CHAPTER: RANGES, STOPPING POWERS, AND DEPTH PROFILES
LITERATURE UP TO ABOUT 1987
Books or Bound Tabulations of Calculated Ion Range Data
Projected range statistics in semiconductors, W .S. Johnson & J. F.
Gibbons, Dist. by Stanford Univ Book Store, 1970
Spatial distribution of ions incident on a solid target as a function of instantaneous
energy, D. K. Brice, Sandia Laboratories Research Report SC-RR- 71 0599, Sept 1971
Ion implantation range and energy deposition distributions, Volume 1, High
incident ion energies, D. K. Brice [IFI/Plenum, 1975]
Ion implantation range and energy deposition distributions, Volume 2, Low incident ion
energies, K. B. Winterbon [IFI/Plenum, 1975]
Projected range statistics: semiconductors and related materials,
2nd edition, J. F. Gibbons, W. S. Johnson, & S. W. Mylroie [Dowden,
Hutchinson, & Ross, 1975]
Ion implantation range data for silicon and germanium device technologies, B. Smith
[Research Studies, 1977]
Work by the Danish group, especially Jens Lindhard, that led to or is associated with
LSS theory [LSS for Jens Lindhard, Morten Scharff, and Hans Schiott]
N. Bohr, "The penetration of atomic particles through matter," Kgl. Danske Videnskab
Selskab Mat-fys Medd 18(8), 1948.
J. Lindhard & M Scharff, "Energy dissipation by ions in the keV region," Phys. Rev. 124, 12830 (1961)
J. Lindhard, V Nielsen, M Scharff, & P V Thomsen, "Integral equations governing radiation
effects," Kgl. Danske Videnskab Selskab Mat-fys Medd 33, No 10, 42 pp. (1963)
J. Lindhard, M Scharff, & H E Schiott, "Range concepts and heavy ion ranges," Kgl. Danske
Videnskab Selskab Mat-fys Medd 33, No 14, 42 pp. (1963)
J. Lindhard, "Influence of crystal lattice on motion of energetic charged particles," Kgl.
Danske Videnskab Selskab Mat-fys Medd 34, No 14, 64 pp. (1965)
Ion Range and Stopping Power Calculations
1966 Aug 30 W. S. Johnson & J. F. Gibbons, "Statistical range distribution of ions in single
and multiple element substrates," Appl. Phys. Lett. 9, 321-22 (1966)
1967 Oct 27 H. E. Schiott, "Projected ranges of light ions in heavy substances," Can. J. Phys.
46, 449-53 (1968) computer programs using LSS. multi-element substrates. incl
straggling
1967 Nov 8 W. Brandt & J. Reinheimer, "Theory of charged particles in semiconductors,"
Can. J. Phys. 46, 607 (1968)
1969 Oct 20 D. K. Brice, "Ion implantation depth distributions: energy deposition into atomic
processes, and ion locations," Appl. Phys. Lett. 16, 103-06 (1970)
1970 June 17 H. E. Schiott, "Approximations and interpolation rules for ranges and range
stragglings," Radiat. Effects 6, 107-13 (1970) two energy ranges using reduced
energy ~. low energy range ~ E2/3. intermed. energy R ~ E.
1971 F.H. Eisen, G.C. Clark, J. Bottiger, amd J.M. Poate,"Stopping power of energetic helium
ions transmitted through thin silicon crystals in channeling and randon directions,"
AERE R6949 Dec 1971
1972 D.K. Brice, "Three-parameter formula for the electronic stopping cross section at
nonrelativistic velocities," Phys/ Rev. A6, 1791-1805 (1972)
1972 K. B. Winterbon, "Heavy-ion range profiles and associated damage distributions,"
Radiat. Effects 13, 215-26 (1972) & at Atomic Collisions in Solids IV Gausdal, Norway,
Sept 1971
1972 K. B. Winterbon, "A note on the large depth decrease of range and damage profiles,"
Radiat. Effects 15, 73-75 (1972)
1974 A. V. S. Satya & H. R. Palanki, "Ion implantation through surface layers: a truncated
gaussian model," Proc 4th Intern Conf on Ion Implantation, Osaka, Japan [Plenum,
1974] p 405 LSS extension - applicable.
1974 H. Ishiwara, S. Furukawa, J. Yamada, & M. Kawamura, "Projected range distribution of
implanted ions in a double-layer substrate," Proc Internat Conf on Ion Implantation
[Plenum, 1974] p 423. interface discontinuity. C-V meas check. theoret
prediction of MOSFET gate threshold V.
1975 Dec 15 D.K. Brice,"Energy dependence of the low-energy electronic stopping power,"
Appl. Phys. Lett. 29, 10-12 (1976)
1976 Feb 5 K. B. Winterbon, "Transverse spreading of implanted ion collision cascades,"
Radiat. Effects 30, 85-90 (1976)
1977 Ma6 16 J.F. Ziegler, "The electronic and nuclear stopping of energetic ions," Appl.
Phys. Lett. 31, 544-46 (1977)
1976 May 29 K. B. Winterbon, "Calculations of implanted ion range and energy deposition
distributions: 11B in Si," Radiat. Effects 30, 199-206 (1976)
1976 June 21 W. D. Wilson, L. G. Haggmark, & J. P. Biersack, "Calculations of nuclear
stopping, ranges, and straggling, in the low-energy region," Phys. Rev. B15, 2458-68
(1977)
1976 Aug 2 A. Desalvo & R. Rosa, "Monte Carlo calculations on spatial distribution of
implanted ions in silicon," Radiat. Effects 31, 41-45 (1976) agreement with exper
1977 Aug 3 V. V. Yudin, "Ranges and standard deviations of implanted ions," Appl. Phys. 15,
233-28 (1978) broad theoretical treatment + experim comparisons - claims better
agreement than Johnson and Gibbons
1977 Aug 19 K. B. Winterbon, "Ion implantation distributions in inhomogeneous materials,"
Appl. Phys. Lett. 31, 649-51 (1977)
1978 May 11 K B Winterbon, "Ion implantation distributions in non-uniform targets: Projected
range," Radiat. Effects 39, 31-38 (1978)
1978 May 11 K. B. Winterbon & J. B. Sanders, "Analytical calculations of some ion
implantation depth distributions," Radiat. Effects 39, 39-44 (1978)
1978 Sept (IBMM 78, Budapest) A. Desalvo & R. Rosa, "A comprehensive computer program
for ion penetration in solids," Radiat. Effects 47, 117-20 (1980) includes bilayers
1978 Sept (IBMM 78, Budapest) S. Kalbitzer & H. Oetzmann, "Ranges and range theories,"
19 pages, 13 figures.
1977 July 28 V. V. Beloshitsky & M. A. Kumakhov, "A theory of energy loss of channeled
protons," Radiat. Effects 35, 209 (1978)
1979 Aug 9 K.B. Winterbon, "Analytical calculations of some ion implantation depth
distributions II: Inhomogeneous equations," Radiat. Effects 46, 15-22 (1979)
1979 Oct 4 K. B. Winterbon, "On the net recoil density," Radiat. Effects 46, 181-88 (1980)
1979 Nov 7 J. P. Biersack & L. G. Haggmark,"A Monte Carlo computer program for the
transport of energetic ions in amorphous targets," Nucl. Instrum. Meth. 174, 257-69
(1980)
1979 F. F. Komarov, "Comment on 'Critical analysis of the modified Firsov model. Sensitivity
to the choice of atomic wave functions' by S. A. Cruz, C. Vargas, & D. K. Brice," Radiat.
Effects Lett. 43, 139-41 (1979)
1979 Apr 20 J.F. Ziegler and G.J. Iafrate,"The stopping of energetic ions in solids," Radiat.
Effects 46, 199-220 (1980)
1980 Mar 25 L. A. Chistel & J. F. Gibbons, "An application of the Boltzmann transport
equation to ion range and damage distributions in multilayer targets," J. Appl. Phys.
51, 6176-82 (1980) incl recoil ranges
1981 May 4 K. B. Winterbon, "The spatial structure of collision cascades," Radiat. Effects 60,
199-207 (1982)
1981 Nov 12 K. B. Winterbon, "Impact parameter dependence of electronic energy loss,"
Radiat. Effects 79, 251-63 (1983)
1981 J. P. Biersack, "Calculation of projected ranges - analytical solutions and a simple
general algorithm," Nucl. Instrum. Meth. 182/183, 199-206 (1981)
1982 J. P. Biersack & J. F. Ziegler, "Refined universal potentials in atomic collisions," Nucl.
Instrum. Meth. 194, 93-100 (1982)
1982 D. Fink, J. P. Biersack, K. Tjan, & V. K. Cheng, "Ranges of 3He and 6Li in various
solids," Nucl. Instrum. Meth. 194, 105-11 (1982). 0.05-1.5 MeV. Nuclear reaction
profiling vs TRIM profiles.
1984 U. Yarkulov, "Ranges of heavy ions in solids," Radiat. Effects 83, 233-39 (1984)
1985 J. Albers, "Monte Carlo calculation of one- ad two-dimensional particle and damage
distributions for ion-implanted dopants in silicon," IEEE Trans. Electron Devices
ED 32, 1930-39 (1985)
1986 Jan 27 L. J. Parkes & J. P. Lavine, "Calculated moments for the implantation of boron
into silicides," J. Appl. Phys. 60, 14-16 (1986)
1986 Mar 31 D. K. Brice, "Ion implantation distributions in inhomogeneous materials," Nucl.
Instum. Meth. Phys. Res. B17, 289-99 (1986)
1986 D. J. O'Connor & J. P. Biersack, "Comparison of the Theoretical and empirical
interatomic potentials,"Nucl. Instrum. Meth. B15, 14-19 (1986)
1986 M. Posselt & J. P. Biersack, "Influence of recoil transport on energy loss and damage
profiles," Nucl. Instrum. Meth. B15, 20-24 (1986)
1986 D. E. Harrison & M. M. Jakas, "Inelastic energy losses and atom ejection," Nucl.
Instrum. Meth. B15, 25-28 (1986)
1986 Oct D. Fink, J.P. Biersack, P. F. Sanchez, & P. F. Fitchner, "Universal relations between
range and damage profile parameters," Radiat. Effects 103, 89-101 (1987)
1986 Nov 25 P. J. M. Smulders & D. O. Boerma, "Computer simulation of channeling in
single crystals," Nucl. Instrum. Meth. Phys. Res. B29, 471-89 (1987)
1986 K. Izsak, J. Berthold, & S. Kalbitzer, "Range phenomena of low energy ions in solids,"
Nucl. Instrum. Meth. Phys. Res. B15, 34-41 (1986)
1986 Y. Kido, I. Konomi, M. Kakeno, K. Yamada, K. Dohmae, & J. Kawamoto,
"Universal expressions for average projected range and average damage depth in ion
implanted substrates," Nucl. Instrum. Meth. Phys. Res. B15, 42-46 (1986)
1986 Aug 28 R Oven & D G Ashworth, "A comparison of two-dimensional ion implantation
profiles," J. Phys. D: Appl. Phys. 20, 642-46 (1987) comparison with Giles & Gibbons
work
1987 Mar 18 D. Fink, J.P. Biersack, M. Staedele, and V.K. Cheng, "Range profiles of He in
solids," Radiat. Effects 104, 1-42 (1987)
1987 Apr 10 P. F. P. Fichtner, M. Behar, C. A. Olivieri, R. P. Livi, J. P. De Souza, F C
Zawislak, J. P. Biersack, & D. Fink, "Range profiles of 10 to 390-keV ions (29 < Z1 <
83) implanted into amorphous silicon," Nucl. Instrum. Meth. Phys. Res. B28, 481-87
(1987)
1987 P. F. Sanchez, D. Fink, P. F. Fichtner, & J. P. Biersack, "Analytical approximations for
range and damage profile parameter predictions on a microcomputer," Nucl. Instrum.
Meth. B19/20, 28-31 (1987)
1987 J. P. Biersack, "Three-dimensional distributions of ion range and damage including
recoil transport," Nucl. Instrum. Meth. B19/20, 32-39 (1987)
1987 H. Ryssel, W. Krueger, & J. Lorenz, "Comparison of Monte Carlo simulations and
analytical models for the calculation of implantation profiles in multilayer targets,"
Nucl. Instrum. Meth. B19/20, 40-44 (1987)
1987 H. Ryssel, J. Lorenz, W. Krueger, "Ion implantation into non-planar targets: Monte Carlo
simulations and analytical models," Nucl. Instrum. Meth. B19/20, 45-49 (1987)
Ion Range and Profile Shape Measurement
1967 June 1 P. Jespergard & J. A. Davies, "Ranges of Na, K, Kr, and Xe in amorphous Al 2O3
in the energy region 40-1000 keV," Can. J. Phys. 45, 2983-94 (1967)
1967 Oct 30 J. B. Sanders, "Ranges of projectiles in amorphous materials," Can. J. Phys. 46,
455 (1968)
1967 Nov 1 T. Andersen & G. Sorensen, "Range studies using a new chemical film
technique," Can. J. Phys. 46, 483 (1968)
1967 Nov 2 N. H. Freeman & I. D. Latimer, "The ranges of 5-80 keV deuterium ions in gold
and aluminum," Can. J. Phys. 46, 467 (1968)
Y. Ohmura, K. Koike, H. Kobayashi, & K. Murakami, "Deviated gaussian profiles of implanted
boron and deep levels in silicon," Proc 4th Intern Conf Ion Implantation, Osaka, Japan
[Plenum, 1974] p 183-88. C-V meas tech. 10B vs 11B. shapes and moments.
Regular Stopping Power Papers
1967 Nov 8 B. Fastrup, A. Borup, & P. Hvelplund, "Stopping cross section in atmospheric air
of 0.2-0.5 MeV atoms with 6< Z1< 24," Can. J. Phys. 46, 489 (1968)
1967 Nov 10 J. H.Ormrod, "Low-energy electronic stopping cross sections in nitrogen and
argon," Can. J. Phys. 46, 497 (1968)
1967 Dec 4 W. M. Gibson, J. B. Rasmussen, P. Ambrosius-Olesen, & C. Andreen," Chargedparticle energy loss in thin gold crystals," Can. J. Phys. 46, 551-60 (1968)
1975 June 13 J. D. Melvin & T. A. Tombrello, "Energy loss of low energy protons channeled
in silicon crystals," Radiat. Effects 26, 113-26 (1975)
1978 May 23 A. Markovich, G. Bahir, T. Bernstein, & R. Kalish, "A method for measuring
stopping powers of channeled ions: boron in silicon," Radiat. Effects 39, 65-70 (1978)
1978 Dec 15 S. Steenstrup, "The effect of screw dislocations on the energy loss of
channeled ions," Radiat. Effects 37, 51-57 (1978)
Damage-related Stopping Power Papers
1967 July 5 L. Hastings & A. van Wijngaarden, "The energy loss, the deterioration depth, and
the light output for heavy ions in ZnO:Zn," Can. J. Phys. 45, 4039 (1967)
1967 July 5 A. van Wijngaarden & L. Hastings, "Radiation damage in ZnO:Zn by heavy ions,"
Can. J. Phys. 45, 3803 (1967)
1967 Oct 30 L. Henriksen, A. Johansen, J. Koch, H.H. Andersen, T. Leffers, & R M J Cotterill,
"Irradiation damage in aluminum single crystals produced by 50-keV aluminum and
copper ions," Can. J. Phys. 46,641 (1968)
1967 Oct 31 Hj. Matzke, "Inert gas diffusion and radiation damage in ionic crystals and
sinters following ion bombardment," Can. J. Phys. 46, 621 (1968)
Z1-dependence of range and stopping power Se
Ya. A. Teplova, V S Nikolaev, I S Dmitriev, & L N Fateeva, "Slowing down of multicharged
ions in solids and gases," Sov. Phys.-JETP 15, 31-41 (1962)
J. H. Ormrod & H. E. Duckworth, "Stopping cross sections in carbon for low-energy atoms,"
Can. J. Phys. 41, 1424-42 (1963)
J. H. Ormrod, J. R. McDonald, & H. E. Duckworth, "Some low-energy atomic stopping cross
sections," Can. J. Phys. 43, 275 (1965)
G. Sidenius, Atomic Collision Processes [North-Holland]
G. C. Ball & F. Brown, "The ranges of 133Xe and 134Cs ions in tungsten single crystals and
tungsten oxide at energies of 40 and 125 keV," Can. J. Phys. 43, 676-83 (1965)
B. Fastrup, P. Hvelplund, & C. Sautter, "Stopping cross-section in carbon of 0.1-0.9 MeV
atoms with Z1 < 20," Nucl. Instrum. Meth. 38, 260 (1965)
L. Eriksson, J. A. Davies, & P. Jespersgaard, "Range measurements in oriented tungsten
single crystals (0.1-1.0 MeV) I. Electronic and nuclear stopping powers," Phys. Rev.
161, 219-34 (1967)
F. H. Eisen, "Channeling of medium-mass ions through silicon," Can. J. Phys. 46, 561-72
(1968)
B. Fastrup, A. Borup, & P. Hvelplund, "Stopping cross section in atmospheric air of 0.2-0.5
MeV atoms with 6 < Z1< 24," Can. J. Phys. 46, 489-95 (1968)
K. B. Winterbon, "Z1 oscillations in stopping of atomic
particles," Can. J. Phys. 46, 2429 (1968)
I. M. Cheshire, G. Dearnaley, & J. M. Poate, "The Z1-dependence of electronic stopping,"
Phys. Lett. 27A, 304-05 (1968)
D. E. Harrison, Jr, "Interpretation of the periodicity in energy loss of a well-channeled ion with
respect to its nuclear charge," Appl. Phys. Lett. 13, 277-79 (1968)
R. S. Nelson, "Periodic variations in the Z1-dependence of interatomic potentials revealed by
a channeling technique," Phys. Lett. 28A, 676-77 (1969)
I. M. Cheshire, G. Dearnaley, & J. M. Poate, "Structure effects in low-energy electronic
stopping," Proc. Roy. Soc. A311, 47-51 (1969)
I. Hoffmann, E. Jager, & U. Muller-Jahreis, "Z-dependence of electronic energy straggling of
light ions," Radiat. Effects 31, 57 (1976)
R.K. Nesbet and J.F. Ziegler, "Low-velocity stopping of heavy ions," Appl. Phys. Lett. 31, 81012 (1977)
J. G. Brennan, D. J. Land, M. D. Brown, & D. G. Simons, Nucl. Instrum. Meth. 149, 143-48
(1978)
P. Loftager, F. Besenbacher, O. S. Jensen, & V. S. Sorensen, "Experimental study of effective
interatomic potentials," Phys. Rev. A20, 1443-47 (1979)
D. Ward, H. R. Andrews, I. V. Mitchell, W. N. Lennard, & R. B. Walker, "Systematics for the Z 1
oscillation in stopping powers of various solid materials," Can. J. Phys. 57, 645-56
(1979) not channeled
M.M.R. Williams, "Slowing down approximations to the Boltzmann equations: I. Applications
to energy deposition and ion implantation," Radiat. Effects 51, 11-26 (1980)
G.J. Iafrate, J.F. Ziegler, and M.J. Nass, "Application of Lindhard's dielectric theory to the
stopping of ions in solids," J. Appl. Phys. 51, 984-87 (1980)
F. Besenbacher, J. Boettiger, T. Laursen, P. Loftager, & W. Moller, "Z 1-oscillations in lowenergy heavy-ion ranges," Nucl. Instrum. Meth. 170, 183-88 (1980)
D. K. Brice, "Projectile size dependence of stopping power," Nucl. Instrum. Meth. 170, 20104 (1980)
A. Pathak, "Velocity dependence of Z1 oscillations in stopping power of solids for channeled
heavy ions," Nucl. Instrum. Meth. 170, 209-10 (1980)
D. J. O'Connor, B. W. Farmery, D. Chivers, & M. W. Thompson, "Z1 oscillations in low energy
heavy ion ranges," Nucl. Instrum. Meth. 170, 517-22 (1980)
A. Pathak, "Z1 oscillations in channeling stopping power, "Nucl. Instrum. Meth. 194, 31-34
(1982)
J. Berthold & S. Kalbitzer, "Evidence for an insulator-metal effect on the Z1-range oscillations
in the nuclear stopping regime," Nucl. Instrum. Meth. 209/210, 13-18 (1983)
V.A. Khodyrev and E.I. Sirotinin, "Charge-particle stopping in crystals," Phys. Stat. Sol. b116
659-71 (1983)
A. F. Burenkov, F. F. Komarov, and M. M. Temkin, "Elastic and inelastic energy deposition
distributions during ion implantation in solids," Radiat. Effects 86, 153-59 (1984)
A. F. Burenkov, F. F. Komarov, M. M. Temkin, & G. Schlotzhauer, "Z 1-dependence of low
energy heavy ion range parameters," Radiat. Effects 86, 153-59 (1984)
H. Sugiyama, "Z13 and Z12 corrections to the electronic stopping formula," Radiat. Effects 81,
57-70 (1984)
P. F. P. Fitchner, M. Behar, C. A. Olivieri, R. P. Livi, J. P. DeSousa, F. C. Zawislak, D. Fink, &
J.
P. Biersack, "Large Z1-range effect for Eu, Yb, and Au ions implanted in amorphized
silicon," Radiat. Effects Lett. 87, 191-96 (1986)
P. F. P. Fitchner, M. Behar, C. A. Olivieri, R. P. Livi, J. P. DeSousa, F. C. Zawislak, D. Fink, &
J. P. Biersack, "Energy dependence of the Z1-range oscillation effect in silicon," Nucl.
Instrum. Meth. Phys. Res. B15, 58-60 (1986)
E. Geyer, D. Reschke, & K. Freitag, "Z1 stopping power oscillations in the nuclear stopping
regime as obtained by time-of-flight spectroscopy of heavy ions in hydrogen," Nucl.
Instrum. Meth. Phys. Res. B15, 81-85 (1986)
Z2-dependence of range and stopping power
W. Brandt, "Modern problems of low velocity stopping powers," Nucl. Instrum. Meth. 191,
453-61 (1981)
W. Brandt, "Effective charges of ions and the stopping power of dense media," Nucl. Instrum.
Meth. 194, 13-19 (1982)
H. Geisel, Y. K. Laichter, W. F. W. Schneider, & P. Armbruster, "Energy loss and energy loss
straggling of fast heavy ions in matter," Nucl. Instrum. Meth. 194, 21-29 (1982)
D. Fink, J. P. Biersack, M. Stadele, K. Tjan, & V. K. Cheng," Z 2 stopping power oscillations as
derived from range measurements," Nucl. Instrum. Meth. 218, 817-20 (1983)
P. Dickstein, D. Ingman, & N. H. Shafrir," Z2-oscillation systematics in the stopping of fission
fragments," Nucl. Instrum. Meth. Phys. Res. B15, 109-13 (1986)