EMD Group
MEMS/Photonics and Nano/Electronic Materials
1
Graduate Student Orientation
Altan
Ferendeci
Electronic Materials
Group
Marc
Cahay
Punit
Boolchand
2
M.Cahay
Research Areas
Field Emission from tips
Spintronics
3
Three generic structural phases of network
glasses
P.Boolchand,
University of Cincinnati
Supported by NSF grant DMR 08- 53957
Model of an amorphous/crystalline Si interface,
taken from F. Wooten, JNCS 114, 681 (1989).
Functional Disordered networks
Window Glass
Self-organization
in oxide glass
Electrical Eng.
Thin-film gate
dielectrics
Computer Science
Satisfiability Problems
Intermediate phases
in glasses
Biological Sciences
Protein folding
Solid State Physics
Pairing in Oxide
Superconductors
Each may have at its base a self-organized phase that
endows these systems with unusual functionalities.
PB, G.Lucovsky, J.C.Phillips and M.F.Thorpe, Phil. Mag.85,
3823 (2005).
University of Cincinnati
Short Range Wireless Communications
Altan M. Ferendeci
Department
of
School of Electronics and Computing Systems
Microwave and Millimeter Wave Communications
Laboratory.
UC-MEMS Switches
On/off switching times
Switch-up “on”
Switch-down “off”
3-D Multilayer MMIC
•
Multilayer Transmitter
Circuit
–
–
–
–
•
•
Power Amplifier
MEMS switched Phase
Shifter
MEMS switched T/R
module
Slotted Spiral Antenna
with Wide-Bandwidth
Balun
Monolithically
processed vertical posts
or planes
interconnecting the subunits.
Ground planes for
circuit isolation.
Recommended Courses
•
•
•
•
•
•
•
•
611 Microwave Communications (Fall)
757 Semiconductor Physics (Fall)
628 Nanoelectronics (Winter)
758 Quantum Mechanics for EE (Winter)
711 Millimeter Wave Electronics (Spring)
810 Materials Characterization by Optical… (Spring)
6 hrs of 780 (Self Study Research)
Seminar series (701,702,703) in Fall, Winter, and Spring
quarter, respectively.
10
Graduate Student Orientation
Photonics and
Nanostructures
Group
… and more!
Joseph
Boyd
Jason
Heikenfeld
Stephen T.
Kowel
Fred R.
Beyette
Peter B.
Kosel
Thomas D.
Mantei
11
Andrew J.
Steckl
Research Areas
•
Photonic devices: LED's, lasers, waveguides, optical memory, displays
•
Organic light emitting devices
•
Photonic band gap-based waveguides, simulation of photonic waveguide
devices
•
Plasma sources, plasma characterization, plasma etching, and plasma
deposition
•
Anodic fiber bonding for telecommunications applications
•
High energy-density dielectrics, chalcopyrite semiconductor growth for
photonics
•
MBE and MOCVD deposition of wide bandgap semiconductors
•
electrofluidics for tunable/switchable refractive and diffractive optics
•
optical tools for membrane science/sensing
•
carbon nanofiber arrays for biomimetic devices
•
electrowetting pixels for flat panel displays
12
GO TO THE ECE
WEBSITES!
Research Interests
13
Research Interests
14
Current Research Activity in
Photonic Waveguide Structures
Joseph T. Boyd
Photonic crystal structures
Fabrication
Low loss propagation
Parabolic coupler
Structures for efficient information processing
Nano-slot photonic waveguides
Fabrication
Low loss propagation
Enhanced field for efficient nonlinear interactions
Novel Devices Laboratory
 Applications in displays, labon-chip, optics (switchable
lenses/prisms), reconfigurable
antenna’s.. Etc…
 UC is an academic leader in electrowetting (Steckl group also has an APL cover in EW!)
2005
2006
2007
2009
2010
16
2010
2010
Current Research - Professor P B Kosel
Cold Electron Sources
Pressure Sensors
Diamond-based Electronics
Oxide Layer (1 m)
+ Electrode
High Temperature Electronics
Silicon wafer B
(300 - 500 m)
AlN
spacer
layer (1-2 m)
PCD (4-6 m)
Host silicon with PCD
Wafer A. (300-500 m)
- Electrode
PCD capacitors
PCD Diaphragm
11b
100%
Calculated
90%
Measured
Linear (Measured)
Linear (Calculated)
80%
70%
Output Signal
60%
High temperature probing
50%
40%
30%
20%
10%
0%
0
50
Chalcopyrite Semiconductor Devices
Microwave Poly Preparation
100
150
200
250
Pressure (KPa)
Vapor Phase Transport
Ave Temp
1050
1000
950
900
850
800
Ave Temp
1
2
3
4
5
6
7
8
Photodetectors
Film growth furnace
Powder source in quartz ampoule
U. of Cincinnati
Se
University of Cincinnati
Recommended Courses
•
•
•
•
•
•
•
•
618 Microfabrication of Semiconductor Devices (Fall)
648 Fundamentals of Optoelectronics (Fall)
614 Photonic Information Processing Lab (Winter)
641 Silicon Fab Lab or 697 Compound Semiconductor
Fab Lab (Winter)
652 Optical Communications (Spring)
784 Advanced Semiconductor Lasers (Spring)
6 hrs of 780 (Self Study Research)
Seminar series (701,702,703) in Fall, Winter, and Spring
quarter, respectively.
18
Graduate Student Orientation
MEMs Group
Chong
Ahn
Ian
Papautsky
19
Biochips and Lab on a Chip,
BioMEMS and Microfluics
Chong H. Ahn, Professor
Microsystems and BioMEMS Laboratory
School of Electronics and Computing Systems
University of Cincinnati
PO Box 210030
Cincinnati, OH 45221-0030, USA
http://www.BioMEMS.uc.edu
Smart Point-of-Care Diagnostics
for Home Care or Emergency Room
Wristwatch Type Point-of-Care Testing
Inlet ports
Biochemical sensors
(underneath)
sPROMs
Air-bursting
“Detonator”
Integrated
Biochip
Disposable Biochip
Analyzer for
Watch & Display
Cartridge cap
Multi-analyte
Wrist watch band
Detection
Pressurized air
bladders
Microneedle
array
Action buttons
Integration of Disposable Smart Biochip
Cartridge
Pouch
200 um
Waste chamber
Integration of pouch
Biosensor array
Calibration
pouch
AIBN
Rapid injection
molding
Lateral metallic
microneedle
AIBN heater
Screen printing
sPROMs (passive
valve)
Spray and screen printing
150 um
Microneedle
Pressure source
Biochemical sensor
Mold injection
Integration of Metal needle
Solid-propellant
(AIBN)
Techniques for MASS-PRODUCTION
Wristwatch type
Ian Papautsky, University of Cincinnati
Input
Outlet
 Cells, blood, particles,
bacteria
• Separation, filtration, concentration
• High-throughput
Bhagat et. al., Lab Chip, 2008
Bhagat et. al., Microfluid. Nanofluid., 2009
Kuntaegowdanahalli et. al., Lab Chip, 2009
Bhagat et. al., Biomed. Microdev., 2010
0.3D
Segre and Silberberg,Downstream
Nature 1961
Input
Rep = 0.692
50 µm
0.3D
Bhagat et al., Lab Chip, 2008
Bhagat et al., Microfluid. Nanofluid., 2009
Segre and Silberberg, Nature 1961
1
Side outlets
Center outlet
0.9
Fluorescence intensity
• Inertial Microfluidics
– Lift forces focus cells
into equilibrium
positions
– Dean drag disrupts
Inlet
equilibrium
– Size-dependant
focusing
Downstream
0.8
0.7
0.6
1.9 µm
Bhagat et al., Lab Chip, 2008
0.5
Bhagat et al., Microfluid. Nanofluid., 2009
0.4
0.3
0.2
0.1
590 nm
0
0
20
40
60
80
100
120
140
Microchannel width (µm)
160
180
200
Ian Papautsky, University of Cincinnati
• Point-of-care electrochemical sensors
a
– Anodic stripping voltammetry
– Limits of detection below 1 nM
– Focus on detection of highly
electronegative metals
– Bismuth working electrode surface
electrochem. cell
Bi FE
input
+
-
AE
Mn0
Au
+
GC
Au
BiFE
MFE
GC
BiFE
-22
– Zn strips at approx. -1.3V
– Range: 60~80 µg/dL and below
• Mn exposure
Jothimuthu et. al., IEEE Sensors, 2008; 2009
Jothimuthu et. al., Biomed. Microdev., 2010; Wilson et. al., Electroanalysis, 2010
-11
Stripping
WE
RE
Mn2+
Pt
Pt
• Zn supplementation
(Cincinnati Children’s Hospital)
glass
output
electrode
interface
Current
Current (µA)
Pre-concentration
Mn2+
0
Mn
b
0
0
Potential(V)
(V)
Potential
-1
1
-2
2
Bi FE
glass
Recommended Courses
(required) ECE 607 Introduction to Biomedical Microsystems (Fall)
(required) ECE 608 Fundamentals of MEMS (Fall)
ECE 618 Microfabrication Semicondutor (Fall)
ECE 757 Semiconductor Physics (Fall)
(required) ECE 641 Silicon Semiconductor Microfabrication Lab for MEMS (Winter)
(required) ECE 707 Biomedical MEMS (Winter)
ECE 771 Application of MEMS (Winter)
ECE 678 Micro/Nano Biochips Lab (Spring)
ECE 726 Biochip and Lab on a Chip (Spring)
ECE 732 Biosensors and Bioelectronics (Spring)
6 hrs of 780 (Self Study Research)
Seminar series (701,702,703) in Fall, Winter, and Spring quarter, respectively.
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