Inert Atmosphere Systems
in OLED
Research and Fabrication
Copyright, 1996 © Dale Carnegie & Associates, Inc.
Inert Atmosphere System Definition:
An enclosure that provides a non reactive
work area for processing materials sensitive to
oxygen and/ or water.
The system may be a single work-station or
multiple work-station glove box or a large
enclosure for automation of air sensitive
processes.
Inert Atmosphere: < 1 PPM oxygen and water
Typical Research Systems
Single work station glove box
Typical Research Systems
Multi station glove box
Inert Atmosphere Systems Components:
• Enclosure or Glove Box - The work area
• Airlock or Antechamber - entry and exit
from glove box
• Recirculating gas purifier - maintains
inert conditions
• Pressure control - Maintains safe
pressure
• Instruments - Monitor the environment
Applications in OLEDs
• Material Research
• Vapor Deposition of Metal Oxides and
Polymers
• Polymer Deposition by Spin Coating
• Deposition by Printing Processes
• Sealing- Epoxy/UV Curing and LASER
Welding
• Automated Pilot Production Facilities
Material Research New Compound Synthesis
• Synthesis of light emitting polymers and
small molecule organics.
• TFT polymers
• Substrates - both glass AND plastic
• Plastic barrier and sealant formulation
• Characterization - Voltammetry and
probing stations
Glove Box Accessories for
Research
• Cold Storage Unit - for temperature sensitive
materials
• Cold Well - for low temperature synthesis
• Vacuum Oven - bake out water/volatiles from
materials
• Mini-antechamber - Rapid transfer of small
items
• Various Interface Assemblies - connect the
glove box environment to the outside world
Applications in OLEDs
• Material Research
• Vapor Deposition of Metal Oxides and
Polymers
• Polymer Deposition by Spin Coating
• Deposition by Printing Processes
• Sealing- Epoxy/UV Curing and LASER
Welding
• Automated Pilot Production Facilities
Thermal Vapor Deposition of
Metal Oxides and Polymers
• Integrated Glove Box/Vapor Deposition
Systems
• “Outboard” Deposition Systemsconnected to glove box
Integrated Glove Box/
Vapor Deposition Systems
• Multi source system with glass bell jar
Integrated Glove Box/
Vapor Deposition Systems
Multi source system with glass bell jar. Another view.
Integrated Glove Box/
Vapor Deposition Systems
Custom system with stainless deposition
chamber integrated in laminar flow glove box
“Outboard” Deposition System Integrated with glove box
Applications in OLEDs
• Material Research
• Vapor Deposition of Metal Oxides and
Polymers
• Deposition by Spin Coating
• Deposition by Printing Processes
• Sealing- Epoxy/UV Curing and LASER
Welding
• Automated Pilot Production Facilities
Polymer Deposition by Spin
Coating
• Integrated glove box/ spin coater
Applications in OLEDs
• Material Research
• Vapor Deposition of Metal Oxides and
Polymers
• Polymer Deposition by Spin Coating
• Deposition by Printing Processes
• Sealing- Epoxy/UV Curing and LASER
Welding
• Automated Pilot Production Facilities
Deposition by Printing Processes
• Laminar flow glove box- “Clean room in
a glove box.”
This view shows the clean room filter at top of box
Laminar flow glove box- “Clean
room in a glove box.”
View showing perforated floor and return plenum
Applications in OLEDs
• Material Research
• Vapor Deposition of Metal Oxides and
Polymers
• Polymer Deposition by Spin Coating
• Deposition by Printing Processes
• Sealing- Epoxy/UV Curing and LASER
Welding
• Automated Pilot Production Facilities
Sealing - Epoxy/UV Curing
and LASER Welding
• Proper integration of curing stations
requires external UV source and quartz
window for UV transmission into glove
box.
• LASER Sealing processes may be adapted
from other industries.
Applications in OLEDs
• Material Research
• Vapor Deposition of Metal Oxides and
Polymers
• Polymer Deposition by Spin Coating
• Deposition by Printing Processes
• Sealing- Epoxy/UV Curing and LASER
Welding
• Automated Pilot Production Facilities
Automated Pilot Production
Roll to roll manufacturing within an inert atmosphere enclosure