstrip filter on 127 ptm-thick MgO with a center frequency at 2 GHz .............. 4.20 Simulated response of a YBCO (50 K) 4-pole 0.05% shielded microstrip bandpass filter on MgO with a center frequency at 2 GHz .............. 4.21 Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter with the cover height reduced by 10%. ...................... . . 4.22 Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter with the substrate thickness reduced by 2 m ................. 4.23 Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter with the substrate thickness reduced by 8% ................... 94 95 96 96 98 100 102 103 104 105 105 108 111 112 112 113 114 114 116 117 118 119 119 LIST OF FIGURES 16 4.24 Simulated response of a 2 GHz 4-pole with the dimensions of the resonators 4.25 Simulated response of a 2 GHz 4-pole with the dimensions of the resonators 4.26 Simulated response of a 2 GHz 4-pole with the dimensions of the resonators 0.05% YBCO shielded microstrip filter uniformly reduced by 2 m ....... 0.05% YBCO shielded microstrip filter randomly reduced by 0 to 2 m. .... 0.05% YBCO shielded microstrip filter randomly reduced by 0 to 0.25 im. .. 120 121 121 4.27 Simulated response of a 2 GHz 4-pole 0.05% YBCO (50 K) microstrip filter on 381 im-thick LaA103. ............................. 4.28 Measured and simulated response of a 1-pole edge-coupled Nb microstrip filter with a center frequency at 2 GHz......................... 4.29 Measured response of a 4-pole 1% bandwidth bandpass filter fabricated using 3 um-thick silver ......................... ......... 4.30 Measured response of a 4-pole 1% bandwidth bandpass filter fabricated using 0.4 m-thick niobium. ............................... 4.31 Simulated response of a 4-pole 1% bandwidth bandpass filter by a commercial simulator IE3D .................................. 5.1 5.2 5.3 5.5 5.6 5.7 5.8 5.9 123 124 125 126 Configuration of an edge-coupled shielded microstrip line ............ Calculated even- and odd-mode effective dielectric constants of Nb coupled 130 shielded microstrip lines on 508 1im-thick LaA10 132 3 at 4.2 K ........... Calculated even- and odd-mode impedances of Nb coupled shielded microstrip lines on 508 5.4 122 1 im-thick LaA10 3 at 4.2 K. ..................... 132 Calculated backward-wave coupling coefficient C of a symmetric shielded microstrip, a microstrip, and a stripline quarter-wavelength coupling sections. . Calculated backward-wave coupling coefficient C of shielded microstrip quarterwavelength coupling sections. .......................... Electric field distribution of the even-mode in a coupled symmetric shielded microstrip line with 2s/hi = 2. .......................... Electric field distribution of the even-mode in a coupled symmetric shielded microstrip line with 2s/hi = 10 .......................... Configuration of a symmetric shielded-microstrip quarter-wavelength coupler. Calculated transmission coefficient of symmetric shielded microstrip quarterwavelength couplers ................................ 5.10 Configuration of a shielded microstrip. ...................... 134 134 136 136 137 138 140 5.11 Calculated open-end equivalent length for shielded microstrip lines with 2w/hl = 1........................................... 142 5.12 Calculated open-end equivalent for shielded microstrip lines with h2 /hl = 6. 143 A.1 A layered medium with a current embedded in layer (n). ........... 150 B.1 Cross section of an anisotropic substrate sandwiched by two perfectly conducting ground plates . . . . . . . . . . . . . . . . . . ........... 156 List of Tables 2.1 Parameters for the microstrip lines ........................ 2.2 Parameters for the Coplanar Waveguides .................. 44 52 4.1 Quality factor and power-handling capability of superconducting resonating structures with f = 2 GHz for Nb on LaA10 3 at 4.2 K. ........... 4.2 The magnitude of S21 of a quarter-wavelength coupled microstrip line shown in Fig. 4.2 as a function of the cover height. ................ . 4.3 Physical parameters for YBa 2 Cu3O7 _. at 50 K and Nb at 4.2 K ....... 4.4 Design for a 4-pole 1% Nb microstrip filter on LaA10 3 with a center frequency at 10 GHz. 4.5 5.1 .................................... 93 95 109 109 Design for a 4-pole 0.05% YBCO shielded microstrip filter on MgO with a center frequency at 2 GHz ............................ Dimensions of symmetric shielded-microstrip quarter-wavelength couplers. 17 115 . 135 18 Chapter 1 Introduction The low-loss characteristics and high operating temperatures of high-transition-temperature superconductors (HTS's) open up possibilities of building high-performance planar microwave devices whose performance can only be achieved with current technology by using bulky waveguides or coaxial components. However, many material and engineering issues associated with HTS have yet to be resolved. One of the problems in designing microwave circuitry using HTS films is lack of adequate computer-aided-design (CAD) tools [1]. Existing commercial CAD tools employ design rules and assumptions made for normal conductors. When HTS is used in building high performance devices, the accuracy of the CAD tools becomes an important issue. In addition, mismatch, radiation, and dielectric loss mechanisms that are trivial compared to conductor losses in conventional devices become important factors affecting the performance of low-loss HTS devices. Also, most existing CAD tools do not accept complex conductivities which are used to characterize HTS's. The objective of this work is to develop efficient and accurate methods for the characterization and synthesis of superconducting microwave passive devices. This thesis presents the first full-wave analysis of superconducting planar transmission lines, which rigorously accounts for the complex conductivity, the finite metallization thickness, and the anisotropy of superconductors. Based upon the current distribution generated from the analysis, an quantitative analysis is made for the first time on power-handling capability of superconducting 19 CHAPTER 1. INTRODUCTION 20 non-TEM resonators. A more efficient but yet accurate full-wave method is developed based upon an equivalent surface impedance concept. This efficient method is extended to analyze single and coupled microstrip lines on anisotropic substrates with a rotated optic axis, and is used to build a set of computer routines for modeling and designing superconducting passive microwave devices. In particular, a CAD tool is developed for edge-coupled superconducting bandpass filters. By applying this CAD tool, sensitivity analyses are performed on highperformance bandpass filters. Using a well shielded planar transmission-line structure can ease the design of very narrowband filters. The characteristics of coupled shielded microstrip lines are studied using the full-wave method developed in this thesis. For the first time, the effects of a parallel-plate mode in the shielded microstrip structures are predicted by the full-wave analysis and are demonstrated by experiments. 1.1 Background Conventional superconductors are either pure metals or alloys with superconducting transition temperatures (To) well below 30 K. Examples of the most widely used conventional superconductors are Nb (T, = 9.2 K), NbN (T, = 16 K), and Nb3 Sn (T, = 18 K). Because of the low T,, costly and complex cryogenic refrigeration systems with liquid helium as coolant are required to cool these superconductors to such low temperatures. The high cooling cost limits the use of superconductors in only a few ultra-high-performance applications such as microwave radio astronomy and magnetic resonance imaging. In 1986, the discovery of the new copper oxide compounds with high transition temperature has fundamentally changed the prospects for applications of superconductors [2], [3]. One of the commonly used high-temperature superconductors is YBa 2 Cu3 O7 _ (YBCO) with T, = 92 K. Because of the high superconducting transition temperature, simpler and more reliable mechanical coolers can be used to achieve the desired operating temperatures. In the cases where the magnetic fields and vibration generated by mechanical coolers be- 1.1. BACKGROUND 21 come a problem, liquid nitrogen which is a much cheaper and more abundant coolant than liquid helium can be used instead. Consequently, the cooling cost of HTS's is nearly two orders of magnitude less than that of conventional superconductors [4], [5]. High-temperature superconducting microwave devices are now being considered for use in high-performance microwave systems where components are needed with higher performance, smaller size, and lighter weight than devices based on conventional technology. These new high-temperature superconductors, however, are very difficult to process and to handle because of their complicated crystal structures consisting of a large number of elements. Although many material, physics, and engineering issues associated with high-temperature superconductors have yet to be resolved, prototypical HTS devices developed by a number of research organizations have demonstrated performance advantages over conventional devices [6]-[8]. Passive HTS microwave devices have a reasonable potential for widespread commercialization [6]. Most passive HTS microwave devices are based upon simple planar transmission-line structures which are relatively easy to fabricate on HTS thin films using existing photolithographic methods. The performance of these HTS passive microwave devices depends greatly upon the quality of the films. Difficulties in the epitaxial growth of HTS materials have posed a major obstacle for fabricating high-performance HTS devices. Recent advancements in film-deposition methods have enabled fabrication of a number of passive HTS microwave devices with good performance such as high-Q resonators with low phase noise [9], [10], multi-pole bandpass filters with narrow bandwidth [11], [12], and long delay lines with low insertion loss [13]-[15]. A YBCO chirp filter has also been recently incorporated into a real-time spectrum-analysis subsystem [16]. Unfortunately, improvements in performance of HTS devices have been very difficult partly because of the complexity of the materials. Another reason is the limitations of existing CAD tools [1]. The BCS theory of superconductivity [17] was developed in 1957 by J. Bardeen, L. N. Cooper, and J. R. Schrieffer. This theory successfully explains the superconducting phe- CHAPTER 1. INTRODUCTION 22 nomenon observed in conventional superconductors, but it fails to explain high-temperature superconductivity. At this point, there is no acceptable theory available for high-temperature superconductivity. Despite its short-comings, the BCS theory provides a reasonable description of high temperature materials up to certain limits. However, because of its complexity, the BCS theory is rarely applied directly for engineering purposes. The widely used model for superconductivity is the classical two-fluid model and London equations [18] which provide an intuitive phenomenological description of superconductors. These classical models are used in this thesis for analyzing superconducting devices. 1.2 Description of the Thesis This thesis proposes accurate full-wave methods for analyzing superconducting planar microwave devices. The building blocks for planar devices are transmission-line structures. A spectral-domain volume-integral-equation method is presented in Chapter 2 for analyzing superconducting planar transmission lines. This method rigorously accounts for the complex conductivity, the finite metallization thickness, and the anisotropy of superconductors. The integral equation for the electric field inside the superconductors is formulated using a dyadic Green's function for layered media in the spectral domain. Galerkin's method is applied to solve the integral equation. Because of the rapid spatial variation of the electric field in the superconductors, roof-top basis functions rather than the simpler pulse basis functions are used to approximate the transverse components of the electric field, so that large singular charge distributions are eliminated. The complex propagation constant of the transmission lines and the current distribution in the superconductors are obtained from the analysis. This method accurately quantifies the effects due to film thickness, kinetic inductance, and anisotropic properties of high-temperature materials. Calculated results are presented for microstrip lines, coplanar waveguide structures, and striplines. Measurement data obtained from resonators agree well with the numerical results. 1.2. DESCRIPTION OF THE THESIS 23 In Chapter 3, a more efficient full-wave method is developed using an equivalent surface impedance concept. The idea is to transform the superconducting strips with finite thicknesses to infinitely thin strips using equivalent surface impedances. These equivalent surface impedances account for the loss and kinetic inductance of the superconductors. The expression for the equivalent surface impedance is derived based upon a closed-form expression for the current inside an isolated superconducting strip. This closed-form expression for current is obtained by curving fitting to numerical results, and is valid for strip thicknesses less than a few penetration depths. The isolated strip approximation is valid only for line widths being small compared to the substrate thickness. A 2-D dyadic Green's function for layered media is used to formulate an integral equation for the surface current on the infinitely thin strip. Galerkin's method with entire-domain basis functions is used to solve for the complex propagation constants. The characteristic impedances are then determined from the propagating power and current. The validity of this equivalent surface impedance method is verified by the more rigorous spectral-domain volume-integral-equation method and by measurements. The effects of the optic axis orientation and the line width on the characteristics of single and coupled microstrip lines on M-plane sapphire are presented. The effects of the line separation and operating temperature on the coupled lines are also shown. Chapter 4 discusses issues associated with designs of superconducting bandpass filters. An quantitative analysis of the power-handling capability is presented for various planar resonators. The analysis is based upon the peak magnetic field in the superconductors calculated using the spectral-domain volume-integral-equation method and a modified Weeks' method. In principle, a nonlinear model such as Ginzburg-Landau theory is required to determine the power-handling capability of a superconducting transmission-line resonator. However, because the nonlinearity inherent in superconductors is small, this analysis based upon linear models is shown to be valid. Packaging issues associated with planar filters are also discussed qualitatively. A design procedure and a simulation method are presented for CHAPTER 1. INTRODUCTION 24 superconducting edge-coupled bandpass filters. Both of the design procedure and the simulation method neglect secondary coupling effects such as next-nearest-neighbor coupling and package coupling. In the design, a lumped-element prototype is first transformed into a series of transmission lines and impedance inverters. Then this series of transmission lines and impedance inverters is implemented by a series of quarter-wavelength couplers. The geometrical dimensions of the couplers are optimized using the equivalent surface impedance technique. An equation is presented for compensating unequal even- and odd-mode propagation constants and open-end effective lengths in any planar filter design. In the simulation, the filter structure is broken into elements of quarter-wavelength couplers. The overall filter response is obtained by the response of cascaded two-port networks which represent the couplers. A sensitivity analysis is performed on a 4-pole 1% microstrip filter centered at 10 GHz and a 4-pole 0.05% shielded microstrip filter centered at 2 GHz. The 4-pole 1% filter design is also implemented using silver and niobium. Measurement results indicate significant secondary coupling effects. In searching for a structure which has a better shielding property than a microstrip, the characteristics of shielded microstrip lines are studied using the equivalent surface impedance method. The results are presented in Chapter 5. The good shielding property as predicted by an quasi-static analysis for the shielded microstrip structures is greatly deteriorated by a parallel-plate mode supported by the two ground plates. The existence of the parallel-plate mode is shown in the calculated electric field distributions. The effects due to the parallelplate mode are predicted by the full-wave analysis and confirmed by measurements on several quarter-wavelength couplers. Preliminary results show that the parallel-plate mode can be suppressed by making good contacts between the ground plates to ensure an equal potential. Closed-form expressions for the open-end equivalent length in single and coupled shielded microstrip lines are derived using a phenomenological approach. 1.2. DESCRIPTION OF THE THESIS 25 Chapter 6 summarizes the results presented in this thesis and recommendations of future work are also given. 26 Chapter 2 Spectral-Domain Volume-Integral-Equation Method 2.1 Introduction Superconducting transmission lines offer many advantages over their normal-metal counterparts. Dispersion is virtually nonexistent for frequencies as high as several tens of gigahertz, circuit packing density can be greatly increased without incurring the penalties of high loss associated with very dense normal conducting lines, and many analog signal processing devices can be devised based on very long transmission lines or high-Q planar resonators [7], [19]-[20]. The prospect for developing superconducting microwave devices that can be used in actual system applications improved dramatically with the discovery of high-T, superconductors. Because superconducting devices will move from the research laboratory into complex microwave systems in the very near future, rigorous methods need to be developed to accurately predict the performance of superconducting microwave device structures over wide frequency ranges. For instance, in the design of long delay lines, phase velocities of the propagating signals need to be precisely determined to about 1%. This requires techniques which can accurately characterize transmission lines with various geometries, dimensions, and electrical parameters. Kwon et al. [21] used the two-fluid model and a Monte-Carlo method to calculate the 27 28 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD propagation characteristics of a superconducting interconnect. A quasi-TEM approximation was employed by Cangellaris [22] to calculate the propagation properties of two coplanar conducting strips above an infinite ground plate. Pond et al. [23] analyzed a microstrip structure using a resistive boundary condition for the case where the resistivity is assumed to be a complex quantity and the superconducting strip is assumed to be thin compared to the magnetic penetration depth. More recently, Nghiem et al. [24] used the same method of modeling the conducting strip as a surface current with an equivalent surface impedance approximated for the two cases when the strip is either much thinner or much thicker than the penetration depth. In Refs. [25] and [26], a simple and practical method referred to as the phenomenological loss equivalence method (PEM) is used for characterizing planar quasi-TEM transmission lines with a thin and narrow normal conductor on the order of the skin depth or with a superconductor on the order of the penetration depth. In Ref. [27], Van Deventer et al. used an integral equation approach to calculate the propagation characteristics of high-To thin film superconducting lines at high frequencies. The losses in these lines are evaluated by replacing the superconducting strips by frequency dependent surface impedance boundaries and assuming that the superconducting strips have a large width-tothickness ratio. Recently, Sheen et al. [28] applied a quasi-TEM method for the calculation of the current distribution, resistance, and inductance matrices for a system of coupled superconducting strip transmission lines having a rectangular cross section. More recently, Kessler et al. [29] investigated a coplanar waveguide structure using an elaborate mode matching technique. All of the previously proposed methods except [29] are quasi-TEM and/or restricted by the dimensions of the structure, and none of the previous work accounted for the anisotropy of the superconducting film. In this chapter, a volume integral equation using a spectral domain dyadic Green's function for layered media [30], [31] is formulated and used to analyze different configurations of superconducting transmission lines. This method can be easily generalized to analyze 2.2. THE TWO-FL UID MODEL 29 arbitrary number of coupled strips in different layers without imposing any restriction on the dimensions and electrical parameters of the structure. Using this formulation, the ef- fects of the anisotropy of the superconducting films on planar transmission lines are studied. This spectral-domain volume-integral-equation (SDVIE) method is used to study various microstrip (MS) lines, coplanar waveguide (CPW) structures, and striplines (SL). The complex propagation constant k and quality factor Q for these structures are calculated and compared to measurements. The current distributions are also calculated. 2.2 The Two-Fluid Model In 1957, J. Bardeen, L. N. Cooper, and J. R. Schrieffer presented a theory which successfully explained superconductivity in conventional superconductors [17]. This theory is known as the BCS theory. Despite its success in low-temperature superconductors, the BCS theory fails to explain high-temperature superconductivity. Searching for the theory for high-temperature superconductivity is still a current research area. Nevertheless, the BCS theory does provide a reasonable description of high temperature materials up to certain limits. Because of its complexity, the BCS theory is rarely applied directly for engineering purposes. The classical two-fluid model and London equations [18]provide a good phenomenological description of superconductors, and have been widely used in the engineering community. As shown in Fig. 2.1, the two-fluid model assumes there are two current carriers, namely electrons and superelectrons, in a superconductor. At a given temperature, these carriers penetrate, but do not interact, with each other. The total current is therefore the sum of both normal current and supercurrent, J=J + (2.1) 30 CHAPTER 2. SPECTRAL-DOMAIN VOL UME-INTEGRAL-EQUATION METHOD Jn Js Figure 2.1: The two-fluid model. The normal current Jn obeys Ohm's law J, = al(T)T (2.2) (T- (2.3) where al(T) is given by (T) = = an a (T) a, and a, is the normal-state conductivity at critical temperature Tc. The supercurrent J, obeys the London equations -B a -(A(T)7,) (2.4) = V x (A(T)J,) (2.5) = where A(T) = poA2(T) (2.6) and A(T) is the magnetic penetration depth of the superconductor. In the frequency domain, the two components of the current may be combined and related to the electric field by 2.3. GENERALIZED FORMULATION 31 defining a complex conductivity a,,, J = SCE= (al + ia2) E (2.7) where 1-( 2 T)4 Wo (2.8) o2 and o is the magnetic penetration depth of the superconductor at 0 K. ][n general, the superconducting film can exhibit anisotropic properties as in high-Tc materials [18]. In this case, the complex conductivity is a tensor given by sc(T) = -1 (T) + i 2(T) (2.9) where 1 =-1 F2(T)= o.-A (T) (2.10) and A is a diagonal tensor assuming that the boundaries of the dielectric slab are aligned with the principal axes of the superconducting film. That is, Aa(T) A(T) = 0 0 0 Ab(T) 0 O O (2.11) A,(T) where A (T) = poA (T) and j = a, b, c. In the case of YBa2 Cu 3 0 7_x (YBCO), the penetration depths, along the a- and b-axes, narme:lyAa and Ab, are approximately equal. However, Ac = a,b (2.12) where a can range from 3 to 5 [32], [33]. The normal-state conductivity along the a-b plane is almost an order of magnitude higher than the conductivity along the c-axis. 32 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD Z y Figure 2.2: Electric field generated by current sources enclosed in a volume V'. 2.3 Generalized Formulation Suppose that a volume V' enclosed some current sources J exits in an unbounded free space as shown in Fig. 2.2. The electric field E at r is given by E=i o ,J() vJJ A (2.13) where r, [I + k2VVJ4r - 'l is the dyadic Green function for the unbounded free space with permittivity co and permeability o0.Usually, current sources are carried by conductors or dielectric materials. Suppose 1 that the volume V' encloses a dielectric material carrying current J with permittivity c' + i e" and permeability o. Equation (2.13) is now no longer correct because the medium is no longer a homogeneous free space but an unbounded free space with a piece of dielectric. To find the electric field using Eq. (2.13), the Green's function has to be modified to account for the dielectric. However, it is very inconvenient because a new Green's function has to be derived for every differently shaped dielectric. In some cases where the shape of the dielectric 2.3. GENERALIZED FORMULATION 33 is irregular, it would be very difficult to derive the appropriate Green's function. To overcome this difficulty, we could alternately modify the current sources rather than the Green's function. In the dielectric, the Ampere's law can be written as V x H= - iwe'T = we" - iwe'E (2.14) By purposely adding and subtracting the displacement current in free space, Eq. (2.14) becomes V x H = [we"- iw(e'- Eo)]TE- iwEoE (2.15) Notice that the dielectric material has been mathematically removed and replaced by free space with an equivalent current Jeq = [WE" - iw(e' - 0)] E (2.16) With this concept in mind, the electric field can be calculated using the Green's function for free space and with the current J replaced by J,q. If the dielectric material is a good conductor then Jq J for as long as the conduction current is much greater than the displacement current. In general, both Jeq and E are unknown. Since Jq = ,eqE, an integral equation can be written for T E V', specifically, JlJJ di G(r E = iwyO ) [ffeq()E(f)] (2.17) The method of moments can be used to solve the integral equation. This procedure can be generalized to formulate a system of integral equations for a layered medium with multiple current sources. In Fig. 2.3, current sources of arbitrary geometry are shown embedded in a layered medium. The electric field in layer m is given by Em,(r)= ip 7E '| dr(, ) ( (2.18) where ,n is the permeability of layer n, Vn is the volume in layer n which encloses the current sources Jn, and Gmn is the Green's function with observation point in layer m and 34 CHAPTER 2. SPECTRAL-DOMAIN VOL UME-INTEGRAL-EQUATION METHOD ZL (n) vl ' iJ (1) I~~~~~~~ I -I0 9^ i II, I A,( v · !v 1.L, A'1, (2) · I F-2 L2 83 93 I (3) (N-2) , - E-, F- (N-1) EN- 1 N-2 , RtN-1 -Ilffiealvj (N) EN N Figure 2.3: Geometric Configuration of a layered medium with embedded current sources. 2.4. VOLUME-INTEGRAL-EQUATION FOR MICROSTRIP LINES (0) v//////// --- - -- /7 /1Eo , 35 gob X -- -- 01 El1 , (1) 6i 1 (2) Figure 2.4: A superconducting strip is embedded in layer (0) of a layered dielectric medium. source point at layer n. The dyadic Green's function for layered media can been found in the literature for isotropic media [30], for anisotropic media [34], and for chiral media [35]. Since J,n = anEn for T E V,, N simultaneous integral equations for the electric field can be obtained. The method of moments can as well be used to solve the system of equations. In the following sections, this formulation of integral equations is applied to analyze superconducting planar transmission lines. 2.4 Volume-Integral-Equation for Microstrip Lines In Fig. 2.4, a superconducting strip is shown embedded in layer (0) of a stratified dielectric medium. Each dielectric layer is assumed to be homogeneous and isotropic. The superconducting strip has an anisotropic complex conductivity as given in Eq. (2.9). The structure is uniform along the propagation direction y. The total electric field E(T) in the superconducting strip can be expressed in terms of a dyadic Green's function of the layered medium as E() = iwaoJv where Jeq = [sc + i(Eo - )] E (Goo(,) 7eq(f) (2.19) ac E and V' is the volume occupied by the supercon- 36 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD ducting strip. The dyadic Green's function Co(T,V'), where the observation point is in layer (0) and the source is also in the layer (0), can be expressed in the spectral domain as [30], [31] T zz k(- d -n) dko )' ik(00 - go o(, (2.20) z,) where k = k + ky; F = x + y; = x' + y' (2.21) , z, z') is the F ourier transform of The first term in Eq. (2.20) is the source dyadic and o(k= the principal value part of Goo(, r ') (see Appendix A). We assume that the electric field E(T) existing in the strips has x:, y, and z components and propagates in the y-direction with propagation constant kyo. Thus, E( ) can be expressed as ~E(r) = eikyoE(X, ) = eikyoY[~Ex(x,z) + yEy(x,z) + iE,(x, z)] (2.22) Substituting Eqs. (2.20) and (2.22) into Eq. (2.19), we can get E(x, ) + iwIpo k-- sc]z. E(x, z) = ko2 - o J/ dk ek dx' dz' e-ik,'zo(k .(x', kyo, ziZ) z') (2.23) where S' is the cross-sectional area of the superconducting strips, and [sc]~z is the zz th element of asc, and (x, z) E S'. This vector integral equation is then solved using a Galerkin's method to find the complex propagation constant of the superconducting structures. In the formulation of integral equations for microstrip lines or striplines, the ground plates of the structure can be either treated as dielectric layers with a dielectric constant %e= ia,c/w or as equivalent volume sources. Although the later approach rigorously accounts for the finite width of the ground plates, the former approach is employed to simplify the problem. For coplanar waveguide structure, both the signal strip and ground plates are treated as equivalent volume sources since both are embedded in the same layer. 2.5. METHOD OF MOMENTS 37 tg Figure 2.5: Superconducting microstrip line. 2.5 Method of Moments In this section, without loss of generality, we shall apply the moment method for the solution of Eq. (2.23) to the case of a microstrip line with a superconducting strip of finite thickness above a single dielectric layer and a perfectly conducting ground plate. As shown in Fig. 2.5, the width and the thickness of the strip are assumed to be 2w and t, respectively. The dielectric layer is assumed to be isotropic with permittivity r,, permeability o0, and thickness d. To apply the method of moments, a 2M x N nonuniform grid is imposed on the cross section of the superconducting strip as shown in Fig. 2.6. To minimize computation time and memory requirements, the division of the strip is determined so that the grid is smaller near the edges where the current density is larger and is changing most rapidly as a function of distance into the strip. The dimensions of the smallest grid element are first chosen to be a fraction of the magnetic penetration depth A. This smallest grid element is AM wide in the x direction and rl = TN high in the z direction. The size of each patch is then equal to a multiplier times the patch size of the smaller neighbor. The multiplier is numerically determined after the number of patches is decided. In this way, we have adequate resolution near the edges while the computation time and memory requirements are reduced by using larger grid elements in the center of the superconducting strip where the current density is 38 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD Fv r AM 1 1 A A AM Figure 2.6: A nonuniform grid is imposed on the cross section of a superconducting strip. nearly uniform. An appropriate set of local basis functions as shown in Fig. 2.6 is defined based on the grid to represent the electric field in the superconducting strip. Pulse basis functions are first used to describe the three components of electric field inside the conductor; compared to previously published data, however, the results are found to be very different. Similar findings have been reported in [36]. The inaccuracy caused by using the pulse basis functions for the transverse field components is due to the singularity in the charge distribution associated with the pulse functions. Thus, roof-top basis functions are used to represent the x and z components of the electric field, and the y component is represented by pulse basis functions. The symmetry of the geometry is used to reduced the number of basis functions. The components of the electric field are expressed in terms of the local basis functions P,(x) and Qn(z) as M E(z, z) = E m=l n a,P'(xa)Qn(z); a = x, y, z (2.24) 2.5. METHOD OF MOMENTS 39 where amn are the expansion coefficients, and the sum over n is from 1 to N for the x and y component and from 0 to N for the z component. The explicit forms of the basis functions are [(1+ Am); Xm-Am,X P0(X) = .4(1 x -l < Xm ) ; Xm<IXI <Xm +Am+ (2.25) ;otherwise 0 where the + sign is for x > 0, and the - sign is for x < O0 PY (X) = Pm(x) xm -Am < otherwise Qn(z) - - I < Xm (2.26) (z) Q[(z) { 1 -{ ; 1 + 0 Qn(z) (2.27) otherwise - zn < < zn ; Z Z Zn ; n < Z < n + Tn+l (2.28) otherwise 0 Letting P(ks,) be the Fourier transforms of Pm(x), where a = x, y, z and m = 1,2, * , M, we have Px (kx)= - | dx eikxpm(x) = 7r i 1 [sin kr(xm - Am) - sin kXm] + ,, Pm(k.) = m 1 [sinkxm+l - sinkxm] } (2.29) Pm(kr) _L dx e-ikzxPm(x) = - 2 rk- - Am sin x 2 P,(-kx) = cos k(xm) (-kx) A 2 ) (2.30) 40 CHAPTER 2. SPECTRAL-DOMAIN VOL UME-INTEGRAL-EQUATION METHOD Substituting Eqs. (2.24), (2.29), and (2.30) into Eq. (2.23), we have M a [(1 2 + Qn(z) o dz'g"' (k kz 11dkx e ik=2x ,zc]pp -o =x'y'z 2 sC]() P.'W +.~ zw]2 C'=-,yz m=1 n o010 ) P(k, 0 Qn(z')] =0 (2.31) where g(k, ky, z, z') and b,z is the Kronecker kyo, z, z') is the acpth element of o(k delta function. Applying Galerkin's method, we choose & Pp'(x) Q'(z) as the testing functions for the Taking the inner products of the testing functions and Eq. (2.31), we integral equation. obtain 3MN + M equations. Integrating these equations over the x-z plane, we have O=X,Y,Z Z-a-1mn m= n [J dk ; P7 (-kx) P!(kx) af'(k)+ smn] =0 (2.32) where 1 W -- Xpqmn dx w1o -W 1 3 wyo 1q,nq (p,m [2(nm + Am+l)] + p,m-1Am + sp,mAp} 1 y d P () P ) Qx() Qx(z ft w ldl(z Pp9() Pmyl Xpqmn 7q(Z n z) 2 = z Xpqmn (2.34) 6p,mTqAp -q,n t JW = + 1 1 3 wyoo (2.33) 2,[L 0T 'O +k2 Iz · )-w sc]zz 5 dx p,mAp dz Ppz(x) P(x) QQ(z)Q(z) {6 q,n [2(rn + Tn+l)] + cbq,n-lTn + q-l1,nTq} (2.35) 2.5. METHOD OF MOMENTS 41 and J J t t ][ |dz' 0 [,c],a 1 oa~o = + +I dz Q (z) gooP(k,kyo,z > z') Q(z') dz| q pLjd dz' |' n dz Q(z) goo(k. kyO, Z <z) Q(z' go(k, dz q 900\,zt kyo, n~yO, ·e > z') Q(z') n\~C~/ ""0Q'(z) dz' ; q> n ) ; < q ;q = n The limit of the integral in Eq. (2.32) has been reduced to 0 < k < oo by utilizing the symmetry properties of the dyadic Green's function, the basis functions, and the testing functions. Equation (2.32) can be written in matrix form as B B B -Y B B B A .R -W· =0 (2.37) A The elements of A are the expansion coefficients for the basis functions. Each entity B in Eq. (2.37) is a submatrix. The explicit form of the elements is B2 = j dkAPp(-kx) P(k) 21(k) + 6 ,Xqmn (2.38) Because of the complexity of the integrands in the above equations, the integrals are to be carried out numerically. There are poles in the Green's function associated with various modes. The correctness of the solutions depends on the choice of the integration path. In a three dimensional problem, integrations in the k-plane, where k = k + k2, are necessary. The Sommerfeld integration path, as shown in Fig. 2.7, gives the proper solutions which satisfy the radiation condition. For lossless problems, the poles and the branch points are on the real axis. If the conductors and/or the dielectric are lossy, the poles and the branch points are above the real axis for positive Re{k,}, and are below the real axis for negative Re{k,}. For two dimensional problems, integrations are only needed in the k,-plane. In the ks-plane, the poles and the branch points are on the imaginary axis for lossless problems 42 CHAPTER 2. SPECTRAL-DOMAIN VOL UME-INTEGRAL-EQUATION METHOD Branch Cut Im{k s} A Surface Wave Pole Re{ks} - k 1 . a- l l * - - - ko SIP Surface Wave Pole Branch Cut Figure 2.7: Sommerfeld integration path in k-plane. Im{kx} Surface Wave Pole Branch Cut _! 01 Integration Path _ I e Surface Wave Pole Branch Cut Figure 2.8: Sommerfeld integration path in ks-plane. Re{kx} a- 2.5. METHOD OF MOMENTS 43 and are near the imaginary axis for lossy problems. A proper integration path can be taken along the real axis as shown in Fig. 2.8. The matrix equation for the propagation constant k can be solved by setting the de- terminant of the coefficient matrix in Eq. (2.37) equal to zero, i.e., det {B(w, k,o)} = 0 (2.39) The real part of kyo is the phase constant and the imaginary part is the attenuation constant. Once the propagation constant is found, the the electric fields/currents are obtained by searching for the eigenvector of the matrix B corresponding to the "zero" eigenvalue. To calculate the characteristic impedance Zo of a transmission, one needs to determine the propagating power. Because of the finite volume of the superconducting strips, it is not a easy task to calculate the power guided by the structure. However, the dissipated power can by easily calculated from the electric field inside the superconductor. The resistance per unit length R of the transmission line is given by iJS F12 dA R =ff 2 (2.40) c7c8JjTdA where S is the cross section of the superconductors. By neglecting the dielectric loss, the characteristic impedance Z, of the transmission line can be expressed in terms of the resis- tance R and propagation constant kO, specifically o 2 Im{ kyo} Re{kyo (2.41) Since both R and Relkyo} are very sensitive to the distribution of the electric field, one has to be careful in applying Eq. (2.41) to calculate Zo. In some cases where the electric field changes very rapidly inside the conductor and/or where the loss of the transmission is very small, the accuracy of the impedance given by Eq. (2.41) may be unacceptable. transmission lines with normal metallization, Eq. (2.41) has found to be quite reliable. For 44 CHAPTER 2. SPECTRAL-DOMAIN VOL UME-INTEGRAL-EQUATION METHOD Table 2.1: Parameters for the microstrip lines (all dimensions are in tlm and the impedances are in Q). Nb YBCO Structure MS86 MS50 MS15 2.6 Tc T 9.25 K 4.2 K 77 K 90 K 2w 20 181 1800 t 0.4 0.4 0.4 A(O) al (T.) 0.07 m 3000 S/#m 0.22 gm 6.56 S/tm tg 0.4 0.4 0.4 Zo -86 Z50 ~15 Results and Discussions Microstrip Line The configuration of the microstrip (MS) structures studied are shown in Fig. 2.5, and their dimensions are listed in Table 2.1. The parameters used for Nb and YBa 2 Cu307-_ (YBCO) listed in Table 2.1 are consistent with the values given in [9], [28]. The transmissionline geometries considered here have a 508-pm-thick LaA10 3 substrate with Er = 23.5 and tan 6 = 2 x 10 - 6 at 4.2 K. In the cases studied, the loss in the transmission-line structures is dominated by conductor loss. In the calculations for MS lines, the discretizations used for the strips are 18 x 5, 22 x 5, and 26 x 5 for MS86, MS50, and MS15, respectively, with the smallest patch size in both x- and z-directions equal to one-sixth of the penetration depth of each superconductor. Figure 2.9 shows a comparison between the calculated and measured effective dielectric constants fEf = (Re{kyo/ko})2 for the three Nb MS lines. The measured Ef is extracted from the resonant frequency f of the Nb half-wavelength MS resonator using the mode number and the physical length of the resonator. Because of the capacitance of the open ends, the effective length of the resonator is slightly longer than its physical length by 2AL, which is calculated using the expression in [37]. 2.6. RESULTS AND DISCUSSIONS O 0 22 C co U, 4 9 A 45 MS86 - mea. MS50 - mea. MS15- mea. '- 'MS86 - cal. - MS50 - cal. I I II MS15- cal. _ _ - C O O i 18- ._ ' 16- a) _-~~~ El' --[3- --El---3 -> 14- 9r._--- - _ a12 X 12 0 I 5 I 10 Frequency (GHz) I 15 i 20 Figure 2.9: Effective dielectric constant of Nb microstrip transmission lines. The calculated quality factors Q = Re{kyo}/2Im{kyo} of the three Nb MS and the two YBCO MS resonators are shown in Fig. 2.10. The measured results on the Nb MS resonators show reasonable agreement with calculation. The discrepancies can be easily accounted for by changes in al and the penetration depth A of Nb from film to film. The MS line with the wider strip achieves higher Q because of a lower current density and therefore lower loss. The Q of the YBCO resonators, with the parameters given in Table 2.1, is nearly an order of magnitude lower than that of the Nb resonators because of the larger penetration depth of YBCO. The current density in the signal strips of the MS lines is shown in Fig. 2.11, for a total current I of 1 A. It is clear that the average current density in the widest line MS15 is nearly two orders of magnitude lower than that in the narrowest line MS86. However, the peak values are only different by slightly more than one order of magnitude. Since the Q of Nb MS15 and MS86 also differ by only an order of magnitude, it is clear that the magnitude of 46 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD 106 ' ' ' I O Nb MS86- mea. O Nb MS50- mea. Nb MS86 - cal. Nb MS50 - cal. Nb MS15- cal. YBCO MS86 - cal. YBCO MS50 - cal. - - I ........... [] 'El%.. 105 - C-· iLU _- - l _, a io4 -~~·0 10 3 I 100 I I I I i I ! I I I I 100 10 1 I Frequency (GHz) Figure 2.10: Quality factor of superconducting microstrip resonators. 1013 . I I I I I I Nb MS86 - NbMS86 NbMS15 1012 10 m I=1A ---Nb MS50 E I *- YBCO MS86_ - NbMS50 - YBCOMS86 - NbMS15 11 _ I ii...................... i _ _ _ _ _ _ , I __---/ _ _ _ 1010 I _ 109 - I I 0.2 0.3 . _. . I II 0.4 _, _ _,l l _d I 0.5 I I II 0.6 0.7 X/W I 0.8 d_, _ I 0.9 1 Figure 2.11: Longitudinal current density at the bottom of the signal strips of microstrip transmission lines. 47 2.6. RESULTS AND DISCUSSIONS I buffer (0) 11 layer \ YBCO tb$ _ _ 2W _ _ _ _ _ 4 _,__..________ mh.x (2) d (3) it,,,,,,,,,,e,,,,,,,,,/ dielectric conducting '\perfectly X ground plate Figure 2.12: Superconducting microstrip transmission line with a thin dielectric buffer layer and a perfectly conducting ground plate. the current density near the edge of the strip determines the Q of the structure more than the average current density. The current density at the edges of the YBCO microstrip lines is lower than that in the Nb structures because of the larger penetration depth of YBCO. Microstrip Line with Buffer Layer A requirement in fabricating high-quality high-T0 superconducting films is a good lattice match with the substrate and chemical compatibility with the substrate material. A thin dielectric buffer layer as shown in Fig. 2.12 can be used to provide a good lattice match to the superconducting film and to physically separate a chemically reactive substrate material from the superconducting film. The procedure described in the Section 2.4 can be applied directly to the problem of a superconducting microstrip with a thin dielectric buffer layer. The effective dielectric constants and the attenuation constants of microstrip lines with and without buffer layers are presented in Fig. 2.13. The buffer layer is assumed to have a thickness tb = 100 A and a relative dielectric constant Eb = 500 at 77 K. Since we are 48 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD c-' C 6.45 0.08 0.07 c- o 6.40 0.06 m co 0.05 .ra,) 6.35 0.04 o 0.03 c cD .) 6.30 0.02 A 0.01 6.25 0.0 0 2.0 4.0 6.0 8.0 10.0 Frequency (GHz) Figure 2.13: Effective dielectric constant and attenuation constant of a superconducting microstrip line with and without a thin dielectric buffer layer. (2w = 160 m, t = 0.3 m, d = 500 /m, e = 10, tb = 100 A, Eb = 500, A(OK) = 0.2 m, al(77 K) = 1.0 S/Ym, T = 93 K, T = 77 K, and AX= 5 Aa,b-.) 2.6. RESULTS AND DISCUSSIONS 49 focusing only on the loss due to the superconducting strip, the buffer layer is assumed to be lossless. In the calculation, the smallest grid size is chosen to be A/6, where M and N are respectively 11 and 5. The results show that the effective dielectric constant of the microstrip line is increased by less than 0.5% when the thin buffer layer is used, despite the large relative dielectric constant of the buffer layer. The losses of the microstrip lines with and without the buffer layer are approximately the same. Anisotropy of High-To Superconducting Films High-To superconductors, such as YBCO, are generally anisotropic. To study the effect of the anisotropic properties of the superconductors, two superconducting microstrip lines with different dimensions are investigated. Both lines are assumed to be anisotropic where Ac = 5 a,b. The c-axis of the superconducting film is assumed to be in the z-direction. The effective dielectric constants eff and the attenuation constants for the two microstrip configurations are calculated for isotropic and anisotropic superconducting films. The results are shown in Figs. 2.14 and 2.15. For these microstrip configurations, no noticeable difference due to the anisotropy properties of the c-axis-oriented superconducting films is found. Since the z-component of the current is very small compared to the other two components, the effect of the anisotropy is suppressed. Although only the effects due to the anisotropy of a c-axis-oriented superconducting film are studied, the method presented can treat cases where the principal axes of the YBCO crystal are tilted with respect to the coordinate axis. Stripline with Air Gap Striplines are commonly used in microwave circuits as transmission lines and resonators. Epitaxial growth of multilayer dielectric structures on top of YBCO is a challenging technical problem. An alternative way to fabricate YBCO stripline is to press a superstrate onto a YBCO microstrip using a spring-loaded package [11]. However, using this method to 50 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD 3.60 0.8 0.7 oC 3.56 0.6 0.5 ' 3.52 .g 0 3.48 0.4 O 0.3 = 0.2 3.44 0.1 a) w E 3.40 0 0 5 10 15 20 Frequency (GHz) Figure 2.14: Effective dielectric constant and attenuation constant of an isotropic and an anisotropic superconducting microstrip line. (2w = 2 gm, t = 0.5 ,m, d = 1 lm, e, = 3.9, A(0 K) = 0.14 C 0oO m, crl(Tc) = 0.5 S/jm, T, = 92.5 K, T = 77 K, and A, = 5 6.50 0.06 6.45 0.05 a,b.) E 6.40 0.04 m 6.35 0.03 0 6.30 0.02 =: .r a) 0 a w 0 a) II a) 6.25 0.01 6.20 0.00 0 2 4 6 Frequency (GHz) 8 < 10 Figure 2.15: Effective dielectric constant and attenuation constant of an isotropic and an anisotropic superconducting microstrip line. (2w = 160 m, t = 0.3 m, d = 500 m, e = 10, ,(0 K) = 0.2 m, a1(77 K) = 1.0 S//m, T, = 93 K, T = 77 K, and A, = 5 ,b.) 2.6. RESULTS AND DISCUSSIONS (-2) 51 . ~·////////////~//-//A// (-1 ) d Z YBCO i~~~ dielectric "'"""""""-"m.`-'rm (0)_ (1) . d die I"'t' t e2Wdielectric __ x fto- +~~~~~~~~~~~~ (2) perfectly conducting ground plate Figure 2.16: Stripline transmission line with an air gap. Both ground plates are assumed to be perfectly conducting. fabricate stripline introduces an air gap into the structure as shown in Fig. 2.16. The effect of the presence of such air gaps on the propagation characteristics is investigated. This analysis takes into account the thickness of the superconducting film and can handle air gaps of arbitrary dimensions. The formulation of the integral equations for the stripline problem shown in Fig. 2.16 is basically the same as the formulation given in Section 2.4 The electric field inside the strip can be expressed as E(f) = iWoLu 0 l, diG 00 (,) E E(') (2.42) Since the upper half space is bounded by the superstrate and the ground plate, the Fourier transform of the principal value of oo(, 0 ') includes the terms that account for the reflection from the superstrate (see Appendix A). The procedure of obtaining the matrix equation using basis functions and the Galerkin's method has been stated in the previous section. To investigate the effects of an air gap in a stripline structure, the effective dielectric constant and the attenuation constant for two superconducting striplines with strip thickness 52 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD Table 2.2: Parameters for the Coplanar Waveguides (all dimensions are in impedances are in Q). Nb Structure CPW50-20 CPW50-50 CPW86-20 T: T 9.25 K 4.2 K 0.07 pm (0) 2w 20 50 20 t 0.4 0.4 0.4 s 35 87.5 355 m and the al (T) 3000 S/pm wg 600 600 600 Zo .50 ~50 ,86 of 1.0 and 0.3 m, respectively, are calculated. The thickness of the air gap is assumed to be the same as the strip thickness and the width of the strips is assumed to be 120 pm. The results are plotted in Fig. 2.17 together with the results obtained for striplines with no air gap. While the effective dielectric constant is decreased by a small percentage because of the existence of an air gap, the effect of the air gap on the attenuation constant appears to be negligible. Since the kinetic inductance of a superconducting stripline increases as the thickness of the center strip decreases [28], the effective dielectric constant of the stripline with a thicker superconducting film is relatively small compared to the stripline with a thinner superconducting film. However, both striplines with no air gap have an effective dielectric constant that is larger than the relative dielectric constant of the substrate (r = 23.5), illustrating the effect of kinetic inductance for these geometries [38], [39]. Coplanar Waveguide The configuration of a coplanar waveguide is shown in Fig. 2.18 and the parameters of the structures used in the calculation is listed in Table 2.2. In Fig. 2.19, the calculated es values for three Nb CPW geometries are plotted with the measured values for two of the structures. The measured er is extracted from the resonant frequency of the Nb halfwavelength CPW resonator without corrections for end effects. The deviation (< 4%) of the 2.6. RESULTS AND DISCUSSIONS ^f -_ I c I I I I I 53 a I I I I I I I I I I I I 23.7 - 00 23.6 - - o 23.5 - .0------ 0---E ---------- 0 a) 23.4 - a) 23.3 - t O 23.2 - line 1 - line 2 -- e--line 3 23.1 - - --. ._- o 0 u o u · Z;.U . . I . . . . . . .. 0 I, , 1 . 2 4 line 4 . . . _ I . 6 . . 8 ._ 10 Frequency (GHz) 0.25 -e-- 0.20 m o 0.15 -- _ line 1 line 2 --O-line34 -- ~--line / / / _ C 0 :3 0.10 C c- 4- 0.05 0.00 0 1 2 3 4 5 6 7 8 Frequency (GHz) Figure 2.17: Effective dielectric constant and attenuation constant of superconducting striplines with (lines 1 and 2) and without (lines 3 and 4) an air gap. (2w = 120 jm, d = 500 im, r, = 23.5, A(77 K) = 0.2 ,um, o-(Tc) = 0.1 S/ilm, Tc = 90 K, T = 77 K, and A, = 5 A,b. Line 1: t = 1.0 jm; line 2: t = 0.3 pm; line 3: t = 1.0 #m; line 4: t = 0.3 jim.) 2. SPECTRAL-DOMAIN VOL UME-INTEGRAL-EQUATION METHOD 54 CHAPTER Figure 2.18: Configuration of a coplanar waveguide. 14 C 4- C O 0 - O X - -- CPW50-20- mea. CPW50-50 - mea. CPW50-20- cal. X CPW50-50 - cal. 13 - ------ CPW86-20 - cal. 0 ., 0 ~ a) {D 0 I I· I - 12 - - C) ~ ~ x x X X CIa) 11 - I 0 i II 5 10 15 _ 20 Frequency (GHz) Figure 2.19: Effective dielectric constant of Nb coplanar waveguides. 2.6. RESULTS AND DISCUSSIONS 55 I10 3 CPW50-20- mea. O _V \-rA - ,rvv3U-3U- mea. ;PW50-20 - cal. 'PW50-50 - cal. ,PW86-20 - cal. 104 - % 0 X 0% 0 103 I ' l l I - L I II I 1 10 100 Frequency (GHz) Figure 2.20: Quality factor of Nb coplanar waveguide resonators. measured fes's from the calculated result might be eliminated if corrections for end effects were made on the measured eff's. The dependence of es on frequency is very similar for the measured and calculated results. In the calculations, the number of patches in the signal strips used is 18 x 5 for CPW50-20 and CPW86-20, and 20 x 5 for CPW50-50. For the ground plates, 7 x 5 patches are used in all the calculations. The smallest patch size used is one-sixth of the penetration depth. The Q of the three Nb CPW structures are illustrated in Fig. 2.20. By increasing the width of the signal strip by 2.5 times, the Q for CPW50-50 is higher than that for CPW50-20 by approximately a factor of 2. The Q of a CPW resonator can also be increased by enlarging the strip-to-ground-plate separation, as demonstrated in the calculated results for CPW50-20 and CPW86-20. The difference in Q results from the difference in the current distribution in the superconducting strips. Although the current densities in the signal strips of CPW50-20 and CPW86-20 are nearly identical, as shown in Fig. 2.21, the wider strip-to-ground-plate separation in CPW86-20 yields lower peak current 56 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD 1013 -. . I I - -- I I ! I I I I ! l I m I I I I r II- I=IA CPW50-20 CPW50-20 (CPW86-20 CPW50-50 10 - CPW50-50 CPW86-20 ------.I 12 '10 F sr' 1- 10 1010 0.2 I I I I I I I I 0.3 0.4 0.5 0.6 I I 0.7 I I 0.8 I 0.9 I 1 X/W Figure 2.21: Longitudinal current density at the bottom of the center strips of Nb coplanar waveguides. density in the ground plate, as shown in Fig. 2.22, which gives rise to a lower attenuation constant. 2.7 Summary A spectral-domain volume-integral-equation method has been developed using a dyadic Green's function for layered media to analyze superconducting transmission lines. The thickness and the anisotropy of the superconducting film are rigorously considered. This method allows accurate investigation of the various physical and geometrical effects on the characteristics of superconducting transmission lines. Calculated results have been presented for standard microstrip lines, microstrip lines with a thin dielectric buffer layer, striplines with an air gap, and coplanar waveguides. The calculated ef and Q of the Nb MS lines agree with the measurements. A thin 2.7. SUMMARY 57 I 1013 I I - -- 12 ---- CPW50-20 CPW50-50 101 I=1A 10 ' 5 10 4 0.001 0.01 0.1 1 X/W Figure 2.22: Longitudinal current density at the bottom of the ground plates of coplanar waveguides. dielectric buffer layer with a high dielectric constant (Er = 500) only slightly modifies the dielectric constant of a superconducting microstrip transmission line. This result indicates that the effects of a thin buffer layer made of dielectric with low dielectric constant such as MgO (Er = 10) can be neglected. The effects of the anisotropy of the superconductor on the characteristics of the transmission line are found to be negligible when the superconducting film is assumed to be c-axis oriented. The effective dielectric constant of a stripline is decreased by a small percentage when an air gap is present. The effect of the air gap on the attenuation constant appears to be negligible. The deviation (<4%) of the measured eff for Nb CPW resonators from the calculated values would be reduced if the corrections for end-effect capacitance were made on the measured eff. The current distribution is more uniform in the YBCO structures than in the Nb structures owing to the larger penetration depth of YBCO. Theoretically, the SDVIE method can be generalized to analyze arbitrary number of 58 CHAPTER 2. SPECTRAL-DOMAIN VOLUME-INTEGRAL-EQUATION METHOD conductors embedded in layered media as shown in the previous section. Both finite volume and finite conductivity of the conductors are rigorously accounted for. Because this method is very numerically intensive, it requires long computation times. To be incorporated in design tools, a more efficient and yet accurate method must be developed. The SDVIE method is used as a basis and reference for the development of more efficient methods. Chapter 3 Equivalent Surface Impedance Approach 3.1 Introduction In Chapter 2, a spectral-domain volume-integral-equation (SDVIE) method has been presented to analyze superconducting microstrip lines and striplines. Several other authors have also proposed full-wave analyses of superconducting planar transmission lines on isotropic substrates [23], [24], [29]. Kessler et al. [29] have investigated a coplanar waveguide structure using a mode matching technique. The SDVIE and the mode matching methods rigorously account for the finite volume of the superconductors, yielding accurate characterization for the kinetic inductance and loss. However, both of these methods are computationally inefficient. Pond et al. [23] have used a resistive boundary condition to analyze microstrip structures with very thin metallization. A similar method has been used by Nghiem et al. [24] to study microstrip lines and striplines for the cases when the superconductor is either much thinner or much thicker than the penetration depth. Both Pond and Nghiem have used the surface impedance derived for a very thin, infinitely extended plate to replace a superconducting strip. Nghiem has also considered the case of using the surface impedance for a very thick, infinitely extended plate to replace a superconducting strip. Because of the different field behaviors in a superconducting strip compared to an infinitely extended plate, 59 CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 60 the loss and kinetic effect of the superconducting strip are not correctly determined. Pond has pointed out that the singular behavior of the currents at the edges of an infinitely thin strip might increase the kinetic inductance contribution resulting in an enlarged propagation constant. In this chapter, an efficient full-wave method is developed to calculate the effective dielectric constant, attenuation, and characteristic impedance of superconducting microstrip lines and coupled lines on anisotropic substrates. The case of M-plane sapphire is considered in which the optic axis of the substrate is in the plane of the substrate at an arbitrary angle with respect to the propagation direction. To increase the efficiency of the method, the superconducting strips are transformed into infinitely thin strips using an equivalent surface impedance (ESI) concept. These equivalent surface impedances account for the loss and kinetic inductance of the superconductors. A 2-D dyadic Green's function is then used to formulate an integral equation for the surface current in the strips. Galerkin's method with entire-domain basis functions is used to solve for the complex propagation constants. The characteristic impedances are then determined using the power-current definition. To verify the validity of the ESI approach, numerical results for superconducting microstrip lines on isotropic LaAlO0 3 are compared to previously published measured data and results calculated by the SDVIE method. The effective dielectric constants calculated for perfectly conducting coupled lines on sapphire show good agreement with the results by the finite-difference time-domain method. This efficient ESI technique is then used to study the effects of the optic axis orientation and the strip width on the characteristics of single and coupled superconducting microstrip lines on M-plane sapphire. The effects of the line separation and operating temperature on the coupled lines are also investigated. By utilizing the ESI concept rather than the more rigorous SDVIE method, the computation time is reduced by nearly two orders of magnitude. 3.2. EQUIVALENT SURFACE IMPEDANCE 61 A A _ IIx w F~~ ' l 4 h Figure 3.1: A superconducting microstrip line. 3.2 Equivalent Surface Impedance A superconducting microstrip line with thickness t is shown in Fig. 3.1. To implement an efficient method, an equivalent surface impedance Z, is used to transform the superconducting strip with a finite thickness into an infinitely thin strip. Since the fields and currents in a superconducting strip behave differently from those in an infinitely extended superconducting plate, the surface impedance derived for an infinite half-plane superconductor or for parallel plates [40] is not suitable for the transformation. Instead, Z, should preserve the power dissipated and stored in the superconductor. Suppose the thickness of the superconducting strip is on the order of the penetration depth A or less, then the power associated with the magnetic field can be neglected. The power conservation equation can be simplified to J z. IJs, 2 dx = 1 I IJ0 )2 dx dz (3.1) where J,y is the y-component of the surface current J in the infinitely thin strip, a is the complex conductivity of the superconductor, and j(o) is the y-component of the volume current in the superconducting strip. Both J(O)and J,y are normalized to give a unit current. The simple two-fluid model [18] has been used to describe the complex conductivity ac with U = + i/(WioA 2 ). CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 62 Because of the edge conditions, the surface current J,y, is infinite at the edges of the strip [41], [42]. The surface current for a single infinitely thin strip in homogeneous medium [43] can be used as the first-order approximation for J,,, specifically J.,y cX, (3.2) J/1 (x/w)2 However, because the y-component of the electric field (Ey = ZJ,,y) is finite at the edges, Z, should cancel the singularity of J,,, at the edges. Since Ey << Es and Ez for quasi-TEM propagation, we can assume a uniform distribution of Ey across the strip without introducing significant error. Based upon these assumptions, the equivalent surface impedance takes the following form: Zs(x) = Z 1 - (x/w)2 (3.3) j t fWi IJ)dxdz (3.4) where = The volume current J() remains nearly frequency independent as long as the penetration depth A is much less than the skin depth S. When the strip is thin and the substrate is thick, 0 ) can be well approximated by the current in an isolated thin strip. However, the exact J? distribution of current cannot be put in a simple analytic form. An approximate solution is derived in the next section. 3.3 Current Distribution in Superconducting ThinFilm Strips London equations and the two-fluid model [18]give a phenomenological description of the currents and fields in superconductors. Based upon this classical theory of superconductivity, the problem of the steady-state current distribution in a superconducting thin film has been discussed by several authors [44]-[47]. Cooper [44] and Marcus [45] suggested solving the 3.3. CURRENT DISTRIBUTION IN SUPERCONDUCTING THIN-FILM STRIPS 63 t W -W Figure 3.2: Cross section of an isolated superconducting strip. problem by formulating an integral equation for the current, but only numerical solutions can be obtained. While Rhoderick and Wilson [46] presented an approximate solution for the case in which the thickness of the film is very thin compared to the London penetration depth, most applications involve films with a thickness either greater than or comparable to the penetration depth. A more general closed-form solution has been proposed by Shadowitz [47]. However, we will show that Shadowitz's solution is incorrect because of improper assumptions made in the derivation. We present here a closed-form expression for the current distribution in an isolated strip made from a superconducting thin film. This formula is valid for strip thicknesses less than a few penetration depths. Since the penetration depth is not a function of frequency, the current distribution remains frequency independent as long as the penetration depth is much smaller than the skin depth. 3.3.1 Approximate Solution for the Current Distribution Our goal is to find an expression for the steady-state current flowing in a superconducting strip of infinite length as shown in Fig. 3.2. The width and thickness of the strip are assumed to be 2w and 2t respectively. The origin of the coordinate is taken to be at the center of the cross section with -w < x < w and -t < y < t. The currents and fields inside the CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 64 superconducting strip satisfy the spatial distribution governed by V2 - V 2 J= VB= -B -V2- (3.5) J where A is the London penetration depth. A general solution for the axial current is given by J,(x, y) 2 + (atn/)2) Jzxoy) -anoax/cosh(yV(1/A) = an cos(anx/w) n=o cosh(tj/(1/)A)2 + (an/W)2) + ] bn + Z bn cos(any/t) n=o cosh(x\(1/A)2 + (a'n/t) 2 ) cosh(wV(1/A) 2 + (a/t) t2)(3.6) 2) where an and bn are constants determined by the boundary conditions, and an -= n7/2. To determine the expansion coefficients an and bn, one needs to find the solutions of the Laplace equation for the field outside of the superconducting strip, and then to match the boundary conditions. Because of the rectangular cross section, this is considered to be a formidable task. Even if one manages to solve the problem, the solution is very likely to be a slowly converging series. In Ref. [47], Shadowitz assumed a simple solution to Eq. (3.5) for the axial current Jz(x, y) = J cosh(x/A) + J2 cosh(y/A) (3.7) The ratio of J1 /J2 was then determined by minimizing the kinetic energy in the supercon- ducting strip, Uk = I rw rt J-wJ-t - 12 J * A dy d = J- / -t 2 loA2'J2 dy d (3.8) As noted by Shadowitz, the resulting J 1 /J2 is practically zero. This solution suggests that the current in a superconducting strip is nearly uniform across its width. In reality, however, the current has a strong spatial dependence across the width [45], [46]. The failure of Eq. (3.7) arises from the energy minimization process, in which only the kinetic energy is considered. The kinetic energy is minimum when the current is uniform and therefore J1 /J 2 is practically 3.3. CURRENT DISTRIBUTION IN SUPERCONDUCTING THIN-FILM STRIPS 65 zero in Shadowitz's expression. To obtain the correct current distribution in a strip of finite width, the total energy given by u=L- 2+ [2 - oA2J172] d (3.9) must be considered. Again, because of the rectangular cross section and the sharp corners of the strip, the magnetic energy outside of the superconducting strip is very difficult to calculate. It is extremely difficult to obtain an analytical solution for the current in a superconducting strip. Therefore, we have studied the numerical solutions generated by the modified Weeks' method [28]. We have found a closed-form expression for the current distribution, that fits the numerical results well, specifically cosh(y/A)) [Ccosh(x/l) Z(y) 1 - cosh(x/12)/ cosh(w/12 ) 1-(X/W)2 cosh(w/11) -lcosh(t/A) +J2 csh(x/A) (3.10) cosh(w/A) where J2 1.008 Jx cosh(t/A) C = (0.506 w/AlX 4/A - 0.08301A/Al /I-iA.7 11 = A2A/A, 12 = 0.774A2 /A1 + 0.5152A and AX = A 2 /2t is the transverse penetration depth. This formula has only been tested for A/Al > 1. Equation (3.10) breaks down when the strip thickness becomes large compared to A and its limit is determined by the expression for J 2 /J. When A/Al is greater than 6.9, J 2 /J1 becomes a complex number. As suggested in Ref. [46], the axial current J at the center of the strip has the functional form of [1 - (x/w) 2]- 1 / 2 . In Fig. 3.3, the current distribution CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 66 I I 101 I I I I I I I I I I I I numerical o Eq. (3.10) x' = 0.085 Os 10 _ _- x -,, ..- v x' V_ 3 81 "- I II .L .- 31 4 - 10-1 N 4I-' . -- ~ -- x'= 250 x'= (w - x)/X 10 -2 I I I I I I I I ~~~~~~~~~~~~~~~~~~~~~~~~~I I I I II I I 0.05 0.1 0.15 I -0.2 -0.15 -0.1 -0.05 I 0 0.05 (m) 0.1 0.15 . _ 0.2 Figure 3.3: Current distribution in an isolated superconducting strip. Comparison is made between the closed-form expression Eq.( 3.10) and the results generated by the modified Weeks' numerical method [28] (w = 50 pm, t = 0.2 ,im, A = 0.2 ym, ol = 2.0 S/pm). 3.3. CURRENT DISTRIBUTION IN SUPERCONDUCTING THIN-FILM STRIPS 10 4 - x numerical from Eq. (3.10) Shadowitz 10 10 2 I~ 10 I I I~ 5 _ --- tim w 10 67 - 0 500 M .I I. .I I. .I I. I. 0.5 1 1.5 2 2.5 3 3.5 t/k 4 Figure 3.4: AC resistance at 2 GHz of an isolated superconducting strip for various strip widths and thickness-to-penetration depth ratios. Comparison is made between calculations from the closed-form expression Eq. (3.10), from the expression proposed by Shadowitz [47], and by the modified Weeks' numerical method (t = 0.5 #m, al = 2.0 S/pm). calculated from this closed-form expression shows good agreement with the numerical result generated by the modified Weeks' method. The current distribution in a superconducting strip remains frequency independent as long as the penetration depth is much smaller than the skin depth. Take YBa2 Cu3 07 as an example. The typical value for the superconducting transition temperature Tc is 90 K, the penetration depth at 0 K is 0.22 tm, and the real part of the complex conductivity at TC is 6.56 S/pm. Assume the operating temperature to be 77 K. The ratio of the penetration depth to the skin depth is approximately 1:6 at 20 GHz. Therefore, Eq. (3.10) is still valid for microwave frequencies. Figure 3.4 shows the ac resistance at 2 GHz versus strip thickness of an isolated superconducting strip for various strip widths. The results calculated by Eq. (3.10) agree well with the numerical results by the modified Weeks' method. The error CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 68 I A 't.V A f __ X I' - 'I'1 1 1 111 I I I'"1 I 1 11 3.5E LO 3.0- 0 2.52.0- 30 1.0- 0 I -7 W -0.6 E -0.5 O E II R. ... X . X 0 0 0 0.0-- . I 111.11 I I ..... .... . . ...... . 1 ................ i x R O R -0.3 CS 101 d/w -0.2 - by Eq. (3.10) . I . t, ,ll . I I 10 0 3: 0 x"o·TO TO I -0.4 0 0.5- 101 m w = 5 i0 ~rn 1.5n- w = 5 w=5im X V. I " 102 I .. . i I . ; . YL ^ J -U.1 10 3 Figure 3.5: Total resistance R and center strip resistance R of superconducting striplines calculated by the modified Weeks' method for various strip widths and ground plate separations at 2 GHz. The resistance estimated by the closed-form expression Eq. (3.10) falls within the 5% margin bar of R (t = 0.2 gm, A = 0.2 #m, al = 3.5 S/ym). of the closed-form expression runs from less than 1% to approximately 5% for different strip widths and thickness-to-penetration depth ratios. As shown in Fig. 3.4, the ac resistances calculated using Shadowitz's equation, which postulates a more uniform current distribution than the actual profile, are only 1/3 to 1/2 of the results given by Eq. (3.10) or those by the modified Weeks' method. 3.3.2 Applications of Isolated Strip Approximation Although an actual isolated strip does not exist in reality, it may be used to estimate characteristic parameters of actual structures. One application of the closed-form expression for the current density presented here is to approximate the resistance and inductance per unit length at 2 GHz of superconducting striplines and microstrip lines. Figure 3.5 shows the resistance per unit length of an air-filled (, = 1) superconducting stripline calculated 3.3. CURRENT DISTRIBUTION IN SUPERCONDUCTING THIN-FILM STRIPS 69 by the modified Weeks' method for various strip widths 2w and ground plate separations 2d. The thickness of the strip and the ground plates is 0.4 #m, while the width of the ground plates is taken to be 6350 pm. The typical parameters for YBa 2 Cu 3 0 7_ at 77 K are used in the calculations. As the separation of the ground plates decreases, the resistance of the center strip Res decreases because the current becomes more uniform. Equation (3.10) fails to give a good approximation for R,, when d/w is less than 4 for w = 5 m and less than 2 for w = 50 m, respectively. However, the total resistance R of the stripline remains fairly constant because of an increase of the resistance of the ground plates which compensates the reduction of the center strip resistance. As shown in Fig. 3.5, the resistance calculated by the closed-form expression for an isolated strip falls within the 5% margin bar of the stripline resistance. Since the current in a superconducting stripline or a microstrip line can be well approximated by the closed-form expression presented here, one could use this formula to derive an equivalent surface impedance to transform the center strip with finite thickness into an infinitely thin strip while preserving the loss and kinetic inductance. The resulting problem involving an infinitely thin strip can be efficiently solved by the integral equation method. This idea is carried out to develop an efficient and accurate full-wave technique for analyzing superconducting planar transmission lines in the following sections. In applying Eq. (3.10), one has to be careful about the limits of approximations. For example, Eq. (3.10) is not suitable in the limit in which, Ai used in the calculation of the edge-barrier effect on critical current density, as discussed below, is much greater than A. The critical current density J for a superconducting thin film, which is given by the measured critical current divided by the cross-sectional area of the film, has been found to increase systematically as the width of the film decreases [48]. An edge barrier is believed to be the cause of the increase in J. By assuming the current density decays exponentially from the CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 70 edge with a characteristic length Al for the case w > Al > A, Tahara et al. [48] found that (3.11) J = Jc(aA±/w)+ J. where J and J are the critical current densities corresponding to the edge barrier and to bulk pinning, respectively, and a is an adjustable dimensionless parameter. As we discussed earlier, the current density in a thin film has a functional form of [1 - (/w)2] -1 /2 instead of the exponential function assumed by Tahara. In the given limit in which w > A > A, the expression given in Ref. [46] should be used instead of Eq. (3.10). By employing the proper description of the current distribution given in Ref. [46], the dependence of Jc upon w is found to be + e /27 J,= J, [2(1- e1/2)aA 2 W Notice that the dependence of Jc upon w is dominated by the term + J! (3.12) aAX/w instead of aAl/w suggested by Eq. (3.11). Despite the different dominant terms in Eqs. (3.11) and (3.12), both equations suggest that the critical current density Jc approaches the bulk-pinning value when the width of the strip is greater than a few Al's. 3.4 Superconducting Microstrip on Anisotropic Sub- strate The performance advantages of superconducting microwave devices have been demonstrated in the form of very high Q planar resonators, long delay lines, and multipole narrowband filters with low insertion loss [7], [8]. The proper choice of substrate materials is a key to the performance of these devices. The uniform and low-loss dielectric properties of sapphire make it attractive for high-temperature superconducting passive microwave device applications. The performance of microwave devices on sapphire has been demonstrated in the form of a low-loss 9-ns delay line [14] and a 4-pole microstrip filter operating at 10 GHz 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE 71 2w a - oo Figure 3.6: Superconducting microstrip line with a perfectly conducting ground plate on an anisotropic substrate. [15]. However, the anisotropic dielectric property of sapphire requires special attention in the design of these devices. In Fig. 3.6, a superconducting strip is shown on an anisotropic substrate for which the optic axis is in the x-y plane at an angle 0 with respect to the y-axis. The thickness of the substrate is assumed to be h. The thickness and the width of the strip are t and 2w respectively. The structure is uniform along the propagation direction. conducting ground plate is assumed. The permittivity tensor E for A perfectly the substrate in the chosen coordinate system can be written as e e.lco (ell- 2 0 + ) sin 0 where eL and e ll sin2 0 cos 0 (ell-e.L) sin cos0 sin 2 0 + Ellcos2 0 0 0O 0 (3.13) fJ l are the permittivities perpendicular and parallel to the optic axis, respec- tively. 3.4.1 Integral Equation Formulation and Method of Moments Figure 3.6 illustrates the configuration of a superconducting microstrip line. The superconducting strip with finite thickness is transformed into an infinitely thin strip by using CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 72 the ESI concept, as described in Section 3.2. A 2-D dyadic Green's function !9(k,, ky) for layered, anisotropic media (see Appendix B) is used to formulate an integral equation for the surface current in the strip, Zs(x)Js(x) = 20 X 27r oo dk (k,ky) . Ys(k)eikx (3.14) where k, 0 is the complex propagation constant and Ys(kx) is the Fourier transform of J,(x). To apply the method of moments, the surface current is expressed in terms of a set of orthogonal basis functions, 7 ,(x) = o 0=[ixanXn(x) + b,Y,n(x)] where Xn(~) = sin[nmr(~+ w)/2w] (3.15) Yn(~) = cos[nr(~ + w)/2w] (3.16) V1- for 161 < w. (=/w)2 =o[an(kx) + = E n(k=a) The Fourier transform of J,(x) is given by ybnYn(kr)] where X~(kx) n) 2w Yn(kx) = (i) - e(3.17) e-ikw(-1)n k2 (3.17) [Jo(kxw + 2 ) + (-l)nJo(kw - 2 )] (3.18) and JO is the Bessel function of the zeroth order. By applying Galerkin's method, the integral equation for the surface current is transformed into a set of linear equations for the coefficients of the basis functions, n=0 mn mn1 for m = 0, 1, -. , N. The elements of the matrix equation are given by K q = f| dkx Pm(-k)gpq(kx, If Pqn 00 5 pq i2 ZR, kyo)Qn(kx) + bpq W/10 l~ ZRP (3.20) (3.20)~~~~O where p = x,y; q = x,y; Pm = Xm, Ym; Qn = X, y,,; 5pq is the pqth element of the g; 6pq 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE .4 1ZZ ZZZ.- d/r 2w z Z , 2s 0F4 Z. - Z.-. 73 2w .2 go d,. Z d Z dZ dd, 4 00 Figure 3.7: Superconducting coupled microstrip lines with a perfectly conducting ground plate on an anisotropic substrate. --J (mr ) is the Kronecker delta function; Z is defined in Eq. (3.4); and r i 2m im-n" RXRy= 2 m+n)r mn 27I2 ,m = n ,m ± n are even (3.21) m ± n are odd Rmn =( m + n are even 2 ) i-0( , m ± n are odd (3.22) Here Jo and J1 are the Bessel functions of the zeroth and first order, respectively. The complex propagation constant kyois determined so that the matrix equation has a nontrivial solution. The surface current is then obtained by searching for the eigenvector of the coefficient matrix corresponding to the "zero" eigenvalue. The electric field E(k,, z) and magnetic field (k., z) in the spectral domain are obtained in terms of the surface current. The characteristic impedance Zc of the line is found by calculating the propagating power, 1 fo~ Z = 1 o .0. ( x "-)dz dk, (3.23) The method of solution for the coupled microstrip lines, shown in Fig. 3.7, is similar to the one for the single microstrip line. The surface current of the coupled lines is expressed CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 74 in terms of a set of basis functions, N J , ,(x) = a()X,,(x - s - w) + a(2)X,(x + s + w) (3.24) b()Y,( - s - w) + b(v)Yn(x+ s + w) (3.25) n=O N J, .,(x) = n=O where a(') and b(l) are the expansion coefficients for the microstrip line 1 centered at x = s+w, a(2) and b(2)are the expansion coefficients for the microstrip line 2 centered at x = -(s + w), Xn and Yn are expressed in Eqs. (3.15) and (3.16), and 2s is the separation of the strips. The complex propagation constants for the two fundamental modes, c and 7rmodes, are determined using Galerkin's method. The characteristic impedances, Z 1 , Zc2, Zcrl,and Z2, of the two lines for the two modes are calculated using the power-current definition, Zm,,n c zmZ2 1 21 L° f00 21 ff II dz dk.2 * (Em x !) 12 - RI2m2 x *)dzdk. lI2 l2- ill2/R *(Em (3.26) (3.27) where Emand WI, are the electric and magnetic fields for the m = c, r mode in the spectral domain, I IlI,/I2I2. and I are the longitudinal current in the lines for the m mode, and R = For symmetric lines (R = -1), Eqs. (3.26) and (3.27) reduce to an equation for the m = even (c mode) and m = odd (r mode) impedances. 3.4.2 Numerical Results and Discussion In the calculations, a low-order (N) series of basis functions is found to be sufficient for the frequency range studied in this work. For a single line on an isotropic substrate, N = 0 is sufficient. Converged solutions are obtained by using N = 2 for single and coupled lines on anisotropic substrates. Figure 3.8 shows good agreement between the calculated effective dielectric constants e6f = (Re{kyo/ko}) 2 using the ESI approach discussed here, and the measured data for three Nb microstrip lines on the isotropic substrate LaAlO3 ( = 23.5 and tan 6 = 2 x 10 -6 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE a 21 ,, 20 I - I ' I I ' I _ ]j - C 0 75 19 000 18 C1 4) 17 0 16 a 0 C.) 0) _ m Line 2 - 15 , . I l Line 3 _ 14 0- Uj 13 , 0 I 5 , 10 I 15 , I 20 , 25 Frequency (GHz) Figure 3.8: Measured and calculated effective dielectric constant of three Nb microstrip lines on LaA10 3. Calculations were performed using the equivalent surface impedance (ESI) approach ( = 0.0715 #m; al = 128 S/ym; h = 508 #m; t = 0.4 gm; line 1, 2w = 1800 jm; line 2, 2w = 181 m; and line 3, 2w = 20 gim). CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 76 I~~~~~~~~~~~~~~~ 50000- I II II I I I ' II 40000- a 3000020000 - I- - 10000 A v - I I 0 I lI I I 1 2 l I I I l 3 t/x I I I 4 l - I I 5 6 Figure 3.9: Calculated quality factor at 2 GHz for a Nb microstrip line on LaA1O3 as a function of strip thickness normalized to the penetration depth. Comparison is made between the ESI approach, the parallel-plate surface impedance (PSI) approach, and the spectral-domain volume-integral-equation (SDVIE) method (A = 0.0715 /um,01 = 128 S/pm, h = 508 #m, 2w = 20 um). at 4.2 K). The measured e~ is extracted from the resonant frequency and mode number of the Nb half-wavelength microstrip resonator. Because of the capacitance of the open ends, the resonator is effectively slightly longer than its physical length. The effective length of the resonator is calculated using the expression published in [37]. To demonstrate the necessity of the equivalent surface impedance, Fig. 3.9 shows the calculated quality factor Q = Re {ky0 }/(2Im (ky0 }) of a Nb microstrip line on LaA103 as a function of film thickness at 2 GHz. The results by the ESI approach agree well with the results calculated using the SDVIE method. As we have expected, the results calculated using the surface impedance derived for a superconducting parallel-plate to replace the superconducting strip do not agree with the results by ESI or those by SDVIE, except when the strip thickness is thin compared to the penetration depth. The expression for the 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE 77 94 10000 93 7500 92 0 5000 91 N 90 2500 89 88 0 0 5 10 15 20 25 Frequency (GHz) Figure 3.10: Calculated quality factor and characteristic impedance of a YBCO microstrip line on LaA1O3 as a function of frequency. Comparison is made between the ESI and the SDVIE approaches ( = 0.323 #m, al = 3.5 S/#m, h = 508 #m, t = 0.4 pm, and 2w = 20 #m). superconducting parallel-plate surface impedance used in the calculation can be found in [40], ;= =w coth (t ( /o )) (3.28) which properly accounts for the superconductor in a parallel-plate configuration. For a very thin plate t < A, Eq. (3.28) approaches Z, = 1/(ta,¢). When t > the limit for an infinite half-plane, Z = -iwpoac. , Eq. (3.28) approaches To implement the parallel-plate surface impedance (PSI) approach, Galerkin's method cannot be used because the integral equation for the surface current expressed in Eq. (3.14) becomes nonintegratable. Thus, the more general method of moments is applied. However, more basis functions (N = 8) are required for the PSI method to obtain convergence than for the ESI method. In Fig. 3.10, the quality factor Q and the characteristic impedance Z, of a YBCO microstrip line, calculated using the ESI approach, are shown together with the numerical 78 CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 7.4 o 7.2 0a0 o 0 7.0 0 6.8 D 6.6 6.4 6. 6.2 2 0 20 40 60 80 100 0 (deg.) Figure 3.11: Calculated effective dielectric constant at 2 and 20 GHz for YBCO microstrip lines on M-plane sapphire as a function of the rotation angle 0 of the optic axis. The normalized strip width is used as a parameter ( = 0.323 pm, al = 3.5 S/pm, h = 430 pm, and t = 0.4 pm). results obtained using the SDVIE method. The comparison again shows good agreement, thereby validating the ESI technique. The ESI approach achieves a great saving in the computation time, requiring nearly two orders of magnitude less time than the SDVIE method. This efficient full-wave method using the ESI approach is now applied to study YBCO microstrip lines (t = 0.4 pm) on 430-pm-thick M-plane sapphire substrates ( = 9.34 and ell = 11.6). Typical values of AO= 0.22 m, al(Tc) = 6.56 S/pm, and the superconducting transition temperature Tc = 90 K for YBCO are used, where Aois the penetration depth at T = 0 K, and al is the real part of oa,. The operating temperature is assumed to be 77 K. The calculated effective dielectric constant ea, attenuation constant ac, and characteristic impedance Z, at 2 and 20 GHz for various 2w/h ratios are illustrated as functions of 0 in Figs. 3.11-3.13. Because of the larger dielectric constant along the optic axis and the fact 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE 0.0100 1.00 E 0.95 - I N N C E m co D 0.0095 I 79 0.0090 0.90. 0 cuj 0.0085 0.85 0 C o 0.80 : = 0.0080 0) .*I a. 0.0075 l 0 20 40 60 80 U. /D 100 6 (deg.) Figure 3.12: Calculated attenuation constant at 2 and 20 GHz for YBCO microstrip lines on M-plane sapphire as a function of the rotation angle 0 of the optic axis. The normalized strip width is used as a parameter (A = 0.323 m, al = 3.5 S/pm, h = 430 pm, and t = 0.4 ym). CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 80 58 56 54 a: N cc 52 50 48 46 44 0 20 40 60 80 100 0 (deg.) 0.60 I N C( ' ' ' ' II ' ' ' I' I -U.u _ ' ' -5.5 0.552w/h = 0.8 CN 0.50- - 0.45- f=2 GHz f = 20 GHz -5.0 N oc <o -4.5 2w/h = 1.0 N E ' I ' 0.40 - N 2w/h = 1.2 -4.0 r 0.35 0 20 r _n V * 8 I 40 60 80 100 . 0 (deg.) Figure 3.13: Calculated (a) real and (b) imaginary parts of the characteristic impedance at 2 and 20 GHz for YBCO microstrip lines on M-plane sapphire as a function of the rotation angle 0 of the optic axis. The normalized strip width is used as a parameter (A = 0.323 ,m, a = 3.5 S/,um, h = 430 ,m, and t = 0.4 #tm). 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE 81 that the transverse electric field is much larger than the longitudinal field Ey, the inductance L and capacitance C of the lines increase as 0 increases from 0° to 90° . The effective dielectric constant, which is a function of the product of L and C, shows a greater dependence on 0 compared to the attenuation constant and the characteristic impedance, which depend on the ratio of L and C. Since the capacitance increases more rapidly with 0 than the inductance, the a increases with 0 while the Zc decreases. The rotation of the optic axis about the z-axis changes the effective dielectric constant "seen" by the x-component of the fringing electric field. As the signal strip becomes narrower, the fringing field becomes more significant. Consequently, the effects of the rotation of the optic axis on the characteristics of the lines are greater for smaller 2w/h. The es, a, and Zc become less dependent on 0 as the frequency increases from 2 to 20 GHz. This occurs because the fields for microstrip lines are more confined under the signal strips at higher frequencies. For symmetric coupled lines, the fundamental modes are called even mode where the longitudinal currents in the lines are in the same direction, and odd mode where the currents are in the opposite direction. In the case of coupled symmetric lines on anisotropic substrates, the field symmetry of the coupled lines no longer exists when the optic axis is not aligned with one of the coordinate axes (i.e., the permittivity tensor has off-diagonal elements). The fundamental modes for coupled lines on anisotropic substrate are generally labeled c and r corresponding to the typical lack of perfect field symmetry. In principle, the impedances of the two coupled microstrip lines are different because of the distortion in the field symmetry. However, in the case of M-plane sapphire the optic axis is in the plane of the substrate. Since the longitudinal component of the electric field is much smaller than the other components, the field symmetry is only slightly distorted when the optic axis is rotated about the z-axis. As a result, the difference in the impedances for the two lines (line 1 and line 2) on M-plane sapphire is negligible. The distortion of field symmetry is much greater in the case where the optic axis of the substrate is in the plane normal to the propagation direction. Although this 82 CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH . 8.0- I I I I I I Cr g 7.5- , 1% ·r-t7. 7.0 - cmode . a) 6.5a) ,; 6.0- I mode a) 5.5- 0 I I I I I I 5 10 15 20 25 30 35 Frequency (GHz) Figure 3.14: Effective dielectric constant of a perfectly conducting coupled microstrip line on M-plane sapphire. Comparison is made between the ESI approach and the finite-difference time-domain (FDTD) method [49]( = 450, 2s/h = 1, 2w/h = 1, and h = 430 Mm). case is not studied here, the ESI approach can analyze such a structure using the appropriate Green's function. Figure 3.14 shows the effective dielectric constant for perfectly conducting coupled microstrip lines on M-plane sapphire. The results calculated using the ESI method compare well with those generated by the finite-difference time-domain method [49]. In applying the ESI method, the equivalent surface impedance Z, is set to zero for the perfectly conducting strips. The effect of the rotation of the optic axis on the characteristics of YBCO coupled microstrip lines on M-plane sapphire are then studied using the ESI method. The parameters for YBCO and sapphire used in the calculations are those used for the single microstrip lines. The calculated , ac, and Re{Z 0} at 2 GHz for the two fundamental modes are illustrated in Figs. 3.15-3.17. The results show that the effects of the orientation of the optic axis on the characteristics of coupled lines are similar to the effects on the single lines. 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE -7 I .0f- C 0oCu I I I I c mode -- 7.05- .--- C I I _ 83 0 2w/h = 0.85 2w/h = 0.95 2w/h ----= 1.05 6.5 - 0 6.0G) ._ icmode - a, ,.,= 5.5 . * *. .1 . . . .I . I ., . 40 20 0 . ,. . I. . . .-_ 100 80 60 O (deg.) Figure 3.15: Calculated c- and r-mode effective dielectric constants of YBCO coupled microstrip lines on M-plane sapphire as functions of the rotation angle 0 of the optic axis at 2 GHz (A = 0.323 pm, a1 = 3.5 S/pm, h = 430 m, 2s/h = 1, and t = 0.4 pm). fn u. I I I n44 i B I i r- ~ - I 1j I I I I I I I I I I I I 1 I I 0.0110 0.01050.0100- _---_ C 0 0.0095c- c 4(D 0.0090 - _ 0.0085 - C ____--------__ 7: mode fn I V%1 ' --2w/h = 0.95 ------ 2w/h = 1.05 1irI -.I 2 0 n... ?s - I - ,- 0 ff%.7 I III IL, A 0 C .7 W/vll = nQ .u ,r I c mode 0.0080V. . ,r/ 20 i 40 0 60 I . 80 I 100 (deg.) Figure 3.16: Calculated c- and 7r-mode attenuation constants of YBCO coupled microstrip lines on M-plane sapphire as functions of the rotation angle 0 of the optic axis at 2 GHz (A = 0.323 pm, rl = 3.5 S/pm, h = 430 plm, 2s/h = 1, and t = 0.4 pm). CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 84 65 I I II I I I I I I I I I I 60 55N a: cr: c mode 0 50- 2w/h = 7rmode - .85 -2w/h = 0.95 -----2w/h = 1.05 45 ,, . ,, 40 ,I I,, 2 0 20 40 60 80 100 0 (deg.) Figure 3.17: Calculated c- and r-mode characteristic impedances (real part) of YBCO coupled microstrip lines on M-plane sapphire as functions of the rotation angle 0 of the optic axis at 2 GHz (A = 0.323 m, a = 3.5 S//m, h = 430 m, 2s/h = 1, and t = 0.4 m). 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE 85 7.0C e-- 0o 6.5- e md 0 .- a) 6.0- 2w/h = 0.85 ----- 4· 5.5- ' 0 I II II I - 2w/h = 0.95 I _ 2w/h = 1.05 aU) 5.00 1 2 3 4 5 6 2s/h Figure 3.18: Calculated c- and 'r-mode effective dielectric constants of YBCO coupled microstrip lines on M-plane sapphire as functions of the normalized line separation at 2 GHz (A = 0.323 ,pm, a = 3.5 S/pm, h = 430 m, t = 0.4 pm, and 0 = 0). Figures 3.18-3.20 show the variation of c- and 7r-mode e, ac, and Re{Zc} with strip width 2w/h and separation 2s/h for superconducting YBCO coupled microstrip lines on Mplane sapphire at 77 K. The optic axis of the sapphire is again assumed to be aligned with the propagation direction. The characteristics of the 7r mode behave similarly to coplanar strips. The ef and Re{Zc} for the lr mode increase with the separation, while the a decreases because of the more uniform current distribution as the separation increases. For the c mode, the calculated results approach the values for two single lines as the separation increases. When the strips are close to each other, the characteristics for the c mode show interesting coupling effects. The interaction of the fields causes the current at the inner edges to peak less, which slightly reduces the attenuation as shown in Fig. 3.19. As the separation of the lines becomes small, the pattern of the electric and magnetic fields approaches the pattern for a single line, and the fringing fields between the strips are reduced. Consequently, the CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 86 0.015 0.014 E 0.013 2 0.012 0 0.011 = 0.010 0.009 0.009 W 0.008 0.007 0 1 2 3 4 5 6 2s/h Figure 3.19: Calculated c- and r-mode attenuation constants of YBCO coupled microstrip lines on M-plane sapphire as functions of the normalized line separation at 2 GHz (A = 0.323 pm, a1 = 3.5 S/pm, h = 430 pm, t = 0.4 pm, and 0 = 0°). 70 65 ,c mode 60 55 - N 50 _I- a) cc 45 __ 40 __ ,__ - mod G - x mode ------ 2w/h = 1.05 2w/h = 0.85 2w/h = 0.95 _,' 35 30 0 1 2 3 4 5 6 2s/h Figure 3.20: Calculated c- and r-mode characteristic impedances of YBCO coupled microstrip lines on M-plane sapphire as functions of the normalized line separation at 2 GHz (A = 0.323 pm, a1 = 3.5 S/pm, h = 430 pm, t = 0.4 pm,and 0 = 0°). 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE 57.05- ,,, -43.70 ,1,,I I,1 87 ') o .-43.65 2 57.00o - r -43.60 _ a 56.95- -43.55 N ' 56.90- N ) -43.50z = U.4 .~ I~ ~~ , , 56.850 ~~ I . . . I , , 0.2 0.4 T/T 0.6 Im l . . -43.45 ~~~~~~~ . . .1 I 0.8 1 Figure 3.21: Calculated c- and r-mode characteristic impedances of YBCO coupled microstrip lines on M-plane sapphire as functions of reduced temperature TITC at 2 GHz ( 0O = 0.22 m, al(Tc) = 6.56 S/#im, Tc = 90 K, 2s/h = 1, 2w/h = 1, h = 430 um, and 0 = 0). ,es and Re{Zc}, shown in Figs. 3.18 and 3.20, are larger for smaller 2s/h. As shown in Fig. 3.18, when the enhancement of the fringing fields at the outer edges becomes greater than the reduction of the fringing fields at the inner edges, the 'e of the coupled lines starts to decrease as the separation is further reduced. The reliability of superconducting microwave devices depends on their sensitivity to temperature fluctuation. Figure 3.21 shows the effects of temperature on the c- and ir-mode impedances of YBCO coupled microstrip lines on M-plane sapphire. In the calculations, the simple two-fluid model is used to describe the temperature dependencies of the pene- tration depth, A(T) = A0 +/1- (T/TC)4, and the real part of a,c, o1(T) = o1(Tc) (T/T,) 4. By assuming the critical temperature Tc is 90 K, operating at 77 K gives T/TC = 0.86. The impedances of the lines are very sensitive to temperature fluctuation as shown in Fig. 3.21. As we have quantified in our calculations, decreasing the operating temperature from 77 to CHAPTER 3. EQUIVALENT SURFACE IMPEDANCE APPROACH 88 60 K would dramatically reduce the sensitivity of the YBCO devices to temperature fluctuation. Furthermore, increasing the thickness of the strips would also reduce the temperature dependence because the kinetic effect of superconductors becomes less for thicker strips. 3.4.3 Summary A closed-form expression is derived for the steady-state current distribution in an isolated strip made from a superconducting thin film. We have shown that this formula is valid for strip thicknesses less than a few penetration depths and for frequencies up to tens of gigahertz. The ac resistance of an isolated superconducting strip calculated using this formula agrees well with the numerical results generated by the modified Weeks' method. We have demonstrated that this closed-form expression can be used to approximate the resistance per unit length of superconducting striplines. Based upon this expression, equivalent surface impedances are derived for superconducting strips. These equivalent surface impedances transform the superconducting strips into infinitely thin strips while preserving the loss and kinetic inductance of the superconductors. A computationally efficient full-wave method utilizing the ESI concept is developed for characterization of single and coupled superconducting microstrip lines on anisotropic substrates. The case of M-plane sapphire is considered in which the optic axis of the substrate is in the plane of the substrate at an arbitrary angle with respect to the propagation direction. The calculated results for microstrip lines on isotropic LaA103 show good agreement with previously published measured data and with the more rigorous volume-integral-equation method. The calculated c- and 7r-modeeffective dielectric constants for perfectly conducting coupled lines on M-plane sapphire compare well with the results generated by the finitedifference time-domain method. The effects of the rotated optic axis of M-plane sapphire on the characteristics of superconducting microstrip lines and coupled lines are presented for various strip widths. The effects of the line separation and operating temperature on 3.4. SUPERCONDUCTING MICROSTRIP ON ANISOTROPIC SUBSTRATE 89 the coupled lines are also reported. Since coupled transmission lines are the fundamental building blocks for filters and couplers, the ESI method formulated in this chapter are used to develop a computer-aided-design tool for superconducting bandpass filters. Modeling and design of these devices will be presented in the following chapters. 90 Chapter 4 Design and Simulation of Superconducting Bandpass Filter 4.1 Introduction The low-loss characteristics and high transition temperature of thin-film high-Ta superconductors (HTS's) enable compact planar microwave devices to be built with performance that could previously only be achieved by using bulky waveguides or coaxial components. One promising near-term application for HTS's is compact narrowband filter networks. Planar filters based upon various superconducting transmission-line resonators have been reported in the literature [6], [13], [51]-[54]. The reported performance, however, has not yet attained the level that can be achieved using state-of-the-art cavity or dielectric filters. Issues such as power-handling capability, packaging effects, and design accuracy must be resolved in order to improve the performance of superconducting planar filters. In this chapter, we attempt to address these issues. A set of computer-aided design and simulation tools, numerical superconducting filter design (NSFD) routines, is developed for superconducting microstrip bandpass filters. The backbone of these routines is the equivalent surface impedance (ESI) method that has been discussed in the previous chapter. Accurate filter design details, such as the proper model for resonator open-end effects, are included and used to illustrate the fraction of a percent 91 CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 92 accuracy required in the design of high-performance narrowband superconducting filters. Based upon our analysis we also point out the advantages of edge-coupled microstrip and edge-coupled shielded microstrip filter structures compared to coplanar and stripline struc- tures. 4.2 4.2.1 Transmission-Line Resonators Power-Handling Capability Applications such as output-filter networks demand resonators with high power-handling capability. The power-handling capability of a superconducting resonator is determined by the magnitude of the peak magnetic field inside of the superconductor. Electromagnetic numerical analyses can be used to determine the best planar resonator structures for high power applications. The absolute maximum power-handling capability of a passive microwave superconducting device is limited by the critical magnetic field of the superconductor. When the peak magnetic field is greater than the critical field, flux penetrates the superconductor causing a dramatic increase in loss. Even for magnetic fields less than the critical field, nonlinear behavior is observed in superconductors. In principle, a nonlinear model such as Ginzburg-Landau theory [18] is required to determine the power-handling capability of a superconducting transmission-line resonator. However, because the nonlinearity inherent in superconductors is small [55], linear models, such as the spectral-domain volume-integral-equation (SDVIE) and the modified Weeks' methods [28], can be used to estimate the power-handling capability of superconducting devices. Compared to the results in Ref. [55], the power-handling capability of a superconducting stripline estimated with the linear models used in the analysis done here is only approximately 12% smaller than that given by Ginzburg-Landau theory when the peak magnetic field is equal to 70% of the thermodynamic critical field. This means that the current distribution in the 4.2. TRANSMISSION-LINE RESONATORS 93 Table 4.1: Quality factor and power-handling capability of superconducting resonating structures with resonant frequency f = 2 GHz for Nb on LaA103 at 4.2 K. Q and Qd are the conductor and dielectric Q, respectively, RE is the ratio of the total stored energy to the peak energy density, and R' is the normalized RE with respect to the value for SMS50. MS15 is a 15-Q microstrip, SMS50 is a 50-Q symmetrical shielded microstrip, CPW86-20 is a 86-Q coplanar waveguide with a 20-pm-wide center strip, and SL40 is a 40-4 stripline. Structure MS15 MS50 MS86 SMS50 CPW50-50 Zo 15 50 86 50 50 Qc 1.06 2.02 4.80 1.55 4.66 x x x x x 4.40 x 1/(1/Qc + 1/Qd) 106 105 104 105 10 4 4 3.40 1.44 4.38 1.18 4.26 x x x x x 4.04 x 105 105 104 105 104 RE (cm3 ) RE 10 - 5 10 - 6 10- 7 10 - 6 10 - 7 4.6 1.2 0.23 1.0 0.30 0.23 0.13 0.54 0.29 1.3 3.3 6.5 2.8 8.5 x x x x x CPW86-20 CPW50-20 86 50 2.06 x 104 1.98 x 104 6.5 x 10 - 7 3.5 x 10- 7 SL40 SL50 40 50 1.20 x 105 7.14 x 104 9.68 x 104 6.25 x 104 1.5 x 10 - 6 8.0 x 10 - 7 10 10 4 superconducting films changes very little even at large magnetic fields (70% of the critical field) and validates the analysis done here. The SDVIE and the modified Weeks' methods are applied to analyze several commonly used transmission-line resonators with 0.4-pm-thick Nb on 508-pm-thick LaA103 substrate with er = 23.5 and tan 6 = 2 x 10- 6 at 4.2 K. For striplines (SL's), the separation of the ground plates is 1016 m. The results are shown in Table 4.1. A ratio (RE) of total energy stored to peak energy density is used to compare the power-handling capability of these resonating structures. Since the power-handling capability of a superconducting structure is inversely proportional to the square of the peak magnetic field and is proportional to the total energy stored in the structure, a larger RE for a structure implies its power-handling capability is higher. For the 50-Q structure, a microstrip (MS) resonator has more than four times the power-handling capability of a SL structure. Coplanar waveguide (CPW) structures can have similar power-handling capability to MS structures, but the large strip-to-ground-plate separation for such CPW structures may make them impractical for certain applications. CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 94 A4' 0 £ 2w o 2s > 2w h2 formed on a quarter-wavelength coupled MS in Fig. :::::::::::: ....:-:::::x:: :-.......:: ::: : -: line, -:::::* as : : shown e ::* :::: 4.2, commonly seen in :::::::::::::::::::::::::::::: ...................... : ....* ¢*: .............. :::::::::: ::::::::::::::::::::::::: :::::::::::::::::::::::::::-:-:.... ::::-:::-:::::::::::::::.. ~ ~ ~~ ~~~i:~~~~i:.. .*.:::. . . . ........................................................................... ...... ::::: :::.............*.*::.*. ....... ..... :-:::::::: :: ::: :-:*:.*:.::::.::::::: ::::::::::::::::: lines are described by the same parameters without an upper ground plate. Thus MS resonators are superior to the other transmission-line resonators considered here. For a symmetrical shielded microstrip (SMS) structure as shown in Fig. 4.1 with h1 = h2, the power-handling capability is very close to that of MS resonators. 4.2.2 Packaging Packaging is a very important issue especially for high-Q circuits. Ideally, filters are built using well-shielded transmission line elements so that secondary effects, such as package interactions, can be neglected. Secondary effects can quickly ruin a high-performance filter design; therefore, accuracy of significantly better than 1% is required. MS resonators are the most widely used structure for building superconducting filters. This is because MS structures are the most thoroughly analyzed structures in the literature, and they are relatively easy to fabricate. On the other hand, MS structures have a relatively high radiation loss. By enclosing a resonator inside a box with modes at frequencies different from the resonance frequency of the resonator, the radiation loss can be prevented. However, coupling from the resonator to the enclosure can pose a problem for designing high-performance filters. An analysis using a commercial package EM [56] has been performed on a quarter-wavelength coupled MS line, as shown in Fig. 4.2, commonly seen in 4.2. TRANSMISSION-LINE RESONATORS 95 /////,/://1/11/1://I// jr - j - 3520 A _t T t mS h2 . *-i .. .i.... -:- - ...... .v.... .............. .. >>.. .. > >> >> .> .. . ..... ........ x .......... -:. ; . .. .. . 00I..- - ...... .... ........................ > ...... >... > > > > >> > ...... > .......... |.... ...... . :..-::::::.. . > .. ::..... ............... ............................... ... . . . . . . . ........ ..... >> .......................... . ......................................... ..... ................ ............ !::::::S:'::-' ; :::'::w :S:: -S>>:x >:x: .; .. ....... Jf /of Of Jf/7os 7/Zi. ........ Hrsxosw~~~~~~oozzzzzzzzz~~~~ai I /zuim////////////////////'' _A _ , ::: Top View Cross Section Figure 4.2: Configuration of a quarter-wavelength coupled microstrip line. Table 4.2: The magnitude of S21 of a quarter-wavelength coupled microstrip line, shown in Fig. 4.2, as a function of the cover height h2. The results are calculated using a commercial simulator EM [56]. h 2 /hl tS21 1 filter structures. 10 0.0180 20 0.0192 50 0.0205 100 0.0187 1000 0.0163 The results are listed in Table 4.2. By changing the cover-height of the enclosure, the S21 of the coupled line varies by more than 20% even though the minimum cover-height used was more than 10 times the substrate thickness. Coupled microstrip lines are therefore very difficult to model individually without taking into account the package enclosure. As shown in Fig. 4.3, the S21 of the coupled line also varies as the side wall of the enclosure becomes close to the lines. Because of the mirror image projected on the side walls, the characteristics of the coupled line change rapidly as the distance from the side wall becomes comparable the spacing of the coupled line. To avoid coupling to the side walls, circuits should be separated from the side walls by a distance of several times of the greatest characteristic length in the structures. In the case of narrowband filters, the greatest characteristic length is the separation of the resonators. With an upper ground plate, SL resonators are shielded from the effects due to the CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 96 0.01925 - - I . . I .- I- - I I - . ·- I · .· I I · · . · S- 0.01920 0.01915 0.01910 cm CD 0.01905 I I i I I I Ii i. i 1 1 1 1 I I I I 1.6 1.8 2.0 I1 . I a I I I 0.01900 0.01895 0.01890 0.01885 0.8 I I I 1.0 1.2 1.4 I 2.2 2.4 d / 2s Figure 4.3: The magnitude of S21 of a quarter-wavelength coupled microstrip line with h2 = 20hl as a function of the distance d from the side wall. The configuration of the coupled line is shown in Fig. 4.2. 58 0 C: 56 C au n 54 E U 4-' 0 a> cr 0 L.. 52 50 CZ 0 48 0 5 10 15 20 25 Frequency (GHz) Figure 4.4: Calculated even- and odd-mode impedances of coupled shielded microstrip lines on 508 #m-thick LaA103 for Nb at 4.2 K. (2w = 150 m, t = 0.4 tjm, A = 0.281 ,im, al = 2.53 S/lm, h1 = h 2 .) 4.2. TRANSMISSION-LINE RESONATORS 97 enclosure as long as the side walls of the box are kept far enough from the filter resonators as compared to the separation of the resonators. The assembly of a SL resonator requires a substrate with an upper ground plate be placed on top of the center strip, usually creating a small air gap. The effects of the air gap were found to be large enough to deteriorate the filter response of 1%-bandwidth superconducting filters, and a difficult packaging technique was needed to reduce the effects [51]-[52]. The existence of the air gap would limit the ultimate performance of filters based upon SL resonators. CPW structures require coating only one side of the substrate and thereby simplify the fabrication and assembly. Unfortunately, for many applications air bridges must be used to connect the ground plates to avoid the slotline mode. The additional air bridges complicate the implementation of CPW structures, and the capacitance induced by the bridges can create design difficulties. Radiation from an open CPW structure can create further design difficulties. The configuration of a SMS structure is similar to a SL structure, but its superstrate is an air layer. Thus, a SMS does not have the air gap problem associated with a SL. Consequently, the characteristics of a superconducting SMS line can be accurately analyzed by full-wave methods such as the equivalent surface impedance (ESI) technique. Because of its upper ground plate, a SMS has better shielding characteristics than a MS. Based on our criteria for a well-shielded structure with good power-handling capability, it would appear that SMS structures are the clear structure of choice for high-performance superconducting filters. However, some of the shielding advantage of the SMS disappears at high frequencies because of dispersion effects. In Fig. 4.4, the dispersion effects calculated using the ESI method on the even- and odd-mode impedances of coupled SMS lines are shown. In order to take the advantage of the shielding provided by the upper ground plate, the SMS structures are more suitable for applications at lower frequencies. Because of the parallel-plate mode, interesting characteristics have been observed in the shielded microstrip structures. A more CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 98 Figure 4.5: Configuration of an edge-coupled microstrip bandpass filter. detailed discussion will be presented in the next chapter. 4.3 Filter Design Procedure Our objective is to build superconducting filters with very high-performance by using accurate modeling techniques. To eliminate complications, a simple edge-coupled configuration, shown in Fig. 4.5, is adapted. The standard filter design procedures have been discussed in great detail in several textbooks [57]. The design procedure for a superconducting filter does not significantly differ from the one used for a conventional filter. First, a lumped-element filter prototype is designed for the desired response. Then the proper transformation (e.g., Richard's transform and Kuroda's transform depending upon the type of lumped-element filter) is applied to obtain a prototype which can be implemented with transmission-line structures. To design a N-pole bandpass filter, first the g factors, which are the normalized reactive elements of a lumped-element filter, are first obtained by the following equations. For Butterworth filters, the g factors are given by go = 1 gk = 2sin (2k-I)r] 2N k = 1,2,...,N (4.1) gN+l = 1 For Tchebyscheff filters with R dB pass-band ripple, the g factors may be computed as follows: 4.3. FILTER DESIGNPROCEDURE 99 first compute = aY ln[cot (17-37)] = sinh2N) = sin ak [(2k1)r] =12 N k = 1,2,...,N bk = a2 +sin2 (), then compute go= 1 gl = 2a3 ct 4 ak-lak gk a ,a k = 2,3,..., N bk-lgk-l' f 1, for N is odd coth2 9N+1 (4.2) (42) (,) for N is even Lumped-element bandpass filters consist of series and shunt resonators. Since it is very difficult to implement both series and shunt resonators with distributed structures in a same circuit, direct extension from the lumped-element prototype to the distributed one is not possible. However, impedance inverters can be used to eliminate either the series or the shunt resonators. Figure 4.6(a) shows an equivalent circuit of the edge-coupled bandpass filter using impedance inverters Ki. The values for the impedance inverters are calculated in terms of the g factors [57], Z. 7V 2gog' K1 T0w rW Zo Ki Z, Z,, KN+1 (4.3) 1 1 , 2 V/gjTg23 - 2 gNgN+l 7r j = 2,3,..., N (4.4) (4.5) (4.5) where w is the fractional bandwidth of the filter. An ideal impedance inverter has a constant image impedance K and an image phase shift y of -90° at all frequencies. The image CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 100 (a) .- . I-H '-IiI !(;I~~~~~~~ 7 '-oe I I M u I ,-I M - I 7 L'-oo (b) (c) Figure 4.6: Equivalent circuit of the edge-coupled bandpass filter. impedance K of a two-port network is defined as the input impedance of the infinite chain of the two-port network [57]. The next step is to implement the filter prototype shown in Fig. 4.6(a) using transmission lines. It can be shown that the filter element shown in Fig. 4.6(c) is approximately equivalent to that of Fig. 4.6(b). The image impedance Z and the image phase shift y of the coupled line shown in Fig. 4.6(b) are given by ZI [Z e cos-y = Zoe cot Zoe csc Zoo-2ZoeZo he ¢e + Zoo cot 0, + Zoo csc 0 (csC )eCSC0, + cot 0 e cot o)] 2(46) o (4.7) where Zo0 and Zoo are the even- and odd-mode impedances, and qS and q, are the phase shift for the even and odd modes, respectively. For the ideal impedance inverter shown in 4.3. FILTER DESIGNPROCEDURE 101 Fig. 4.6(c), the image impedance and the image phase shift are given by 4Z -. + K Z cos = 2 21 -I / ( 1 Z 2 sin X = ( ) 1(1( Zo + sin2 K+Z 0 +' -'--- Z (4.9) K)cos§ By equalizing the image impedance of the quarter-wave parallel coupling transmission-line section to that of the impedance inverter with quarter-wavelength lines on either side, we find Zoe = Zo [1 Z + ( zOO = Zo[I Zo( Zo] (k+ , ko) + 2 (4.10) + i/2 Zoe (4.11) (4.12) Zoo) (kko) Zo + Zoo 2 where I is the coupling length of the transmission line, and ke and ko are the propagation constants for the even and odd modes, respectively. Hence, the even- and odd-mode impedances and the coupling length of the edge-coupled transmission lines are obtained. However, Eq. (4.12) does not take the open-end effects into account. As the center frequency of the filter moves toward higher frequencies, the effective length due to openend effects becomes significant. To include the microstrip open-end effects into the model, Eq. (4.12) needs to be modified, specifically, [( l + Alo 2 (Zoeke Zooko ( Zo,,k + Zooko - (4.13) 2 where Ale and Alo are the even- and odd-mode effective lengths, respectively. tion (4.13) can be applied to any planar narrowband filter structure. Equa- To illustrate the importance of the open-end effects, Fig. 4.7 shows the simulated response of a 4-pole 2% microstrip bandpass filter on sapphire with a center frequency at 10 GHz designed using CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 102 0 -10 -20 2 -30 -40 -50 -60 9.4 9.6 9.8 10 10.2 Frequency (GHz) 10.4 10.6 Figure 4.7: Simulated response of a YBCO (71 K) 4-pole 2% microstrip bandpass filter on sapphire with a center frequency at 10 GHz. The curves labeled (a) and (b) are the ISl I and IS21 l of a design using the proper open-end model shown in Eq. (4.13). The curve (c) is the ISu11of a design using the single-microstrip-line open-end model. two different open-end models. The simulation for the design using Eq. (4.13) to properly account for the open-end effects shows an ideal filter response. The other design adapted the open-end model for a single microstrip line. Although the difference between the two designs in the length for the first coupling section is only 0.4%, the center frequency is shifted by 1% and the return loss is increased by 10 dB. The filter simulation method will be discussed in the next section. By incorporating this design procedure, NSFD routines are developed based on the ESI method and the multidimensional Newton's method. By using these NSFD routines, the geometrical parameters of the coupled lines are optimized to give proper impedances and coupling lengths. The definition of the geometrical parameters is shown in Fig. 4.8. This particular design procedure based upon individual coupled-line elements is valid only if 4.3. FILTER DESIGNPROCEDURE 103 I ;sj I I1 e -4 I AL 1 L 52 I AL AL 2 2 AL2 AL2 - AL2 2 AL, I 1' C_41 .a _ i AL 1 L1 d 4- - - I s 1 w I Figure 4.8: Layout of an edge-coupled bandpass filter. CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 104 Figure 4.9: Network representation of a bandpass filter. the next-nearest-neighbor coupling and coupling to the enclosure are negligible. Therefore, choosing a transmission-line configuration with good shielding properties such as SMS is key to the success of building high-performance filters. 4.4 Filter Simulation Method To simulate the response of a bandpass filter, one could solve the electromagnetic wave problem for the whole filter structure, so that the effects due to the next-nearest-neighbor coupling and coupling to the enclosure can be accounted for. However, it is very difficult to obtain an accuracy result for such a problem and is a very time consuming process. For a well shielded structure where the second-order coupling can be neglected, an edge-coupled bandpass filter can be modeled by cascaded two-port networks as shown in Fig. 4.9. Each of these two-port network can be characterized by a scattering matrix S. The elements of the S matrix are the ratios of the input and output voltages at the ports, specifically [ b2 S21 S2 2 a2] (4.14) where ai and bi, for i = 1,2, are the input and output voltages normalized to the square root of the reference impedance Z, as shown in Fig. 4.10. For a reciprocal network, S12 = S21; while S 11 = S22 for a symmetrical network. If the network is lossless, then the power is 4.4. FILTER SIMULATION METHOD 105 a2 ao Zo -_ N 1 .b bi 2 Zo b2 Figure 4.10: A schematic of a two-port network. I. Z0 I v z Vi VV V2 I 2b Z=0 %. V Zo I Z Zoe, Zoo, ke, ko Figure 4.11: Transmission model for a coupled section in a bandpass filter. conserved, i.e. 2 IS.ll2 + IS2, 1 = IS22 12+ IS[212= 1 (4.15) This scattering-matrix representation of a two-port network can be easily generalized to a N-port network. To obtain the S parameters for the two-port networks representing the coupled sections in the bandpass filter, we use the transmission-line model to describe the coupling sections as shown in Fig. 4.11. The input and output signals of the coupling section are written in CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 106 terms of the reflection coefficient R and transmission coefficient T, Vi(z) = V(eik' + Re- 'k z) I,(z) = V(e 'kz - Re-'ikz)/Zo { (4.16) (4 = VTeik( - ) Io(z) = VTeik(-)/Zo(4.17) V(z) The coupling section is characterized by the even- and odd-mode impedances Zoe and Zoo, and by the even- and odd-mode propagation constants ke and ko, respectively. The electrical length of the coupling section is assumed to be . The signal in the coupled line is given by + v-e-ikz + V-e-ikez+ V+eikoz (Z) = V+eikez V-eiko z 1ke[+ [v+ee _-z I () = k ° V2 (z) = V+eikez+ Veikez - V+e z - Ve -(ikoz - Vloeikoz] 1 [VO+eikz Veikez] [V+eikezI 2(Z) =Z ] (418) In Eqs. (4.16)-(4.18), there are totally six unknowns but we are only interested in R and T. To solve for these unknowns, six boundary conditions are needed. At z = 0, we have I = V(1- R)/Zo, V 1= V(1 + R), The boundary conditions at z = I, = 0, I2 = 0 (4.19) are V2 = VT, 12 = VT/Zo (4.20) By elimination, the reflection and transmission coefficients are obtained R = T = a2 - 2 +4 _ )2 p2 2) 2 -3 (C- -4i/ 2 (4.21) (4.22) where a = [Zoecot(ke)+ Zoocot(ko~)]/Zo (4.23) f = [Zoecsc(ke) )- Zoocsc(ko)] /Zo (4.24) 4.5. NUMERICAL SIMULATIONS AND DISCUSSION The electrical length 107 of the coupling section is given by the physical coupling length plus the equivalent length due to the open-end effects. Since the even- and odd-mode open-end equivalent lengths are different for microstrip and shielded microstrip structures, takes two different values for the two modes. The S parameters for the coupling section are related to the reflection and transmission coefficients, specifically S 11 = S2 2 = R (4.25) T (4.26) S12 = S 21 = To characterize a cascaded network, it is more convenient to use the transfer scattering matrix T rather the S matrix. It is because in the transfer scattering matrix presentation the variables in port 1 are treated as the independent variables while the variables in port 2 are treated as the dependent ones. a2 ] [ T2 1 T2 2 bl (4.27) The T parameters can be expressed in terms of the S parameters as the following: Tll = (S 21 S 12 -S11S22) I/S 12 (4.28) T12 = S22/S12 (4.29) T21 = -S 1 /S (4.30) T22 = 1/S12 12 (4.31) The T matrix for a cascaded network is simply obtained by multiplying the T matrices of the individual networks. 4.5 4.5.1 Numerical Simulations and Discussion A Four-Pole 1% Filter The first high-performance high-temperature superconducting (HTS) bandpass filters was CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 108 0 -10 -20 D -30 -40 -50 -60 9.7 9.8 9.9 10 10.1 Frequency (GHz) 10.2 10.3 Figure 4.12: Simulated response of a 4-pole 1% Nb microstrip filter on 508 m-thick LaA103 with a center frequency at 10 GHz (Design: Nb/LAO-4pl%bw). reported in 1991 [58]. That particular filter was designed as a 4-pole Tchebyscheff bandpass filter at 5 GHz with 1% bandwidth. The reports on the latest developments in HTS bandpass filters [15], [51]-[54]do not show much improvement in performance after a few years of active research by a number of research organizations. To have a better understanding of how to improve the performance of filters, an analysis on the sensitivity is needed. To design a multipole narrowband filter, accuracy in the design model is very important. The NSFD routines are used to design a 4-pole 1% microstrip filter on 508 m-thick LaA103 (Er = 23.5). The metallization is assumed to be 0.4[m-thick Nb films. The physical param- eters for Nb used in the simulation are listed in Table 4.3, and the dimensions of the filter are shown in Table 4.4. Figure 4.12 shows the simulated response of this filter. To demonstrate the kinetic inductance effects, Figure 4.13 shows the simulated S2 I of this 4-pole 1% microstrip filter together with three other simulations by the NSFD routines. One of these three simulations assumed the thickness of Nb metallization is reduced to 0.14 1am, one as- 109 4.5. NUMERICAL SIMULATIONS AND DISCUSSION Table 4.3: Physical parameters for YBa 2 Cu3 0 7_- at 50 K and Nb at 4.2 K A al YBCO Nb 0.2 gm 9.62 S/pm 0.0716 Pm 26.2 S/pm Table 4.4: Design for a 4-pole 1% Nb microstrip filter on LaA10 3 with a center frequency at 10 GHz. (see Fig. 4.8 for layout description.) Design: Nb/LAO-4pl%bw Metallization = Nb at 4.2 K Film thickness = 0.4 pm Substrate = LaA103 (,e = 23.5) Substrate thickness = 508 pm i Li (#m) wi (#m) Si (m) ALi (pm) 1 2 3 1706.1 168.5 539.5 116.8 1719.3 181.1 2616.5 109.1 1719.2 181.2 3049.5 109.1 110 CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER sumed YBa2Cu 3 07_. (YBCO) metallization, and the other assumed perfect conductor. The ESI method used in the NSFD routines gives more accurate values for the kinetic inductance and loss of the superconductors compared to the methods based upon parallel-plate surface impedance [24]. The physical parameters for YBCO used in the simulations are listed in Table 4.3. By reducing the film thickness, the kinetic effects are enhanced. Thus, the simulated response for the filter with a thinner Nb metallization show a slight downward shift in the center frequency. An even greater downward shift in the center frequency is observed in the YBCO results because of the greater penetration depth for YBCO. An upward shift is observed for the results assuming perfectly conducting metallization because of the absence of the kinetic effects. Although the difference is small between all the simulations with different physical parameters for this particular filter design, the difference is greater for a more aggressive filter design, and that is to be discussed in the following section. To understand the sensitivity of this 4-pole 1% filter design, we have examined the effects on the filter response by varying some physical dimensions. For 508 um-thick substrates, variation in thickness by 50 #m is common. With the state-of-the-art machining technique, the variation can be reduced to 2 #m. Figures 4.14 and 4.15 show the response of the filter with substrate thickness reduced by 50 m and by 2 m, respectively. The reduction in substrate thickness by 50 m increases the return loss by nearly 10 dB and shifts the center frequency. The effects due to the 2 m reduction are negligible for a 1% filter. Even with a very accurate filter design, the limited resolution of the standard photolithography technique can cause error in linewidths and linelengths of a filter design. Suppose the dimensions of the resonators in the 4-pole Nb filter are uniformly reduced by 2 #m from all four edges. As shown in Fig. 4.16, except for a small shift in the center frequency, the coupling elements of the filter remains properly matched. However, if the dimensions of the resonators are randomly reduced by 0 to 2 gm from all four edges, the performance of the filter is greatly deteriorated as shown in Fig. 4.17. 111 4.5;. NUMERICAL SIMULATIONS AND DISCUSSION 0.00 - I -0.10 - . ... C- -0.20 - cm -0.30 I - - ;I -0.50 - Figure 4.13: Simulated ----- I- I ' I- ----- YBCO(t=0.4rm) Perfect Conductor Nb (t=0.1432g.m) ,1...... i| -| j~~~~ . 9.9 - - -:~iI lNb (t=0.4gm) . : l_ -0.40 - I 9.95 . . 10 10.05 Frequency (GHz) 10.1 response of a Nb (4.2 K) 4-pole 1% microstrip bandpass filter on LaA103 with a center frequency at 10 GHz (Design: Nb/LAO-4pl%bw). Comparison is made between results generated using the proper Nb parameters, using the YBCO parameters at 50 K, and using the perfect conductor assumption to demonstrate the kinetic effects on the filter response. Te effects of the film-thickness are also shown. CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 112 0 -10 -20 m 55 -30 -40 -50 -60 9.7 9.8 9.9 10 10.1 10.2 10.3 Frequency (GHz) Figure 4.14: Simulated response of a 10 GHz 4-pole 1% Nb microstrip Nb/LAO-4pl%bw) with the substrate thickness reduced by 10%. filter (Design: 0 -10 -20 V -30 O3 -40 -50 -60 9.7 9.8 9.9 10 10.1 Frequency (GHz) 10.2 10.3 Figure 4.15: Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter (Design: Nb/LAO-4pl%bw) with the substrate thickness reduced by 2 tim. 4.5. NUMERICAL SIMULATIONS AND DISCUSSION 113 0 -10 0 D- -30 -40 -50 -60 9.7 9.8 9.9 10 10.1 10.2 10.3 Frequency (GHz) Figure 4.16: Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter (Design: Nb/LAO-4p1%bw) with the dimensions of the resonators uniformly reduced by 2 am. With an improved photolithography technique, the random variation in the dimensions can be reduced to 0.25 m. Figure 4.18 shows the simulated response of the 4-pole Nb filter with random variation in the dimensions of the resonators up to 0 to 0.25 jtm. Such a small change in the dimensions virtually has no effect on the filter. 4.5.2 A Four-Pole 0.05% Filter High-temperature superconductors (HTS's) provides the potential for building low cost filters with very narrow bandwidth and low insertion loss. A possible high-volume commercial application for HTS's is in cellular communication. Multiplexing units with very narrowband filters can increase the number of users supported by the cellular system. Four or five-pole filters with 0.05% bandwidth centered at 2 GHz are very desirable for those multiplexing units. For such a narrowband filter, the coupling strength of resonators is very weak, which is in the range of -50 to -60 dB. Consequently, the spacing between the resonators is very large. CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 114 0 -10 -20 m -30 cO -40 -50 -60 9.7 9.8 9.9 10 10.1 Frequency (GHz) 10.2 10.3 Figure 4.17: Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter (Design: Nb/LAO-4pl %bw) with the dimensions of the resonators randomly reduced by 0 to 2 m. 0 -10 -20 m cnv - -30 I.- -40 -50 -60 9.7 9.8 9.9 10 10.1 Frequency (GHz) 10.2 10.3 Figure 4.18: Simulated response of a 10 GHz 4-pole 1% Nb microstrip filter (Design: Nb/LAO-4pl%bw) with the dimensions of the resonators randomly reduced by 0 to 0.25 Am. 4.5. NUMERICAL SIMULATIONS AND DISCUSSION 115 Table 4.5: Design for a 4-pole 0.05% YBCO shielded microstrip filter on MgO with a center frequency at 2 GHz. (see Fig. 4.8 for layout description.) Design: YBCO/MgO-4p0.05%bw Metallization = YBCO at 50 K Film thickness = 0.4 m Substrate = MgO ( = 9.68) Substrate thickness = 127 m Cover height = 1016 gm i Li (m) wi (m) si (m) AL (m) 1 2 3 14624.9 124.5 341.1 35.9 14624.6 124.8 1607.7 35.8 14624.6 124.8 1820.3 35.8 Because of the weak coupling strength between the resonators, any coupling from the filter to the package would greatly deteriorate the performance. In order to reduce the secondary coupling effects, a better shielding structure rather than the standard microstrip structure is needed. Stripline structures have much better shielding properties. However, because of the air gap, stripline structures are difficult to be characterized accurately. Shielded microstrips with thin substrate are believed to be a better structure for building filters with 0.05% bandwidth. The NSFD routines are used to design a 4-pole YBCO shielded microstrip filter centered at 2 GHz with 0.05% bandwidth. The substrate is 127 m-thick MgO with a dielectric constant of 9.68. This filter is designed with 0.4 m-thick YBCO films and with an upper ground plate located at 1016 m above the top of the substrate. The physical parameters of YBCO used is listed in Table 4.3. The impedance of the filter is 50 Q. The dimensions of the filter is listed in Table 4.5. Figure 4.19 shows the simulated response of this bandpass filter. For an aggressive filter design, properly including the kinetic inductance effects of thin- CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 116 0 -10 I- -20 cl -30 -40 -50 -60 1.995 1.9975 2 2.0025 2.005 Frequency (GHz) Figure 4.19: Simulated response of a 4-pole 0.05% YBCO shielded microstrip filter on 127 #m-thick MgO with a center frequency at 2 GHz (Design: YBCO/MgO-4p0.05%bw). film superconductors is crucial for a successful design. The responses shown in Fig. 4.20 are for the 4-pole 0.05% bandpass filter designed with the parameter for 0.4 #m-thick YBCO at 50 K. The simulations shown are performed using 1.1 gm-thick YBCO films at 50 K, using the parameters for Nb at 4.2 K as listed in Table 4.3, and using perfect conductor assumption. The kinetic inductance effects cause the filter responses to shift totally out of the band. The simulations generated with Nb parameters and perfect conductor show very good filter behaviors beside the frequency shift. That illustrates that the responses of the elements in the filter are changed systematically by the kinetic effects and the elements remain to be properly matched. A sensitivity analysis similar to the one discussed in the last section is performed on the 4-pole 0.05% YBCO shielded microstrip filter. By decreasing the cover height by 10%, the center frequency is shifted by 0.1% and the return loss is increased to above -20 dB. The overall response of the filter, as shown in Fig. 4.21, is acceptable. The effects due 4.5. NUMERICAL SIMULATIONS AND DISCUSSION 117 0.00 -10.00 -20.00 m - 30.00 -40.00 -50.00 -60.00 1.998 2.0006 2.0032 2.0058 2.0084 2.011 Frequency (GHz) Figure 4.20: Simulated response of a YBCO (50 K) 4-pole 0.05% shielded microstrip bandpass filter on MgO with a center frequency at 2 GHz. Comparison is made between results generated using the proper YBCO parameters at 50 K, using the Nb parameter at 4.2 K, and using the perfect conductor assumption to demonstrate the kinetic effects on filter response. The design has assumed 0.4 gm-thick YBCO film. The Nb film is 0.4 um thick and one of the simulations for YBCO is assumed 1.1 pm thick film. The substrate thickness is 127 #m and the cover height from the top of the substrate is 8 times the substrate thickness. CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 118 0 -10 -20 co -30 -40 -50 -60 1.995 1.9975 2 2.0025 2.005 Frequency (GHz) Figure 4.21: Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter (Design: YBCO/MgO-4p0.05%bw) with the cover height reduced by 10%. to the variations in substrate thickness are shown in Figs. 4.22 and 4.23. A reduction in the substrate thickness by 2 m only shifts the center frequency by less than 0.1%. The response of the filter is still nearly ideal as shown in Fig. 4.22. When the substrate thickness is decreased by 8%, the return loss is up to -15 dB and a large frequency shift is observed. The resulting response is marginally acceptable. For 0.05% bandwidth filters, the variation in substrate thickness must be less than 8%. As discussed in the last section, the dimensions of the resonators in a filter can be deviated from the optimal values because of an inaccurate design and of the limited resolution in the standard photolithography technique. Figure 4.24 shows the simulated response of the 0.05% filter with the dimensions of the resonators uniformly reduced by 2 #Im from all four edges. Beside a shift in the center frequency, the response of the filter is nearly ideal. Once again, it shows that a slight systematic change in the filter layout does not cause the filter to be mismatched even for a very aggressive filter. A random variation up to 2 lm in the 4.5. NUMERICAL SIMULATIONS AND DISCUSSION 0 I -10 I mv-1 O3 I II I - I I I I Il -20 -1 119 I Ia I~8 I a a If -a I -r 30 -40 I I t I 1% -DU- f_ % I -50 _ f a a I I I . - - --I -. I i. I I 1.9975 1.995 I ? ............ . 2 ._ . I -- 2.005 2.0025 Frequency (GHz) Figure 4.22: Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter (Design: YBCO/MgO-4p0.05%bw) with the substrate thickness reduced by 2 #m. I 0 10 m Ia I I r~~~~~ I-I m - I aI 20 'o O3 I II 30 - I 55 a - -40 i -I III \ I!~~~~ % 1I - If - % I -50 m -a -I 4 A m IIIp"~L I -vv B _ I 1.99 I I I , I 1.992 , I , I I I II 1.994 1.996 I I I I I - _ I.998 I 1.998 2 Frequency (GHz) Figure 4.23: Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter (Design: YBCO/MgO-4p0.05%bw) with the substrate thickness reduced by 8%. CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 120 0 -10 -20 mo 30 -40 -50 -60 1.995 1.9975 2 2.0025 2.005 Frequency (GHz) Figure 4.24: Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter (Design: YBCO/MgO-4p0.05%bw) with the dimensions of the resonators uniformly reduced by 2 gm. 4.5. NUMERICAL SIMULATIONS AND DISCUSSION 121 0 -10 -20 -30 -40 -50 -60 1.995 1.9975 2 2.0025 2.005 Frequency (GHz) Figure 4.25: Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter (Design: YBCO/MgO-4pO.05%bw) with the dimensions of the resonators randomly reduced by 0 to 2 m. 0 -10 -20 o ry -30 -40 -50 -60 1.995 1.9975 2 2.0025 2.005 Frequency (GHz) Figure 4.26: Simulated response of a 2 GHz 4-pole 0.05% YBCO shielded microstrip filter (Design: YBCO/MgO-4p0.05%bw) with the dimensions of the resonators randomly reduced by 0 to 0.25 m. CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 122 0 -10 -20 m -30 -40 -50 -60 1.995 1.9975 2 2.0025 2.005 Frequency (GHz) Figure 4.27: Simulated response of a 2 GHz 4-pole 0.05% YBCO (50 K) microstrip filter on 381 #m-thick LaA10 3. By increasing the YBCO film thickness to 1 /m and by decreasing the impedance to 10 Q, the insertion loss of the filter is reduced to 0.2 dB. dimensions, however, can destroy the filter performance as shown in Fig. 4.25. If the random variation can be reduce to 0.25 gm by a better photolithography technique, the performance of the filter is still deteriorated but is acceptable. Figure 4.26 illustrates the effects due to the random variation up to 0.25 m in the dimension of the resonators. For a very narrowband filter such as those with 0.05% bandwidth, the quality factor of the resonators must be high enough to have an acceptable insertion loss. The 0.05% filter discussed here is design with 0.4 #m-thick YBCO film. The operating temperature is assumed to be 50 K. The impedance of the filter is 50 Q. The insertion loss shown in the simulations is approximately 2 dB which is slightly too large. To reduce the insertion loss, one needs to increase the quality factor of the resonating elements. For planar resonating structures, the quality factor can be increased by increasing the film thickness and by decreasing the filter impedance. Figure 4.27 shows a simulated response of a 2 GHz 4-pole 0.05% YBCO 4.6. EXPERIMENTAL RESULTS 123 0 -5 -10 -15 co cm Cn -20 -25 -30 0 1 2 3 4 5 6 7 8 Frequency (GHz) Figure 4.28: Measurement and simulation of a 1-pole edge-coupled Nb microstrip filter with a center frequency at 2 GHz. The second and the third harmonic responses of the filter are also shown. microstrip filter on 381 jim-thick LaAlO3 . The operating temperature is still 50 K. The YBCO film thickness is increased to 1 im and the impedance is decreased to 10 . As a result, the insertion loss of the filter is only 0.2 dB. 4.6 Experimental Results To validate the simulation method presented in Section 4.4, a 1-pole Nb microstrip filter with a center frequency at 2 GHz is fabricated and measured using a Hewlett-Packard network analyzer. The measured response is illustrated in Fig. 4.28 with the calculated result. The parameter of Nb used in the simulation is listed in Table. 4.3. The calculated result matches very well to the measured response. Notice the frequency of the second and the third harmonics is shifted. The shift in the frequency is because of the dispersive characteristics of microstrip lines. CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 124 0 -10 -20 -30 -40 -- -50 -60 -70 -80 9 9.5 10 10.5 11 Frequency (GHz) Figure 4.29: Measured response of a 4-pole 1% bandwidth bandpass filter (Design: Nb/LAO-4p1%bw) fabricated using 3 tm-thick silver. The design of the filter is listed in Table 4.4. In Section 4.5.1, a sensitivity analysis is presented for a 4-pole 1% bandwidth Nb microstrip filter with a center frequency at 10 GHz. The design of this filter, listed in Table. 4.4, is fabricated using 3 g#m-thick silver and 0.4 #jm-thick niobium. The measured responses of the two versions are shown in Figs. 4.29 and 4.30. The silver filter is measured at room temperature, while the niobium filter is measured at 4.2 K. The large insertion loss of the silver filter is because of the high conductor loss, and the downward frequency shift is partly due to the greater internal inductance. The large ripple appeared in the passband of the niobium filter indicates the effects of secondary coupling. A zero transmission is found at the skirt of the passband, and that is a clear signature of the next-nearest-neighbor coupling. A commercial field simulator IE3D [59] is used to simulate the filter response. The metallization is assumed to be perfectly conducting in the simulation. The result is shown in Fig. 4.31. In the simulation, the enclosure of the filter is neglected. From the simulated response, the 4.7. SUMMARY 125 0 -10 -20 co -30 _- -40 'n -50 -60 -70 -80 9 9.5 10 10.5 Frequency (GHz) 11 Figure 4.30: Measured response of a 4-pole 1% bandwidth bandpass filter (Design: Nb/LAO-4pl%bw) fabricated using 0.4 m-thick niobium. Comparison is made with the simulated response by the cascaded two-port networks approach. The design of the filter is listed in Table 4.4. effects due to next-nearest-neighbor coupling is clear shown. In designing high-performance filters with a fractional bandwidth less than 1%, the secondary coupling must be accounted for. Because of the tolerance of the fabrication and packaging techniques, tuning is likely required for very aggressive filters. 4.7 Summary A set of computer-aided design and simulation tools, numerical superconducting filter design (NSFD) routines, has been developed for narrowband superconducting microstrip filters. These routines are developed based upon the equivalent surface impedance (ESI) method that has been discussed in the previous chapter. The design procedure and fine filter design details, such as the proper model for resonator open-end effects, are discussed. An CHAPTER 4. SUPERCONDUCTING BANDPASS FILTER 126 0 -10 -20 m -30 - -40 '0 cm So -50 -60 -70 -80 9 9.5 10 10.5 11 Frequency (GHz) Figure 4.31: Simulated response of a 4-pole 1% bandwidth bandpass filter (Design: Nb/LAO-4pl%bw) by a commercial simulator IE3D [59]. The metallization is assumed to be perfectly conducting and the relative permittivity of the substrate is 23.5. Comparison is made with the measured data. equation is presented for compensating unequal even- and odd-mode propagation constants and open-end effective lengths in any planar filter design. By studying the power-handling capability and packaging of several commonly used transmission-line resonators, a shielded microstrip structure is found to be the most promising element for building high-performance superconducting bandpass filters especially at lower frequencies when compared to coplanar and stripline structures. The NSFD routines are applied to design a 4-pole Nb microstrip filter centered at 10 GHz with 1% bandwidth, and a 4-pole YBCO shielded microstrip filter centered at 2 GHz with 0.05% bandwidth. The kinetic inductance effects have been studied by simulating the re- sponses of the filters with different material parameters. Beside a shift in frequency, the performance of the filters is only slightly affected by the change of metallization even for 4.7. SUMMARY 127 the aggressive 0.05% filter. Sensitivity analysis has also been performed for these two filters. For the 1% filter, the design is robust to substrate variations up to 10%. A slight uniform variation in the dimensions of the resonators has a little effect on the performance. However, a slight random variation in the dimensions can greatly limit the performance. For the 0.05% shielded filter, variations in the cover height are acceptable up to 10%, while substrate thickness variations must be less than 8%. Similar to the 1% filter, a slight uniform variation in the dimensions of the resonators only shifts the center frequency. A slight random variation in the dimensions can destroy the filter performance. The 4-pole 1% bandwidth microstrip filter is fabricated using 3 m-thick silver and 0.4 #m-thick niobium. The silver filter is measured at room temperature, while the niobium filter is measured at 4.2 K. A large ripple is found in the passband of the niobium filter, and a zero transmission appears at the skirt of the passband. The measured responses clearly shown the significance of the secondary coupling effects. In designing high-performance filters with a fractional bandwidth less than 1%, the secondary coupling effects must be accounted for. Because of the tolerance of the fabrication and packaging techniques, tuning is very likely required. 128 Chapter 5 Shielded Microstrip Lines 5.1 Introduction In the previous chapter, we have presented a design procedure and a simulation method for edge-coupled bandpass filters. The filter structures are broken into elements consisted of quarter-wavelength edge-couplers in both the design and the simulation. Such an approach works well for filters with moderate performance. For high-performance filters with a fractional bandwidth less than 1%, the filter performance is very sensitive to secondary coupling effects such as next-nearest-neighbor coupling and package coupling. As we have discussed in the last chapter, it is very difficult to design a filter which accounts for the secondary coupling effects. By using transmission-line structures which have a better shielding property than microstrip lines, design procedures with the filter broken into elements would still be acceptable for high-performance filters. With an upper ground plate, stripline structures have a much better shielding property than standard microstrip lines. However, the assembly of a stripline filter requires a substrate with an upper ground plate be placed on top of the center strips, that usually creates a small air gap. Because of the air gap, the stripline structures cannot be accurately characterized. As mentioned in the previous chapter, the effects of the air gap were found to be large enough to deteriorate the filter response of 1%-bandwidth superconducting filters [51]-[52]. 129 130 CHAPTER 5. SHIELDED MICROSTRIP LINES go, .. ...S.......S <2w S SS S 2s S . ......' 2w h2 .. Figure 5.1: Configuration of an edge-coupled shielded microstrip line. The configuration of a shield microstrip line, as shown in Fig. 5.1, is very similar to a stripline. Shielded microstrip lines also have an upper ground plate, but the dielectric between the center strips and the upper ground plate is replaced by a layer of air. Therefore, shielded microstrip lines do not have the problems associated with the small air gap in the stripline structures. When the distance of the upper ground plate to the top of the substrate is the same as the substrate thickness, i.e., hi = h 2, the shielded microstrip line is called symmetric. In the quasi-static limit, the electrical characteristic of a symmetric shielded microstrip line is very similar to a stripline. The characteristic impedances of a coupled symmetric shielded microstrip line have the same functional form as those of a coupled stripline [37]. Therefore, one would expect that the symmetric shielded microstrip lines have similar shielding properties as the striplines. However, full-wave analysis shows that the shielded microstrip lines are very dispersive, and their shielding capability is greatly reduced by the parallel-plate mode supported by the ground plates. In the following sections, we will apply the equivalent surface impedance method to study the characteristics of the shielded microstrip lines. Experimental results support the numerical analysis. 5.2 Characteristics of Edge-Coupled Shielded Microstrip Lines Figure 5.1 shows the configuration of a coupled shielded microstrip lines. The width and 5.2. EDGE-COUPLED SHIELDED MICROSTRIP LINES 131 the separation of the lines are 2w and 2s, respectively. The thickness of the substrate is hi and the relative permittivity is e,. The distance between the upper ground plate to the top of the substrate is h2 . The ground plates are assumed to be infinitely extended. The equivalent surface impedance (ESI) method presented in Chapter 3 is used to analyze the characteristics of the shielded microstrip lines. The even- and odd-mode effective dielectric constants of Nb coupled symmetric shielded microstrip lines are calculated and plotted in Fig. 5.2. Typical parameters for Nb at 4.2 K are used. The substrate is taken to be 508 m-thick LaA103. The results show very dispersive characteristics. The change in effective dielectric constants is greater than 20% over the 20 GHz frequency span. For coupled microstrip lines, the variation in the effective dielectric constant over 20 G1Hzrange is only about 14%. The highly dispersive characteristics of shielded microstrip lines can also be observed from the characteristic impedances. The calculated even- and odd-mode characteristic impedances of the Nb coupled symmetric shielded microstrip lines are shown in Fig. 5.3. Two major factors are believed to be the causes of the highly dispersive characteristics in the shielded microstrip lines. Firstly, in the quasi-static limit, the effective dielectric constant of a symmetric shielded microstrip is given by [37] e= 2+ (5.1) The fields are about the same in the air region as in the substrate. As the frequency increases, fields tend to concentrate in the region with higher dielectric constant. Hence, the effective dielectric constant increases with frequency. For microstrip lines, although there is a large amount of fringing fields in the air, most of the fields concentrate in the substrate between the strip and the ground plate. Since the symmetrical shielded microstrip has more fields in the air than the microstrip at low frequencies,the ratio of the field strength in the substrate to the field strength in the air is likely to change more rapidly for the shielded microstrip as the frequency increases. Secondly, the two ground plates in the shielded microstrip structures can CHAPTER 5. SHIELDED MICROSTRIP LINES 132 17 cC . - . . . I I . . . . . . .. . . . . . . . I 16 - ._ C) 0C00 .r 15 - 0a 0 0 14 2s = 2000 gm 13 - - - -2s a) I.LL I . B I., 0 I . 5 I . I . . . . I I I 10 15 = 3000 m . . I . . 2 20 25 Frequency (GHz) Figure 5.2: Calculated even- and odd-mode effective dielectric constants of Nb coupled shielded microstrip lines on 508 m-thick LaAlO3 at 4.2 K. (2w=150 m, t=0.4 Im, A=0.281 m, oa1=2.53S/pm, hi = h2 .) 58 a) Ci C) E C.) L.. 56 54 52 50 c- 0 48 0 5 10 15 20 25 Frequency (GHz) Figure 5.3: Calculated even- and odd-mode impedances of Nb coupled shielded microstrip lines on 508 ym-thick LaA1O3 at 4.2 K. (2w=150 pm, t=0.4 im, A=0.281 #m, a1=2.53 S/ylm, hi = h2.) 5.2. EDGE-COUPLED SHIELDED MICROSTRIP LINES 133 support an addition parallel-plate mode other than the fundamental even and odd modes. From our analysis, this parallel-plate mode deteriorates the coupling characteristics for the coupled shielded microstrip lines. For a stripline quarter-wavelength coupling section, the forward-wave coupling coefficient is zero because of the equal even- and odd-mode propagation constants, and the backwardwave coupling coefficient C is given by [57] C= Zo - zoo Z (5.2) Zoe + Zoo where Zoe and ZO, are the even- and odd-mode characteristic impedances, respectively. Because of the unequal even- and odd-mode propagation constants, the backward-wave coupling coefficient of a microstrip or a shielded microstrip quarter-wavelength coupling section is different from the one for the stripline, but Eq. (5.2) gives a good approximation. Figure 5.4 shows the calculated backward-wave coupling coefficient of a symmetric shielded microstrip, a microstrip, and a stripline quarter-wavelength coupling sections. The coupling coefficient of the stripline roll off much quicker than the microstrip as the separation of the lines increases. That demonstrates the better shieldingproperty of the stripline. Based upon the quasi-static analysis [37], the backward-wave coupling coefficient of the symmetric shielded microstrip coupler should be the same as that of the stripline. The full-wave analysis indicates that the coupling coefficients for the symmetric shielded microstrip and the stripline are the same for small line separations. As the line separation increases, the coupling coefficient of the symmetric shielded microstrip line deviates from that of the stripline, and a "shoulder" appears at around -54 dB in the coupling curve. By decreasing the frequency, the "shoulder" in the coupling curve appears at a weaker coupling strength as shown in Fig. 5.5. As shown in the same figure, the "shoulder" can also be pushed to a weaker coupling strength by rising the upper ground plate. The "shoulder" appeared in the coupling curve for the coupled shielded microstrip is CHAPTER 5. SHIELDED MICROSTRIP LINES 134 -10 -20 -30 c O -40 O V-1 -50 -60 -70 1 10 2s/h 100 1000 1 Figure 5.4: Calculated backward-wave coupling coefficient C of a symmetric shielded microstrip, a microstrip, and a stripline quarter-wavelength coupling sections. The metallization is assumed to be perfectly conducting and the line width is 79 m. The substrate is 127 m-thick and its Er=12. The separation of the ground plates in the stripline structure is 254 m. -10- . -20- ,%1.\ V ,C) _ l·___· I _ I __.. l I . ...... X. C I ~~ h2=hl, IIf=2 GHz - _\_ -30m . . , ,, _ -h2=h1 - 4050- f= - -- h=6h1,f 0 .5GHz 2GHz I V'11-_ 60- 70 - [- , , , , , , ,1 -80 I 1 10 2s / h1 100 ,\, ,, 1000 Figure 5.5: Calculated backward-wave coupling coefficient C of shielded microstrip quarter-wavelength coupling sections. The metallization is assumed to be perfectly conducting and the line width is 79 m. The substrate is 127 gm-thick and its er=12. 5.3. EXPERIMENTAL VERIFICATION OF PARALLEL-PLATE MODE 135 Table 5.1: Dimensions of symmetric shielded-microstrip quarter-wavelength couplers. Structure Coupler Coupler Coupler Coupler f (GHz) 1 2 3 4 2 2 5 10 2w (m) 142 142 146 158 2s (m) 1524 2540 1524 1524 (m) 10304 10305 3893 1764 caused by a slight increase in the even-mode impedance and a slight decrease in the oddmode impedance. The changes in the impedances are because of the additional parallel-plate mode supported by the two ground plates. The existence of the parallel-plate mode can be easily identified from the electric field distribution of the even-mode. Figure 5.6 shows the electric field distribution of the proper even-mode in a shielded microstrip line when the line separation is not too far. As the line separation increases far enough so that the "shoulder" appears, the electric field distribution, as illustrated in Fig. 5.7, clearly shows the field associated with the parallel-plate mode. 5.3 Experimental Verification of Parallel-Plate Mode To verify the effects due to the parallel-plate mode on the characteristics of coupled shielded microstrip lines, four quarter-wavelength couplers are designed and fabricated. The operating frequencies of the couplers are 2 GHz, 5 GHz, and 10 GHz. The configuration of the couplers is shown in Fig. 5.8 and the dimensions are listed in Table 5.1. Because the parallel-plate mode is a property of the shielded microstrip line and it is not related to the material of the metallization, we have used 3 m-thick silver to fabricate the couplers. The substrate is 508 gm-thick LaAl03 and the area of the substrate is 2.54 cm by 1.27 cm. The couplers are placed ill a microwave package with two SMA connectors. The transitions from the shielded microstrips to the connectors are made by wire-bonding. The ground plates of the shielded microstrip structures are tightly connected at the input and output ports to CHAPTER 5. SHIELDED MICROSTRIP LINES 136 , ' t t t t t t , ·i t t p * t t ' t t p ·r * ' ?t / I 4 4 *@0 /~~~ 4 4 4 t p t / \t~ , , & 4 4 & Figure 5.6: Electric field distribution of the even-mode in a coupled symmetric shielded microstrip line with 2s/h 1 = 2. The metallization is assumed to be perfectly conducting and the line width is 79 im. The substrate is 127 #m-thick and its er=12. * ttt * 99 . . . · · I III 4 V · I~~~~~~~~~~~~~ · . · ttt · · II Ott . tt t) a I . I · I . .. . ap ·a . .. · Ii ·. 4 9 · · a v a a 44 4 4 9 * , A ,, I a I 5 a 4 . I * 44 4 IS Figure 5.7: Electric field distribution of the even-mode in a coupled symmetric shielded microstrip line with 2s/hl = 10. The metallization is assumed to be perfectly conducting and the line width is 79 /m. The substrate is 127 gm-thick and its er=12. 5.3. EXPERIMENTAL VERIFICATION OF PARALLEL-PLATE MODE 137 Top View sapphire silve ... ............................... silver .................................... groundplates plates 508 gm-thick 3 gm-thick silver strip LaAIO 508 kgm-thick LaAIO 3 3 spacer substrate Cross-Sectional View Figure 5.8: Configuration of a symmetric shielded-microstrip quarter-wavelength coupler. CHAPTER 5. SHIELDED MICROSTRIP LINES 138 0 -10 -20 -30 -40 -50 -60 -70 -80 1 10 100 2s/h Figure 5.9: Calculated transmission coefficient of symmetric shielded microstrip quarter-wavelength couplers. Comparison is made with measured data. ( - measured data at 2 GHz, O - measured data at 5 GHz, A - measured data at 10 GHz.) ensure proper transitions. The simulated and measured S211of the couplers are shown in Fig. 5.9. The simulations are based upon Eq. (4.22). The measurements are made with a Hewlett-Packard network analyzer. Because of the package resonances, the responses of the couplers are not very clean over a 20 GHz frequency span. Fortunately, no resonance is found near 5 and 10 GHz. However, a strong package resonance is found near 2 GHz. In order to measure the two 2 GHz-couplers, two strips of absorber are place along the sides of the package in the air region of the shielded microstrip structures to remove the package resonance at 2 GHz. The reasonably good agreement between the measured and simulated results has confirmed the existence of the parallel-plate mode in a coupled shielded microstrip structure. The parallelplate mode in shielded microstrip structures is not desirable for narrowband filters. In order to take advantage of the good shielding property that shielded microstrip lines potentially 5.4. OPEN-END DISCONTINUITY IN SHIELDED MICROSTRIP LINES 139 provide, one must somehow suppress the parallel-plate mode. Preliminary results based on measurements and simulations by a field simulator, EM [56], the parallel-plate mode can be suppress by making good contacts between the ground plates at all four sides to ensure an equal potential. 5.4 Open-End Discontinuity in Shielded Microstrip Lines Open-end discontinuity of planar transmission lines can be commonly found in many microwave circuits such as resonators, matching stubs, and edge-coupled filters. In the pervious chapter, we have demonstrated the importance of the open-end effects in filter designs. To improve the performance of these microwave components, the open-end effects have to be quantified and accounted for in the circuit designs. The excess capacitance at the open end is usually modeled by an equivalent length of transmission line [37]. Closedform expressions for the open-end equivalent length for striplines and microstrip lines have been previously presented by several authors [61]-[67]. Altschuler and Oliner [61] derived an expression for stripline structures based upon their measured data. Garg and Bahl [62] modified a formula for microstrip lines derived by Hammerstad [63] based upon numerical results computed by Silvester and Benedek [64]. By matching to the numerical results published in Refs. [65] and [66], Kirschning et al. [67] obtained a more accurate equation for the open-end effects in microstrip lines. In Ref. [68], Kirschning et al. presented closed-form expressions for the even- and odd-mode open-end equivalent lengths in coupled microstrip lines based upon the numerical solutions computed by the mode-matching method [66]. Bedair and Sobhy [69] derived a closed-form equation to describe the equivalent length in shielded microstrip lines using the open-end model for striplines [61]. However, we have found that the equivalent length given by Bedair's equation does not approach the proper limit when the cover height in the shielded structures becomes large. CHAPTER 5. SHIELDED MICROSTRIP LINES 140 h2 .... ... 2w_ :: ,...:::...:::. . . . ..... > , c:: .. . .. . . . ... . . . . .. .:.........>.... ... .. .. ........... .. ...... ................ ....... . .......................... ... . . . ...... .. .>...... ... . > ~~~~~~~~~~~~~~.. ...>>> .>> >.. >..... >... >>............ ~~~~~~~~~~~~~.... .... ............ ........ ~~~~~~~~~~~~~~~~~~~~~~.......... ~~~~~~~~~~~~~....... ... .......... c : ---- :. : -: . ............... .::. -- -. e -- .. .: .. :. e--.:.:. : -:-~~~~~~~~~~~~~~~~~~~~~~~~~~~~~........ : - . :.:. .>.. -: - v~~~~~~~~~~~~~~~~. .-........ . ...... ..... >. . ., .. ............ ... . .............. . . . .. ...........................-. ........ ,: v.-. :: ...>... >. >...... .......... .............>> . ......>. .. ..> ........>>.>.>. ........... . . . . .> v...... Figure 5.10: Configuration of a shielded microstrip. Here a phenomenological approach is taken to find closed-form expressions for the openend equivalent length in single and coupled shielded microstrip lines. For a given value of strip width 2w and substrate thickness hi the characteristics of a shielded microstrip, shown in Fig. 5.10, change gradually from a symmetrical shielded microstrip to an unshielded microstrip as the ratio of cover height to substrate thickness, g = h 2 /hl, increases from 1 to oo. This property allows us to write the open-end equivalent length /lsms(g) of a shielded microstrip in terms of the one for a symmetrical shielded microstrip and an unshielded microstrip, specifically Alsms(g) = Alsms(X) + q4[/Alms- /lsms(1)] (5.3) where q is an unknown function, and Alm, is the equivalent length for an unshielded microstrip. In the quasi-static limit, the equivalent length of a symmetrical shielded microstrip Alsms(l) is equal to the equivalent length of a stripline Ala. The equations for AlI and Alms are found in Refs. [61] and [67], respectively. In general, the unknown function qj is obtained by matching to rigorous experimental or numerical results. Alternatively, we attempt to derive an approximate expression for ql without performing extensive experiments or numerical calculations, and then show that our result compares well with those of a commercial simulator. 5.4. OPEN-END DISCONTINUITY IN SHIELDED MICROSTRIP LINES 141 The open-end equivalent length Al,,sm(g) for a shielded microstrip line is given by Alsms(g) = C (g) (54) C(g) where Cf (g) is the excess capacitance because of the fringing fields at the open end, and C(g) is the capacitance per unit length of the shielded microstrip. The capacitance C(g) can be expressed in term of the effective dielectric constant e(g) and the characteristic impedance Z(g)= Z(g)/ ee(g), C(g) = (g) e(l) + qe()[Ee(OO)- Ee(1)] cZ (g) (5.5) = qC() +qC(oo) where c is the speed of light, q(g) = tanh(1.043 + 0.121g - 1.164/g) [70], and (Z () (5.6) (5.7) qco = qe(g) (Zo(g) The open-end capacitance Cf(g) is an unknown function. However, the first-order approximation for Cf(g) can be taken as (5.8) Cf(g) = qclCf(1) + qcooCf(o) With Eqs. (5.4) and (5.6)-(5.8), the open-end equivalent length of a shielded microstrip can be written as ge()e,-- lsms(g) = (1 - Qe(g)) e (1) Alsms(1) + qe(g) sms() (5.9) (59) By comparing the terms in Eqs. (5.3) and (5.9), we obtain q, = Eqg e(oo) s(+qe(g)Ee(oo) Fe(l)+ q(g)[Ee(oo)- e(1)] (g) e'(g) -(1±qe(g)Ee(OO) (5.10) CHAPTER 5. SHIELDED MICROSTRIP LINES 142 0.42 0.40 0.38 0.36 en E _) i, <: 0.34 0.32 0.30 0.28 0.26 1 2 3 4 5 h /h 2 6 7 8 1 Figure 5.11: Calculated open-end equivalent length for shielded microstrip lines with 2w/hl = 1. Comparison is made between the results given by Eq. (5.9), those given by Bedair's expression [69], and those generated by EM [56]. This argument is also applied to derive the even- and odd-mode equivalent lengths for the coupled shielded microstrip lines. The resulting expression is identical to Eq. (5.3) with the variables replaced by the ones corresponding to the proper mode, and q"j(g) - (5.11) - ei(l)] fe i(1) + qe,i(g)[Ee,i(oO) where i = e, o stands for even- and odd-mode, respectively. In Ref. [70], the expressions qe,i(g) are given as = tanh [1.626 + 0.1079- 1.733 { tanh I [9575- 2.965+ 1.68 - 0.311g2] ; for g ; for g < 7 7 Figures 5.11 and 5.12 show the calculated open-end equivalent lengths given by Eq. (5.9). The results agree reasonably well with the numerical results generated by a commercial 5.4. OPEN-END DISCONTINUITY IN SHIELDED MICROSTRIP LINES I 0.60- 1 I I I I I I I I I x 0.50 - EM I - I ' ' - - II I I . I. . .. . I. . . = 2 Eq. (5.9) Bedair 0.55 - I III I 143 r ,- =4 0.45 0 E (, I 0.40 - i £ = 10 0.35- r 0.300.25- il. 0 l......... I I 1 2 ...........I iii- - I I I I- 3 4 5 6 7 2w/h 1 Figure 5.12: Calculated open-end equivalent for shielded microstrip lines with h2 /h l = 6. Comparison is made between the results given by Eq. (5.9), those given by Bedair's expression [69], and those generated by EM [56]. simulator, EM [56]. The results calculated using Bedair and Sobhy's equation [69] are also shown in the figures. Bedair and Sobhy assumed that the open-end capacitance in a shielded microstrip could be approximated by those in striplines with ground-plate separations of 2h2 and 2h1 . However, their assumption is valid only when h 2 /hl is small and/or 2w/hl is large. Consequently, the results generated by their equation deviate from the correct values for large h2 /hl and for small 2w/hl. Compared to results by EM, Bedair's equation gives better approximation for small h 2 /hl where its assumptions are valid; while Eq. (5.9) provides a better overall functional form for the equivalent length, especially when h 2 /hl is greater than 3. Because of their simplicity, these closed-form expressions for the open-end equivalent lengths are well suited for computer-aided design tools. CHAPTER 5. SHIELDED MICROSTRIP LINES 144 5.5 Summary The characteristics of coupled shielded microstrip lines are studied using the equivalent surface impedance method. Coupled shielded microstrip lines are found to be highly dis- persive and the coupling strength of the structures is not the same as the coupled striplines as predicted by the quasi-static analysis. The full-wave analysis shows that the coupling strength of the shielded microstrip lines drops to a certain level and then levels off as the separation of the lines increases. The leveling of the coupling strength is caused by the parallel-plate mode supported by the ground plates. The existence of the parallel-plate mode has been proven by simulated electric field distributions and by experiments. Preliminary results by simulations and measurements suggest that the parallel-plate mode can be suppressed by tightly connecting the ground plates together to ensure an equal potential. Closed-form expressions for the open-end equivalent length in single and coupled shielded microstrip lines are derived using a phenomenological approach. These equations are obtained based upon the open-end models for the stripline and the microstrip. The calculated results agree well with those obtained using a commercial simulation package. Because of their simplicity, these formulas can be easily incorporated into computer-aided design packages. Chapter 6 Conclusions This thesis presented accurate full-wave numerical methods for analyzing superconducting microstrip planar circuits. Chapter 2 described the development of a spectral-domain volume-integral-equation method which rigorously accounts for the complex conductivity, the finite metallization thickness, and the anisotropy of superconductors. In Chapter 3, a more efficient full-wave method was developed based upon an equivalent surface impedance. Chapter 4 described a design procedure and a simulation method for superconducting edge-coupled bandpass filters based upon the equivalent surface impedance method. The power-handling capability of various superconducting resonators was also discussed. The characteristics and shielding properties of shielded microstrip lines were presented in Chapter 5. The following list summarizes the results presented in this thesis. (1) A spectral-domain volume-integral-equation method was developed for characterization of superconducting planar transmission lines. In the model, the superconductors were described by complex conductivity tensors, so that the anisotropic properties of the high-temperature superconductors could be studied. The current in the superconductors and the complex propagation constant of superconducting transmission lines were rigorously solved. (Chapter 2) (2) The effective dielectric constant and the quality factor were calculated for several mi145 CHAPTER 6. CONCLUSIONS 146 crostrip lines and coplanar waveguides made of niobium. Good agreement was obtained when the calculated results were compared with data extracted from measurements performed on resonators (Section 2.6). (3) The characteristics of a microstrip line with a thin buffer layer and a stripline with a small air gap were presented. The effects of the anisotropy of YBa2 Cu 3 O7 , were found to be negligible on the characteristics of the transmission lines fabricated on c-axis oriented films. (Section 2.6) (4) An efficient full-wave integral-equation method was formulated using an equivalent surface impedance method concept. In the formulation, the superconducting strips were replaced by infinitely thin strips. The characteristics of the superconductors were described in terms of the equivalent surface impedances. This method reduced the computation time by nearly two orders of magnitude compared to the more rigorous spectral-domain volume-integral-equation method. (Chapter 3) (5) The validity of the equivalent surface impedance approach was verified by comparing numerical results for superconducting microstrip lines with measured data and calculated results using the spectral-domain volume-integral-equation method. (Section 3.4) (6) The equivalent surface impedance method was extended to model single and coupled microstrip lines on anisotropic substrates with a rotated optic axis. Calculated results for perfectly conducting coupled lines showed good agreement with results generated by the finite-difference time-domain method. The effective dielectric constants and the characteristic impedances for single and coupled microstrip lines on M-plane sapphire were presented for various line widths, line separations, optic-axis orientations, and operating temperatures. (Section 3.4) (7) In the development of the equivalent surface impedance method, a closed-form expres- 147 sion for the current distribution in superconducting strips was obtained by curve fitting to numerical results. (Section 3.3) (8) A quantitative analysis was presented on the power-handling capability of various superconducting transmission-line resonators. The structures under consideration were microstrip lines, shield microstrip lines, coplanar waveguides, and striplines. Among all these structures, microstrip lines were found to have the largest power-handling capability. (Section 4.2) (9) Based upon the equivalent surface impedance method, a computer routine was developed for designing superconducting edge-coupled bandpass filters. An equation was derived for compensating unequal even- and odd-mode open-end effective lengths in structures such as microstrip lines where the even and odd modes propagate at different velocities. The response of the filters was obtained by modeling the filter as cascaded two-port networks consisting of quarter-wavelength couplers. In the design procedure and the simulation, the secondary coupling effects such as next-nearest-neighbor coupling and package coupling were neglected. (Sections 4.3 and 4.4) (10) A sensitivity analysis was performed on a 4-pole 1% bandwidth microstrip filter centered at 10 GHz and a 4-pole 0.05% bandwidth shielded microstrip filter centered at 2 GHz. The analysis showed that given a perfect design the filter remained well matched if the superconducting material was replaced by another superconductor even for the very aggressive 0.05% bandwith filter, except there was a shift in center frequency because of the kinetic inductance effect. The filter performance remained acceptable with a slight symmetric variation in the dimensions of the resonators, but random variations must be smaller than 2 0.05% filter. (Section 4.5) lmfor the 1% filter and 0.25 #im for the CHAPTER 6. CONCLUSIONS 148 (11) A 4-pole 1% bandwidth niobium microstrip filter centered at 10 GHz was designed using the routines developed in this thesis. The design was implemented using silver and niobium. The measured results indicated significant secondary coupling effects. (Section 4.6) (12) The characteristics of coupled shielded microstrip lines were studied using the equivalent surface impedance method. The structures were found to be very dispersive. A parallel-plate mode supported by the ground plates was found in the shielded microstrip lines. This parallel-plate mode greatly deteriorated the good shielding capability potentially provided by the shielded microstrip. Preliminary experimental and numerical results showed that tightly connecting the ground plates together could suppress the parallel-plate mode. (Secions 5.2 and 5.3) (13) Closed-form expressions for the open-end equivalent length in single and coupled shielded microstrip lines were derived based upon the open-end models for the stripline and the microstrip. The calculated results agreed well with those obtained using a commercial field simulator. (Section 5.4) The secondary coupling effects were found to be important in narrowband filters with a fractional bandwidth less than 1%. The tools developed in this thesis work cannot account for such effects. To develop an optimization subroutine which accounts for all these secondary effects is very difficult. An alternative way is to develop an efficient simulation method which rigorously models the secondary coupling effects. So that fine tuning on the filter design is possible. With a very well shielded structure, the secondary effects can be reduced. The shielded microstrip line is a very good structure if the parallel-plate mode can be suppressed. Preliminary results showed the possibility of suppressing the parallel-plate mode. Further experimental and theoretical studies are required. Appendix A Dyadic Green's Function for Isotropic Layered Media The electric dyadic Green's function Gm(T,F) for isotropic layered media as shown Fig. A.1, where the observation point is in layer (m) and the source is in the layer (n), satisfies the following relation (V x V x I- k) ) Gmn( -- 76(f -t), m -n (A.1) With a current source in the layer (n), the Green's functions with the observation point at layer (m), for m = 1, 2, 3, ..., satisfy the following boundary conditions x Gmn,,= lm i x V x Gmn = x G(m+),,, 1 x V x G(m+), /Pm+l (A.2) (A.3) at the interface between layer (m) and layer (m+1). The dyadic Green's function dyadic Green's function nn,can be expressed as a superposition of the unbounded due to the primary excitation and a scattered dyadic Green's function Vnn [30]. Hence for any layer (m) Gmn = -- n. + 9mn (A.4) where mnis the Kronecker delta function. The unbounded dyadic Green's function 9 can 149 APPENDIX A. DYADIC GREEN'S FUNCTION FOR ISOTROPIC MEDIA 150 (n-l) dn-1 £n-1 , IF I II n-1 (n) current IF source ax En, Rn II (n+1) dn+l - £n+ 1, ,n+ 1 IF 0 0 Figure A.1: A layered medium with a current embedded in layer (n). be expressed in terms of a scalar Green's function g, specifically (= [I+ kV] where k2 = 2 Jem . g(, ) (A.5) This scalar Green's function g satisfies the wave equation 2g(, V )+kg(,') =-') (A.6) By applying the Fourier transform to Eq. (A.6), we obtain 1 ) IL00 g(f'I') = (2;)7 where kmz = 12ik.(-') kz -kLZ (A.7) k - k2 - k with the imaginary part greater than zero, and k = ikx + yky + kz.For solving problems with layered media, it is more convenient to carry out the For solving problems with layered media, it is more convenient to carry out the kzintegration in Eq. (A.7) and express the Green's function in terms of a double integral. The 151 singularities exist in the ks-integration are the poles occurring at (A.8) kz = ±kmz (a-)ek ) 1-eikl To properly account for the contributions due to the poles, the integration path is deformed upward for z > z', and is deformed downward for z < z'. Thus, after the integration, we have -) ~T~) 2 (2r)2 where IL k = k + ky; dk , 00 (A.9) _ L, . = ix + y; s = ,'xx' + y' (A.10) By substituting Eq. (A.9) into Eq. (A.5), the unbounded dyadic Green's function 5 is obtained (r~,') - - km i -A') + =2 T2 f [h(kmz)h(kmz) + Jf 1 dk8 eik a(rr; )kmz z > z' O(kmz)(kmz)eikmz(zz'), (A.11) [h(-kmz)h(-kmz) + (-kmz))(-kmz)]e ' - (z z'), z < z' where the unit vectors h and v are defined as h(±kmz) = k 0(±kmz) = T: kmk + k The unit vector h is in the direction of the electric field for a horizontally polarized TE wave and the unit vector is in the direction of the electric field for a vertically polarized TM wave. In Eq. (A.11), the TE dyad h(kmz)h(kmz)exp[ikmz(z- z')] for z > z' is formed by two unit vectors. The anterior vector is related to the observation point where the wave vector has a positive z-component, and the posterior vector is related to the source point where the wave vector also has a positive z-component. The term exp[ik,,z(z - z')] accounts for APPENDIX A. DYADIC GREEN'S FUNCTION FOR ISOTROPIC MEDIA 152 the phase shift as the wave propagates from the source point at z' to the observation point at z. For z < z', the wave vector at both the observation and source points has a negative z-component. Therefore, the TE dyad is h(-kmz)h(-kmz) exp[-ikm(z - z')]. The TM dyad has the similar properties. V,,(?, r') from the physical picture It is possible to construct the dyadic Green's function of the wave radiated from the source and reaching the field point. In the spectral-domain, we have -6(-') n(,')= I8eik's(r,-)(ks Z) dk +8 The first term in (A.12) is the source dyadic and the principal value part of Gnn(T,T'). The term ,~(k, (A.12) nn(k, z, z') is the Fourier transform of z, z') is a function of the observation point, at z, and the source point, at z'. For z > z', the explicit form of n(k, z, z') is given by TE [A(knz)eiknz+ RTEh-knz)eiknz(2dn-z)] = [h(knz)e-iknz' + R Eh(-knz)eiknzz'] TM k ~[o(ki2)eiz +[ Rk_ (- )eiknz(2dn-z)] + R TijM(-kz)eiknz'] i(knz)e-'k [ (A.13) and for z < z', we have TE nn( Z< Z nz [h(-knz)eiknzz + Rnn(knz)eknzz] *[(-kn)eiknzz' + R TEjh(knz)eiknz(2dn-z')] + __ [(-knz)eiknzz +Rn f(knz)eikZ] * [(-kn,)eiknzz' + RuTM(knz)eiknz(2dn-z')] (A.14) where d is the thickness of layer (n), and 2 iknzdn rTE = (1RR RTE=TE ) e nRnn (1 - rnM rTM = TM TM e2iknzdn -1 (A.15) (A.16) 153 The factors respectively. rTE and rTM account for the TE and TM multiple reflections in layer (n), In (A.13) and (A.14), RA, and R"n are, respectively, the global reflection coefficients at the lower boundary and at the upper boundary of the layer (n), which can be obtained recursively as MY + RRl 2ik(t+l)d+l + n(t+l) R'l = R(l+l) I 1 + R+l) R(l+l)e2 ik(+1)d +l R'Y1..1 ) + R (1_1)ezik (1d 1 - 1I +R ' R1 + L(t-1)- R-u' 1 1) 2ik(lj ldt-j (A.17) (A.1) (A.18) where y = TE, TM, I = 0, 1, 2,..., and R7. is the Fresnel reflection coefficient at the interface of the i th and the j th layers. The explicit forms are IIE R':= -jkiz ikjz p z+LRt7jz + iijZ (A.19) For the microstrip problem, there is no boundary above the strip, therefore, n = 0 and the global reflection coefficients Ro are equal to zero in (A.13) and (A.14). 154 Appendix B Dyadic Green's Function for Anisotropic Media Figure B.1 shows an anisotropic substrate sandwiched by two perfectly conducting ground plates. The optic axis of the substrate is in the x-y plane. The permittivity tensor E for the substrate in the chosen coordinate system can be written as ep oI o I Cos20 + ( e ll -e) sin 0 11sin2 0(ll cos E) e sin2 0 + sinell cos8 cos 2 0 0 ex O (B.1) where qe and ell are the permittivities perpendicular and parallel to the optic axis, respectively. The 2-D dyadic Green's function (k, ky) with surface currents at z = h can be derived using the method proposed in [50]. Let k0o be the k-vector in the free space. Define k 2 = k 2 + k2, I¢§ = k k2a and K2 = k2-e. ko2. The explicit form of (k, ( ' 8)( [° f2O ) Q + °, p where fi = f2 = Ko coth[Ko(d - h)]-kkp2r + -k2 coth[Kfo(d- h)]K+ 155 1 ky) is given by (B.2) 156 APPENDIX B. DYADIC GREEN'S FUNCTION FOR ANISOTROPIC MEDIA ~ -- oo ~z %0, O d~~~~ .... d............ . . . ..... ;- l.... /j....................................... :. ..... :../I....... :..j ? / :;.···...;.....;;-::e.·. _ -. : .·:·::. :x>::; > :::::r::::i::i:·: :--* -:: ::::::::>:>: : x.-;. e e~~~~~:5:i:::::i: :K::i:::x::: :::::x:::iE|^ :: -:: ::¢: :.: -:.:. ~ : ~~~~~~~~~~::::::. : .......... ::: :::--::. ::::>::x:: ::::::::::: ::::-:::: * ,;..... ~:: ................. ................. ^:j::: d8~~~~~~~~~~8~~: ~w://///95··_·······1_····-·_·_·····C ::~~::::*:.:: x:::~:>:::: : :::: :: ::::::: : : : : :~~~~~~~~. :--:...:tf..-... .... ... ~~~........... _:..... .---///////////9 -:.x;.: :>:·: :::.::·: x ::.j: : ::::: ::::j::::j::j: -:::>x e.:.::·:···:::::e>- :: : : ::::::: i~:~:~:.~~8~:~~3~:~:~~~:~:.......... ...................... ." ..........:.................... _ Figure B.1: Cross section of an anisotropic substrate sandwiched by two perfectly conducting ground plates. r = A2 1 1I ,2 A2 [A2 coth(A 2 h) - A1 coth(Alh)] 2 A2, [A 1 coth(A 2h) - A 2 coth(Al h)] and A2 are the 'CI~U eigenvalues3Vof 1 and A2 2 "C~I B= "i EJ 0I -ko [ko( 0 -1 EP For an open structure where d -- oo, fi and f2 in Eq. 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