Properties of Photonic and Plasmonic Resonance Devices Jae Woong Yoon, Kyu Jin Lee, Manoj Niraula, Mohammad Shyiq Amin, and Robert Magnusson Dept. of Electrical Engineering, University of Texas – Arlington, TX 76019, United States Outline • • • • • • Introduction Guided-mode resonance bandpass filters. Broadband omnidirectional Si grating absorbers. Transmission resonances in metallic nanoslit arrays. Gain-assisted ultrahigh-Q SPR in metallic nanocavity arrays. Conclusion 2 Photonic Resonances in Periodic Thin Films Thin-film interference Guided-mode resonance Guided mode by TIR - Highly controllable with the pattern’s geometry. - Spectral engineering by blending of multiple guided modes. 3 Guided-Mode Resonances in Dielectric and Semiconductor Thin-Film Gratings Low index-contrast gratings [Wang and Magnusson, Appl. Opt. 32, 2606 (1993)] - High-Q, narrow band resonances. - Primarily reflection peaks. - Optical notch filters, biosensors, and so on. High index-contrast gratings [Ding and Magnusson, Opt. Express 12, 5661 (2004)] - Both broadband + narrow-band effects. - Versatile spectral engineering. - Lossless mirrors/polarizers, flat microlenses, bandpass filters, broadband resonant absorbers, and so on. 4 Bandpass Filters: Theoretical 1.0 Air R nC d1 d2 n1 n2 Air Air nC Λ I R dG nF c-Si nS nS nS T nS Conventional multilayer T 0.8 SiO2 Single-layer GMR structure fΛ dF Transmittance I Multilayer GMR 0.6 0.4 SiO 2 0.2 0.0 1250 1275 1300 1325 Wavelength (nm) 1350 Major advantages - Simple fab. processes (involves less fabrication errors). - Stop-bands and pass-line are determined by geometry of the surface texture. 5 Bandpass Filters: Experimental 1.0 z-axis (nm) Surface profiles (AFM) 0.6 0.4 0.2 1.0 200 100 Measurement Simulation 0.5 0.0 1300 1304 1308 0.0 1200 300 0 Transmittance (T0) 0.8 1250 1300 1350 1400 Wavelength (nm) 0 500 1000 1500 2000 2500 3000 3500 x-axis (nm) Design Fabricated Air Air Performance Parameters - Pass-line (peak): 0.4 nm FWHM, 83% efficiency. - Stop-band: < 1% over 100 nm bandwidth. - Angular tunability = 6 nm/deg. SiO 2 SiO 2 6 Broadband Omnidirectional Absorbers: Theoretical 0 0.2 0.4 0.6 0.8 1 0.8 TM (planar) wavelength (mm) 340 nm Planar absorber a-Si:H SiO2 TE (planar) 0.7 0.6 0.5 0.4 0.3 -90 -60 -30 GMR absorber 0.8 TM, 15.5% fill factor 0 TM, f = 30 TM, 30 60 90 f = 60 TM, f = 90 1 0.6 0.8 0.5 wavelength (mm) 2000 nm 30 60 90 -90 -60 -30 q (polar angle in deg.) 0.7 L = 419 nm 30 nm f=0 0 0.4 0.3 0.8 0.6 (a) (b) (c) (d) TE, f = 0 TE, f = 30 TE, f = 60 TE, f = 90 0.4 0.7 0.6 0.2 0.5 0.4 (e) (f) (g) (h) 0 0.3 0 30 60 90 0 30 60 90 0 30 60 polar angle of incidence (q in deg.) 90 0 30 60 90 7 Broadband Omnidirectional Absorbers: Theoretical Resonant Light Trapping (a) TM, f = 0 0.65 Anti-Reflection Effect R0 unpatterned surface (b) TE, f = 0 patterned surface R-1 R0 0.5 f = 90 wavelength (mm) 0.60 (f) (a) TM 0.2 120 90 (b) TM 60 120 60 (d) 0.55 150 0.1 (c) (e) 0.50 0.05 q=0 180 0.45 330 0.01 0 15 30 45 60 q (polar angle in deg.) 25 (d) 0 75 90 14 0 15 (e) 0 30 45 60 q (polar angle in deg.) 11 (f) 0 75 0 180 90 240 90 90 300 240 120 90 (d) TE 60 150 0 120 0 30 0 180 30 240 90 330 300 0.2 330 60 210 240 90 300 270 270 0 0 30 60 210 60 150 30 180 300 270 90 (c) TE 330 60 210 270 3 0 30 60 210 0 0 30 30 0.02 0.40 (c) 150 30 0.4 0.6 0.8 1 8 Broadband Omnidirectional Absorbers: Experiment (a) collimated white light 1.0 (b) (c) normalized power R high N.A objective lens 143.6 sample 0.8 extinction 0.6 extinction from unpatterned area 0.4 experiment theory (RCWA) 0.2 T R integrating sphere T 0.0 450 500 550 600 650 700 750 800 wavelength (nm) (a) (c) (b) (d) 1D a-Si grating unpatterned area 1 inch 1 mm 1 mm 100 mm 9 Surface Plasmon Resonances in Metallic Nanostructures • Collective oscillation of surface free electrons. • Deep subwavelength confinement: - Metallic metamaterials. - Optical communication with nanoscopic objects. - Quantum optical effects. • Highly lossy due to ohmic damping. • Primarily absorption and transmission resonances. (↔ Photonic resonances) 10 Extraordinary Optical Transmission Nature 391 667; Phys. Rev. B 58 6779. SPP Destructively interfere 2 0.45 0.14 0.06 11 Extraordinary Optical Transmission Cao et al., Phys. Rev. Lett. 88 057403 (2002) “Negative role of surface plasmons in the transmission of metallic gratings with very narrow slits” Fabry-Perot resonance of slit guided mode CM Destructively interfere SPP resonance condition 12 Surface and Cavity Plasmonic Resonances in Metallic Nanoslit Arrays 10-6 10-5 10-4 10-3 10-2 10-1 1 1.25 a E 1.20 l (L) H z y x 2 3 4 T (Analytic Theory) 5 1.15 1.10 SPP t T b T (RCWA) q =1 1.05 r in 1.00 0.2 0.4 0.6 0.8 1.0 1.2 1.4 0.2 0.4 0.6 0.8 1.0 1.2 1.4 CM t d (L) RCWA Analytic Theory 1 d/L q= 4 -2 10 CM rD+rSP=rin h in SPP 10-4 10-6 1 h in hex 1.06 a, Lossless (eM'' = 0) Metal 10-2 To External Planewave t=tSP+tD T Metal q= 5 T Slit 10-4 10-6 b, Lossy (eM'' = 0.01) 1.00 1.05 1.10 1.15 l (L) 1.20 1.25 13 Toward Ultrahigh-Q Metallic Nanocavity Resonances 0.3 2.0 |rin| t 0.2 2 200 nm 1.5 2 0.9 2 100% air dielectric |t| 1.0 Ag semi-infinite 1.0 500 nm 25 nm 0.1 0.5 l AR 0.8 0.0 0.8 0.7 surface excitation (b) 0.6 T k=0 k = 2.26103 air dielectric 200 nm Ag 460 nm q= 4 0.4 0.0 q= 2 200 nm air T q= 5 0.2 q = 3 (missing) 0.2 0.0 0.8 |t|2 0.1 0.6 T normalized power (a) |Ez /E0| 1.1 0.0 600 650 700 750 800 wavelength (nm) 850 900 0.4 (c) air 3.6104 PMMA with optical gain in the dielectric host Ag PMMA 0.2 air 0.0 600 650 700 750 800 0 850 900 wavelength (nm) 14 Conclusion • Demonstrated optical bandpass filters and broadband absorbers based on high-index contrast subwavelength waveguide gratings. • Explained complex resonance effects in metallic nanoslit arrays with a simple model of an optical cavity with Fanoresonant reflection boundaries. • The theory predicts efficient room-T ultrahigh-Q plasmonic nanocavity resonances with the externally amplified intracavity feedback mechanism. 15 ACKNOWLEDGEMENT This research was supported, in part, by the UT System Texas Nanoelectronics Research Superiority Award funded by the State of Texas Emerging Technology Fund as well as by the Texas Instruments distinguished University Chair in Nanoelectronics endowment. Additional support was provided by the National Science Foundation (NSF) under Award No. ECCS-0925774 and IIP-1444922. Publications with these works: [1] J. W. Yoon, K. J. Lee, W. Wu, and R. Magnusson, “Wideband omnidirectional polarizationinsensitive light absorbers made with 1D silicon gratings”, Adv. Opt. Mater. 2014; doi:10.1002/adom.201400273. [2] J. W. Yoon, J. H. Lee, S. H. Song, and R. Magnusson, “Unified theory of surafce-plasmonic enhancement and extinction of light transmission through metallic nanoslit arrays”, Sci. Rep. 4, 5683 (2014). [3] J. W. Yoon, S. H. Song, and R. Magnusson, “Ultrahigh-Q metallic nanocavity resonances with externally-amplified intracavity feedback”, Sci. Rep. 4, 7124 (2014).