Data Sheet E90b
VaraClean VCSC Filters
Description
The VaraClean VCSC filter provides a unique filtration
solution for critical chemical cleaning applications.
• Patented highly asymmetric polysulfone membrane
has a wide range of chemical compatibilities
• Superior flow rates give faster bath clean-up and
reduced energy consumption
• No particle release despite variations in process
conditions
• Efficient particle removal and absolute mechanical
retention
• Hydrophilic membrane, no need to prewet filter
• No IPA contamination introduced to process chemicals
• Reduced down time, DI water waste, and
inconvenience
• Fast rinse-up cartridges are factory-flushed with
18 Megohm–cm ultrapure water
• Cleanroom manufactured
Specifications
Materials of Construction
Medium
Hydrophilic asymmetric polysulfone
(single layer)
Removal ratings
1.2 µm, 0.8 µm, 0.65 µm, 0.45 µm,
0.2 µm, 0.1 µm, 0.05 µm
Hardware
Polysulfone
Configurations
Support
Fluoropolymer – upstream and
downstream
• Nominal length: 102 mm / 4 in,
254 mm / 10 in, 508 mm / 20 in,
762 mm / 30 in, 1016 mm / 40 in
• Diameter: 66 mm / 2.6 in
Sealing
Thermal bond
Operating conditions
Maximum forward differential
pressure
• 6.5 bar @ 20˚C / 90 psid @ 68˚F
• 5.0 bar @ 60˚C / 72 psid @ 140˚F
Compatibility
Compatible HF1, 2, BOE, TMAH and
other commonly used cleans and
etch bath chemicals at ambient
temperatures.
1 Polysulfone is not compatible with many solvents and concentrated acids.
Call for recommendations.
2 Consult Pall Microelectronics for specific recommendations.
Performance Parameters
Part Numbers
Removal Rating
in Microns (µm)
Water Flow for
254 mm / 10 in Element
lpm / 100 mbar
gpm / psid
Clean Pressure Drop in Water for
254 mm / 10 in Element
mbar / lpm
psid / gpm
VCSC050
0.05
8.2
1.5
12.2
0.67
VCSC100
0.1
9.3
1.7
10.7
0.59
VCSC200
0.2
16.4
3.0
6.0
0.33
VCSC450
0.45
30.0
5.5
3.3
0.18
VCSC650
0.65
32.7
6.0
3.1
0.17
VCSC800
0.8
38.2
7.0
2.5
0.14
VCSC1200
1.2
43.7
8.0
2.3
0.13
Part Numbers/Ordering Information
VCSC
1
2
3
4
Table 2
Table 1
Table 3
Code
Removal ratings
in microns (µm)
Code
Cartridge
lengths (nominal)
050
0.05
04
102 mm / 4 in
100
0.1
10
254 mm / 10 in
200
0.2
20
508 mm / 20 in
450
0.45
30
762 mm / 30 in
650
0.65
40
1016 mm / 40 in
800
0.8
1200
1.2
Code
End configurations
M3
SOE flat closed end, external 222 O-rings
M6
SOE flat closed end, external 226 O-rings
M7
SOE fin end, external 226 O-rings
M8
SOE fin end, external 222 O-rings
Table 4
Code
O-Ring materials
V
Fluorocarbon elastomer
T
FEP encapsulated silicone
F
FEP encapsulated fluorocarbon elastomer (standard)
C
Chemraz3
S
Silicone
3 Chemraz is a trademark of Greene, Tweed & Co.
Unit conversion: 1 bar = 100 kilopascals
Microelectronics
Visit us on the Web at www.pall.com/micro
25 Harbor Park Drive
Port Washington, NY 11050
+1 516 484 3600
telephone
+1 800 360 7255
toll free US
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/contact.
Because of technological developments related to the products, systems, and/or services
described herein, the data and procedures are subject to change without notice. Please
consult your Pall representative or visit www.pall.com to verify that this information remains
valid.
© Copyright 2010, Pall Corporation. Pall, and
® Indicates a Pall trademark registered in the USA.
Corporation.
E90b
are trademarks of Pall Corporation.
is a service mark of Pall
September 2010