Правительство Российской Федерации
Федеральное государственное автономное образовательное учреждение
высшего профессионального образования
"Национальный исследовательский университет
"Высшая школа экономики"
Московский институт электроники и математики Национального
исследовательского университета "Высшая школа экономики"
Факультет электроники и телекоммуникаций
Программа дисциплины «Материаловедение наноструктурированных
материалов»
для направления 222900.62 «Нанотехнологии и микросистемная техника »
подготовки бакалавра
Автор программы: Новоселова Е.Г., к.ф.-м.н., enovoselova@hse.ru
Одобрена на заседании кафедры «Микросистемная техника,
материаловедение и технологии» «_8__»_сентября___________ 2014 г
Зав. кафедрой Кулагин В.П.
Рекомендована профессиональной коллегией
УМС по электронике
Председатель С.У. Увайсов
Утверждена Учёным советом МИЭМ
Ученый секретарь В.П. Симонов
Москва, 2014
Настоящая программа не может быть использована другими подразделениями
университета и другими вузами без разрешения кафедры-разработчика программы.
The course «Material science of nanostructured materials» is designed to provide an
introduction to nanomaterials and devices to the third-year students of bachelor study
programme in Nanotechnology .
Course objective:
providing a basic understanding of the relationships between physical properties or phenomena
and material dimensions. Also, we will discuss fabrication and application of nanostructures or
nanomaterials. The course will be focused primarily on inorganic materials.
Course contents:
1. Introduction. Emergence of Nanotechnology. Classification of nanosized structures.
2. Physical Chemistry of Solid Surfaces
Thermodynamics of surfaces. Surface Energy. Chemical Potential as a Function of Surface
Curvature. Electrostatic Stabilization. Surface charge density. Electric potential at the proximity
of solid surface. Van der Waals attraction potential. Interactions between two particles.
3. Zero-Dimensional Nanostructures: Nanoparticles
Fundamentals of Homogeneous nucleation. Synthesis of metallic, semiconductor and oxide
nanoparticles. Nanoparticles through Heterogeneous Nucleation. Kinetically Confined Synthesis
of Nanoparticles
4. One-Dimensional Nanostructures: Nanowires and Nanorods
Spontaneous Growth. Fundamentals of evaporation (dissolution)-condensation growth
Evaporation condensation growth. Dissolution-condensation growth. Template-Based Synthesis.
Lithography
5. Two-Dimensional Nanostructures: Thin Films
Fundamentals of Film Growth. Vacuum Science. Physical Vapor Deposition (PVD).
Evaporation. Molecular beam epitaxy (MBE). Sputtering. Comparison of evaporation and
sputtering. Chemical Vapor Deposition (CVD). Typical chemical reactions. Reaction kinetics.
Transport phenomena. CVD methods. Diamond films by CVD. Atomic Layer Deposition
(ALD). Superlattices. Self-Assembly. Langmuir-Blodgett Films. Electrochemical Deposition.
6. Nanostructures Fabricated by Physical Techniques
Lithography. Photolithography. Soft lithography. Assembly of Nanoparticles and
Nanowires
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Learning outcomes:
The students:
will recognize the classification of nanosized structures,
will be able to understand fundamentals of synthesis and processing of nanomaterials and
nanostructures,
will be able to discuss structure and properties of nanostructured films and coatings
will be able to describe methods employed for nanomaterial fabrication
Form of tuition:
Lectures, tutorials, practical courses and self-study
Course material:
Powerpoint presentations, internet
Literature:
Pogrebnjak A., Beresnev V. Nanocoatings Nanosystems Nanotechnologies.
SAIF Zone, Sharjah, UAE: Bentham Science Publishers, 2012
Guozhong Cao Nanostructures and nanomaterials. Synthesis, Properties, and
Applications/ Imperial College Press, 2004
Entry requirements:
Students registering for this course are required to have a basic knowledge in
physics, chemistry, semiconductor materials and devices
Course contents per week
Week
1
2
3
4
5
6
7
8
9
10
week
6
7
8
Course contents – lectures
Contents
Introduction. Emergence of Nanotechnology. Classification of
nanosized structures
Thermodynamics of surfaces. Surface Energy. Chemical
Potential as a Function of Surface Curvature
Electrostatic Stabilization. Surface charge density. Electric
potential at the proximity of solid surface. Van der Waals
attraction potential. Interactions between two particles.
Fundamentals of Homogeneous nucleation .Synthesis of
metallic, semiconductor and oxide nanoparticles.
Nanoparticles through Heterogeneous Nucleation. Kinetically
Confined Synthesis of Nanoparticles
Spontaneous Growth. Fundamentals of evaporation
(dissolution)-condensation growth. Evaporation condensation
growth.
Nanowires and nanorods. Template-Based Synthesis.
Lithography.
Fundamentals of Film Growth. Vacuum Science. Physical
Vapor Deposition (PVD). Evaporation.
Molecular beam epitaxy (MBE). Sputtering. Comparison of
evaporation and sputtering .
Chemical Vapor Deposition (CVD). Typical chemical
reactions. Reaction kinetics. Transport phenomena. CVD
methods. Diamond films by CVD
Course contents – practical courses
Contents
Study of the formation of nanoscale films by magnetron
sputtering
Determination of nanoscale films parameters by X-ray
reflectivity
High-resolution X-ray diffraction study of epitaxial structures
9
Small-angle X-ray scattering study of metal clusters size in the
polymer matrix
Workload table
Activity
Total workload
Time (hours)
108
Class hours
60
Lectures
Laboratory
Seminar
20
20
20
Working hours out of class
48
Evaluation system
mid-term studies
(10 points max.)
Assignment
Reports on
practical courses
Quiz
Total
Contribution, %
20
60
(4х15%)
20
100
Contribution of mid -term studies to pass mark (10 points max.) – 40%
Type of final exam –oral. It is a closed book examination.
Contribution of final exam (10 points max.) to pass mark– 60%