Boise State University
Document Control
Date: 5/28/2016
System Information
Machine: Ellipsometer
Manufacturer: Gaertner
Model #: L115C
Operating and Maintenance Procedures
Start
1.
2.
3.
4.
5.
6.
7.
Up
Turn key on the ellipsometer clockwise.
Pull the shutter on the left of the machine out.
Put the switch on the right column to the A position.
Push the power button on the programmable step motor controller.
Turn on the monitor.
Turn on the power to the computer.
Push the F1 key for single point measurements. For 3-D mapping, go to Part
B.
8. Push the F2 key for display.
9. Push the F1 key again for the film.
10. Now you will need to decide if your film is an oxide (F5) or a nitride (F6), then
press the appropriate key.
11. It should now give you a possible thickness.
12. To see the other possible thicknesses push the F6 key.
13. Keep repeating steps 10 - 12 until you are finished measuring wafers.
14. When you are done, press the F10 key to go back to the main menu.
15. Push the F4 key to exit the program.
16. Answer yes (Y) to exit the program.
17. Push the F10 key to exit to DOS.
18. Turn off the computer and monitor.
19. Turn off the programmable step motor controller.
20. Turn off the ellipsometer.
21. Push in the shutter from the laser.
3D Mapping
1. Push the F2 key.
2. Push the spacebar.
3. Push the F2 key for engineering.
4. Push the F2 key for execute (exe).
5. Push the F2 key for wafer scan.
6. Enter your sample name (1).
7. Push the Enter key two times and you should get your map.
8. Push enter one more time.
9. Once you are done mapping wafers, press the F10 key until you return to the
main menu.
10. Then follow from step 15 from above.
Document Number: BSU_COEN_IML_16001
Prepared By: P. Miranda
Rev. A
Page: 1 of 1