Move your own stuff if you know what’s good for you.
Wally wins without any effort.
ECE Clean Room Safety
 Many
hazardous materials exist in
the clean room
 The safety of everyone working in
the clean room is top priority
 Everyone working in the clean room
must know the hazards and how to
deal with them
Material Safety Data Sheet - MSDS

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
Mandated by the Federal government
Employees must have access
All hazardous materials MUST have a MSDS
associated with it
MSDS details all hazards, safety requirements,
exposure limits, spill or leakage procedures, etc.
CARC Clean Room MSDS sheets are located in my
office
You can view them in my office or you can get
them on-line from each manufacturer of the
hazardous material
The safety office and Brocker Health Center do
NOT have all of the MSDS sheets for the entire
University. Each lab is responsible for their
MSDS
Material Safety Data
Sheet – MSDS
showing hazardous
and required
protective equipment
Shuttle Stop
CAMERON HALL
Second
floor
entrance
Main
entrance
CAMERON – Best entrance to the
clean room
second
floor
entrance
Parking
Lot L-16
Craver
Road
ECE Clean Room Safety
John’s office
Second
floor
entrance
to
Cameron
Manual
pull fire
alarm
CAMERON’s Clean Room.
The clean room is
located on the 2nd
floor, room 201F,
of the CARC
building.
 Access to the clean
room is restricted.
 Access is through a
UNC – Charlotte ID
card reader.

Front
window of
clean room
Front door
to clean
room
Card reader
door lock
Engr 1202 students sign in each
time they enter the clean room on
the clipboard shown below
ECE Clean Room Safety
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Fire alarm inside clean room
Fire alarm includes strobe
light and loud alarm
If the alarm sounds, you
must leave the building
If an emergency condition
exists, it is OK to leave the
building with your clean
room garments
If there appears to be no
emergency – remove clean
room garments before
leaving the building
Most alarms are false
alarms but all alarms must
be treated as a serious
condition
ECE Clean Room Safety
Rear clean
room exit
Rear fire
alarm
ECE Clean Room Safety

Inside the clean
room is a safety
station
1.
2.
3.
4.
5.
6.
7.
Deluge shower
HF safety instructions
Burn and HF salve
First aid kit
Chemical spill kit
Eye wash
Hose wash
Liquid Nitrogen
Portable
liquid
nitrogen
tank
Hazards of Liquid Nitrogen
 Extremely
cold, about -1800C
 Can cause immediate human tissue
damage – frost bite
 Leakage or spill in a closed area can
cause the oxygen to be displaced
with resulting asphyxiation
Deionized (DI) Water
UV
sterilizer
DI water
polisher,
set 1
DI water
polisher,
set 2
Recirculation
water pump
Resistivity
meter
City
water
feed
Supply
and
return
DI water
to CR
Carbon
filters
Gas Cylinders inside CARC
Clean Room
Gas pressure
regulators
Hazardous Gases used in
Microelectronics

1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
Hazardous gases in the
CARC Clean Room – all
high purity
Nitrogen
Oxygen
Helium
Argon
Hydrogen
Ammonia
Methane
Chlorine
Acetylene
Carbon Dioxide
Carbon Monoxide
Freon

1.
2.
3.
4.
5.
6.
Hazardous gases NOT in
the CARC Clean Room
Silane
Phosphine
Arsine
Diborane
Cyanide
Fluorine
Hazardous Chemicals in the CARC
Clean Room
Acids
1.
2.
3.
4.
5.
6.
7.
Hydrofluoric Acid
Sulfuric Acid
Acetic Acid
Nitric Acid
Hydrochloric Acid
Chromic Acid
Phosphoric Acid
Oxidizers
1.
Flammable solvents
1.
2.
3.
4.
5.
Bases
1.
2.
3.
Photoresist Developer
(NaOH)
Potassium Hydroxide
Ammonium Hydroxide
Hydrogen Peroxide
Acetone
Methanol
Trichloroethyene-TCE
Isopropanol
Ethane
Light Sensitive
1.
2.
Positive photoresist
Negative photoresist
Chemical Storage
Chemical resistant plastic cabinets
Flammable storage inside CARC
Clean Room
Metal fire-proof cabinets for flammables
Student working with chemicals
Fume
exhaust
laminar
flow work
station
Chemical
goggles
Face
shield
Chemical
gloves
Correctly
labeled
containers
Front
exhaust
panels
Anyone not wearing eye protection when working with
chemicals will be removed from the clean room
UNC – Charlotte
Microelectronics Clean Room
Electrical and Computer
Engineering
Clean Room Gowning
Procedure
Reasons for gowning.

To keep the clean room free of
contamination
The human body is a bad contaminate for
microelectronics
– Particles and dirt
– Dead skin from your body
– Hair particles
– Skin oils
– Pollen, dust, moisture from your breath

As a protection from hazardous materials
in the Clean Room.
– Some protection from dangerous chemicals
– Protection of clothing from chemical stains
Tacky Mats are located in the
gowning area of the clean room.
Tacky Mats are set
in place to remove
any dirt particles
from the bottom of
your shoes before
entering the
gowning area and
clean room.
 Tacky Mats should
be replaced when
dirty

Coat Hangers

Coat hangers are a
available to hang
your coat, book
bag, or anything
else that needs to
be hung up.
Lockers
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The lockers are available
to store any valuable items
that aren’t permitted in the
clean room.
You can take into the clean
room notebooks, pens or
markers, and cameras
You can NOT take into the
clean room books, back
packs, pencils, food,
drinks, coats, hats, IPods,
MP3 players, cigarettes,
tobacco, hand lotion, etc.
The gown dressing order.
1.
2.
3.
4.
5.
6.
Face Mask
Safety Glasses
Hood
Coverall
Shoe covers/boots
Clean room gloves
Choosing the right size.


Coveralls, hoods, and
boots are in lockers by
size
Comfort
– For coveralls choose
one size larger than
what you normally
would wear.

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Boots are available in
large and Xlarge only.
Hoods are available in
medium and large
only.
Face Mask - First
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The face mask
protects the clean
room from any
contaminants that
may come from your
breath.
A metal strip on top of
the mask is formed
over the nose.
Elastic ear loops
secure the mask.
The mask is pulled
below the chin.
Masks are disposed of
after use.
Safety Goggles - Second

Safety Goggles are
worn to protect
your eyes from any
hazardous
chemicals or
particles that may
inflict damage to
your eyes.
Hood
The Hood protects
the clean room
from any particles
from your head
and hair.
 The hood covers
the entire head.
 The hood is worn
inside the coverall.

Coverall - Fourth
Coveralls cover the
entire body. They
provide partial
protection from
hazardous
chemicals
 Coveralls are used
to protect the clean
room from any
particles generated
by the body.

Shoe covers/boots - Fifth
Boots are worn to
protect the clean
room from any dirt
that may be on
your shoes.
 All snaps must be
used to prevent
tripping over
dangling straps.

Clean Room Gloves - Last
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Clean room gloves are
available in three sizes, small,
medium, and large
Clean room latex gloves
provide some protection for
your hands from hazardous
materials. They are NOT
chemical gloves.
Gloves are used to protect the
clean room from any dirt,
dust, or oils that may be on
your hands.
Clean Room gloves are
discarded whenever they are
torn or dirty.
Special non – latex gloves are
available fro people that are
allergic to latex.
Completed Gown
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After all gowning is complete you can now enter the clean room.
You are not allowed into the clean room unless you are completely gowned
Returning hoods, coveralls, and boots to the
proper lockers and stations.
All coveralls,
hoods, and boots
are returned by
size to the
appropriate locker.
 Gloves and the
face mask are
discarded in the
trash container.

Conclusion

You should now know…
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Where the Clean Room is.
About CARC’s Clean Room.
What is an MSDS
Reasons for gowning.
What are the tacky mats.
Where are the coat hangers.
Where are the lockers.
The gown dressing order.
How to find the safety shower, eye wash, and hand
spray
How and where to store and use chemicals
Where dangerous gases are stored
What hazardous materials might be in the clean room
What to do if there is an accident
Safety Test
 Read
all safety notes under Engr
1202 guidelines at the web site
 25 questions, multiple choice
 Must pass the safety test to be able
to work in the clean room