Data Sheet MEXKKCENa XpressKleenTM KC Assemblies Description The Pall XpressKleen KC disposable assembly uses a new generation of surface modified and patent pending PTFE membrane designed for leading edge critical chemical processes. The XpressKleen KC filter provides control of critical size particles and maintains critical fluid purity with a product guarantee of less than 3 ppb of total metal ion extractables1. The XpressKleen filter's surface cleanliness includes removal of organic contamination and surface particles. This makes the filter suitable for use in point of use (POU) and at the point of process (POP) to help fabs define a contamination control system that delivers the required fluid purity to the wafer. This is accomplished by Pall's completely integrated and advanced manufacturing capability that extends from the PTFE resin to the finished filter device. The filter cleanliness reduces process downtime and delivers fast qualification following filter change. The XpressKleen KC assembly is a completely disposable filter unit designed for critical single pass use. Features • Low extractables1 < 3 ppb total of 13 elements < 0.1 ppb (Ni), <0.2 ppb (Cu) • > 40nm particle rinse up control in UPW • TOC control • 100% prewetted with ultrapure water in package • Medium size designed KC assembly for POU retention • Disposable filter unit with filter cartridge integrally sealed in housing • Sealed assembly for safer handling and faster change-out • 100% integrity tested 1 2 Specifications Materials of Construction3 Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb.Consult factory for conditions. XP10 nm has ≤1ppb of total metal ion concentration per single length filter. 3 Removal Ratings and Operating Conditions Removal Ratings 10 nm Media code XP10 Filter area 0.85 m / 9.1 ft Flow In-line Maximum Operating Temperature 185 ˚C / 365 ˚F Maximum Operating Pressure 0.49 0.39 0.34 0.20 0.15 0.12 Parts Material Filter medium Surface-modified PTFE Media support PTFE / PFA Core, cage and end caps PFA Housing PFA All fluoropolymer materials made without PFOA. 12 nm 15 nm XP12 2 MPaG MPaG MPaG MPaG MPaG MPaG @ @ @ @ @ @ 2 30 nm XP15 0.67 m / 7.2 ft 2 2 25 ˚C / 71 psig @ 77 ˚F 60 ˚C / 56.6 psig @ 140 ˚F 90 ˚C / 49.3 psig @ 194 ˚F 120 ˚C / 29 psig @ 248 ˚F 150 ˚C / 21.8 psig @ 302 ˚F 185 ˚C / 17.4 psig @ 365 ˚F XP30 0.9 m / 9.7 ft 2 2 0.45 m2 / 4.8 ft2 Pressure Drop vs. Liquid flow Rate4 (Water, 20 ℃) In-line KC (1/2 in) In-line KC (3/8 in) 1 1.5 2 2.5 80 Flow rate (gpm) 0 0.5 12 1 1.5 2 2.5 80 XP12 10 XP12 6 XP30 4 20 2 0 0 1 2 3 4 5 6 7 8 9 Flow rate (lpm), water @ 20˚C 4 10 Clean pressure drop (kPa) 8 XP15 40 8 XP30 6 40 4 20 2 0 0 0 1 2 3 4 Flow rate (lpm), water @ 20˚C For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise. Nominal Dimensions Super Pillar5 300 P series(LDFN05__64E71) 1/2” female fitting 3/8” male fitting φ106 mm 4.17 in 88.4 mm 3.48 in 290 mm 11.41 in 5 Super Pillar is a trademark of Nippon Pillar Packing Co., Ltd. 10 60 Clean pressure drop (psid) Clean pressure drop (kPa) 60 0 XP15 XP10 12 XP10 247 mm 9.72 in 5 6 7 8 9 10 Clean pressure drop (psid) Flow rate (gpm) 0 0.5 Part Numbers / Ordering Information6 LDFN05XP 1 2 E 3 Table 1 Table 3 Table 2 Code Removal Ratings Code Inlet / Outlet Vent / Drain Code Connections 10 10 nm 06 7 ⅜ in male ¼ in male 1 20 series (Flowell) 9 12 12 nm 64 8 ⅜ in male ¼ in male 2 Super Pillar Type 15 15 nm 08 ½ in male ¼ in male 51 Flare style 30 30 nm 09 ½ in female ½ in female 71 Super Pillar 300 P series 12 ¾ in male ¼ in male 72 Super Pillar 300 P series L type 13 ¾ in female ½ in female 8 60 series Flowell 9 11CR series Flowell 6 Part numbers in combination with all codes are not always available. Please contact Pall for part number availability. 7 Flare style only 8 Super Pillar 300 P series only 9 Flowell is a trademark of Flowell Corporation. Microelectronics 25 Harbor Park Drive Port Washington, NY 11050 +1 800 360 7255 toll free US +1 516 484 3600 telephone +1 516 801 9711 fax microelectronics@pall.com Nihon Pall Ltd. 6-5-1, Nishishinjuku, Shinjuku-ku Tokyo 163-1325 Japan +81 3 6901 5700 telephone +81 3 5322 2109 fax Visit us on the Web at www.pall.com/micro Pall Corporation has offices and plants throughout the world. For Pall representatives in your area, please go to www.pall.com/corporate_contact.asp. Because of technological developments related to the products, systems, and/or services described herein, the data and procedures are subject to change without notice. Please consult your Pall representative or visit www.pall.com to verify that this information remains valid. Products in this document may be covered by one or more of the following patent numbers: US5543047; US5690765; US6113784; US7083564; US7318800; EP0982061; EP0667800; EP1380331. © Copyright 2015, Pall Corporation. Pall, ® Indicates a trademark registered in the USA. MEXKKCENa , Kleen-Change and XpressKleen are trademarkes of Pall Corporation. is a service mark of Pall Corporation. August 2015