Atomic Layer Deposition for Photonic Crystal Devices

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PHOTONIC CRYSTALS

@ GEORGIA TECH

E. Graugnard, J. S. King, Curtis Neff, Davy Gaillot,

Tsuyoshi Yamashita, D. Heineman, and C. J. Summers

School of Materials Science and Engineering,

Georgia Institute of Technology, Atlanta, GA, USA

1D

Photonic Crystals

2D 3D z y x

Periodic in one direction

Periodic in two directions

Periodic in three directions

(Joannopoulos)

• Photonic Crystal – periodic modulation of dielectric constant

• Exhibits a “Photonic Band Gap” (PBG) where propagation of a range of photon energies is forbidden.

• For visible wavelengths, periodicity on order of 150 – 500 nm.

• Introduction of “dielectric defects” yield modes within the PBG.

• Luminescent 2D & 3D PC structures offer the potential for controlling wavelength, efficiency, time response and threshold properties (phosphors, displays, solid state lighting, etc.).

Photonic Crystal Properties

• Density of states of radiation field in free space & photonic crystal

(Sakoda)

• Photonic band gap and associated defect mode are used to create waveguides, microcavities, resonators, couplers and filters.

• Luminescent 2D & 3D PC microcavity structures offer the potential for controlling the wavelength, efficiency, time response and threshold properties by embedding a defect in a photonic crystal structure. (LEDs,

Lasers, Phosphors)

Photonic Crystals:

Dimensionality Defined

• 1-, 2-, & 3-D photonic crystals are all 3-D structures

• Dimensions refer to number of dimensions in which the photonic bandgap exists

• Dielectric constant modulated in 1, 2, or 3 directions.

• Modulation of dielectric constant on the order of the wavelength of illumination source.

Bragg stack

Square lattice of rods

Inverse opal

1D

2D

3D

1-D

2-D

3-D

Real Photonic Crystals:

Applications for thin films

The Bragg Stack:

‘1D Photonic Crystal’ Treatment

• Treat structure with periodicity in order to cast into reciprocal space.

• a = lattice constant

• b = reciprocal lattice constant

• Also, plane waves can be represented by k vector in reciprocal space a

( x )

 

( x

 a ) l b

0 2

/a 4

/a k

2

 l

Result of the Bragg Stack

• Dispersion lines: plot of the frequency vs. k vector considering the given structure.

• Similar result to 1-D multiple quantum well problem in solid state physics

• The ‘Photonic Band Gap’ is a range of frequencies where a solution does not exist.

2

 a

 a w n

 w a

2

 c w

0

 a

2

 k a

n

Photonic

Band Gap k

Results Compared:

Photonic Crystal vs. Traditional Optics

• Reflected waves interfere constructively

• Band gap corresponds to high reflectivity

• Thickness of each layer: l layer

4 or l

0 n l layer

= wavelength in medium l

0

= free space wavelength n = refractive index of layer w n

0

 a

 a

2D Photonic Crystals

Real Space a

Square Lattice r a

Triangular Lattice

Reciprocal Space Band Diagram

X M

G

M K

G

0.6

0.5

0.4

0.3

0.2

0.7

G

0.1

0 G

X M

K M

G

G

2D Photonic Crystals:

Methods of Visualizing Properties

G

M

C

Band Surface

– Plot of eigen-solutions in the irreducible

Brillouin zone

– Complete information but difficult to analyze

Band Diagram

– Plot of the boundaries of the band surface

– Useful for identifying band gaps and general band shifts

Dispersion Curve

– Iso-frequency contours of the band surface

– Useful for identifying refraction and propagation effects

Dispersion Curve Analysis:

Refraction Effects

• The dispersion curve can be used to predict the refraction effects of a photonic crystal.

k

0 n

1

O k

0 n

2

( q

)

Conventional Materials n

1

Interface k

0 n

1 n

2

( q

) k

0 n

2

( q

)

O

Photonic Crystals n

1 n

2

( q

)

Principle of Self-Collimated

Beams

• Conservation of the transverse component of the wave vector

• Group velocity is normal to the dispersion curve

• Possible to achieve nearly parallel beam propagation

4/ w

0

Isotropic Media Photonic Crystal

Nearly Parallel

Beam

2

/a

2D Virtual Waveguides

Beam spreading in an isotropic material

Sharp Turns

Beam spreading in a photonic crystal virtual waveguide

No cross talk

Virtual Waveguide System

Simulation using FDTD

• Photonic band gap perfect mirrors

• Signals can cross with no interference

• Small deviations in beam width and wavelength can be accommodated

1555nm

9.97

m m

1550nm

8.55

m m

1545nm

7.12

m m

2D Superlattice

2D Superlattice

• Based on triangular lattice but with two different hole sizes.

0.5

0.4

0.3

0.2

0.1

M

0

G

M X

X

X’

G

G X’ M

2D Superlattice:

Dispersion Curve

• Large refraction characteristics with small change in incident beam angle

• Effect does not require a band gap

• Effect can be ‘tunable’ by using electro-optic materals

Isofrequency contour

30

20

10

0

-18

-10

-20

-30

-40

-50

-60

-13 -8

Incident Angle

Application: Beam steering/rastering in optical communications or displays

-3

3D Photonic Crystals:

Opals & Inverse Opals

• For 3D PC’s: “top-down” approaches are difficult.

– “Bottom-up” approach: self-assembly

• Most common 3D photonic crystal is the opal.

– Close-packed silica spheres in air

• Opal is used as a template to create an inverse opal.

– Close-packed air spheres in a dielectric material

ALD

3D-PC Opal

26% air

Inverse Opal

74% air for high dielectric contrast

SiO

2

Opal Films

• Opal films are polycrystalline, 10 m m thick, FCC films with the (111) planes oriented parallel to the surface.

• For visible spectrum, lattice constant ~ 140 – 500 nm.

1 µm 300 nm

Challenge: growth of uniform films within a dense, highly porous, high surface-area, FCC matrix

Inverse Opal:

Fabrication

• Self-assembled silica opal template

– 10 μm thick FCC polycrystalline film, (111) oriented.

• Infiltration of opal with high index materials

– ZnS:Mn n~2.5 @ 425 nm (directional PBG)

– TiO

2

(rutile) n avg

~ 3.08 @ 425 nm (omni-directional PBG)

Self

Assembly

Sintered Opal

ALD

Infiltrated Opal

Etch

Inverted Opal

ALD of TiO

2

at 100ºC

(111)

Cross-sections

300 nm

433 nm opal infiltrated with 20 nm of TiO

2

433 nm opal infiltrated with TiO

2

433 nm TiO

2 inverse opal

• TiO

2 infiltration at 100ºC produces very smooth and conformal surface coatings with rms roughness ~2Å.

• Heat treatment (400C, 2 hrs.) of infiltrated opal converts it to anatase TiO

2

, increasing the refractive index from 2.35 to 2.65, with only a 2Å increase in the rms surface roughness.

Optimized TiO

2

Infiltration

• Pulse and purge times were increased to optimize infiltration in opals with small sphere sizes.

2 µm

433 nm TiO

2 inverse opal

Specular Reflectivity

• Measurements: 15° from normal

• Probes changes in G

-L photonic band structure (111)

Flat band peaks

ZnS:Mn

G

-L PPBGs Flat band peaks

TiO

2

G

-L PPBGs

(a) (c) (b)

1.0

0.8

0.6

0.4

(a)

(c)

(b)

0.2

0.0

200 300 400 500 600 700 800

Wavelength (nm)

200 nm opal

400 600 800

Wavelength (nm)

330 nm opal

1000

(a) sintered , (b) as-infiltrated, and (c) inverse opals

Photonic Crystal Properties

• Photonic band diagrams: ω vs. k (reciprocal space representation)

• Calculated from wave form of Maxwell’s equations.

• Plane wave expansion (PWE)

• Finite-difference time domain (FDTD)

Photonic Bands of inverted 3D Si-air PC

U

1.0

0.9

0.8

0.7

0.6

0.5

0.4

0.3

0.2

PPBG

# ixmax= 20

# iymax= 20

# izmax= 20

# dx=1

# ikmax= 16

# n_pts_store=16

# radius=0.5

# eps_b=11.9

# eps_s=1

FCC Brillouin zone

# sig_b=0

• Photonic band gaps (PBG)

• Pseudo-photonic band gaps (PPBG)

Source-->Exec.

metalpc.f90 --> metalpc

• Flat bands, low group velocity project\FDTD\defect\band

• Superprism and giant refraction

0.1

0.0

X U L W K k-vector

Inverse Opal Reflectivity:

Theoretical Comparison

Band Diagram

300

Normalized Reflectivity

Flat band peaks

400

• TiO

2 infiltration of 330 nm opal.

• ~88% filling fraction

• 2.65 Refractive Index

• Agreement: full index attained!

500

600

700

800

900

1000

Fabry-Perot

fringes

2-3 PPBG

1100

L

Sintered Opal

G

700

800

900

400

Normalized Reflectivity

500

600

Flat band

peaks

1000

1100

Band Diagram

2-3 PPBG

L

Infiltrated Opal

G

300

400

500

600

700

800

900

1000

Normalized Intensity

PPBG's

Band Diagram

L Inverse Opal

2-3 PPBG

G

10-11

8-9

5-6

Opal Defect Engineering

Silica Opal with Defect

Infiltrated Opal

Inverted Opal Structure

(With Defect – soon!)

Inverse Opal:

Defect Mode Calculations for PcP

• What is the main idea behind Photonic Crystal Phosphor ?

– Combining a 3D inverse opal with nanophosphors as a local defect in the Pc lattice

40

50

20

30

60

70

10

10 20 30 40 50 60 70

Si-air Pc slice

Luminescent nanocrystal

• Specific frequencies in the Photonic Band-Gap of the inverse structure are inhibited except for the defect modes

• A broad luminescent material spectrum within this band-gap would be filtered by the resonant frequency and therefore tuned up

0.7

0.65

0.6

0.55

0.5

0.45

0.4

0.35

0.3

0

Photonic Band-Gap Analysis

Defect mode

0.5

1 1.5

2

Spectrum analysis for

PcP

Regular spectrum of a green phosphor

Regular spectrum of a defect mode

Both spectrum combine and

Emission Energy of phosphor is totally quenched into the defect mode

Main Characteristics of PcP:

Field of applications

• The cavity mode spectrum lies into the phosphor emission spectrum

– A matching nanophosphor would spontaneously emit in by the confined defect mode in the ultra-high Q-factor cavity

• The nature of the resonant spectrum acts as an optical amplifier and filter and allows Static Tunability of luminescent properties.

– The position and peak cavity spectrum controls the color, luminous intensity and decay time of structure

• Intrinsic properties are therefore controlled by the geometry of the host

• Ultimate tunability would be achieved by optically or electrically biasing materials such as respectively Liquid-crystal or PLZT (instead of air)

– Changing dynamically the refractive index of host materials would affect both position and peak of cavity mode

• The amplified mode leaks upon near-UV pumping and then propagates out

PcPs are perfect candidates for High-Definition Display devices !!!!

Three-Layer Inverse Opal:

PcP

• SEM of TiO

2

/ZnS:Mn/TiO

2 inverse opal

330 nm sphere size

Luminescent multi-layered inverse opals fabricated using ALD: PcP

Photoluminescence:

ZnS:Mn/TiO

2

Composite PcP

• 433 nm opal

• 337 nm N

2 laser excitation

• Detection normal to surface

Cl

-

Mn

2+

(a) 2-layer TiO

2

/ZnS:Mn/air

(14 nm/20 nm) inverse opal

(b-f) 3-layer TiO

2

/ZnS:Mn/TiO

2 inverse opal after backfilling with TiO

2

(b) 1 nm by

(c) 2 nm

(d) 3 nm

(e) 4 nm

(f) 5 nm

 108%

(a)

(b)

(c)

(d)

(e)

(f)

400 500 600 700

Wavelength (nm)

800

Using ALD of TiO

2

to create novel 2D Photonic Crystals.

X. D. Wang, E. Graugnard, J. S. King,

C. J. Summers, and Z. L. Wang

TiO

2

Coated ZnO Arrays

Aligned ZnO nano-rods in a hexagonal matrix on a sapphire substrate.

Aligned ZnO nano-rods coated with 100 nm of TiO

2 at 100°C.

Summary

• Precise control of thin film growth enables novel photonic crystal structures:

– Inverse opals with void space air pockets (enhanced PBG)

– Achieved maximum infiltration of 86%

– Perfect match between reflectivity and calculated band structure

– Multi-layered luminescent inverse opals: PcP

• Modification of photoluminescence by precise infiltration

– Increased Mn 2+ peak intensity by 108%

• Pathway for photonic crystal band gap engineering.

• Novel 2D PCs created with ALD

– TiO

2

/ZnO aligned nano-rod arrays

Acknowledgments

• US Army Research Lab: S. Blomquist, E.

Forsythe, D. Morton

• Dr. Won Park, U. Colorado

• Dr. Mike Ciftan, US Army Research Office:

MURI “Intelligent Luminescence for

Communication, Display and

Identification”

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