1
University of Jyväskylä
Invitation to tender
1291/2/31/2012
Department of Physics for an Atomic Layer Deposition system
ANNEX 3. REQUIREMENTS FOR THE SYSTEM AND THE
TENDER, SELECTION CRITERIA
Tender form, please complete and return with the Tender
Name of the tenderer:
INSTRUCTIONS
The tenderer is asked to answer the following questions and to provide an unambiguous
answer ”yes” or “no” and to attach the required documents to its tender. However, note
that some items require answers other than yes/no, they can be typed into this document
or given in a separate annex.
For a tender to be accepted, all the minimum requirements listed in this annex must be
fulfilled. The form may be completed in electronic format or by hand, but the contents of
the form may not be altered.
The tenderer shall, upon request, submit proof of compliance with each requirement.
These documents may be requested from the tenderer that is deemed as the probable
winner of the contract. A tenderer who fails to submit proof within the given time frame
will be excluded from the bidding.
The preferred requirements are not mandatory, but they will be taken into account when
grading each selection criterion. Answers and comments to these can be given in this
document or in an annex.
MINIMUM REQUIREMENTS FOR THE SYSTEM AND TENDER
General
TENDERERS ANSWERS AND
DOCUMENTS
The system shall be a hot-wall type
Atomic Layer Deposition system that is
capable of depositing multiple different
Yes
thin films on a single substrate with
thickness of couple of nanometers to
hundreds of nanometers.
The system is equipped with plasma
assisted deposition system to allow
Yes
depositions in lower temperatures.
Dual reaction chamber design: within a
larger vacuum vessel a smaller inner Yes
reaction chamber that can be detached
easily for maintenance.
No
No
No
2
University of Jyväskylä
Invitation to tender
1291/2/31/2012
Department of Physics for an Atomic Layer Deposition system
The equipment is class 1000 (ISO 6) clean
room compatible.
Yes
No
Ozone generator is included.
Yes
No
Changeable process chambers for different
sample sizes (see section for samples
below). Time requirement for chamber
change must be presented.
Yes
No
Available options for precursor lines etc.
are listed with prices in the tender.
Yes
No
The pump line includes a particle trap
between the reactor and a dry pump.
Yes
No
Pumping speed of reaction chamber pump
at least 300 m3/h.
Yes
No
Base pressure of less than 5 Pa achievable
in the vacuum vessel.
Yes
No
SAMPLES
The system shall be able to operate with
following sample types and sizes:
TENDERERS ANSWERS
Standard silicon wafers with diameter up
to 150 mm
Yes
No
Small silicon chips, for example 1x1 cm2
Yes
No
Items with a maximum size of
100x100x90 mm3
Yes
No
Yes
No
Yes
No
Porous 50–100 µm thick structures similar
to micro channel plates with high aspect
ratios (up to 50–100).
The system must be able to process
samples with sensitive parts such as thin
membranes without breaking them (for
example during pump-down).
Time estimate:_____min
PROCESSES
TENDERERS ANSWERS
The system shall be able to process at least
the following materials:
Oxides: Al2O3, TiO2, ZnO, SiO2, Ta2O5,
Yes
No
3
University of Jyväskylä
Invitation to tender
1291/2/31/2012
Department of Physics for an Atomic Layer Deposition system
HfO2, MgO
Nitrides: TiN, NbN, BN, AlN, SiN, TaN
Fluorides: MgF2
Metals: Ru, Ag, Pt, W
ALD and PEALD processing possible in
one process sequence without changing
hardware configuration to allow
deposition of nanolaminates of ALD and
PEALD films.
Yes
No
Process temperature range 80–500 °C
Yes
No
Source temperature up to 200 °C
Yes
No
Installation of at least six gas, solid or
liquid sources possible (in total)
Yes
No
Compatibility with chloride-based
reactants in long-term use.
Yes
No
WARRANTY, MAINTENANCE
TENDERERS ANSWERS AND
DOCUMENTS
Minimum 1 year warranty for all parts of
the system.
The supplier must guarantee that the
service, spare parts and other maintenance
are available for at least five years after the
purchase.
A list of commonly needed spare parts,
their estimated consumption and their
prices are included in the quotation.
Most common spare parts are available in
stock from the tenderer and can be shipped
to the buyer’s facility within 36 hours.
Free software updates during the warranty
period.
Reactor safety assessment document is
delivered with the tool. This document
includes a description of tool response to
any abnormal operation conditions that
can be expected to be encountered over the
first 10 years of operation.
During the warranty period the tenderer
Yes
No
Yes
No
Yes
No
Yes
No
Yes
No
Yes
No
Yes
No
4
University of Jyväskylä
Invitation to tender
1291/2/31/2012
Department of Physics for an Atomic Layer Deposition system
provides
on-site
technical
and
maintenance support within 72 hours of a
request from the buyer. Weekends and
public holidays are excluded from this
time.
During the warranty period the response
time for telephone or e-mail support does
Yes
not exceed 8 hours during normal office
hours.
No
Remote support is free of charge.
Yes
DELIVERY, INSTALLATION,
TRAINING
TENDERERS ANSWERS AND
DOCUMENTS
Delivery time not longer than six months.
Yes
No
Yes
No
Yes
No
Yes
No
Yes
No
Yes
No
Installation documentation is provided at
least four weeks before the delivery of the
tool. This includes a description of the
required infrastructure such as gas lines,
connectors, electricity, exhaust, cooling,
etc.
Other technical documents and manuals
including component charts and circuit
diagrams must be delivered at the time of
installation. The documentation includes
instructions for maintenance of the
reaction zone parts and plasma source by
the buyer’s trained personnel.
The tenderer is responsible for the
installation and commissioning of the tool.
The buyer is responsible for the
connection of the tool to the facility
support systems.
End-user training must be provided at
buyer’s site. Training of proper
maintenance of the tool is included.
A safety interlock list (both hardware and
software) is provided with the tool.
No
5
University of Jyväskylä
Invitation to tender
1291/2/31/2012
Department of Physics for an Atomic Layer Deposition system
1. SELECTION CRITERIA: PRICE (50 POINTS)
Please fill the form in Annex 4.
Preferred requirements
-
-
-
If it is recommended that some of the planned processes should not be done in
the same process chamber, the tender should include at least two chambers for
each process type.
The tender should also state if some of the planned materials cannot be used in
the same source line due to risk of cross-contamination, and a quote for the
parts that need to be changed when switching between such materials should
be included.
A quote for a possible option that can improve the performance for depositing
films on high aspect ratio structures.
Tenderer’s answer (or annex):
2. SELECTION CRITERIA: TECHNICAL REQUIREMENTS AND
PERFORMANCE (30 POINTS)
Performance test
Two reference samples are required:
1) A 200 nm Al2O3 film deposited on a 150 mm wafer with about 400 nm thick
PMMA layer on it, the deposition temperature should not exceed 100 °C.
2) A 100nmTiN/50nmAl2O3/Si film structure on a 150 mm Si wafer.
Wafers for the tests will be sent from Jyväskylä by request and full wafers should
be returned to Jyväskylä before the ending of this tender. The samples should be
shipped to address:
Timo Sajavaara
University of Jyväskylä, Department of Physics
Survontie 9
40500 Jyväskylä
Finland
The exact process parameters need to be given with the samples. The composition,
resistivity and other properties of the films will be characterized in Jyväskylä.
6
University of Jyväskylä
Invitation to tender
1291/2/31/2012
Department of Physics for an Atomic Layer Deposition system
Preferred requirements
-
-
Better performance (temperature range, pumping speed, number of precursors
etc.) than in the minimum requirements.
It is preferred that the vacuum pumps are placed in the service corridor
outside the cleanroom, if possible.
It is preferred that the small chips can be placed on a carrier without the need
for clamping or gluing.
No shortcutting in the plasma head: the reactor has proven capability of
depositing thick layers (at least 4 µm) of conductive films by PEALD process
without maintenance.
A list of recommended gas alarm sensors. The buyer has a central gas alarm
system that will be used also around ALD equipment
The tenderer should declare to which extent they will provide the buyer with
their current process library and will any new processes developed in the
future be disclosed to the buyer.
Tenderer’s answer (or annex):
3. SELECTION CRITERIA: DELIVERY TIME, TRAINING,
WARRANTY, MAINTENANCE AND SPARE PARTS (20 POINTS)
Preferred requirements
-
Delivery time shorter than 6 months will be considered beneficial.
Software updates free of charge for at least three years.
The tenderer should declare whether the production of the offered system will
continue, or whether it will be replaced by a newer model in the near future.
- A warranty period of two years or longer will be considered beneficial.
- Emergency visit response time: during the warranty period on-site
maintenance support is provided within 36 hours of request, excluding
weekends and public holidays.
Tenderer’s answer (or annex):