Applied Surface Science 154–155 Ž2000. 135–139 www.elsevier.nlrlocaterapsusc Polarization-dependent laser crystallization of Se-containing amorphous chalcogenide films V. Lyubin b a,) , M. Klebanov a , M. Mitkova b a Department of Physics, Ben-Gurion UniÕersity of the NegeÕ, Beersheba 84105, Israel Central Laboratory of Electrochemical Power Sources, Bulgarian Academy of Sciences, Sofia 1113, Bulgaria Received 1 June 1999; accepted 29 July 1999 Abstract We report about the observation of influence of the light polarization on the photocrystallization process in the Se 70 Ag 15 I 15 , elementary Se and Se 80Te 20 films. Irradiation with linearly polarized He–Ne and Arq laser light results in the formation of polycrystalline films with strong optical anisotropy Ždichroism., the sign of which is determined by the direction of the electrical vector of light. In the laser-crystallized Se 80Te 20 films we observed also the anisotropy of the photoconductivity. The results obtained indicate that the laser-induced crystallization has a nonthermal character. q 2000 Elsevier Science B.V. All rights reserved. PACS: 78.66.Jg; 42.70.Gi Keywords: Amorphous chalcogenide films; Photoinduced phenomena; Photocrystallization; Polarization-dependent effects 1. Introduction Amorphous chalcogenide films are known to exhibit several photoinduced phenomena, both scalar Žphotodarkening, photorefraction, photodoping. and vectorial, Žphotoinduced anisotropy, photoinduced gyrotropy, photoinduced light-scattering. which are connected with photoinduced structural transformations, defects creation and diffusion of metallic atoms into the film w1–5x. These phenomena are already applied in various fields of modern microelectronics and electrooptics w1,3x. Another interesting photoinduced phenomenon is the photocrystallization first ) Corresponding author. Tel.: q972-7-6461249; fax: q972-76472903. E-mail address: vlyubin@bgumail.bgu.ac.il ŽV. Lyubin.. observed by Dresner and Stringfellow in amorphous Se films w6x and then studied by different authors w7–10x on various chalcogenide films. Recently, studying the photoinduced processes in the amorphous Se–Ag–I films, we observed a new effect, i.e., the influence of light polarization on the photocrystallization process and on the resulting properties of the crystallized films w11x. This phenomenon was then observed also in amorphous selenium Ža-Se. films w11–14x. In the present paper we report the results of a detailed study of laser-induced crystallization of amorphous Se 70 Ag 15 I 15 , elementary Se and Se 80Te 20 films. Laser-induced crystallization of the latter films was shown to be accompanied not only by optical anisotropy but also by the appearance of electrical anisotropy. 0169-4332r00r$ - see front matter q 2000 Elsevier Science B.V. All rights reserved. PII: S 0 1 6 9 - 4 3 3 2 Ž 9 9 . 0 0 4 3 7 - 7 136 V. Lyubin et al.r Applied Surface Science 154–155 (2000) 135–139 2. Experimental Amorphous Se 70 Ag 15 I 15 films were prepared by vacuum evaporation from a vaporiser with a small opening described in Ref. w15x. The a-Se and Se 80 Te 20 films were fabricated by standard thermal vacuum evaporation at a pressure of 3 = 10y6 Torr. The thickness of all chalcogenide films was in the range 300–2000 nm. Study of photodarkening and photoinduced anisotropy was carried out using an experimental set-up with two linearly polarized laser beams Žinducing and probing beams. illuminating the same area of the film. A low-power He–Ne laser beam Ž; 0.4 mWrcm2 at l s 633 nm. was applied as a probing beam, while as a photoinducing beam we used either an He–Ne laser beam Ž; 2.75 Wrcm2 , l s 633 nm. or an Arq ion laser beam Ž; 0.3 Wrcm2 , l s 488 nm.. The photodarkening was recorded by monitoring the decrease of the transmitted light intensity. The photoinduced anisotropy Ždichroism D . was determined from the equation D s 2 Ž I I yI H .rŽ I I qI H ., where I I and I H are correspondingly the intensities of the probing beam transmitted through the film for the parallel and perpendicular polarized components of the electric vector of the inducing beam. For investigation of the anisotropy of the photoconductivity we used the samples in which three Au electrodes were deposited on the oxide substrate before forming the chalcogenide film ŽFig. 1.. The electrical circuit shown in Fig. 1 was adjusted by shifting the position of the illuminating light beam in such a manner that the nano-amperemeter G showed Fig. 1. Scheme of electrical circuit and electrodes used for the study of anisotropic photoconductivity. Ž1–3. Electrodes; Ž4. position of the laser beam; V1 and V2, electrical batteries; G, nanoamperemeter. a zero current by illumination of the sample with nonpolarized light. By irradiation with strong Žinducing. linearly polarized light, the device G showed a current if the photoconductivity became anisotropic, as the electrical fields between electrodes 1–2 and 2–3 were directed either in parallel or perpendicular to the electrical vector of probing light. In the structural investigations we used the standard methods of optical microscopy, scanning electron microscopy ŽSEM. and X-ray diffraction ŽXRD.. All experiments were accomplished at room temperature. 3. Results 3.1. Se7 0 Ag 15 I15 films The photodarkening under the action of both He– Ne- and Arq- ion laser light was not observed in the as-prepared Se 70 Ag 15 I 15 films, as seen from Fig. 2. Excitation of such films by the linearly polarized light led to the generation of linear photoinduced dichroism with properties analogous to that observed in the AsSe films studied previously w16x. At the same time, storage of the films at temperature of 30–358C during 2–3 weeks or the artificial aging Žannealing at 708C for 2 h. resulted in a noticeable change of photoinduced processes in them. The prolonged photodarkening appeared under irradiation of the films by both He–Ne- and Arq-laser beams ŽFig. 2.. The dichroism excited by the light with a constant direction of the polarization vector changed its sign after 10–20 min of irradiation and grew slowly, achieving very large values of D s 15–18% as shown in Fig. 3. Relaxation of dichroism after interruption of the exciting light Žat various D values. was not observed ŽFig. 3.. Annealing of irradiated Žphotodarkened. films at a glass transition temperature of 558C and even at 80–908C for several hours did not lead to a thermobleaching and to the destruction of dichroism, opposite to the results in the AsSe films where annealing was accompanied by the increase of transparency Žbleaching of the film. and by the disappearance of dichroism w4,5,16x. These results allowed us to assume that we do not deal here with the usual photodarkening and photoinduced anisotro- V. Lyubin et al.r Applied Surface Science 154–155 (2000) 135–139 Fig. 2. Kinetics characteristics of transmission changes in as-prepared and thermally treated Se 70 Ag 15 I 15 film induced by linearly polarized He–Ne and Arq laser light. py but with another photoinduced effect, i.e., photocrystallization w6–10x. This assumption was confirmed also by structural investigations. X-ray analysis of the irradiated films showed for instance the presence of Se, Ag 2 Se and AgI microcrystallites. To check if the observed phenomenon is characteristic not only for amorphous Se–Ag–I films but also for other amorphous chalcogenide films, we investigated the films of ‘‘classical’’ amorphous materials displaying the photocrystallization phenomenon such as amorphous selenium Ža-Se. and Se–Te films w6–10x. 3.2. a-Se and Se 8 0 Te2 0 films The whole set of characteristics shown above for the Se 70 Ag 15 I 15 films was also observed in the a-Se Fig. 3. Kinetics characteristics of dichroism generation in thermally treated Se 70 Ag 15 I 15 film stimulated by linearly polarized He–Ne laser light — horizontal Ž1. and vertical Ž2. directions of the electrical vector. Dichroism relaxation after interruption of the exciting light at various dichroism values Ž3–5. are also shown. 137 and Se 80 Te 20 films. As obtained by the deposition process, these films did not display photodarkening at room temperature, but only after a thermal treatment, i.e., annealing at 50–708C for 1 h, they could be photodarkened by a He–Ne laser beam with power 2.75 Wrcm2 . The annealed a-Se and Se 80 Te 20 films displayed large photoinduced dichroism, and the sign of the dichroism changed with changing the polarization direction of the inducing light to the orthogonal one. Such reorientation of dichroism in the studied films was very different from the same reorientation in the AsSe films w4,16x. At the beginning of the experiment, the vertical polarization vector stimulated an increase of positive dichroism while the horizontal polarization vector diminished the positive dichroism and led finally to a negative dichroism. In the next stages the reverse processes were observed as shown for the Se 80 Te 20 films in Fig. 4. Photodarkening and photoinduced dichroism were stable, i.e., they did not relax in the darkness and could not be erased in the process of annealing at the glass transition Ž418C and 608C, respectively, for a-Se and Se 80 Te 20 films. and at higher temperatures. The appearance of photoinduced crystallization in a-Se and Se 80 Te 20 films was confirmed by SEM and XRD analyses. Especially important is that in the Se 80 Te 20 films Žwhich had a much smaller electrical resistance than the Se 70 Ag 15 I 15 and a-Se films. we observed a photoinduced anisotropy of photoconductivity. The results of the study of the Se 80 Te 20 samples, using Fig. 4. Kinetics characteristics of dichroism generation and reorientation in a thermally treated Se 80 Te 20 film stimulated by linearly polarized He–Ne laser beam with horizontal Ž x . and vertical Ž y . directions of the electrical vector. 138 V. Lyubin et al.r Applied Surface Science 154–155 (2000) 135–139 Fig. 5. Kinetics characteristics of photocurrent D I in a thermally treated Se 80 Te 20 film induced by linearly polarized He–Ne laser beam with horizontal Ž x . and vertical Ž y . directions of the electrical vector. the special electrical circuit, shown schematically in Fig. 1, are demonstrated in Fig. 5. It can be seen that the irradiation of the sample by the inducing linearly polarized light beam leads to the appearance and growth of a photocurrent D I in the circuit. Changing the polarization direction of the inducing light was always accompanied by corresponding reversible jumps of the current. Kinetics of photocurrent is quite analogous to the kinetics of the optical dichroism changes shown in Fig. 4. 4. Discussion The polarization-dependent laser-induced crystallization was observed in the Se 70 Ag 15 I 15, a-Se and Se 80 Te 20 films, showing that this effect is typical for quite a number of selenium-based chalcogenide materials. Polycrystalline films prepared by linearly polarized light irradiation displayed a large linear dichroism with a sign which depended on the direction of the electrical vector of light and was opposite in sign to the photoinduced dichroism in the as-prepared films. In the laser-crystallized Se 80 Te 20 films we observed also an anisotropy in photoconductivity. To the best of our knowledge, this is the first reported case where the photoinduced optical anisotropy in chalcogenide films is accompanied also by electrical anisotropy. Discussing the peculiarities of the dichroism kinetics, we can assume that the early stages of the process can be related to the kinetics of polarization-dependent laser-induced crystallization and the later stages are related to the anisotropy of photoconductivity in the photocrystallized Se 80 Te 20 films. The results obtained show that the laser-induced crystallization has a nonthermal character and is indeed a photonic process as the thermal process cannot be polarization-dependent. The results also can be related to the model of photocrystallization, proposed in Ref. w7x which assumes a rupture of interatomic covalent bonds parallel to the electrical vector of photoinducing light, resulting in the directional growth of crystallites. This mechanism is discussed in our previous paper w11x. Large values of photoinduced dichroism accompanying the laser crystallization can be used in modern optoelectronics and photonics w11x. 5. Conclusion We have observed the dependence of laser-induced crystallization of amorphous Se 70 Ag 15 I 15 , elementary Se and Se 80 Te 20 films on the polarization state of the inducing light beam. Polycrystalline films formed as a result of irradiation by linearly polarized light beam displayed large linear dichroism with a sign which depends on the direction of the electrical vector of light. Optical anisotropy was shown to be accompanied by the appearance of photoconductivity anisotropy. The results obtained support the model of photoinduced crystallization based on the photoinduced rupture of interatomic covalent bonds. Acknowledgements The authors would like to thank Dr. T. Petkova for preparation of the Se 70 Ag 15 I 15 samples. This work was supported by a grant from the Israeli Ministry of Science as well as by grant X-558 of the Bulgarian Ministry of Education, Science and Technology. References w1x K. Tanaka, Rev. Solid State Sci. 4 Ž1990. 641. w2x H. Fritzsche, Philos. Mag. B 68 Ž1993. 561. w3x A. Kolobov, S.R. Elliott, Adv. Phys. 40 Ž1991. 625. V. Lyubin et al.r Applied Surface Science 154–155 (2000) 135–139 w4x V.M. Lyubin, V.K. Tikhomirov, J. Non-Cryst. 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