E88a
Chemical Filtration Filters
Mega-Etch Filter
Description
Specifications
The Mega-Etch filter has been designed
for HF and BOE recirculation bath processing. The patented highly asymmetric
polysulfone membrane enables very high
flow rates and fine filtration with minimal
demand on limited pumping capacity.
The end result is fast starts, excellent
particle retention, low microbubble
potential, and superior bath quality.
Materials
Operating Conditions
• Medium: Highly asymmetric
hydrophilic polysulfone
• Core, cage, and end caps: Polypropylene
• Support: Polypropylene
• O-ring: Viton 2 A (standard)
Maximum operating temperature:
• 95˚C / 203˚F
Maximum forward differential pressure:
• 0.345 MPa (50 psid) @ 20˚C (60˚F)
When operated at ambient temperature,
the Mega-Etch filter is compatible with
a wide range of etch solutions and
semiaqueous strippers that are primarily
HF based1. It is highly recommended for
use in SiO 2 etch with surfactant and
low horsepower internal pumps. For
spontaneous wetting in high surface
tension fluid, the Ulti-Etch filter can be
used.
•
•
•
•
•
•
•
Excellent retention
Very high flow rates
Rapid bath turnover
Low extractable
Ultralow metal ion extractables option
No prewetting with IPA required
Manufactured in a cleanroom
environment
• 100% integrity tested
Removal Ratings
• 0.45 µm (0.1 µm RP)3, 0.2 µm, 0.1 µm,
0.05 µm
Filter Areas
• 254 mm / 10 in (0.65 m2 / 7.0 ft2)
• 508 mm / 20 in (1.30 m2 / 14.0 ft2)
Configurations
• Nominal length:
25.4 cm / 10 in, 50.8 cm / 20 in
• Diameter 6.6 cm / 2.6 in
1
2
3
The Mega-Etch filter should be tested before
installation to determine compatibility.
Viton is a trademark of E.I. du Pont de Nemours
and Company.
Recirculating performance. See Technical Bulletin
1038-T for more information.
Pressure Drop vs. Liquid Flow Rate 4
Flow rate (gpm)
1
0
3
2
4
5
4
0.2 µm
(EBC200)
0.025
0.1 µm
(EBC100)
0.02
3
0.015
2
0.05 µm
(EBC050)
0.01
1
0.005
0.45 µm (EBC450)
0
0
5
0
Flow rate (L/min)
4
15
10
Differential pressure (psi)
Differential pressure (MPa)
0.03
20
For liquids with a viscosity differing from water, multiply
the pressure drop by the viscosity in centipoise.
Part Numbers / Ordering Information
EBC 5 ■ - ● ◆ ▲
Removal Ratings
in Microns (µm)
Code
●
Cartridge
Lengths
Code
■
050
0.05
10
254 mm / 10 in
M3
SOE flat closed end; external 222 O-rings
100
0.1
20
508 mm / 20 in
M7
SOE fin end; external 226 O-rings
200
0.2
M8
SOE fin end; external 222 O-rings
450
0.45 (0.1 RP)3
Code
End Configurations
Code
End Configurations
◆
▲
5
6
V
Viton A (standard)
T
FEP encapsulated silicone
F
FEP encapsulated Viton A
C
Chemraz 6
Etch Bath Cartridge
Chemraz is a registered trademark of Greene Tweed and Co.
Unit conversion: 1 MPa = 10 bar
Pall Microelectronics
25 Harbor Park Drive
Port Washington, NY 11050
Visit us on the Web at www.pall.com/micro
+1 516 484 3600 telephone
+1 800 289 7255 toll free US
microelectronics@pall.com
Because of technological developments related to the products, systems, and/or
services described herein, the data and procedures are subject to change without
notice. Please consult your Pall representative or visit www.pall.com to verify that this
information remains valid.
Pall Corporation has offices and plants throughout the world. For Pall representatives
in your area, please go to www.pall.com/corporate_contact.asp.
© Copyright 2009, Pall Corporation. Pall and
® Indicates a Pall trademark registered in the USA.
Pall Corporation.
E88a
are trademarks of Pall Corporation.
is a service mark of
January 2009