North America Information & Control
Technical Committee Chapter
Liaison Report
December 2014
NA I&C Report - December 2014
Outline
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Leadership
Organization Chart
Meeting Information
Ballot Results
Upcoming Ballots
Task Force Reports
Upcoming Meeting Schedule
NA I&C Report - December 2014
Task Force and Leadership Changes
• None
NA I&C Report - December 2014
Leadership
• Committee Co-chairs
– Brian Rubow /Cimetrix
– Lance Rist /RistTex
– Jack Ghiselli /Ghiselli Consulting
NA I&C Report - December 2014
Current Committee Structure
North America
Information & Control
Technical Committee Chapter
Diagnostic Data Acquisition
(DDA) TF
Energy Saving Equipment
Communication (ESEC) TF
GEM300 TF
NA I&C Report - December 2014
Sensor Bus TF
Process Control Systems
(PCS) Architecture TF
Meeting Information
• Last meeting
– November 5 for the N A Fall 2014 Meetings
San Jose, California
• Next meeting
– April 1 for the N A Spring 2015 Meetings
San Jose, California
NA I&C Report - December 2014
Document Review Summary [1/2]
N A Standards Fall 2014 Meetings
* Cycle 6, 2014 *
Doc #
Description
TC Action
5274C
Revision to Add a New Subordinate Standard Specification for
Sensor/Actuator Network Specific Device Model of a Generic
EquipmentAdd-On Sensor (ADDON) to SEMI E54-0413,
Sensor/Actuator Network Standard
Failed,to be
reworked
5508
(2 LIs)
Line Revisions to SEMI E90-0312,Specification for Substrate
Tracking; SEMI E90.1-0312,Specification for SECS-II Protocol
SubstrateTracking;and SEMI E5-0813,SEMI Equipment
Communications Standard 2 Message Content (SECS-II)
Add Batch Object SEMI E90 & E90.1 and a New Material Format
in SEMI E5
1:Failed,to be
reworked
Line Item 1:New Material Format toAllow Batches
Line Item 2:New Batch Object and Batch State Model
NA I&C Report - December 2014
2:Failed,
discontinued
Document Review Summary [2/2]
N A Standards Fall 2014 Meetings
* Cycle 6, 2014 *
Doc #
Description
TC Action
5618
New Standard:Specification for Preservation of Recipe
Integrity (PRI)
Failed,to be
reworked
5619A
New Standard: Specification for SECS Equipment Data
Dictionary (SEDD)
Passed as balloted
5620A
New Standard: Specification for SECS-II Message Notation
(SMN)
Passed with editorial
changes
NA I&C Report - December 2014
Technical Ballots to be reviewed at
N A Spring 2015 Meetings [1/2]
* Voting Period – Cycle 1 or 2, 2015 *
Document
#
Document Title
TF / S C
5274D
Revision to Add a New Subordinate Standard Specification for
Sensor/Actuator Network Specific Device Model of a Generic Equipment
Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network
Standard
Sensor Bus TF
5618A
New Standard: Specification for Preservation of Recipe Integrity (PRI)
GEM300 TF
* Voting Period – Cycle 2, 2015 *
Document
#
Document Title
TF / S C
5677
Revision to SEMI E164, Specification for EDA Common Metadata
Diagnostic Data
Acquisition (DDA)
TF
5716
Revisions to SEMI E133, Specification for Automated Process Control Systems
Interface and SEMI E133.1, Provisional Specification for XML Messaging for
Process Control Systems (PCS)
Process Control
System (PCS) TF
NA I& C Report - December 2014
Technical Ballots to be reviewed at
N A Spring 2015 Meetings [2/2]
* Voting Period – Cycle 2, 2015 *
Document
#
Document Title
TF / S C
5762
Revision to SEMI E132.1, Specification for Soap Binding for Equipment Client
Authentication and Authorization (ECA).Adding EDA freeze versions to
E132.1
Diagnostic Data
Acquisition (DDA)
TF
5821
New Standard: Specification for Energy Savings Mode Communication
between Semiconductor Equipment and Sub-Systems
Energy Saving
Equipment
Communication
(ESEC) TF
5824
Revision to Specification for SECS Equipment Data Dictionary (SEDD)
[formerly SEMI Draft Document 5619A]
GEM300 TF
SEMI Draft Document 5619A (New Standard:Specification for SECS Equipment Data
Dictionary {SEDD}) passed technical committee review on November 5, 2014. Pending
successful procedural review and publication,this ballot will propose additional refinements
to the SEDD Standard.
NA I&C Report - December 2014
Task Force Updates
• Diagnostic Data Acquisition (DDA) TF
– Revised SNARF
• (#5762) Revision to SEMI E132.1, Specification for Soap Binding for
Equipment Client Authentication and Authorization (ECA). Adding
EDA freeze versions to E132.1
– SNARF revised from E132 revision (Specification for Equipment
Client Authentication and Authorization) to E132.1 revision.
– Other documents under development
• Doc. 5677 – Revision to SEMI E164, Specification for EDA Common
Metadata
– Correct the reported issues in the E164 Complementary Files and
Various Materials.
– Ballot Plans
• 5762 and 5677 for Cycle 1 or 2, 2015.
NA I&C Report - December 2014
Task Force Updates [continued]
• Energy Saving Equipment Communication (ESEC) TF
– New SNARF
• (#5821) New Standard: Specification for Energy Savings Mode
Communication between Semiconductor Equipment and SubSystems
– Approved via I&C GCS
– Ballot Plans
• 5821 for Cycle 2, 2015
NA I&C Report - December 2014
Task Force Updates [continued]
• GEM300 TF
– New SNARF
• (#5824) Revision to SEMI E###, Specification for SECS Equipment Data
Dictionary (SEDD) [formerly SEMI Draft Document 5619A]
– Background
» SEMI Draft Document 5619A (New Standard: Specification for SECS Equipment
Data Dictionary {SEDD}) passed technical committee review on November 5,
2014.
» Pending successful procedural review, Document 5619A will be published as a
SEMI Standard (E###)
» This SNARF proposes additional refinements to the SEDD Standard.
– SNARF Rationale:
» During ballot review of SEMI Document #5619A at the Fall 2014 Standards
Meetings, some potential enhancements and additions to the document were
identified and discussed. This document will propose those enhancements.
» In addition, other potential enhancements had been identified by the GEM 300 TF
in the past. These will also be considered for inclusion in this proposal.
» All these potential enhancements are listed in the Scope section.
NA I&C Report - December 2014
Task Force Updates [continued]
• GEM300 TF {cont’d}
– Ballot Plans
• 5824 (see previous slide for details) as early as Cycle
2, 2015.
• 5618A (Preservation of Recipe Integrity {PRI}) for
Cycle 1 or 2, 2015
NA I&C Report - December 2014
Task Force Updates [continued]
• Process Control Systems (PCS) TF
– Ballot Plans (Cycle 2, 2015)
• (#5716) Revisions to SEMI E133, Specification for Automated Process
Control Systems Interface and SEMI E133.1, Provisional Specification
for XML Messaging for Process Control Systems (PCS)
– This ballot will be a major revision to E133 and E133.1.
– This ballot will propose the following changes:
» Enhancements to E133.1 (XML specification). Adjustments will be made
to existing E133 and E133.1 standards content to better align with the
XML guidelines document, as necessary. Technical changes will be made
to clarify the implementation of the PCS analysis engine type.
» Changes to the schema
» Removal of “Provisional”
– Some of the changes listed above will also require related/corresponding
changes in the E133 primary standard.
NA I&C Report - December 2014
Task Force Updates [continued]
• Sensor Bus TF
– Ballot Plans (Cycle 2, 2015)
• (#5274D) Revision to Add a New Subordinate Standard
Specification for Sensor/Actuator Network Specific Device
Model of a Generic Equipment Add-On Sensor (ADDON)
to SEMI E54-0413, Sensor/Actuator Network Standard
NA I&C Report - December 2014
SECS Message Language (SML)
Copyright Update
• The following statement from SEMI Legal Counsel was read
to the committee at the N A I&C Committee Fall 2014
meeting:
– “SEMI’s investigation, conducted in conjunction with counsel, into
PEER Group’s claimed copyright in SML and SML Notation is
ongoing.Counsel for SEMI and PEER have exchanged
correspondence, and currently are evaluating the parties’ positions.
All committee activity related to SML and SML notation is being
postponed in light of this ongoing investigation.”
NA I&C Report - December 2014
N A I&CC Meeting Schedule
N A Standards Spring 2015 Meetings [DRAFT]
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Monday, March 30
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Tuesday, March 31
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Japan Predictive Carrier Logistics [PCL] TF (11:00 AM to 12:00 N oon,US Pacific Time)
I&C Leadership (12:00 Noon to 1:00 PM)
Diagnostic Data Acquisition [DDA] TF (1:00 PM to 3:00 PM)
Energy Saving Equipment Communication [ESEC] TF (8:00 AM to 10:00 AM)
GEM300 TF (10:00 AM to 5:00 PM)
Sensor Bus TF (1:00 PM to 3:00 PM)
Process Control System [PCS] TF (3:00 PM to 5:00 PM)
I&C GCS (5:00 PM to 6:00 PM)
Wednesday, April 1
–
I&C Committee (8:00 AM to 4:30 PM)
NA I&C Report - December 2014
ThankYou!
For more information or participate in
any N A I&C activities, please contact
PaulTrio at SEMI (ptrio@semi.org)
NA I&C Report - December 2014