CENTER FOR NANOSCALE SCIENCE AND ENGINEERING
Standard Operating Procedure
Plasma Etch
Matt Deye, Bonnie Cheng, Brian Wajdyk
Version 1.1
Page 1 of 6
Important


Gloves should be worn at all times while handling the Pyrex dish, samples, or working inside
chamber to prevent contamination.
Pyrex dish may be hot after the process has completed. Open door and allow dish to cool down
for several minutes after the process has completed.
Version 1.1
Page 2 of 6
Machine Chamber and Accessoires
Pyrex Dish
Dish Prop
Base Plate
Rubber Gasket
Vacuum Gauge
Vacuum Pump
Version 1.1
Page 3 of 6
Device controls
Three-Way Valve
Gas Flow Meter
Oven Controls
Version 1.1
Page 4 of 6
Operating Procedure
1. Preparation
1.1. It is recommended that you place your sample on a clean glass plate and then place the glass
plate on the base plate for better cleaning. This step is optional.
2. Load the sample
2.1. Open the microwave oven door.
2.2. Tilt Pyrex dish back to expose base plate.
2.3. Place sample in center of base plate.
2.3.1. You may use the metal prop, located on the left side of the oven, to hold the Pyrex dish if
two hands are required to place sample.
2.4. Cover sample with the Pyrex dish and verify that the dish is in contact with the orange rubber
gasket around the base plate.
2.5. Close the oven door
3. Start pumping
3.1. Behind the oven, turn the three-way valve to the vacuum gauge (Upright Position)
3.2. Turn on vacuum pump (located to the right of the oven, power switch is behind pump)
3.3. Wait until the pressure gauge reads below 25 inches of mercury.
4. Start gas
4.1.
4.2.
4.3.
4.4.
Open the valve on the top of the Oxygen cylinder (counter clock wise).
Turn three-way valve from vacuum gauge to flow meter.
Turn on gas and ensure that approximately 1 SCFH is flowing through meter
Wait 60 seconds.
5. Set process time.
5.1. Select a time for the asher to run. Pressing 1 will run the process for 1 minute, 2 will run the
process for 2 minutes. Time for more than 6 minutes is entered by pressing the “Time cook”
button then entering the time by the keypad.
5.2. The plasma will glow, especially in a darkened room.
6. Purging chamber
6.1. Turn gas supply off at the tank.
6.2. Turn three-way valve back to the vacuum gauge. Allow pump to purge the chamber for 60
seconds to remove any contaminants
7. Venting chamber
7.1.
7.2.
7.3.
7.4.
7.5.
Turn vacuum pump off.
Open oven door.
Wait several minutes for Pyrex dish to cool down.
Slowly turn three-way valve to open air to vent chamber
Allow chamber to reach atmospheric pressure.
Version 1.1
Page 5 of 6
8. Removing sample
8.1. Once Pyrex dish has cooled, lift dish and remove sample.
8.2. Use the dish prop on the left side of the oven chamber if needed
9. After using machine
9.1. Place Pyrex dish on rubber gasket.
9.2. Close oven door.
9.3. Ensure that gas supply valve on top of the tank and vacuum pumps are switched off.
Version 1.1
Page 6 of 6