The Boston University Photonics Center (BUPC) is a 235,000 square foot facility
with ten floors that house more than twenty-five faculty research laboratories,
three shared laboratories and a business incubator. The BUPC also has
instructional and seminar facilities specifically designed for photonics research
and education.
BUPC has three core-shared facilities. The Optoelectronic Processing Facility is
a 2500 square foot multi-user cleanroom facility. It includes both Class 100 and
1000 cleanrooms with equipment facilitating photolithography, wet chemical
processing, thin film depositions, plasma etching and cleaning, thermal oxidation,
thermal annealing and electrical characterization. The Integrated Optics
Laboratory is located in a 400 square foot Class 100 cleanroom and houses
equipment for eutectic die and thermal compression flip chip bonding, and an
outer laboratory for optical spectroscopy and PDMS soft lithography replication.
The Precision Measurement Laboratory is located in a 1500 square foot vibration
isolated basement space, and houses equipment for surface mapping
interferometry, field emission scanning electron and atomic force microscopy,
and e-beam writing.